ESD讲义
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Welcome to the ESD Class (and Certification)
ESD Class Agenda 課程內容
Class Objective 課程目的 What ESD is ? 何謂 ESD? Material Classification 防靜電等級區分 Human ESD Sensitivity 人對ESD感受力 IC Susceptibility to ESD 元件耐受電壓範圍例 ESD generation 靜電的產生 ESD protection Objective 靜電防護的目的 Work area Vs. ESD 電子工作區之靜電防護 ESD Elimination 靜電消除之方法 ESD grounding 靜電接地 Certification Test 職能測驗
DC discharge & response 人的反應與直流放電量
Slight sensation on hand
Perception threshold median
1 ma
0.6 ma
5.2 ma
9 ma 62 ma 76 ma
3.5 ma
6 ma 41 ma 51 ma
Shock-not painful & muscular control not lost Painful shock-muscular control lost
Documentation of ESD ESD 相關文件程序
General policy Tailored department of defense ESD standard Standard procedure instructions Manufacturing procedures Planning & Control procedures Manufacturing processes Material handling specifications Quality procedures
ESD Anti-ESD
CLASS OBJECTIVES 課程目的 Gain a basic understanding of what ESD is and how to control it. Understand specific expectations and policies concerning ESD control. Understand what actions are needed to maintain an ESD Safe Work Area. Increased Yield & Cost Saving Better Product reliability Extend Usage Life
• Class 1 - Susceptible Damage Voltage • Class 2 - Susceptible Damage Voltage
Under 1999 Volts (From Human Body Model) From 2000 Volts to 3999 Volts (From Human Body Model) 4000 Volts to 15999 Volts (From Human Body Model)
M3-10P06
Electron Static Generation 靜電現象之產生
Walking Rubbing 摩擦 走動
TransPeeling parecy 剝離 投影片
Oil tanker Flow out 流出 油罐車
Air surge Steering Mixer Blow out 噴出 攪拌 空氣噴槍 攪拌機
Monitor Induce 感應 電腦瑩幕
Phenomenon of electron static generation 靜電現象之產生
Human body activity on ESD discharge (C=200pF)
人體(C=200pF)與日常活動所產生之靜電量
活動項目 (Item)
Conductive mat, 導電地墊, 導電地磚
Working Area & ESD 電子業靜電的產生與防制
ESD from Source Prevention
Clothes 衣服
Coat,Synthetic Coat ,Shoe,Cotton wear 工作服,合成外衣 ,絕緣鞋,棉質衣服
Wrist,Heel,glove Anti-ESD’s shoe, Coat,…………... 導電腕帶,鞋帶 抗靜電衣服手套 鞋子等
Surface Resistance -10E7~10E9 Ohm/SQ 表面阻抗10 的7次方至9 次方歐姆
Surface Resistance 10E10~10E12 Ohm/SQ 表面阻抗10的10 次方至12次方歐 姆 Anti-ESD /抗靜電級
Surface Resistance 10E12.5 Ohm/SQ over 表面阻抗10的 12.5次方歐姆 以上
Painful shock-let-go threshold, median Painful & severe shock-breathing difficult, muscular control lost
90 ma
Men
60 ma
Women
ESD Sensitivity part classification ESD敏感元件等級分類
Conductive mat, Anti-ESD workbench 導電膠墊, 抗靜電工作墊
Working Area & ESD 電子業靜電的產生與防制
ESD from Source Prevention
Floor 地板
Cement,Wax,Wood, PVC plastic mat,... 混凝土,打臘,木板, PVC塑膠地板,
• Class 3 - Susceptible Damage Voltage From
ESD generation (TYPICAL ELECTROSTATIC VOLTAGES) ESD產生/典型靜電壓
Means of Static Humidity/相對濕度 Generation
65 to 99%RH Walking across carpet 1,500 V 走在地毯上 Walking on vinyl floor 250 V 走在塑膠地板上 Work chair padded with 1,500 V 35,000 V
What is the ESD ?
