CHARGED PARTICLE ENERGY ANALYSER
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专利名称：CHARGED PARTICLE ENERGY ANALYSER 发明人：HOLTON, Ian, Robert
申请号：GB1992002083
申请日：19921111
公开号：WO93/010554P1
公开日：
19930527
专利内容由知识产权出版社提供
摘要：A charged particlee analyser (1) comprises an inner electrode (2) and an outer electrode (3) defining a gap between opposed curved surfaces of the electrodes for the passage of charged particles deflected on application of an electric field from a source to a detector (12) in surface analysis techniques. The electrodes are preferably hemispherical or part-hemispherical and are formed from a sheet of metal by a pressing technique. Preferably the electrodes (2, 3) are each formed to a tolerance of within about 0.13 mm so as to achieve a high transmission at a high resolution. A base plate (4) for the electrodes (2, 3) is preferably formed of two spaced, relatively thin sheets (29, 30) joined at a plurality of discrete points.
申请人：HOLTON, Ian, Robert
地址：Fisons House Princes Street Ipswich IP1 1QH GB,13 Nelson Road Hawkenbury Tonbridge Wells Kent TN2 5AW GB
国籍：GB,GB
代理机构：TOMLINSON, Kerry, John
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