Temporal interferometric signal modeling with cons
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专利名称：Temporal interferometric signal modeling
with constant phase shift in white light
interferometry
发明人：Shouhong Tang
申请号：US11588560
申请日：20061026
公开号：US07538887B1
公开日：
20090526
专利内容由知识产权出版社提供
专利附图：
摘要：A method for determining the surface topography of an object with various surface properties in white light interferometry first generates a set of interferograms,
produced by a phase shift driving mechanism supplied with known inputs, obtained from a single reflective surface at the location of the test piece. The sequence of interferograms from the test piece then is used to calibrate a sequence of inputs to the phase shift driving mechanism to compensate for non-linear characteristics of the phase shifting mechanism. The temporal interferometric signal or its transform at each pixel of a set of subsequently acquired interferograms from a test piece then is compared with signals or their transforms modeled with different properties of the measuring surface. The measured surface properties which generate a best match to the modeling surface properties are selected as the desired signal.
申请人：Shouhong Tang
地址：Tucson AZ US
国籍：US
代理机构：Luedeka, Neely & Graham, P.C.
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