Influence of the gate dielectric on the mobility of rubrene single-crystal field-effect tra
有机光电材料
Design, Fabrication, and Performance Investigation of OrganicOptoelectronic DevicesChong-an DiABSTRACTOrganic optoelectronic materials and devices, which is also called …plastic electronics‟, att rached focus attention in past decade due to their potential application in large area and low cost flexible displays, solid-state lighting, radio frequency identification (RFID) cards and electronic papers etc. As important parts of organic optoelectronic devices, organic light-emitting diodes (OLEDs), organic field-effect transistors (OFETs) and organic light-emitting transistors (OLEFTs) have made great achievements. The performance of these optoelectronic devices depends not only on the properties of the organic semiconductors involved, but is also dramatically affected by the properties of other functional layers and the nature of the interfaces present. Therefore, interface engineering, a novel approach towards high-performance OFETs, is a vital task for organic optoelectronic devices. Electrode/organic interfaces, dielectric/organic interfaces, organic/organic interfaces and organic/atmosphere interfaces are the three frequently reported interfaces in organic devices. In this dissertation, a systematic research has been carried out centering on the interface engineering of organic optoelectronic devices. With investigation of interface phenomenon and effective interface modification, dramatic decrease of power consumption and cost, obvious ehancement of device performance and improvement of stability are achieved. The main results are obtained as follows:1: Exploration of novel anode modification approach for OLEDs to reduce the power consumption and enhance the efficiency.Power consumption and light emitting property are the key parameters for the real application of organic light-emitting diodes. In fact, modification of electrodes is a widely applied approach to improve device performance of OLEDs since it can optimize the devices performance without change of organic functional materials. We demonstrated that the improvement of interface contact between ITO anode and organic semiconductor layer can be realized by the introduction of ultrathinhexadecafluoro copper phthalocyanine (F16CuPc) layer. Besides, The modification brings on formation of dipole layer on the ITO surface, which in turn leads to workfunction enhancement of ITO anode and dramatic decrease of hole injection barrier. With device design and optimization, we fabricated high performance low-operation voltage single-layer, double-layer and multi-layer OLEDs with tris(8-quinolinolato)aluminum (Alq3) as emissive layer. For the single layer Alq3 devices, the modification of the anode results in the significant enhancement in the current efficiency by about 30 times. The operation voltage decrease obviously for double layer devices, with minimum turn-on voltage of 2.6 V. As for multilayer OLEDs, the maximum current efficiency up to 7.63 cd/A and low turn-on voltage of 2.89 V are obtained by improving carrier density in the combination zone and optimization of carrier balance. The performance is one of the best one for OLEDs with Alq3 light emitting layer(Patent Number:ZL 200510126485.X; Di CA, et al. Appl. Phys. Lett. 2007, 90, 133508;Di CA, et al. Appl. Phys. Lett. 2006, 89, 033502).2: Development of novel organic light-emitting transistor structure and realization of light emission under ambient atmosphere.Organic light-emitting transistor is a highly integrated organic optoelectronic devices since both field-effect and light emitting can be realized in the same channel simultaneously. With optimized photolithograph techniques, we fabricated OFETs with Au and Al serves as source and drain electrode, respectively. Then, the laterally arranged heterojunction structures are achieved by successively inclined deposition of the field-effect and light-emitting materials. It has been observed that introduction of Au-Al source-drain electrodes and laterally arranged heterojunction structures result in enhancement of electron injection and improved carrier density of both holes and electrons. Besides, the designed device structure offers an ideal and widely applicable one to realize effective integration of field-effect property and light emission. It is because the two kind of organic semiconductors could take full use of their own advantages. We fabricated both small molecular and polymer based OLEFTs with pentacene, Alq3and TPA-PPV, respectively(Patent Number: ZL 200610089448.0;ZL 200510130758.8; Di CA, et al. Appl. Phys. Lett. 2006, 88, 121907;Di CA, et al.Adv. Funct. Mater. 