PECVD法制备类金刚石薄膜的摩擦学性能

251Vol.25No.1 20112CHINESE JOURNAL OF MATERIALS RESEARCH February2011PECVD∗(221116)(rf–PECVD),45(DLC), (Raman)X(XPS)(SEM)(AFM),DLC,GCr15,UMT–DLC,,45,,DLC,45,0.008,,,XPS,TB3831005-3093(2011)01-0073-06Tribological Properties of Diamond–like Carbon FilmsDeposited by PECVDWANG Qingliang SUN Yanmin∗∗ZHANG Lei(School of Material Science and Engineering,China University of Mining&Technology,Xuzhou221116) *Supported by National Key Basic Research and Development Program of China No.2007CB607605, and Tribology Science Fund from State Key Laboratory of Tribology(SKLT)at Tsinghua University No.SKLTKF08A01.Manuscript received October13,2010;in revised form December17,2010.**To whom correspondence should be addressed,Tel:(0516)83591916,E–mail:sunyanmin@ ABSTRACT Diamond–like carbon(DLC)films were prepared on the surface of45steel substrates by the radio–frequency plasma enhanced chemical vapor deposition(rf–PECVD)technique.The bond structure,surface morphology and microstructure of DLCfilm were characterized with a laser Raman spectroscopy(Raman),X–ray photoelectron spectroscopy(XPS),scanning electron microscopy(SEM) and atomic force microscope(AFM).The hardness of DLCfilm was determined by the tribo–indenterin−situ nano–mechanical test system.Tribological behaviors of DLCfilm against GCr15steel were performed using a UMT–friction and wear tester under the various normal loads and sliding speeds.And the wear mechanisms were also analyzed.The experimental results showed that the thinfilm deposited on the surface of45steel has the typical structural characteristics of DLCfilm.The surface of DLCfilm composes of the compact nano–particles,which has the higher hardness than that of the45steel substrates.Under the different tribological conditions,DLCfilm showed the higher wear–resistance and lower friction coefficient compared with the45steel substrates.Especially in the high–speed and low–load conditions, the friction coefficient was lower than0.008.KEY WORDS surface and interface in the materials,PECVD,diamond–like carbonfilms,XPS,friction and wear(DLC)sp3C sp2C,sp3C DLC,*2007CB607605,SKLTKF08A012010101320101217:[1,2][3,4][5],DLC[6,7]DLC,(PVD)(CVD),74251DLCTable1The deposition parameters of DLCfilmsPower/W Temperature/Pressure/Pa CH4:H2/mL·min−1Time/h30060530:90 1.5,(rf–PECVD),,DLCDLC,DLCFe,[8][9]DLC,Si SiC TiN CrN W,,DLC[10−12]rf–PECVD45DLC,Si,,DLC,11.1DLC45,,20–26HRA32mm7mm(R a≤0.2µm),20min,,Si,Si DLC11.2T64000Raman DLC,514.5nm,1000–1800cm−1,2cm−1,1µm,5mW;AXIS ULTRA DLD XPS,Al KαX;(S3000,Hitachi Co.)(AFM)DLC;UMT–,4mm GCr15 ,( 357.5MPa)–,0.5kg 1.5kg 2.5kg,0.05m/s0.15m/s0.25m/s MicroXAMSEM DLC22.1Raman XPS1DLC,D1365cm−1,G1571cm−1,Raman[13]DLC α–C:H,HDLC sp2sp3C—C,sp3,,[14]Ramansp3,D Gsp2sp3Raman,D GI D/I G0.67,sp3,DLC,DLC sp3C,XPS,C1s Gaussian2a DLC XPSDLC,O1s DLC2b DLC C1s,C1s3 ,284.3eV sp2C,284.9eV sp3C, 286.8eV C—O1DLCFig.1Raman spectrum of the DLCfilm1:PECVD752DLC XPS C1sFig.2XPS surface spectrogram(a)and C1s spectra(b)of the DLCfilmsp3C[15,16], sp3C48.7%2.2DLCDLC SEM3a,DLC,,3b DLC AFM,,163nm;,R a 6.9nm4,,,Si DLCSi DLC3.2µm,DLC1µm2.32(3.5mN 4.5mN3DLC SEM(a)AFM(b)Fig.3SEM(a)and AFM(b)images of the DLCfilm4DLC SEMFig.4SEM cross–sectional morphology of the DLC film5.5mN)45DLC1µm,2Table2Results of the nano-hardness testSample No.h max/nm A/nm2P max/mN H/GPa a146.380.420 3.58.34 b167.910.445 4.510.11 c180.70.455 5.512.17625146.4nm167.91nm180.7nm,1/5∼1/10,DLC[17,18]2,DLC8GPa,DLC(3–20GPa)DLC,XPS,,,,C,,sp2C sp3C,[19];,,5Fig.5Influence of sliding speed on the friction coef-ficients of DLCfilms.(a)0.5kg,(b)1.5kg,(c)2.5kg,,,2.4DLC5,,DLC45,DLC45, DLC,,DLC,,DLC,,,,,DLC sp3sp2,,[20−22],,,6,,,,,,,[23]5 6,DLC,0.29,0.0082.5kg,DLCSEM7,8,9DLC,,6Fig.6Influence of the applied load on the friction coefficients of DLCfilms for the same slidingspeed1:PECVD777 2.5kg SEMFig.7SEM micrographs of the wear surface of the DLCfilms.(a)0.05m/s,(b)0.25m/s8DLCFig.83D–profile micrographs of the grinding crack of the 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