System and method for rotational transfer of artic
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专利名称：System and method for rotational transfer of articles between vacuum and non-vacuum
environments
发明人：Sheri A. Roub,Stacia L. Theriault,Fletcher I.
Potter,Daniel L. Goodwin,Omar S.
Kiyani,Scott C. Holden
申请号：US14072419
申请日：20131105
公开号：US09673076B2
公开日：
20170606
专利内容由知识产权出版社提供
专利附图：
摘要：A device for transferring articles between an atmospheric pressure environment and a vacuum environment includes a transfer housing having an atmospheric transfer port, a pumping port, a vacuum transfer port, and a venting port disposed in a circumferentially-spaced relationship. The vacuum transfer port is in communication with the vacuum environment and the atmospheric transfer port is in communication with the atmospheric pressure environment. The device can include a carrier disc rotatably disposed within the transfer housing, the carrier disc having a pocket formed in a sidewall thereof for holding an article. The device may further include an air bearing associated with the transfer housing and configured to expel gas to maintain a gap between the transfer housing and the carrier disc.
申请人：Varian Semiconductor Equipment Associates, Inc.
地址：Gloucester MA US
国籍：US
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