Ansys 热分析实例(多芯片组件加散热器(热沉)的冷却分析)

三．MCM温度场稳态分析
多芯片组件加散热器（热沉）的冷却分析
图1(a) 、图1(b) 所示分别为大功率球栅阵列MCM的截面图和俯视图，五个芯片采用倒装焊方式置于有机基板上，为了增加模块的散热能力，在芯片背面上加一热扩展面。

表1所示为各材料的物理属性。

周围的环境温度设为250 o C，其中大芯片的功率为25W，热流密度为60×106W/m3；周围四个小芯片的功率为10W，热流密度为61.54×106W/m3；对流换热系数为10W/(m·K)。

MCM结构参数和材料属性
模型组件材料尺寸(mm）
导热系数(W/(m﹒k)）
芯片硅8*8*0.65,5*5*0.65 82
芯片凸点5Sn/98Pb 10*10*,6*6,Ø0.3,Height:0.2,Pitch:0.7536 基板聚酰亚胺40*40*1.5 0.2
焊料球96.5Sn3.5Ag 26*26,Ø0.6, Height:0.4,Pitch:1.2750
PCB FR4 100*100*1.5 8.37,8.37,0.32 热介质材料导热脂Thick:0.15 1
粘接剂粘接剂Thick:0.15 1.1
热扩展面铜40*40*1.5 390
热沉铝Base:46.5*45.6*1.5,Pin number:16,Pin
height:8
240
分析
从而导致器件性能变化和可靠性的下降。

热场分析和设计是MCM设计中一个重要的环节[3]。

MCM器件中的热应力来自两个方面，即来自MCM模块内部和MCM模块所处的外部环境所形成的热应力，这些热应力都会影响到器件的电性能、工作频率、机械强度和可靠性。

随着MCM集成度的提高和体积的缩小,尤其是对于集成了大功率芯片的MCM ,其内部具有多个热源，热源之间的热耦合作用较强，单位体积内的功耗很大，由此带来的芯片热失效和热退化现象突出。

有资料表明,器件的工作温度每升高10o C，其失效率增加1倍[4]。

因此,准确模拟大功率MCM 模块的三维温度场分布，并分析掌握其热特性，有利于指导MCM热设计方案的选择，对提高大功率MCM的可靠性具有重要意义。

本文针对某球栅阵列封装的大功率MCM，提出了一种简化的热学模型，并利用有限元方法,借助有限元通用程序ANSYS ,对其进行三维温度场的稳态模拟和分析。

方案步骤如下：
1、建模
MCM几何模型图
MCM网格划分图
2、施加载荷计算
a、初始温度及对流系数（施加于模型外表面，即与空气接触的部位）
b、分析处理(温度云图)结果如下：
3、后处理：
热沉的芯片内部温度分布云图
芯片凸点（5Sn/98Pb）温度分布
基板（聚酰亚胺）温度分布云图
焊料球（37Sn/63Pb）温度分布云图
PCB(FR4)温度分布云图
热扩展面（铜）温度分布云图
4 简要分析
从以上的分析结果可以得出：最高温度出现在中间大芯片区域，MCM 内部有源功率芯片是热源的主要贡献者，芯片产生的热量主要沿芯片背面方向传递；加散热装置来对大功率MCM进行降温是一种直接有效的方式；另外，在相同条件下，合理的结构布局，如避免大功率器件过分集中不仅能降低结点温度最大值，而且能避免热集中现象，提高MCM组件的可靠性。

针对球栅阵列封装的大功率MCM其内部具有多个热源、耦合作用强、内部发热量大、温度高的特点，建立其热学模型，在ANSYS平台下对其进行了稳态模拟分析；结果表明，增加外部散热装置可以大大降低MCM的温度，是对其进行降温最直接有效的一种方式；合理布局可以避免热集中现象。

