HETERODYNE GRATING MEASUREMENT DEVICE AND MEASUREM
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专利名称：HETERODYNE GRATING MEASUREMENT DEVICE AND MEASUREMENT METHOD
发明人：LI, Wenhao,李文昊,LIU, Zhaowu,刘兆武,WANG, Wei,王玮,JIRIGALANTU,吉日嘎兰图,YAO,
Xuefeng,姚雪峰,YU, Hongzhu,于宏柱
申请号：CN2020/128528
申请日：20201113
公开号：WO2022/052292A1
公开日：
20220317
专利内容由知识产权出版社提供
专利附图：
摘要：A heterodyne one-dimensional grating measurement device, comprising a light
source (1), a reading head (2), a photoelectric receiving module, and a signal processing system (4). The light source (1) is used to generate two beams of polarized light that are coinciding, polarized and orthogonal and that have a fixed frequency difference. The reading head (2) is used to receive the two beams of polarized light, which each enter a surface of a moving measurement grating (5) to generate +1st order diffracted light and -1st order diffracted light that comprise a first polarized light component and a second polarized light component, respectively. The +1st order diffracted light and the -1st order diffracted light respectively enter the photoelectric receiving module by means of the reading head (2). The photoelectric receiving module is used to receive the first polarized light component and the second polarized light component of the +1st order diffracted light and the first polarized light component and the second polarized light component of the -1st order diffracted light, so to form two beat frequency signals. The signal processing system (4) is used to perform a differential calculation on the two beat frequency signals so as to achieve a displacement measurement of a single-diffraction 4-times optical subdivision of the measurement grating. The effect of grating surface-shape accuracy and a grating attitude error on measurement accuracy may be avoided. Further provided are a heterodyne one-dimensional grating measurement method, a heterodyne two-dimensional grating measurement device and a heterodyne two-dimensional grating measurement method.
申请人：CHANGCHUN INSTITUTE OF OPTICS, FINE MECHANICS AND PHYSICS, CHINESE ACADEMY OF SCIENCES,中国科学院长春光学精密机械与物理研究所地址：No.3888 Dong Nanhu Road Changchun, Jilin 130033,中国吉林省长春市东南湖大路3888号刘兆武, Jilin 130033
国籍：CN,CN
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