Electrostatic Discharge or Electrostatic Dissipate
HUMAN ESD SENSITIVITY 人對ESD感受力
To feel it (shock) 電擊感覺 3500 volts or more To hear it (zap) 聽得到ㄐㄐ或ㄖㄖ聲 4500 volts or more To see it (spark) 看到火花時 5000 volts or more
Relative
10 to 20%RH
12,000
V
18,000
V
Working Coat vs. Human body ESD
作業衣與人體靜電量(25 C,38%RH)
É q c ¾ ¹ ¾ ¦b ¾ ¹ ¦a ª ¤ ¤ Å À ¹ À (¥ ¯ ) É q O WH é R q £ ñ S At conductive floor with anti-ESD ¦U º § · ¦ç (Working Coat) Ø @~ shoe(Volts) ¼¿ ¯ À ¤ (Rub) ² § · ¦ç (take off the coat) ¼ À ¤ (Rub) ² § · ¦ç (take off the coat) æ @~ ¯ ¿ æ @~ ´ t O WH é R q £ ñ S µ ½ ª ¤ ¤ Å À ¹ À (¥ ¯ ) At insulation floor(Volts) T/R mixed with 65/35 (Terylene/Tetoron 65%,Rayon35%) S ¯ ¦h s 65%¹ ¼ 35% À ã ü Polypropylene30%, Cotton 70% E þ m » ¤ ² 30%´ 70% Ö Vinylon50%,Cotton 50% û § ú º ¥ º 50%´ 50% Ö Acrylic30%,Rayon45%, polyester25% È § O ¨ J ¤ 30% ¹ ¼ 45% » ã ü E à 25% T/C mixed with 65/35 (Terylene/Tetoron 65%,Cotton35%) S ¯ ¦h À 65%´ 35% s Ö Cotton100% Ö 100% ´
increasedyieldcostsavingbetterproductreliabilityextenduscdischargeelectrostaticdi聲4500voltsspark看到火花時5000voltsmorehumanesdsensitivity人pamplinearicscmosinputprotectedbipolartransistorseclhybridpblevelthresholdsusceptibilityvolts10025002002500250300038070005001000somedevicectiveincreasedyieldreducefieldreturncostsavingbetterproductreliability提高產品可靠性extendusagelife增加產品使用壽命moreappropriatemannerhandlloreddepartmentdefenseesdstandardstandardprocedureinstructionsmanufacturingproceduresqualityproceduresplanningcontrolproceduresmanufacturingprocessesmaterialhandlingspecificationselectronstaticgenerationelectronstaticgenerationflowout流出blowouttransparecy投影片oiltanker油罐車a之靜電量活動項目itemawayfromseat脫夾克jackettakeoff投影片滑動transparencyshift
人體:走動 (Walking)
電位 (Vlots) 能量(Energy) 3.5 KV
1.2 mJ
人體:離座 (Away from seat)
脫夾克 (Jacket take off)
10.0 KV
15.0 KV 10.0 KV
10.0 mJ
22.5 mJ 3.0 mJ
投影片滑動 (Transparency Shift)
ESD Elimination 靜電消除之方法
Increase Humidity 增加濕度 ESD Eliminator 使用靜電消除器
Rub decreasing 減少摩擦
Material Classification on ESD topic 防靜電材等級區分定義
Surface Resistance below 10E6 Ohm/SQ 表面阻抗10的6 次方歐姆以下
Some Devices and Their Susceptibility to ESD IC 耐受電壓範圍例
Threshold susceptibility
Device Type
(Volts) EPROM 100 OP-AMP 190 - 2500 Linear ICs 200 - 2500 CMOS (Input Protected) 250 - 3000 Bipolar Transistors 380 - 7000 ECL (Hybrid, PB level) 500 - 1000
o
-3500
-120000Biblioteka -90-4000 -4500
-12000 -12000
0 -60
-90 -150
-2000
-12000
-30
-180
-2500
-12000
-90
-150
-2800
-12000
-60
-120
ESD Elimination 靜電消除之方法
Grounding 接地
Anti-ESD Material 使用抗靜電材料
Working Area & ESD 電子業靜電的產生與防制
ESD from Source Prevention
Chair,Bench 工作座椅
Non-Grounding Metal ,PVC,wood glass fiber,,…… 未接地金屬,塑膠, ,木板,玻璃纖維,
Conductive shield, Conductive chair & grounding………. 導電椅套, 導電椅並接地
Conductor /導電級
ESD Dissipate /靜電消散級
Insulator /絕緣體
Working Area & ESD 電子業靜電的產生與防制
ESD from Source Prevention
Working Surface 工作表面
Wax,Paint,glass, plastic mat,…… 打臘,油漆,玻璃, 塑膠地板,
ESD Protection Objective 靜電防護之目的