5 结论
在MCM器件内部，热场对器件的性能和可靠性有严重的影响，热场分析是MCM设计中的重要环节。

利用ANSYS软件对一球栅阵列的MCM进行了模拟分析，结果表明：
1) 多芯片组件中,大功率芯片为模块中热源的主要贡献者,芯片内最高温度点位于中间大芯片区域。

2) MCM几种降低温度的方法：加外部散热装置是一种直接有效的对MCM进行降温方式(有散热装置的最高温度是132.823 o C，没有散热的布局温度大概达
350 o C)；在相同条件下，合理的结构布局，能降低结点温度最大值，提高MCM
组件的可靠性。

参考文献：
[1] 杨邦朝，张经国．多芯片组件技术及其应用．电子科技大学出版社[M]．2001：
40～42
[2] 李川．MCM的热分析及复合SnPb焊点的应力应变分析[D]．电子科技大学．四
川：成都，2005
[3] 陈云，徐晨．有限元分析软件ANSYS在多芯片组件热分析中的应用[J]．电子
工程师．2007(2)；
[4] 张洪信主编有限元基础理论与ANSYS应用．机械工业出版社，2006.2（2007.1重印）：
[5] 徐步陆．电子封装可靠性研究[D]．中国科学院上海微系统与信息技术研究所，
博士学位论文．2002
命令代码
/BATCH
/input,menust,t mp,'',,,,,,,,,,,,,,,, 1 WPSTYLE,,,,,, ,,0
/PREP7 BLOCK,0,0.05 ,0,0.05,0,0.001 5,
BLOCK,0,0.02 ,0,0.02,0.0019, 0.0034, BLOCK,0,0.02 ,0,0.02,0.00355 ,0.00505, BLOCK,0,0.01 7,0,0.017,0.003 55,0.0044, VSBV,
3, 4 BLOCK,0,0.00 4,0,0.004,0.003 6,0.00425, BLOCK,0,0.00 25,0.0085,0.01 35,0.0036,0.00 425, BLOCK,0.008 5,0.0135,0,0.00 25,0.0036,0.00 425,
wpoff,0,0,0.00 17
SPH4,0.00063 5,0.000635,0.0 003 BLOCK,0,0.00 1,0,0.001,0.000 2,0.0006, BLOCK,0,0.00 1,0,0.001,-0.0002,-0.0006,
FLST,3,2,6,OR
DE,2
FITEM,3,8
FITEM,3,-9
VSBV,
7,P51X
NUMCMP,VO
LU
FLST,3,1,6,OR
DE,1
FITEM,3,7
VGEN,13,P51
X, , ,0.00127, ,
, ,0
FLST,3,13,6,O
RDE,2
FITEM,3,7
FITEM,3,-19
VGEN,13,P51
X, , , ,0.00127,
, ,0
wpoff,0,0,0.00
18
SPH4,0.00027
5,0.000275,0.0
0015
BLOCK,0,0.00
1,0,0.001,0.000
1,0.0006,
BLOCK,0,0.00
1,0,0.001,-0.00
01,-0.0006,
FLST,3,2,6,OR
DE,2
FITEM,3,177
FITEM,3,178
VSBV,
176,P51X
FLST,3,1,6,OR
DE,1
FITEM,3,179
VGEN,5,P51X
, , ,0.00075, , , ,
FLST,3,5,6,OR
DE,2
FITEM,3,176
FITEM,3,-180
VGEN,5,P51X
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FLST,3,1,6,OR
DE,1
FITEM,3,179
VGEN,2,P51X
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FLST,3,1,6,OR
DE,1
FITEM,3,201
VGEN,6,P51X
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FLST,3,6,6,OR
DE,2
FITEM,3,201
FITEM,3,-206
VGEN,3,P51X
, , , ,0.00075, , ,
FLST,3,1,6,OR
DE,1
FITEM,3,179
VGEN,2,P51X
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FLST,3,1,6,OR
DE,1
FITEM,3,219
VGEN,6,P51X
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FLST,3,6,6,OR
DE,2
FITEM,3,219
FITEM,3,-224
VGEN,3,P51X
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BLOCK,0.017,
0.02,0,0.017,-0
.0001,0.00005,
BLOCK,0,0.02
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0001,0.00005,
wpoff,0,0,0.00
075
BLOCK,0,0.00
4,0,0.004,0,0.0
