Wide-range combination vacuum gauge
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专利名称：Wide-range combination vacuum gauge
发明人：Paul M. Rutt,Michael D. Borenstein
申请号：US11150868
申请日：20050610
公开号：US07207224B2
公开日：
20070424
专利内容由知识产权出版社提供
专利附图：
摘要：A combination vacuum gauge provides simultaneous absolute and differential pressure measurements over a wide range of pressures ranging from atmospheric
pressures to ultrahigh vacuum by processing the readings from an absolute high vacuum gauge (e.g., an ionization gauge and/or a heat-loss sensor), a differential low vacuum
gauge providing a differential relative to ambient pressure (e.g., a diaphragm sensor), and a barometric absolute pressure sensor exposed to the ambient atmosphere outside the measurement region. The barometric absolute pressure sensor reading is used to convert the differential vacuum gauge reading from uncalibrated differential pressure to calibrated absolute pressure.
申请人：Paul M. Rutt,Michael D. Borenstein
地址：Longmont CO US,Boulder CO US
国籍：US,US
代理机构：Hamilton, Brook, Smith & Reynolds, P.C.
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