Increased Yield & Quality 提高良率與品質 Reduce field return & Cost Saving 減少退貨與節省 成本 Better Product reliability 提高產品可靠性 Extend Usage Life 增加產品使用壽命 More Appropriate Manner to handling 更正確的 ESD防護與處理態度
ESD Class Agenda 課程內容
Class Objective 課程目的 What ESD is ? 何謂 ESD? Material Classification 防靜電等級區分 Human ESD Sensitivity 人對ESD感受力 IC Susceptibility to ESD 元件耐受電壓範圍例 ESD generation 靜電的產生 ESD protection Objective 靜電防護的目的 Work area Vs. ESD 電子工作區之靜電防護 ESD Elimination 靜電消除之方法 ESD grounding 靜電接地 Certification Test 職能測驗
DC discharge & response 人的反應與直流放電量
Slight sensation on hand
Perception threshold median
1 ma
0.6 ma
5.2 ma
9 ma 62 ma 76 ma
3.5 ma
6 ma 41 ma 51 ma
Shock-not painful & muscular control not lost Painful shock-muscular control lost
Documentation of ESD ESD 相關文件程序
General policy Tailored department of defense ESD standard Standard procedure instructions Manufacturing procedures Planning & Control procedures Manufacturing processes Material handling specifications Quality procedures
ESD Anti-ESD
CLASS OBJECTIVES 課程目的 Gain a basic understanding of what ESD is and how to control it. Understand specific expectations and policies concerning ESD control. Understand what actions are needed to maintain an ESD Safe Work Area. Increased Yield & Cost Saving Better Product reliability Extend Usage Life
• Class 1 - Susceptible Damage Voltage • Class 2 - Susceptible Damage Voltage
Under 1999 Volts (From Human Body Model) From 2000 Volts to 3999 Volts (From Human Body Model) 4000 Volts to 15999 Volts (From Human Body Model)
M3-10P06
Electron Static Generation 靜電現象之產生
Walking Rubbing 摩擦 走動
TransPeeling parecy 剝離 投影片
Oil tanker Flow out 流出 油罐車
Air surge Steering Mixer Blow out 噴出 攪拌 空氣噴槍 攪拌機
Monitor Induce 感應 電腦瑩幕
Phenomenon of electron static generation 靜電現象之產生
Human body activity on ESD discharge (C=200pF)
人體(C=200pF)與日常活動所產生之靜電量
活動項目 (Item)
Conductive mat, 導電地墊, 導電地磚
Working Area & ESD 電子業靜電的產生與防制
ESD from Source Prevention
Clothes 衣服
Coat,Synthetic Coat ,Shoe,Cotton wear 工作服,合成外衣 ,絕緣鞋,棉質衣服
Wrist,Heel,glove Anti-ESD’s shoe, Coat,…………... 導電腕帶,鞋帶 抗靜電衣服手套 鞋子等
Surface Resistance -10E7~10E9 Ohm/SQ 表面阻抗10 的7次方至9 次方歐姆
Surface Resistance 10E10~10E12 Ohm/SQ 表面阻抗10的10 次方至12次方歐 姆 Anti-ESD /抗靜電級
Surface Resistance 10E12.5 Ohm/SQ over 表面阻抗10的 12.5次方歐姆 以上
Painful shock-let-go threshold, median Painful & severe shock-breathing difficult, muscular control lost
90 ma
Men
60 ma
Women
ESD Sensitivity part classification ESD敏感元件等級分類
Conductive mat, Anti-ESD workbench 導電膠墊, 抗靜電工作墊
Working Area & ESD 電子業靜電的產生與防制
ESD from Source Prevention
Floor 地板
Cement,Wax,Wood, PVC plastic mat,... 混凝土,打臘,木板, PVC塑膠地板,
• Class 3 - Susceptible Damage Voltage From
ESD generation (TYPICAL ELECTROSTATIC VOLTAGES) ESD產生/典型靜電壓
Means of Static Humidity/相對濕度 Generation
65 to 99%RH Walking across carpet 1,500 V 走在地毯上 Walking on vinyl floor 250 V 走在塑膠地板上 Work chair padded with 1,500 V 35,000 V
What is the ESD ?