2007, 17, 1567.). The results constitute first demonstration of organic light-emitting transistor under ambient atmosphere(Cicoira, F. et al. Adv. Funct. Mater. 2007, 17, 3421;Cicoira, F. et al. J. Mater. Chem. 2008, 18, 158).3: Exploration of novel approach to fabricate high performance low-cost OFETs.Low cost plays dominant role in determining the further development of OFETs. Source-drain electrodes are important parts in OFETs. Gold has been the most widely applied source–drain electrode for OFETs to date, due to its high conductivity, good stability, and formation of excellentcontact with many p-type organic semiconductors. However, the high cost of gold is an adverse factor in practical applications. On the other hand, low-cost electrodes such as Cu and Ag, are unsuitable for most p-type OFETs due to their relatively low workfunction. We provide a simple method to modify the bottom contact Cu or Ag electrodes with organic charge transfer compounds (Cu-TCNQ or Ag-TCNQ). The modification enhanced the workfunction of electrodes and improved the electrode/organic semiconductor contact which results in dramatic improvement of carrier injection. Therefore, we fabricated low cost Cu or Ag based OFETs with device performance comparable with the one of Au based OFETs. Besides, we investigated the influence of electrode morphology on the device performance by the formation of nanosized Cu electrodes. It has been discovered that introduction of source-drain electrodes with proper roughness is helpful to reduce the contact resistance. Fabrication of OFETs based on many organic semiconductors proved that it is a universal approach to improve the performance of bottom contact devices(Patent Number: 200610089591.X;Di CA, et al. J. Am. Chem. Soc. 2006, 128, 16418; Di CA, et al. Phys. Chem. Phys. Chem.2008, 10, 2302 (Front Cover)). The result possess potential application in the patterning of organic crystals and construction of corresponding devices(Di CA et al. Chem. Mater. 2009, 21, 4873).4: Discovery and investigation of high performance top contact OFETs with Cu electrodes. The typical OFET electrode structure, with a bottom gate, can be divided into top-contact and bottom-contact configurations. With varied electrode deposition sequence, the OFETs with different electrode structure required different modification techniques and exhibit varied device performance. Top-contact OFETs usually have a good electrode/organic layer contact and exhibit high device performance. We discovered that many organic semiconductors based OFETs with Cu top-contact electrodes show comparable device performance with the one of Au top-contact devices. The most excellent performance up to 0.8 cm2V-1s-1 can be obtained for pentacene FETs with Cu top-contact. The high performance is result from good electrode/organic layer contact and the formation of Cu x O during the electrode deposition process or device storage in air. The spontaneous formed Cu x O possess matched energy level with many organic semiconductors and bring on improved device performance (Patent Application Number: 200710118153.6;Di CA, et al. Adv. Mater. 2008, 20, 1286.). The results thus provide an effective way towards high performance low cost top-contact OFETs (High-tech Materials Alert, 2008, 25, 9).5: Development of novel graphene patterning method and its applications in OFETs. Graphene, single or few layer of two dimensional graphite, received great interest among condensed physics and material sciences due to its unusual and stable structure. We developed a novel vapor deposition method with ethanol as the carbon source to fabricate patterned gragheneusing the patterned copper or silver and demonstrated its application in OFETs. The patterned graphene exhibit good contact with organic semiconductors, with low carrier injection barrier for p-type OFETs and can serve as excellent source-drain electrodes for OFETs. The pentacene based bottom-contact devices with channel length of 5 m can reach high mobility of 0.53 cm2V-1s-1 which is one of the best result for pentacene bottom contact devices with bare SiO2 dielectric layer (Patent Application Number: 200710177814.2; Di CA, et al.Adv. Mater. 