0015,
BLOCK,0.008
5,0.0135,0,0.00
25,0,0.00015,
BLOCK,0,0.00
25,0.0085,0.01
35,0,0.00015,
WPA VE,0,0,0
CSYS,0
wpoff,0,0,0.00
505
BLOCK,0,0.02
325,0,0.02325,
0,0.0015,
BLOCK,0.021
75,0.02325,0,0.
02325,0.0015,0
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FLST,3,1,6,OR
DE,1
FITEM,3,243
VGEN,8,P51X
, , ,-0.003, , , ,0
VSEL,S,LOC,
Z,0.00505,0.02
FINISH
/SOL
FINISH
/PREP7
FLST,2,9,6,OR
DE,2
FITEM,2,242
FITEM,2,-250
V ADD,P51X
VSEL,S,LOC,
Z,0.0034,0.004
25
VSEL,U, , ,
5
FLST,2,2,6,OR
DE,2
FITEM,2,195
FITEM,2,216
VDELE,P51X,
, ,1
ALLSEL,ALL
FLST,2,240,6,
ORDE,7
FITEM,2,1
FITEM,2,-194
FITEM,2,196
FITEM,2,-215
FITEM,2,217
FITEM,2,-241
FITEM,2,251
VGLUE,P51X
ET,1,SOLID70
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KX
X,1,,82
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KX
X,2,,36
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KX
X,3,,0.2 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KX X,4,,50 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KX X,5,,8.37 MPDATA,KY Y,5,,8.37 MPDATA,KZZ ,5,,0.32 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KX X,6,,1 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KX X,7,,1.1 MPTEMP,,,,,,,, MPTEMP,1,0 MPDE,KXX,6 MPDATA,KX X,6,,1 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KX X,8,,390 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KX X,9,,240 VSEL,S,LOC, Z,0,0.0015 CM,_Y,VOLU VSEL, , , , 250
CM,_Y1,VOL U
CMSEL,S,_Y CMSEL,S,_Y1 V ATT, 5, , 1,
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,
Z,0.0015,0.001
9
FLST,5,169,6,
ORDE,2
FITEM,5,7
FITEM,5,-175
CM,_Y,VOLU
VSEL, , , ,P51
X
CM,_Y1,VOL
U
CMSEL,S,_Y
CMSEL,S,_Y1
V ATT,
4, , 1,
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,
Z,0.0019,0.003
4
CM,_Y,VOLU
VSEL, , , ,
252
CM,_Y1,VOL
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CMSEL,S,_Y
CMSEL,S,_Y1
V ATT,
3, , 1,
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,
Z,0.0034,0.004
25
VSEL,S,LOC,
Z,0.0034,0.003
6
FLST,5,2,6,OR
DE,2
FITEM,5,195
FITEM,5,244
CM,_Y,VOLU
VSEL, , , ,P51
X
CM,_Y1,VOL
U
CMSEL,S,_Y
CMSEL,S,_Y1
V ATT,
7, , 1,
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
FLST,5,2,6,OR
DE,2
FITEM,5,195
FITEM,5,244
VSEL,U, , ,P51
X
FLST,5,59,6,O
RDE,6
FITEM,5,176
FITEM,5,-194
FITEM,5,196
FITEM,5,-215
FITEM,5,217
FITEM,5,-236
CM,_Y,VOLU
VSEL, , , ,P51
X
CM,_Y1,VOL