Electrostatic Discharge or Electrostatic Dissipate
HUMAN ESD SENSITIVITY 人對ESD感受力
To feel it (shock) 電擊感覺 3500 volts or more To hear it (zap) 聽得到ㄐㄐ或ㄖㄖ聲 4500 volts or more To see it (spark) 看到火花時 5000 volts or more
Relative
10 to 20%RH
12,000
V
18,000
V
Working Coat vs. Human body ESD
作業衣與人體靜電量(25 C,38%RH)
É q c ¾ ¹ ¾ ¦b ¾ ¹ ¦a ª ¤ ¤ Å À ¹ À (¥ ¯ ) É q O WH é R q £ ñ S At conductive floor with anti-ESD ¦U º § · ¦ç (Working Coat) Ø @~ shoe(Volts) ¼¿ ¯ À ¤ (Rub) ² § · ¦ç (take off the coat) ¼ À ¤ (Rub) ² § · ¦ç (take off the coat) æ @~ ¯ ¿ æ @~ ´ t O WH é R q £ ñ S µ ½ ª ¤ ¤ Å À ¹ À (¥ ¯ ) At insulation floor(Volts) T/R mixed with 65/35 (Terylene/Tetoron 65%,Rayon35%) S ¯ ¦h s 65%¹ ¼ 35% À ã ü Polypropylene30%, Cotton 70% E þ m » ¤ ² 30%´ 70% Ö Vinylon50%,Cotton 50% û § ú º ¥ º 50%´ 50% Ö Acrylic30%,Rayon45%, polyester25% È § O ¨ J ¤ 30% ¹ ¼ 45% » ã ü E à 25% T/C mixed with 65/35 (Terylene/Tetoron 65%,Cotton35%) S ¯ ¦h À 65%´ 35% s Ö Cotton100% Ö 100% ´
increasedyieldcostsavingbetterproductreliabilityextenduscdischargeelectrostaticdi聲4500voltsspark看到火花時5000voltsmorehumanesdsensitivity人pamplinearicscmosinputprotectedbipolartransistorseclhybridpblevelthresholdsusceptibilityvolts10025002002500250300038070005001000somedevicectiveincreasedyieldreducefieldreturncostsavingbetterproductreliability提高產品可靠性extendusagelife增加產品使用壽命moreappropriatemannerhandlloreddepartmentdefenseesdstandardstandardprocedureinstructionsmanufacturingproceduresqualityproceduresplanningcontrolproceduresmanufacturingprocessesmaterialhandlingspecificationselectronstaticgenerationelectronstaticgenerationflowout流出blowouttransparecy投影片oiltanker油罐車a之靜電量活動項目itemawayfromseat脫夾克jackettakeoff投影片滑動transparencyshift
人體:走動 (Walking)
電位 (Vlots) 能量(Energy) 3.5 KV
1.2 mJ
人體:離座 (Away from seat)
脫夾克 (Jacket take off)
10.0 KV
15.0 KV 10.0 KV
10.0 mJ
22.5 mJ 3.0 mJ
投影片滑動 (Transparency Shift)
ESD Elimination 靜電消除之方法
Increase Humidity 增加濕度 ESD Eliminator 使用靜電消除器
Rub decreasing 減少摩擦
Material Classification on ESD topic 防靜電材等級區分定義
Surface Resistance below 10E6 Ohm/SQ 表面阻抗10的6 次方歐姆以下
Some Devices and Their Susceptibility to ESD IC 耐受電壓範圍例
Threshold susceptibility
Device Type
(Volts) EPROM 100 OP-AMP 190 - 2500 Linear ICs 200 - 2500 CMOS (Input Protected) 250 - 3000 Bipolar Transistors 380 - 7000 ECL (Hybrid, PB level) 500 - 1000
o
-3500
-120000Biblioteka -90-4000 -4500
-12000 -12000
0 -60
-90 -150
-2000
-12000
-30
-180
-2500
-12000
-90
-150
-2800
-12000
-60
-120
ESD Elimination 靜電消除之方法
Grounding 接地
Anti-ESD Material 使用抗靜電材料
Working Area & ESD 電子業靜電的產生與防制
ESD from Source Prevention
Chair,Bench 工作座椅
Non-Grounding Metal ,PVC,wood glass fiber,,…… 未接地金屬,塑膠, ,木板,玻璃纖維,
Conductive shield, Conductive chair & grounding………. 導電椅套, 導電椅並接地
Conductor /導電級
ESD Dissipate /靜電消散級
Insulator /絕緣體
Working Area & ESD 電子業靜電的產生與防制
ESD from Source Prevention
Working Surface 工作表面
Wax,Paint,glass, plastic mat,…… 打臘,油漆,玻璃, 塑膠地板,
ESD Protection Objective 靜電防護之目的
Increased Yield & Quality 提高良率與品質 Reduce field return & Cost Saving 減少退貨與節省 成本 Better Product reliability 提高產品可靠性 Extend Usage Life 增加產品使用壽命 More Appropriate Manner to handling 更正確的 ESD防護與處理態度