Apparatus and method for probing integrated circui
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专利名称：Apparatus and method for probing
integrated circuits using laser illumination
发明人：Steven Kasapi,Kenneth Wilsher,Gary
Woods,William Lo,Radu Ispasoiu,Nagamani
Nataraj,Nina Boiadjieva
申请号：US11169423
申请日：20050629
公开号：US07616312B2
公开日：
20091110
专利内容由知识产权出版社提供
专利附图：
摘要：An apparatus and method for laser probing of a DUT at very high temporal
resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.
申请人：Steven Kasapi,Kenneth Wilsher,Gary Woods,William Lo,Radu
Ispasoiu,Nagamani Nataraj,Nina Boiadjieva
地址：San Francisco CA US,Palo Alto CA US,Sunnyvale CA US,San Jose CA US,Los Gatos CA US,Cupertino CA US,Belmont CA US
国籍：US,US,US,US,US,US,US
代理机构：Nixon Peabody LLP
代理人：Joseph Bach, Esq.
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