2008, 20, 3289). The result demonstrates novel approach to fabricate patterned graphene and open a new application of graphene in OFETs (NPG, Asia Materials, /asia-materials/highlight.php?id=291;Pang, SP et al. Adv. Mater. 2009, 21, 3488;Cao Y, et al. Adv. Funct. Mater. 2009, 19, 2743). The result is the first experimental step towards integrating graphene and conjugated organics (Burghard, M. et al. Adv. Mater. 2009, 21,2586.).6: Discovery of relationship between the device stability and dielectric/organic layer interfaces and fabrication of high performance pentacene FETs.Device stability, a hot topic in the organic optoelectronic device field, is widely believed to be related to the properties of organic semiconductors. Pentacene is the most widely investigated organic semiconductor for OFETs. However, poor device stability is the key shortcomings that impede its real application. We discovered that the device stability of pentacene OFETs in air is strongly related to the properties of dielectric layers. The device performance of pentacene FETs with bare SiO2 can maintain for 7 months. By the investigation of relationship between the device stability and dielectric layer surface energy, we suggest the pentacene aggregation and phase transfer should be responsible for the device performance degradation for devices with low surface energy dielectric layer (OTS modified SiO2). We obtained high performance pentancene FETs with high mobility up to 1.8 cm2V-1s-1 and excellent stability by the optimization of dielectric layer(Di CA, et al. Phys. Chem. Chem. Phys. 2009, 11, 7268.).In summary, centering on investigation of interface phenomenon, we fabricated high performance OLEDs, OFETs and OLEFTs by the device design and optimization. Also, a series of novel interface approaches were explored to improving the device performance and stability, lowering the the fabrication cost and power consumption (Di CA, et al.J. Phys. Chem. B 2007, 111, 14083(Feature Article, Front Cover), Di CA, et al. Acc. Chem. Res. 2009,42,1573). These results might boost further development of organic optoelectronic devices towards real applications.Key words: organic light-emitting diodes, organic field-effect transistors, organiclight-emitting transistors, interface, electrode modification中文摘要被称为“塑料电子学”的有机光电材料与器件因其在大面积和低成本的柔性显示、平板照明、射频标签和电子纸等方面的广阔应用前景在过去二十年中备受关注。
Gate drive
PESC 2001 8 VANCOUVER, CANADA 1. IGBT/MOSFET SWITCHINGS JUNE 17-21,2001 - IGBT VERSUS MOSFET • IGBT combines the advantages of Bipolar Transistors such as low conduction losses with the merits of MOSFETs such as shorter switching times. • Equivalent circuitry: Collector Drift region resistance
© 2001 IEEE * ACTIVE GATE DRIVERS FOR MOTOR CONTROL APPLICATIONS
7 1. IGBT/MOSFET SWITCHINGS
PESC 2001 VANCOUVER, CANADA JUNE 17-21,2001
Constant Cgs on third interval (increased by GD overlap oxide capacitance) Cgs Cgs2 - 2.2nF ∆C=Gate Oxide Capacitance of drain overlap
ACTIVE GATE DRIVERS FOR MOTOR CONTROL APPLICATIONS By DORIN O. NEACSU
Correspondence Address: Satcon Technology Center 161 First Street, Cambridge, MA 02142 Phone (617) 349-0834, Fax (617) 661-3373, Email neacsu@
莫扎特效应对孩子智力影响英语作文
莫扎特效应对孩子智力影响英语作文English: The Mozart effect refers to the hypothesis that listening to Mozart's music can temporarily boost spatial-temporal reasoning skills, which are crucial for problem-solving and understanding complex concepts. While some research studies have shown a correlation between listening to Mozart's music and improved spatial reasoning abilities, the overall impact on intelligence is still a topic of debate among scientists. It is important to note that the Mozart effect is not a long-term enhancement of intelligence, but rather a short-term boost in specific cognitive tasks. Therefore, while exposing children to classical music, including Mozart, can be beneficial for their brain development and cognitive skills, it is not a guaranteed way to significantly improve their overall intelligence. Other factors such as genetics, environment, and education play a much more significant role in determining a child's intellectual abilities.中文翻译: 莫扎特效应指的是一种假设,即听莫扎特音乐可以临时提高空间时间推理技能,这对于解决问题和理解复杂概念至关重要。
MOS器件Hf基高k栅介质的研究综述