U
CMSEL,S,_Y
CMSEL,S,_Y1
V ATT,
2, , 1,
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,
Z,0.0036,0.004
25
FLST,5,3,6,OR
DE,2
FITEM,5,246
FITEM,5,-248
CM,_Y,VOLU
VSEL, , , ,P51
X
CM,_Y1,VOL
U
CMSEL,S,_Y
CMSEL,S,_Y1
V ATT,
1, , 1,
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,
Z,0.00425,0.00
505
CM,_Y,VOLU
VSEL, , , ,
245
CM,_Y1,VOL
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CMSEL,S,_Y
CMSEL,S,_Y1
V ATT,
8, , 1,
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,U, , ,
245
FLST,5,3,6,OR
DE,3
FITEM,5,216
FITEM,5,242
FITEM,5,-243
CM,_Y,VOLU
VSEL, , , ,P51
X
CM,_Y1,VOL
U
CMSEL,S,_Y
CMSEL,S,_Y1
V ATT,
6, , 1,
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,
Z,0.00505,0.02
CM,_Y,VOLU
VSEL, , , ,
249
CM,_Y1,VOL
U
CMSEL,S,_Y
CMSEL,S,_Y1
V ATT,
9, , 1,
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,
Z,0.0036,0.004
25
SMRT,6
SMRT,7
MSHAPE,1,3D
MSHKEY,0
FLST,5,3,6,OR
DE,2
FITEM,5,246
FITEM,5,-248
CM,_Y,VOLU
VSEL, , , ,P51
X
CM,_Y1,VOL U CHKMSH,'VO LU' CMSEL,S,_Y VMESH,_Y1 CMDELE,_Y CMDELE,_Y1 CMDELE,_Y2 VSEL,S,LOC, Z,0.0034,0.003 55
SMRT,8 CM,_Y,VOLU VSEL, , , , 244
CM,_Y1,VOL U CHKMSH,'VO LU' CMSEL,S,_Y VMESH,_Y1 CMDELE,_Y CMDELE,_Y1 CMDELE,_Y2 CM,_Y,VOLU VSEL, , , , 195
CM,_Y1,VOL U CHKMSH,'VO LU' CMSEL,S,_Y VMESH,_Y1 CMDELE,_Y CMDELE,_Y1 CMDELE,_Y2 VSEL,S,LOC, Z,0.0019,0.003 4
CM,_Y,VOLU VSEL, , , , 252
CM,_Y1,VOL U
CHKMSH,'VO
LU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,
Z,0,0.0015
CM,_Y,VOLU
VSEL, , , ,
250
CM,_Y1,VOL
U
CHKMSH,'VO
LU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,
Z,0.00425,0.00
44
SMRT,7
FLST,5,3,6,OR
DE,3
FITEM,5,216
FITEM,5,242
FITEM,5,-243
CM,_Y,VOLU
VSEL, , , ,P51
X
CM,_Y1,VOL
U
CHKMSH,'VO
LU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
SMRT,8
CM,_Y,VOLU
VSEL, , , ,
245
CM,_Y1,VOL
U
CHKMSH,'VO
LU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,
Z,0.00505,0.02
CM,_Y,VOLU
VSEL, , , ,
249
CM,_Y1,VOL
U
CHKMSH,'VO
LU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,
Z,0.0034,0.003
6
FLST,5,2,6,OR
DE,2
FITEM,5,195
FITEM,5,244
VSEL,U, , ,P51
X
SMRT,6
FLST,5,59,6,O
RDE,6
FITEM,5,176
FITEM,5,-194
FITEM,5,196
FITEM,5,-215
FITEM,5,217
FITEM,5,-236
CM,_Y,VOLU
VSEL, , , ,P51
X
CM,_Y1,VOL
U
CHKMSH,'VO
LU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,
Z,0.0015,0.001
9
SMRT,7
FLST,5,169,6,
ORDE,2
FITEM,5,7