㊀收稿日期:2023-01-11作者简介:吕品(1973-)ꎬ女ꎬ辽宁沈阳人ꎬ博士ꎬ副教授ꎬ研究方向:半导体技术.㊀∗通信作者:吕品ꎬE ̄mail:pin_lv@126.com.㊀㊀辽宁大学学报㊀㊀㊀自然科学版第51卷㊀第1期㊀2024年JOURNALOFLIAONINGUNIVERSITYNaturalSciencesEditionVol.51㊀No.1㊀2024MOS器件Hf基高k栅介质的研究综述吕㊀品1∗ꎬ白永臣2ꎬ邱㊀巍1(1.辽宁大学物理学院ꎬ辽宁沈阳110036ꎻ2.辽宁大学创新创业学院ꎬ辽宁沈阳110036)摘㊀要:随着金属氧化物半导体(MOS)器件尺寸的持续缩小ꎬHfO2因其介电常数(k)高㊁带隙大等特点ꎬ成为取代传统SiO2栅介质最有希望的候选材料.本文综述了Hf基高k栅介质薄膜的近年的研究进展.针对HfO2结晶温度低㊁在HfO2薄膜和Si衬底间易形成界面层导致漏电流大㊁界面态密度高㊁击穿电压低等问题ꎬ回顾了最近论文报道的两种策略ꎬ即掺杂改性和插入缓冲层.接着举例讨论了Hf基材料从二元到掺杂氧化物/复合物的演变㊁非Si衬底上淀积Hf基高k栅介质㊁Hf基高k栅介质的非传统MOS器件结构ꎬ为集成电路(IC)中MOS器件的长期发展提供一些思路.关键词:Hf基高k材料ꎻ栅介质ꎻMOS器件ꎻ介电常数中图分类号:TN304㊀㊀㊀文献标志码:A㊀㊀㊀文章编号:1000-5846(2024)01-0024-09ReviewofHf ̄BasedHigh ̄kGateDielectricforMOSDevicesLÜPin1∗ꎬBAIYong ̄chen2ꎬQIUWei1(1.CollegeofPhysicsꎬLiaoningUniversityꎬShenyang110036ꎬChinaꎻ2.CollegeofInnovationandEntrepreneurshipꎬLiaoningUniversityꎬShenyang110036ꎬChina)Abstract:㊀Asthesizeofmetaloxidesemiconductor(MOS)devicescontinuestoshrinkꎬHfO2hasbecomethemostpromisingcandidatematerialtoreplacetraditionalSiO2gatedielectricsduetoitshighdielectricconstant(k)andlargebandgap.ThispaperreviewstherecentdevelopmentofHf ̄basedhigh ̄kgatedielectricfilms.AimingattheproblemsoflowHfO2crystallizationtemperatureandtheformationofinterfaciallayerbetweenHfO2thinfilmandSisubstrateꎬresultinginlargeleakagecurrentꎬhighdensityofinterfacestatesꎬandlowbreakdownvoltageꎬwereviewedtwostrategiesreportedinrecentpapersꎬnamelyꎬdopingmodificationandinsertingbufferlayer.ThenꎬtheevolutionofHf ̄basedmaterialsfrombinarytodopedoxide/complexꎬdepositingHf ̄basedhigh ̄kgatedielectriconnon ̄Sisubstrateandnon ̄conventionalMOSdevicearchitectureswithHf ̄basedhigh ̄kgatedielectricarediscussedusingthespecificexamplesꎬwhichcanprovidesomeideasforthelong ̄termdevelopmentofMOSdevicesinintegratedcircuit(IC).Keywords:㊀Hf ̄basedhigh ̄kmaterialsꎻgatedielectricꎻMOSdeviceꎻdielectricconstant㊀㊀0㊀引言过去60年ꎬ金属氧化物半导体(MOS)集成电路(IC)的稳步发展和半导体产业的指数级增长一直遵循摩尔定律[1].随着MOS器件尺寸的持续缩小ꎬIC的集成度更高㊁功耗更低㊁运行速度更快[2-4].然而ꎬ随着技术节点达到45nmꎬ传统栅介质SiO2的几何尺寸已接近材料的极限.SiO2作为栅介质的最小厚度约为0.7nmꎬ至少需要两层相邻的氧(O)原子来防止栅极/SiO2和SiO2/Si界面相互重叠[5].实际上ꎬ当栅介质SiO2的厚度小于3nm时ꎬ量子隧穿效应非常严重.过量的隧穿电流随着栅介质厚度的降低呈指数级增长ꎬ导致难以忍受的高功耗[6-9]ꎬ同时可靠性下降.IC的MOS运行过程中ꎬ载流子流过器件ꎬ导致SiO2栅介质层和Si/SiO2界面产生缺陷[10-11].缺陷密度达到临界值会导致SiO2栅介质层击穿ꎬ器件失效[12-14].因此ꎬ采用具有更高介电常数(k)的材料替代SiO2ꎬ可以有效抑制隧穿电流[15].通常ꎬ作为可能替代SiO2栅介质的材料应该满足以下条件:1)高k值(由于场效应晶体管的短沟道效应ꎬk值应小于50)ꎻ2)热稳定性好ꎻ3)带隙超过5eVꎻ4)与半导体衬底的带偏移大于1eVꎻ5)在Si/介质界面和介质材料体内ꎬ本征缺陷密度低ꎻ6)介质材料与互补金属氧化物半导体(CMOS)工艺兼容[16].1㊀Hf基高k材料HfO2带隙较大(5.5~6.5eV)ꎬk值相对较高(22~25)ꎬ击穿电场高(3.9~6.7MV cm-1)ꎬ作为体材料热稳定性好ꎬ形成热大(-1134kJ mol-1)[17-19].Intel公司在2007年引入高kHfO2栅介质层以取代传统的SiO2栅介质层[20-21].1.1㊀HfO2结晶淀积后热退火导致HfO2结晶是一个关键问题.晶粒边界为电子提供了传输路径ꎬ导致漏电流增大.HfO2结晶温度高于900ħꎬ但实际记录的局部结晶温度要低得多ꎬ原子层淀积(ALD)法获得的HfO2薄膜的结晶温度可低至350ħ[22].引入结晶温度高的掺杂剂是抑制HfO2结晶的方法之一.掺杂Gd可以增加HfO2膜的结晶温度.当Gd的掺杂比增加到原子分数为15%时ꎬ掺杂Gd的HfO2(HGO)膜表现出完整的非晶相.HGO膜中O空位含量下降ꎬ载流子浓度减少ꎬ栅介质的绝缘特性增加ꎬ此时HGO膜k值为27.1ꎬ漏电流密度为5.8ˑ10-9A cm-2[23].氮溶入可提高HfO2膜的结晶化温度㊁抑制杂质渗透㊁提高可靠性.Liu等[24]以HfO2为靶ꎬ在N2/Ar气氛中利用反应溅射(RF)技术在Si衬底上淀积了HfOxNy栅介质ꎬ成功地将氮溶入HfO2膜中.退火温度达到800ħ时ꎬHfOxNy膜保持无定形态ꎬ退火温度增加到900ħ时ꎬHfOxNy膜弱结晶.纯HfO2膜的结晶温度为500ħꎬ氮溶入HfO2膜使Hf和O原子的迁移率降低ꎬ成核温度增加ꎬ使HfOxNy膜的结晶温度增大.利用脉冲激光淀积技术(PLD)可制备Hf-铝酸盐(Hf Al O)膜[25]ꎬ当退火温度为900ħ时仍保持无定形态ꎬ至1000ħ时出现结晶峰ꎬ因而在HfO2中加入Al2O3所形成的Hf Al O能显著提高非晶相的热稳定性.掺杂La的高kHfLaO栅介质ꎬ其结晶温度能增加至900ħꎬ此时其漏电流较低[26].La的掺杂不会增加电荷陷阱中心ꎬ不会降低界面质量.随着La掺杂量的增加ꎬ渐进击穿行为逐渐消失ꎬ介电击穿52㊀第1期㊀㊀㊀㊀㊀㊀吕㊀品ꎬ等:MOS器件Hf基高k栅介质的研究综述㊀㊀寿命得以提高[27].利用磁控溅射法在功率20W下对纯HfO2和Gd2O3靶可制得Gd2O3掺杂HfO2(GDH-20)薄膜.GDH-20薄膜在退火温度为700ħ时漏电流密度最低.700ħ的快速热退火(RTA)处理能够有效减少薄膜中的缺陷ꎬ从而减少漏电通道ꎬ降低了漏电流.当退火温度达到薄膜的结晶温度(800ħ)后ꎬ薄膜内部开始结晶ꎬ漏电通道增加ꎬ漏电流增加[28].HfO2的结晶温度与膜厚相关[29].利用ALD法在H终止Si表面上淀积的HfO2薄膜成核不良ꎬ生长呈岛状结构ꎬ而在SiO2底层上淀积的HfO2薄膜均匀连续㊁质量好.在淀积的ALDHfO2薄膜中存在显著的非晶成分ꎬ约在600ħ时ꎬHfO2结晶进入单斜相.随HfO2薄膜厚度降低(从40nm到5nm)ꎬHfO2结晶温度升高(从430ħ到600ħ).薄膜厚度的增加ꎬ可能形成结晶核ꎬ薄膜厚度的进一步增加将促进新结晶核的进一步形成和现有晶体的生长[30].1.2㊀界面层的形成当HfO2直接淀积在Si衬底上时ꎬHfO2薄膜和Si衬底间易形成界面层[31-32].界面层的厚度与淀积温度㊁反应前体㊁生长时间㊁HfO2膜的微结构有关.同样ꎬ界面层的组成(SiO2[33-34]㊁Hf硅化物[35]㊁Hf硅酸盐[36-37]㊁富含SiO2的硅酸铪[38])也取决于HfO2膜的淀积条件.因为界面层通常会包含k值相对低的材料ꎬ使CMOS器件的电容急剧下降[39]ꎻ界面层的界面态密度增大ꎬ等效氧化物厚度(EOT)增加[32].HfO2与Si衬底反应形成硅酸盐层和副产物硅化物键(Hf Si).界面金属硅化物键作为界面陷阱ꎬ也可以降低导带偏移能量.由于硅酸盐的k值(约为10)远低于HfO2的k值ꎬ根据高斯定律ꎬ电场主要分布在低k区域ꎬ这导致高kHfO2/低k硅酸盐结构中的有效势垒降低.高kHfO2/低k硅酸盐结构的击穿机制复杂ꎬ软击穿发生在低k层ꎬ整个电介质的硬击穿电压降低[40].为了阻碍界面层的形成ꎬ在HfO2膜和Si衬底间插入缓冲层ꎬ如SiO2[41-42]㊁SiON[32ꎬ43]等或进行掺杂[44].利用ALD法生长HfO2样品ꎬ其结构为HfO2(2.5nm)/SiO2(1nm)/Si(衬底)ꎬ测试后表明中间层是混合的Hf0.18Si0.32O0.5层(0.6nm)ꎬ而不是纯的SiO2层(1nm).80MeVNi离子辐照可以诱导Si和Hf在HfSiO/HfO2界面上相互扩散.中间层中Si的浓度相对于Hf的浓度随着离子通量的变化而增加ꎻ该中间层的厚度也随着离子通量的增加而增加.在Si和HfO2间引入薄的氧化硅/氮化硅层有望提高界面质量[42].在HfO2中掺入Ybꎬk值明显增加(Yb掺杂浓度在原子分数为8%时达到28.4)ꎬ掺杂Yb的HfO2薄膜稳定ꎬ漏电流低.界面SiO2层与稀土离子间的界面反应可以消除SiO2层ꎬ获得极低的EOT值ꎬ形成稳定的界面[44].利用傅里叶变换红外光谱观察ꎬ在HfO2/Si界面处形成了SiO2界面层ꎬN2气氛下退火可使界面SiO2层分解[33].Si/HfO2/AlN叠层的高分辨透射电镜(HRTEM)图像显示在Si衬底界面处出现SiO2薄层ꎬ在700ħ进行RTA后界面SiO2层变薄.AlN对O具有高固溶度ꎬAlN从HfO2中移除O.由于HfO2在热力学上比SiO2更稳定ꎬ首先会通过界面SiO2来获得O[45].通过N2O㊁NH3等离子体氮化ꎬ在Si衬底上生长一层薄的氧氮层(SiON)ꎬ接着在氮化的Si衬底上溅射HfO2膜ꎬ并在N2气氛下ꎬ在400ħ进行淀积后退火(PDA).SiON层中由于N浓度低ꎬ不能完全阻止界面反应ꎬ在HfO2/Si界面形成了富含N的Hf硅酸盐界面层.但经N2O等离子体处理后ꎬ62㊀㊀㊀辽宁大学学报㊀㊀自然科学版2024年㊀㊀㊀㊀漏电流更低ꎬ击穿场更高ꎬ电容等效厚度(CET)更低[43].利用N2等离子体氮化Si衬底形成SiN层则可以完全阻止界面反应的发生ꎬ其EOT更低.同时SiN层的形成避免形成微小的传导通道和由Hf硅化物或亚氧化物造成的高密度界面态[32]ꎬ可以降低漏电流.2㊀Hf基掺杂氧化物/复合物高k栅介质如前所述ꎬHfO2具有结晶温度低ꎬ在Si衬底上直接淀积HfO2时易形成界面层.为了改善HfO2的特性ꎬ对高k栅氧化物的研究已经从单一金属氧化物发展为掺杂氧化物/复合物.采用射频反应共溅射法制备的HfSiON薄膜与Si衬底接触面较平坦ꎬ无界面层形成ꎬ经900ħ高温退火后仍是非晶态ꎬ热稳定性好[46].HfAlOx薄膜热稳定性好ꎬ带隙较大ꎬO扩散势垒较高ꎬ漏电流低[47]ꎬ在退火温度400ħ时ꎬHfAlOx的k值最大可达12.93.在较高温度下退火的HfAlOx薄膜表面更致密ꎬ黏附性更好ꎬ可有效抑制界面态密度和陷阱ꎬ界面质量好.铪锆氧化物(HfZrO4ꎬ(HfO2)1-x(ZrO2)x)膜(HZO)ꎬ是单斜相和四方相材料的混合物ꎬHZO中的四方相比纯HfO2具有更高的k值[48].但当Hf基㊁Zr基金属氧化物材料与Si衬底直接接触ꎬO原子易与Si衬底反应生成界面层ꎬ则k值减小[49].硅酸盐薄膜的形成可以防止HfO2基体系中低k界面氧化层的形成[50].Choi等[51]通过ALD制备不同SiO2含量的HfZr硅酸盐((HfZrO4)1-x(SiO2)x)薄膜(HZS).HZS与Si衬底间无界面层形成ꎬ界面态和O空位数减少ꎬ因此SiO2溶入铪锆氧化物HZO膜有助于提高电介质的完整性.随着SiO2含量的增加ꎬ漏电流密度下降ꎬ击穿电场增强.HZS中x为20%时ꎬk值为17ꎬ漏电流密度为1.23ˑ10-7A cm-2(Vg=-1V)ꎬ界面态密度降低1.09ˑ1011cm-2eV-1ꎬ氧化层陷阱电荷密度降低1.81ˑ1012cm-2.经化学干法刻蚀(CDE)处理的TaN/HfOxNyMOS电容器ꎬ表面更光滑ꎬ残余污染物更少ꎬ漏电流更小ꎬEOT更低(Vg=-1.5Vꎬ约1.97nm)ꎬ击穿所需时间更长[52].利用脉冲激光淀积技术在p-Si(100)衬底上淀积的Al1.997Hf0.003O3薄膜具有稳定的六边形晶体结构ꎬ晶体分布均匀㊁致密㊁形态光滑ꎬ这是由于衬底温度为800ħ所致[53].在该薄膜中ꎬ更多的原子停留在表面ꎬ不饱和键的密度增加ꎬ引起薄膜中缺陷产生局域态.该薄膜越薄带隙越大(激光脉冲数量为20000~5000ꎬ所淀积的Al1.997Hf0.003O3薄膜的带隙为5.26~5.64eV).所淀积Al1.997Hf0.003O3薄膜的漏电流密度比Al2O3薄膜的低一个数量级ꎬ比HfO2薄膜的低两个数量级.将Hf掺入Al2O3中ꎬk值显著增加(激光脉冲数量为20000~5000ꎬ所淀积的Al1.997Hf0.003O3薄膜的k值为21.46~21.18).3㊀非Si衬底上淀积Hf基高k栅介质除Si衬底外ꎬ其他半导体材料(如Ge㊁GaN㊁GaAs㊁4H-SiC等)作为高速沟道或衬底材料的MOS器件也得到了广泛研究.用高kHfO2取代传统的SiO2栅介质ꎬHfO2/4H-SiCMOS的特性显著提高ꎬ主要表现为通态电阻低ꎬ载流子迁移率高ꎬ氧化层电场低ꎬ但漏电流增加ꎬ在高k栅介质HfO2和4H-SiC界面处插入2nm厚的薄SiO2界面层可使漏电流降低4个数量级[54].高k栅介质HfO2进一步降低了随介质层厚度变化的阈值电压的漂移.介质层厚度固定不变(20nm)ꎬ栅介质从SiO2变到HfO2(k=25)ꎬ阈值电压的总漂移约为2.5Vꎬ器件跨导从64增加至87ꎬ有助于提高功率器件的开关能力[55].72㊀第1期㊀㊀㊀㊀㊀㊀吕㊀品ꎬ等:MOS器件Hf基高k栅介质的研究综述㊀㊀n-GaN衬底上淀积Hf0.64Si0.36Ox栅介质膜制备MOS电容器[56]ꎬ在800ħ下不同气氛中(O2㊁N2㊁H2)进行退火处理.在O2气氛下退火(PDO)后ꎬHf0.64Si0.36Ox膜部分结晶ꎬ晶粒边界充当电流漏电通路ꎬ漏电流密度增大ꎻ在H2气氛下退火(PDH)后ꎬn-GaN/Hf0.64Si0.36Ox界面处的中间过渡层Ga2O3可能分解ꎬ致使Ga扩散进入Hf0.64Si0.36Ox膜ꎬ在n-GaN/Hf0.64Si0.36Ox界面处产生电缺陷ꎬ导致界面态密度增大ꎻ而在N2气氛下退火(PDN)后ꎬHf0.64Si0.36Ox(k=15.1)保持无定形态ꎬPDN电容器漏电流密度大大降低ꎬ平带电压滞后小(+50MV)ꎬ漂移小(0.74V)ꎬ击穿电场大(8.7MV cm-1).PDN处理形成的性能优越的Hf0.64Si0.36Ox膜可用于GaN功率器件的栅介质.由于固有氧化物(As2O3ꎬAs2O5㊁Ga2O3)和As的存在ꎬGaAs表面可能由于高界面态密度而形成外部缺陷.Liang等[57]选取GaAs为衬底ꎬ利用三甲基铝(TMA)经ALD20个脉冲循环处理后ꎬ对其进行钝化ꎬ然后淀积掺Y的HfO2薄膜ꎬ经300ħPDA制成电学特性优异的Al/HYO/TMA/GaAs/AlMOS电容器ꎬ其最大的k值约为38.3ꎬ最低的滞后电压约为0.01Vꎬ最小的漏电流密度约为3.28ˑ10-6A cm-2.具有自清洁效应的ALDTMA经过20个脉冲循环处理可以有效地降低HYO/GaAs栅叠层界面上的固有的As氧化物㊁As0和Ga氧化物ꎬ提高了界面质量.300ħPDA处理可以抑制Ga/As氧化物的再生ꎬ有效地阻止低k界面层的形成ꎬ有助于降低O空位相关的界面态或导带偏移增加ꎬ从而减少陷阱辅助的隧穿电流.同样用20个循环的ALDTMA对GaAs衬底进行预处理后淀积掺Gd的HfO2薄膜制得的电容器也显示出极佳的电学性能[58]ꎬ表现为无迟滞ꎬ最小界面态密度约为1.5ˑ1012cm-2eV-1ꎬ带偏移约为2.86eVꎬ最大k值约为35.9ꎬ最低的漏电流密度约为1.4ˑ10-5A cm-2.Meena等[59]在柔性聚酰亚胺(PI)衬底上旋涂溶胶凝胶母液ꎬ经O2等离子体预处理和退火后制成Hf-Zr-氧化物(HfxZr1-xO2)栅介质的电容器ꎬ表现出超低的漏电流密度(施加电压-10Vꎬ漏电流密度为3.22ˑ10-8A cm-2)ꎬ较大的电容密度(在应用频率分别为10kHz和1MHz时ꎬ电容密度分别为10.36fF μm-2和9.42fF μm-2).以上结果表明ꎬ经O2等离子体预处理ꎬ溶胶凝胶湿膜被氧化ꎬ进一步退火导致陷阱数量减少ꎬ从而其电学性能得以提高.利用RF溅射淀积法在Si1-xGex上淀积超薄的HfAlOx高k栅介质(Al和Hf的原子比为73.3ʒ26.6).经测试:EOT约3nmꎬ界面态密度为6ˑ1011cm-2eV-1ꎬ漏电流密度为6.7ˑ10-4A cm-2(Vg=ʃ1V)ꎬ表明HfAlOx/Si0.81Ge0.19结构界面稳定.HfAlOx/Si0.81Ge0.19结构的导带和价带偏移分别为(2.05ʃ0.2)eV和(3.11ʃ0.2)eVꎬ由于在HfAlOx和Si1-xGex间生长了界面层ꎬ引起导带和价带有0.2eV的漂移[60].在Ge衬底上制备HfTa基(HfTaON/AlON叠层)栅介质MOS电容器[61].该MOS电容器的界面态/氧化层电荷密度低㊁漏电流低㊁CET低(约为1.1nm)㊁k值高(约为20).AlON中间层可以有效地阻断HfTa基介质与Ge衬底之间Ge㊁Hf和Ta的相互扩散和反应ꎬAlON层也能防止O渗透到Ge衬底ꎬ有效地抑制了低kGeOx层的形成ꎬ从而降低了氧化层电荷密度和界面态密度.Ta的掺入抑制了栅介质中连续晶体的生长ꎬ从而使结晶温度升高.N的掺入可以阻止物类的相互扩散ꎬ改变高k材料的局部配位ꎬ抑制结晶的发生ꎬ从而降低漏电流.同时由于中间层和高k介质中N的掺入ꎬ形成了N相关的强键ꎬ使HfTaON/AlON叠层的可靠性非常高.采用快速热氮化在Ge(111)衬底上淀积HfO2介质层ꎬ淀积后退火制成Au/Cr/HfO2/GeON/GeMOS电容器[62].光电子能谱(XPS)和HRTEM分析证明在Ge衬底上形成了GeON界面层ꎬ界面层82㊀㊀㊀辽宁大学学报㊀㊀自然科学版2024年㊀㊀㊀㊀清晰.在400ħ下退火的具有GeON界面层的电容器具有更好的电学性能:k值为17.26ꎬ势垒高度为1.04eVꎬ滞后电压值为160mV.界面态密度和固定电荷密度稍大ꎬ分别为1.02ˑ1013cm-2 eV-1和1.55ˑ1012cm-2ꎬ分析认为是由于Ge衬底(111)晶向的激活能高于(100)和(110)晶向的激活能ꎬ同时氧化界面附近存在薄氮层ꎬ导致界面上的缺陷密度更大.p-Ge衬底上淀积HfN薄膜ꎬ在Ar/N2气氛下进行PDA处理后ꎬHfN转变成HfOxNyꎬ制成Pt/HfOxNy/p-GeMOS电容器[63].HfOxNy的EOT随着PDA温度和时间的增加而降低ꎬPDA处理温度为600ħꎬ时间为5min时ꎬHfOxNy的EOT降低至1.95nm(Vg=-1V).与HfOxNy/Si叠层相反ꎬPDA较高的温度和较长的时间ꎬ导致HfOxNy/Ge叠层的滞后宽度更大.与PDA时间无关ꎬ随着PDA温度的升高ꎬ平带电压(VFB)出现负偏移ꎬ意味着在HfOxNy/界面层中引入了更多的固定正电荷.与具有类似EOT的SiO2/Si相比ꎬHfOxNy/p-Ge的漏电流降低了近4个数量级.在600ħ退火5min后ꎬ漏电流密度为1.8ˑ10-5A cm-2(Vg=-1V).Wang等[64]在p-Ge衬底上ꎬ对Ge衬底进行TMA钝化后ꎬ利用共溅射法(HfO2靶和Dy靶)在Ar/O2气氛下常温淀积HfDyOx栅介质层.