FITEM,5,-175
CM,_Y,VOLU
VSEL, , , ,P51
X
CM,_Y1,VOL
U
CHKMSH,'VO
LU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
ALLSEL,ALL
VSEL,S,LOC,
Z,0.0035，
0.00425
VSEL,S,LOC,
Z,0.0036,0.004
25
ASEL,S,EXT
FLST,5,65,5,O
RDE,65
FITEM,5,17
FITEM,5,21
FITEM,5,30
FITEM,5,32
FITEM,5,36
FITEM,5,38
FITEM,5,719
FITEM,5,723
FITEM,5,727
FITEM,5,730
FITEM,5,735
FITEM,5,739
FITEM,5,743
FITEM,5,747
FITEM,5,751
FITEM,5,755
FITEM,5,759
FITEM,5,763
FITEM,5,767
FITEM,5,771
FITEM,5,775
FITEM,5,779
FITEM,5,783
FITEM,5,787
FITEM,5,791
FITEM,5,799
FITEM,5,803
FITEM,5,807
FITEM,5,811
FITEM,5,815
FITEM,5,819
FITEM,5,823
FITEM,5,827
FITEM,5,831
FITEM,5,835
FITEM,5,839
FITEM,5,843
FITEM,5,847
FITEM,5,851
FITEM,5,855
FITEM,5,859
FITEM,5,863
FITEM,5,867
FITEM,5,871
FITEM,5,875
FITEM,5,883
FITEM,5,887 FITEM,5,891 FITEM,5,895 FITEM,5,899 FITEM,5,903 FITEM,5,907 FITEM,5,911 FITEM,5,915 FITEM,5,919 FITEM,5,923 FITEM,5,927 FITEM,5,931 FITEM,5,935 FITEM,5,939 FITEM,5,943 FITEM,5,947 FITEM,5,951 FITEM,5,955 FITEM,5,959 ASEL,U, , ,P51 X
/SOLU FLST,2,4,5,OR DE,4 FITEM,2,15 FITEM,2,19 FITEM,2,23 FITEM,2,1066 /GO
SFA,P51X,1,C ONV,240,240 FLST,2,8,5,OR DE,8 FITEM,2,29 FITEM,2,31 FITEM,2,33 FITEM,2,35 FITEM,2,37 FITEM,2,39 FITEM,2,1064 FITEM,2,-106 5
/GO
SFA,P51X,1,C ONV,250,250
VSEL,S,LOC,
Z,0.00505,0.02
ALLSEL,ALL
VSEL,S,LOC,
Z,0.00505,0.02
ASEL,S,EXT
FLST,5,2,5,OR
DE,2
FITEM,5,1045
FITEM,5,1069
ASEL,U, , ,P51
X
ALLSEL,ALL
VSEL,S,LOC,
Z,0.00505,0.02
ASEL,S,EXT
FLST,5,3,5,OR
DE,3
FITEM,5,14
FITEM,5,1067
FITEM,5,1069
ASEL,U, , ,P51
X
ASEL,U, , ,
1068
FLST,2,50,5,O
RDE,17
FITEM,2,995
FITEM,2,997
FITEM,2,1000
FITEM,2,1003
FITEM,2,-100
7
FITEM,2,1009
FITEM,2,-101
3
FITEM,2,1015
FITEM,2,-101
9
FITEM,2,1021
FITEM,2,-102
5
FITEM,2,1027
FITEM,2,-103
1
FITEM,2,1033
FITEM,2,-103
7
FITEM,2,1039
FITEM,2,-105
5
/GO
SFA,P51X,1,C
ONV,10,25
ALLSEL,ALL
VSEL,S,LOC,
Z,0.0019,0.003
4
ASEL,S,EXT
WPSTYLE,,,,,,
,,1
FLST,5,3,5,OR
DE,3
FITEM,5,1071
FITEM,5,1073
FITEM,5,1075
ASEL,R, , ,P51
X
FLST,2,1,5,OR
DE,1
FITEM,2,1075
/GO
SFA,P51X,1,C
ONV,10,25
VSEL,S,LOC,
Z,0.0019,0.003
4
ASEL,S,EXT
FLST,5,2,5,OR
DE,2
FITEM,5,10
FITEM,5,1072
ASEL,R, , ,P51
X
FLST,2,2,5,OR
DE,2
FITEM,2,10
FITEM,2,1072
/GO
SFA,P51X,1,C
ONV,10,25
VSEL,S,LOC,
Z,0,0.0015
ALLSEL,ALL
VSEL,S,LOC,
Z,0,0.0015
ASEL,S,EXT
FLST,5,2,5,OR
DE,2
FITEM,5,3
FITEM,5,5
ASEL,U, , ,P51
X
ALLSEL,ALL