通过变化Dy靶的直流溅射功率而改变HfDyOx膜Dy的掺杂量.对HfDyOx/Ge叠层进行热退火ꎬ研究掺杂浓度和热退火处理对HfDyOx/Ge叠层界面化学和电学特性的影响.结果表明ꎬ溅射淀积的HfDyOx是多晶结构ꎬ结晶度取决于溅射功率和退火温度.随着溅射功率的增加ꎬDy在HfDyOx膜中的含量增加.由于HfDyOx/Ge界面上不稳定Ge氧化物的大量减少和HfDyOx膜中O空位被Ge充分取代ꎬDy靶的直流溅射功率为10W所淀积的HfDyOx栅介质表现出最佳的界面特性.界面化学特征的演化是通过两个相互竞争的过程发生的ꎬ包括氧化物的生长和氧化物的解吸.随着退火温度的升高ꎬ氧化物解吸过程优于氧化物生长过程ꎬ所以退火处理导致界面性能下降.当Dy靶的直流溅射功率为10W时淀积的HfDyOx/GeMOS电容器表现出最佳的电学特性:k值为22.4ꎬ较小的平带电压0.07Vꎬ滞后可忽略ꎬ较低的氧化层电荷密度约为1011cm-2ꎬ较低的漏电流密度为2.31ˑ10-8A cm-2.与掺杂浓度和退火温度相关的HfDyOx/GeMOS电容器ꎬ随着电场的增加ꎬ漏电流导电机制(CCMs)从SE发射到PF发射再到FN隧穿.4㊀Hf基高k栅介质的非传统MOS器件结构随着器件尺寸的进一步缩小ꎬ采用传统结构的纳米级器件仍受到短沟道效应及量子效应的限制.改进的非传统MOS器件结构应运而生ꎬ如多栅MOS结构[65]㊁绝缘体上硅(SOI)[66]等.Pravin等[67]仿真制备了以高kHfO2为栅介质的双金属栅无结MOS(DMSGJLT).由于双金属栅的设计ꎬ两金属的界面出现电场峰ꎬ源区出现电场峰ꎬ高kHfO2作栅介质的电子速度增加约31%ꎬ可以实现良好的载流子输运.k值增加ꎬ势垒高度增加ꎬ漏电流大大降低.电流开关比的量级为109ꎬ比SiO2作栅介质的MOS高5个量级ꎬ漏致势垒(DIBL)值呈指数下降约61.5%.Kumar等[68]设计了具有栅叠层的异质双环栅无结纳米管金属氧化物半导体场效应晶体管(MetaloxidesemiconductorfieldeffecttransistorꎬMOSFET)ꎬHfO2(k=22)和HfxTi1-xO2(k=50)被选为高k栅叠层氧化物.与无栅叠层结构相比ꎬHfxTi1-xO2作为栅介质漏电流更低(2.44ˑ10-16A)ꎬ电流开关比增加至大约1011ꎬDIBL(25.03mV V-1)和亚阈值斜率均得以提升(66.26mV dec-1).引入高k的侧边隔离可抑制寄生的双极结型晶体管(BipolarjunctiontransistorꎬBJT)ꎬ使关态电流显著降低ꎬ侧边隔离的k值从1变化到25ꎬDIBL提高了40%.92㊀第1期㊀㊀㊀㊀㊀㊀吕㊀品ꎬ等:MOS器件Hf基高k栅介质的研究综述㊀㊀基于高kHfZrO4的高性能32nm绝缘体上硅N沟道金属氧化物半导体(SilicononinsulatorN 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界面处理对AlGaNGaNMIS ̄HEMTs器件动态特性的影响
第40卷㊀第7期2019年7月发㊀光㊀学㊀报CHINESEJOURNALOFLUMINESCENCEVol 40No 7Julyꎬ2019文章编号:1000 ̄7032(2019)07 ̄0915 ̄07界面处理对AlGaN/GaNMIS ̄HEMTs器件动态特性的影响韩㊀军1ꎬ赵佳豪1ꎬ赵㊀杰1ꎬ2ꎬ邢艳辉1∗ꎬ曹㊀旭1ꎬ付㊀凯2ꎬ宋㊀亮2ꎬ邓旭光2ꎬ张宝顺2(1.北京工业大学信息学部光电子技术省部共建教育部重点实验室ꎬ北京㊀100124ꎻ2.中国科学院苏州纳米技术与纳米仿生研究所纳米器件与应用重点实验室ꎬ江苏苏州㊀215123)摘要:研究不同界面处理对AlGaN/GaN金属 ̄绝缘层 ̄半导体(MIS)结构的高电子迁移率晶体管(HEMT)器件性能的影响ꎮ采用N2和NH3等离子体对器件界面预处理ꎬ实验结果表明ꎬN2等离子体预处理能够减小器件的电流崩塌ꎬ通过对N2等离子体预处理的时间优化ꎬ发现预处理时间10min能够较好地提高器件的动态特性ꎬ30min时动态性能下降ꎮ进一步引入AlN作为栅介质插入层并经过高温热退火后能够有效提高器件的动态性能ꎬ将器件的阈值回滞从411mV减小至111mVꎬ动态测试表明ꎬ在900V关态应力下ꎬ器件的电流崩塌因子从42.04减小至4.76ꎮ关㊀键㊀词:电流崩塌ꎻAlN栅介质插入层ꎻ界面处理ꎻAlGaN/GaN高电子迁移率晶体管中图分类号:TN386.2㊀㊀㊀文献标识码:A㊀㊀㊀DOI:10.3788/fgxb20194007.0915ImpactofInterfaceTreatmentonDynamicCharacteristicofAlGaN/GaNMIS ̄HEMTsHANJun1ꎬZHAOJia ̄hao1ꎬZHAOJie1ꎬ2ꎬXINGYan ̄hui1∗ꎬCAOXu1ꎬFUKai2ꎬSONGLiang2ꎬDENGXu ̄guang2ꎬZHANGBao ̄shun2(1.KeyLaboratoryofOpto ̄electronicsTechnologyꎬMinistryofEducationꎬBeijingUniversityofTechnologyꎬBeijing100124ꎬChinaꎻ2.KeyLaboratoryofNanoDevicesandApplicationsꎬSuzhouInstituteofNano ̄techandNano ̄bionicsꎬChineseAcademyofSciencesꎬSuzhou215123ꎬChina)∗CorrespondingAuthorꎬE ̄mail:xingyanhui@bjut.edu.cnAbstract:TheeffectsofdifferentkindsofinterfacetreatmentonthecharacteristicofAlGaN/GaNMIS ̄HEMTswerestudiedinthispaper.N2andNH3plasmapretreatmentwereusedtoimprovetheinterfacequality.TheresultsshowthatN2plasmapretreatmentcouldreducethecurrentcollapseofdevices.ByoptimizingthetimeofN2plasmapretreatmentꎬitwasfoundthatthedynamiccharacteristicofdeviceswith10minthepretreatmentwasimprovedꎬwhilethatof30minwasdegraded.Asagatedielectricin ̄tercalationlayerꎬtheannealedAlNinterlayercaneffectivelyimprovethedynamiccharacteristicofthedevice.TheVthhysteresiswasdecreasedfrom411mVto111mVꎬandthedevicecurrentcollapsefactorwasreducedfrom42.04to4.76afterunderOFF ̄stateVDstressof900.Keywords:currentcollapseꎻAlNgatedielectricinsertionlayerꎻinterfacetreatmentꎻAlGaN/GaNhighelectronmobilitytransistors㊀㊀收稿日期:2018 ̄08 ̄20ꎻ修订日期:2018 ̄10 ̄17㊀㊀基金项目:国家自然科学基金(61204011ꎬ11204009ꎬ61574011)ꎻ北京市自然科学基金(4142005ꎬ4182014)ꎻ北京市教委科学研究基金(PXM2018_014204_500020)资助项目SupportedbyNationalNaturalScienceFoundationofChina(61204011ꎬ11204009ꎬ61574011)ꎻBeijingNaturalScienceFounda ̄tion(4142005ꎬ4182014)ꎻBeijingMunicipalEducationCommissionScientificResearchFund(PXM2018_014204_500020)916㊀发㊀㊀光㊀㊀学㊀㊀报第40卷1㊀引㊀㊀言GaN作为第三代半导体的代表ꎬ具有高禁带宽度㊁高击穿电场㊁高电子迁移率㊁以及耐酸碱等特点ꎮ以AlGaN和GaN异质结结构制备的高电子迁移率晶体管ꎬ由于极化效应产生的天然的高浓度㊁高迁移率的二维电子气ꎬ在功率开关器件的大功率及高频性能方面有很好的应用前景[1 ̄4]ꎮMIS ̄HEMT器件可以有效地减小器件的栅极漏电ꎬ提高耐压ꎬ提高栅驱动能力ꎮ但是由于栅介质的引入ꎬ产生新的界面ꎬ界面质量给器件的应用带来新的问题ꎬ影响器件的可靠性和阈值回滞等ꎮEller等[5]详细报道了对于GaN表面的处理过程ꎬ包括湿法化学处理[6]㊁真空退火处理[7]㊁气体氛围下退火处理[8]及离子束㊁等离子体处理[9 ̄10]等ꎮGaN材料表面存在含O的化合物和N空位[2ꎬ11]ꎬ这两种缺陷态成为影响界面质量的主要因素ꎬ目前的报道中ꎬ集中于使用含N等离子体来处理器件表面[12 ̄14]ꎬ主要作用机理为去除O杂质和补充N空位ꎮHashizume[15]在器件钝化作用前使用N2作为等离子体处理样品表面ꎬ得到了很高质量的钝化结果ꎬ而且界面态浓度下降ꎮRomero[16]通过原位含氮气等离子体预处理ꎬ器件的电流崩塌㊁输出功率㊁增益等特性取得了非常好的效果ꎮ在本文研究中ꎬ我们对AlGaN/GaNMIS ̄HEMT器件工艺过程中的界面处理进行优化比较ꎬ实验利用等离子体预处理研究不同气体(N2和NH3)及不同预处理时间对器件直流性能和动态特性的影响ꎬ并在该研究基础上ꎬ继续引入AlN栅介质插入层进行界面处理ꎬ研究采用AlN栅介质插入层进行界面处理对器件动静态特性的影响ꎮ2㊀实㊀㊀验AlGaN/GaNHEMT外延材料是通过金属有机物化学气相沉积技术在Si(111)衬底上生长的ꎬ外延结构依次为成核层㊁GaN缓冲层和AlGaN势垒层ꎮ器件的制备工艺过程为:(1)界面处理过程ꎻ(2)栅介质钝化层制备ꎬ采用LPCVD沉积SiNx作为栅介质ꎬ主要考虑其具有良好的稳定性和漏电[7]ꎬ利用SiH2Cl2和NH3作为Si源和N源ꎬ温度780ħꎻ(3)注入隔离ꎬ采用F离子进行注入隔离ꎻ(4)欧姆接触制备ꎬ利用磁中性环路放电刻蚀SiNx形成窗口ꎬ电子束蒸发沉积Ti/Al/Ni/Au为20/130/50/50nmꎬN2氛围下850ħ退火30s形成欧姆接触ꎻ(5)栅电极制备ꎬ利用金属热蒸发沉积Ni/Au为50/10nm制备栅电极ꎮ图1(a)显示的是AlGaN/GaNMIS ̄HEMT器件基本结构示意图ꎬ器件栅介质层厚度为20nmꎬ器件栅长为2μmꎬ栅宽为100μmꎬ栅漏距离为16μmꎬ栅源距离为4μmꎮ其中对于界面处理工艺过程ꎬ设计了实验Ⅰ:采用不同预处理气体N2和NH3对AlGaN/GaNHEMT表面预处理ꎬ预处理时间均为5minꎬ实验分别设置为样品A和样品Bꎮ在实验I基础上设计实验方案Ⅱ:选取N2作为预处理气体ꎬ研究不同预处理时间对AlGaN/GaNMIS ̄HEMT器件的影响ꎬ设置样品C㊁D㊁E分别预处理的时间为0ꎬ10ꎬ30minꎮ上述等离子体预处理温度为350ħꎬ压强为266Pa(2000mtorr)ꎬRF功率为60WꎬLF功率为50WꎮSiN x2DEGAlGaNSiBufferSGAlN2DEGAlGaNSiN xSiBufferSGDD(a)(b)图1㊀(a)实验器件基本结构示意图ꎻ(b)引入插入层后的器件结构示意图ꎮFig.1㊀(a)Schematicofdevicesfordifferentpre ̄treatment.(b)Schematicofdevicestructureforsamplewithin ̄sertionlayer.为进一步改善AlGaN/GaNMIS ̄HEMT器件性能ꎬ在上述实验的基础上ꎬ设计实验Ⅲ:采取PEALD生长的AlN作为栅介质插入层ꎬ设置样品F㊁G㊁Hꎬ引入AlN插入层的器件结构示意图为图1(b)ꎮ样品F作为空白对照组未引入插入层界面处理过程ꎬ样品G和样品H利用PEALD生长3nmAlNꎬTMAl为Al源ꎬN2为N源ꎬ生长温度300ħꎮ样品H在栅介质沉积后于N2氛围下1000ħ退火2minꎮ样品栅介质LPCVD ̄SiNx12nmꎮ器件尺寸分别为:栅长2μmꎬ栅宽100μmꎬ栅漏距离30μmꎬ栅源距离3μmꎮ每组实验均采用安捷伦B1505A进行测试表征ꎮ㊀第7期韩㊀军ꎬ等:界面处理对AlGaN/GaNMIS ̄HEMTs器件动态特性的影响917㊀3㊀结果与讨论3.1㊀界面预处理气体的影响图2是N2和NH3预处理器件的转移输出曲线ꎬ从图2中可以看出不同的预处理气体对器件的直流特性具有明显的影响ꎮN2和NH3等离子体预处理之后器件的峰值跨导分别是64.6mS/mm和70.7mS/mmꎬ饱和电流分别为579.3mA/mm和550mA/mmꎮN2等离子体预处理的器件跨导峰值较NH3等离子体预处理器件低ꎬ但是饱和电流有所增加ꎮ在图2中还看到ꎬ相比于N2等离子体预处理ꎬNH3等离子体预处理的实验结果中存在饱和电流下降的现象ꎬ这与Kim[12]报道的一致ꎬ究其原因是在NH3在较低功率下产生等离子体的同时会产生一个H+的钝化效果ꎮ类似的钝化对于器件的RF性能会有所提升ꎬ但对器件的DC特性有退化ꎬHashizume[17]和Romero[16]的研究已经证明了这一点ꎮ为了进一步对比采用N2和NH3不同预处理气体对表面态引起的器件性能退化作用ꎬ实验对样品A和样品B进行了电流崩塌的表征ꎮ图3分别显示了关态下漏极电压600500-20V GS /VI D /(m A ·m m -1)4003002001000N 2plasmaNH 3plasma(a )-15-10-55406080200G m /(m S ·m m -1)6005002V d /VI D /(m A ·m m -1)4003002001000N 2plasma NH 3plasma(b )461012143V -3V -5V -7V -9V80V GS -15~3V 图2㊀N2和NH3等离子体预处输出曲线理器件转移输出曲线对比ꎮ(a)转移曲线ꎻ(b)输出曲线ꎮFig.2㊀TtransferandoutputcurvesforsampleAwithN2plasmaandsampleBwithNH3plasma.(a)Trans ̄fercurves.(b)Outputcurves.10080300V d /VR D y n a m i c /R O N20010100506040200N 2plasma NH 3plasmaOFF 鄄state:V GS =-15VOFF 鄄ON swtiching time:t =200滋s ON 鄄state:V GS =0V V D =1V图3㊀N2和NH3等离子体预处理器件电流崩塌对比Fig.3㊀CurrentcollapseforsampleAwithN2plasmaandsampleBwithNH3plasma10ꎬ50ꎬ100ꎬ200ꎬ300V下的电流崩塌ꎮ从图3中可以看到在不同的漏极偏压下ꎬN2等离子体预处理器件的电流崩塌因子明显较NH3等离子体预处理的小ꎬN2等离子体预处理器件在偏压100V时崩塌因子最大值为35.6ꎬNH3等离子体预处理器件为57.5ꎻ在偏压300V时ꎬNH3等离子体预处理器件的崩塌因子最大值为85.3ꎬN2等离子体预处理器件为19.1ꎮ对比器件的动静态性能ꎬ采用N2等离子体预处理能够有效地提高器件的动态性能ꎮ3.2㊀界面预处理时间的影响图4给出了不同预处理时间下ꎬ器件转移输出特性对比ꎮ结果显示不同预处理时间对样品的基本电学性能影响不明显ꎬ预处理后器件的静态性能没有大的提高ꎮ采用pulse ̄DC表征器件的动态性能ꎮ器件测试脉冲是(5msꎬ3ms)ꎬ即关态偏压施加的时间是3msꎬ测试周期是5msꎬ器件关态偏压为(VD:50VꎬVGS:-20V)ꎮ图5中展示了不同时间预处理器件的直流/脉冲输出电流曲线对比ꎮ相比于静态输出电流ꎬC㊁D㊁E样品的脉冲输出电流都发生了明显下降ꎬ其中未经过N2等离子体预处理的样品C下降最为严重ꎬ预处理时间10min的样品D结果最好ꎬ样品C㊁D及样品E的饱和电流下降幅度分别为306.1ꎬ99.1ꎬ184.5mA/mmꎮ该结果表明利用N2等离子体预处理能够明显地减小器件界面导致的性能退化ꎮ对比预处理10min的样品D和处理30min的样品E的结果ꎬ发现长时间的预处理对器件的性能有一定的损害ꎬ主要原因是长时间的预处理导致表面有正电荷或者新的施主态的积累ꎬ使得器件动态性能下降[18]ꎮ918㊀发㊀㊀光㊀㊀学㊀㊀报第40卷V GS /V600500-15I D /(m A ·m m -1)400300200CD E 1000-20-10-505V d :10V20406080G m /(m S ·m m -1)(a )V D /V6005004I D /(m A ·m m -1)400300200C D E100001081214V GS (b )-14~2V 622V -2V-6V-10V 图4㊀不同预处理时间下器件转移输出特性曲线ꎮ(a)转移曲线ꎻ(b)输出曲线ꎮFig.4㊀Transferandoutputcurvesforthreesamples.(a)Transfercurves.(b)Outputcurves.6005002V D /VI D /(m A ·m m -1)(a )Pulse:(5ms,3ms)Based:(V d ,V gs )(50V,-20V)DC:V g :-14~2V step:4V V d :0~10VDCPulse40030020010000468101214166005002V D /VI D /(m A ·m m -1)(b )Pulse:(5ms,3ms)Based:(V d ,V gs )(50V,-20V)DC:V gs :-14~2V step:4V V d :0~10VDC Pulse40030020010000468101214166005002V D /VI D /(m A ·m m -1)(c )Pulse:(5ms,3ms)Based:(V d ,V gs )(50V,-20V)DC:V gs :-14~2V step:4V V d :0~10VDC Pulse 4003002001000046810121416600500CV D /VI D /(m A ·m m -1)(d )400300D E200DCPulse100图5㊀直流㊁脉冲输出曲线对比ꎮ(a)样品Cꎻ(b)样品Dꎻ(c)样品Eꎻ(d)实验样品直流/脉冲下饱和电流对比ꎮFig.5㊀ComparisionofpulsedI ̄Vcharacteristics.(a)SampleC.(b)SampleD.(c)SampleE.(d)ComparisonofsaturationoutputcurrentdensitybetweenpulsedandDC.3.3㊀界面栅介质插入层的影响图6展示了器件的转移输出特性对比ꎮ为了更明显地显示ꎬ将样品F㊁G的对比结果显示于图6(a)㊁(b)ꎬ将样品G㊁H的对比结果显示于图6(c)㊁(d)ꎮ样品F㊁G和H阈值电压分别为-6.46ꎬ-7.62ꎬ-7.04Vꎬ由此看出采用AlN栅介质插入层导致了器件的阈值向负漂移ꎬ是因为引入AlN插入层会在表面形成极化正电荷ꎬ影响阈值电压ꎮ图6中给出了样品F㊁G和H导通电阻分别为13.8ꎬ15.7ꎬ20.6Ω mmꎮ和样品F比较ꎬ样品G和H导通电阻增加的原因可能是引入AlN介质插入层会造成导通电阻在一定范围内退化ꎬ从而使饱和电流下降[19 ̄20]ꎮ观察图6(c)ꎬ发现样品H中ꎬ从-15V扫到5V的正向及从5V回扫到-15V的转移曲线回滞明显消除ꎬ而没有高温退火的样品G中回滞现象明显ꎮ图7给出了实验样品的正向阈值与负向阈值的对比ꎬ器件的阈值在回扫过程中会出现正向漂移ꎬF㊁G和H器件的阈值回滞ΔVth(Vth负向-Vth正向)分别为411ꎬ506ꎬ111mVꎮ和样品F相比ꎬ样品H的ΔVth降低72.99%ꎬ可以看出采用退火后AlN栅介质插入层界面处理的器件阈值回滞明显消除ꎬ说明由界面引起的器件性能退化得到控制ꎮ另外ꎬ未经过退火的AlN介质插入层的界面处理的器件G㊀第7期韩㊀军ꎬ等:界面处理对AlGaN/GaNMIS ̄HEMTs器件动态特性的影响919㊀阈值回滞反而增大ꎬ这可能是AlN材料中存在缺陷导致的ꎮ经过1000ħ的退火过程的样品HꎬAlN材料存在重结晶过程ꎬ提高了AlN材料质量ꎬ改善了界面质量ꎮ400-15V GS /VI D /(m A ·m m -1)(a )30020010006Reference(F)AlN interlaye(G)V GS :-15~5VV D :15~-15V V D :10V-12-9-6-303200406080Gm /(m S ·m m -1)400V D /VI D /(m A ·m m -1)(b )3002001000Reference(F)AlN interlaye(G)246810R ON (F)=13.8赘·mm R ON (G)=15.7赘·mm400-15V GS /VI D /(m A ·m m -1)(c )30020010006Anneal(H)AlN interlaye(G)V GS :15~5V V GS :15~-15V V D :10V-12-9-6-303200406080Gm /(m S ·m m -1)400V D /VI D /(m A ·m m -1)(d )3002001000AlN interlayer anneal(H)AlN interlaye(G)246810R ON (G)=15.7赘·mm R ON (G)=20.6赘·mmAlN interlayer(G)图6㊀样品转移㊁输出特性曲线对比ꎮ(a㊁b)样品F㊁G对比ꎻ(c㊁d)样品G㊁H对比ꎮFig.6㊀Comparisonoftransferandoutputcurvesforsamples.