VSEL,S,LOC,
Z,/ 0.0015
VSEL,S,LOC,
Z,0,0.0015
ASEL,S,EXT
FLST,5,2,5,OR
DE,2
FITEM,5,3
FITEM,5,5
ASEL,U, , ,P51
X
/SOLU
FLST,5,169,5,
ORDE,169
FITEM,5,40
FITEM,5,44
FITEM,5,48
FITEM,5,52
FITEM,5,55
FITEM,5,60
FITEM,5,64
FITEM,5,68
FITEM,5,72
FITEM,5,76
FITEM,5,80
FITEM,5,84
FITEM,5,88
FITEM,5,92
FITEM,5,96
FITEM,5,100
FITEM,5,104
FITEM,5,108
FITEM,5,112
FITEM,5,116
FITEM,5,120
FITEM,5,124
FITEM,5,128
FITEM,5,132
FITEM,5,136
FITEM,5,140
FITEM,5,144
FITEM,5,148
FITEM,5,152
FITEM,5,156
FITEM,5,160
FITEM,5,164
FITEM,5,168
FITEM,5,172
FITEM,5,176
FITEM,5,180
FITEM,5,184
FITEM,5,188
FITEM,5,192
FITEM,5,196
FITEM,5,200
FITEM,5,204
FITEM,5,208
FITEM,5,212
FITEM,5,216
FITEM,5,220
FITEM,5,224
FITEM,5,228
FITEM,5,232
FITEM,5,236
FITEM,5,240
FITEM,5,244
FITEM,5,248
FITEM,5,252
FITEM,5,256
FITEM,5,260
FITEM,5,264
FITEM,5,268 FITEM,5,272 FITEM,5,276 FITEM,5,280 FITEM,5,284 FITEM,5,288 FITEM,5,292 FITEM,5,296 FITEM,5,300 FITEM,5,304 FITEM,5,308 FITEM,5,312 FITEM,5,316 FITEM,5,320 FITEM,5,324 FITEM,5,328 FITEM,5,332 FITEM,5,336 FITEM,5,340 FITEM,5,344 FITEM,5,348 FITEM,5,352 FITEM,5,356 FITEM,5,360 FITEM,5,364 FITEM,5,368 FITEM,5,372 FITEM,5,376
FITEM,5,380
FITEM,5,384
FITEM,5,388
FITEM,5,392
FITEM,5,396
FITEM,5,400
FITEM,5,404
FITEM,5,408
FITEM,5,412
FITEM,5,416
FITEM,5,420
FITEM,5,424
FITEM,5,428
FITEM,5,432
FITEM,5,436
FITEM,5,440
FITEM,5,444
FITEM,5,448
FITEM,5,452
FITEM,5,456
FITEM,5,460
FITEM,5,464
FITEM,5,468
FITEM,5,472
FITEM,5,476
FITEM,5,480
FITEM,5,484
FITEM,5,488
FITEM,5,492
FITEM,5,496
FITEM,5,500
FITEM,5,504
FITEM,5,508
FITEM,5,512
FITEM,5,516
FITEM,5,520
FITEM,5,524
FITEM,5,528
FITEM,5,532
FITEM,5,536
FITEM,5,540
FITEM,5,544
FITEM,5,548
FITEM,5,552
FITEM,5,556
FITEM,5,560
FITEM,5,564
FITEM,5,568
FITEM,5,572
FITEM,5,576
FITEM,5,580
FITEM,5,584
FITEM,5,588
FITEM,5,592
FITEM,5,596
FITEM,5,600
FITEM,5,604
FITEM,5,608
FITEM,5,612
FITEM,5,616
FITEM,5,620
FITEM,5,624
FITEM,5,628
FITEM,5,632
FITEM,5,636
FITEM,5,640
FITEM,5,644
FITEM,5,648
FITEM,5,652
FITEM,5,656
FITEM,5,660
FITEM,5,664
FITEM,5,668
FITEM,5,672
FITEM,5,676
FITEM,5,680
FITEM,5,684
FITEM,5,688
FITEM,5,692
FITEM,5,696
FITEM,5,700
FITEM,5,704
FITEM,5,708
FITEM,5,712
ASEL,U, , ,P51
X
FLST,2,4,5,OR
DE,4
FITEM,2,1
FITEM,2,4
FITEM,2,6
FITEM,2,1070
/GO
SFA,P51X,1,C
ONV,10,25
ALLSEL,ALL
FINISH
/POST1
FINISH
/SOL
ANTYPE,0
SOLVE
FINISH
/POST1
/POST1。