(aꎬb)SampleFandsampleG.(cꎬd)SampleGandsampleH.-6.2FV t h /VGH506mV111mVV GS :-15~5V V GS :5~-15V411mV -6.0-6.4-6.6-6.8-7.0-7.2-7.4-7.6图7㊀样品F㊁G㊁H正回扫阈值回滞对比ꎮFig.7㊀VthhysteresisforsampleFꎬsampleGandsampleH.图8给出了样品F㊁G㊁H电流崩塌对比ꎮ对比样品F和G数据ꎬ可以看出未经过退火处理的AlN插入层对器件的电流崩塌的改善不明显ꎬ这一结论同图7中器件阈值回滞变化相一致ꎮ对比样品G与H可以看出ꎬ器件的电流崩塌得到了很好的提高ꎬ900V下电流崩塌因子由样品G中的42.04下降到样品H的4.76ꎬ抑制效果明显ꎮ因此利用退火AlN作为栅介质插入层进行界面处理ꎬ能够有效改善Al ̄GaN/GaNMIS ̄HEMT器件界面ꎬ提高界面质量ꎬ抑制电流崩塌ꎬ提高器件可靠性ꎮQuiesent drain bias/V80R D y n a m i c /R O N40080010060402002006001000AlN interlayer anneal(H)AlN interlayer(G)Reference(F)图8㊀样品F㊁G㊁H电流崩塌对比ꎮFig.8㊀CurrentcollapseforsampleFꎬsampleGandsampleH.4㊀结㊀㊀论本文研究了AlGaN/GaNMIS ̄HEMT器件制备过程中不同界面处理对其性能的影响ꎮ研究发现ꎬ经过N2等离子体预处理较NH3等离子体预处理能够降低器件的电流崩塌因子ꎬ提高器件的可靠性ꎬ在该研究基础上优化了N2等离子体预处理时间ꎬ实验结果显示10min等离子体预处理能920㊀发㊀㊀光㊀㊀学㊀㊀报第40卷够有效地提高器件脉冲下电流ꎮ进一步引入AlN栅介质插入层ꎬ实验发现利用AlN插入层及退火工艺能够有效地改善AlGaN/GaNMIS ̄HEMT器件界面质量ꎬ抑制电流崩塌ꎬ提高器件可靠性ꎬ器件的阈值回滞从411mV减小至111mVꎬ实现在关态应力900V下将器件的电流崩塌因子由42.04下降到4.76ꎮ参㊀考㊀文㊀献:[1]ZHANGZLꎬYUGHꎬZHANGXDꎬetal..Studiesonhigh ̄voltageGaN ̄on ̄SiMIS ̄HEMTsusingLPCVDSi3N4asgatedielectricandpassivationlayer[J].IEEETrans.ElectronDev.ꎬ2016ꎬ63(2):731 ̄738.[2]LIUSCꎬCHENBYꎬLINYCꎬetal..GaNMIS ̄HEMTswithnitrogenpassivationforpowerdeviceapplications[J].IEEEElectronDev.Lett.ꎬ2014ꎬ35(10):1001 ̄1003.[3]KELEKÇIÖꎬTAŞLIPTꎬYUHBꎬetal..ElectrontransportpropertiesinAl0.25Ga0.75N/AlN/GaNheterostructureswithdifferentInGaNbackbarrierlayersandGaNchannelthicknessesgrownbyMOCVD[J].Phys.StatusSolidiꎬ2012ꎬ209(3):434 ̄438.[4]王凯ꎬ邢艳辉ꎬ韩军ꎬ等.掺Fe高阻GaN缓冲层特性及其对AlGaN/GaN高电子迁移率晶体管器件的影响研究[J].物理学报ꎬ2016ꎬ65(1):016802 ̄1 ̄6.WANGKꎬXINGYHꎬHANJꎬetal..GrowthsofFe ̄dopedGaNhigh ̄resistivitybufferlayersforAlGaN/GaNhighelectronmobilitytransistordevices[J].ActaPhys.Sinicaꎬ2016ꎬ65(1):016802 ̄1 ̄6.(inChinese)[5]ELLERBSꎬYANGJLꎬNEMANICHRJ.ElectronicsurfaceanddielectricinterfacestatesonGaNandAlGaN[J].J.Vac.Sci.Technol.Aꎬ2013ꎬ31(5):050807 ̄1 ̄29.[6]XIONGCꎬLIUSHꎬLIYHꎬetal..Hotcarriereffectonthebipolartransistors responsetoelectromagneticinterference[J].Microelectr.Reliabil.ꎬ2015ꎬ55(3 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[13]HUANGSꎬJIANGQMꎬYANGSꎬetal..EffectivepassivationofAlGaN/GaNHEMTsbyALD ̄grownAlNthinfilm[J].IEEEElectronDev.Lett.ꎬ2012ꎬ33(4):516 ̄518.[14]EDWARDSAPꎬMITTEREDERJAꎬBINARISCꎬetal..ImprovedreliabilityofAlGaN ̄GaNHEMTsusinganNH3/plas ̄matreatmentpriortoSiNpassivation[J].IEEEElectronDev.Lett.ꎬ2005ꎬ26(4):225 ̄227.[15]HASHIZUMETꎬOOTOMOSꎬOYAMASꎬetal..ChemistryandelectricalpropertiesofsurfacesofGaNandGaN/AlGaNheterostructures[J].J.Vac.Sci.Technol.ꎬ2001ꎬ19(4):1675 ̄1681.[16]ROMEROMFꎬJIMÉNEZJIMENEZAꎬMIGUEL ̄SÁNCHEZMIGUEL ̄SANCHEZJꎬetal..EffectsofN2plasmapretreat ̄mentontheSiNpassivationofAlGaN/GaNHEMT[J].IEEEElectronDev.Lett.ꎬ2008ꎬ29(3):209 ̄211.[17]HASHIZUMETꎬOOTOMOSꎬINAGAKITꎬetal..SurfacepassivationofGaNandGaN/AlGaNheterostructuresbydielec ̄tricfilmsanditsapplicationtoinsulated ̄gateheterostructuretransistors[J].J.Vac.Sci.Technol.Bꎬ2003ꎬ21(4):1828 ̄1838.㊀第7期韩㊀军ꎬ等:界面处理对AlGaN/GaNMIS ̄HEMTs器件动态特性的影响921㊀[18]REINERMꎬLAGGERPꎬPRECHTLGꎬetal..Modificationof native surfacedonorstatesinAlGaN/GaNMIS ̄HEMTsbyfluorination:perspectivefordefectengineering[C].ProceedingsofIEEEInternationalElectronDevicesMeetingꎬWash ̄ingtonꎬDCꎬUSAꎬ2015:35.5.1 ̄35.5.4.[19]ACURIOEꎬCRUPIFꎬMAGNONEPꎬetal..ImpactofAlNlayersandwichedbetweentheGaNandtheAl2O3layersontheperformanceandreliabilityofrecessedAlGaN/GaNMOS ̄HEMTs[J].Microelectr.Eng.ꎬ2017ꎬ178:42 ̄47.[20]HUANGSꎬJIANGQMꎬYANGSꎬetal..MechanismofPEALD ̄grownAlNpassivationforAlGaN/GaNHEMTs:compen ̄sationofinterfacetrapsbypolarizationcharges[J].IEEEElectronDev.Lett.ꎬ2013ꎬ34(2):193 ̄195.韩军(1964-)ꎬ男ꎬ北京人ꎬ博士ꎬ副教授ꎬ2008年于北京工业大学获得博士学位ꎬ主要从事半导体材料与器件方面的研究ꎮE ̄mail:hanjun@bjut.edu.cn邢艳辉(1974-)ꎬ女ꎬ吉林德惠人ꎬ博士ꎬ副教授ꎬ2008年于北京工业大学获得博士学位ꎬ主要从事氮化镓半导体材料的生长㊁测试分析及器件等方面的研究ꎮE ̄mail:xingyanhui@bjut.edu.cn。
南大宽禁带半导体实验室
禁带半导体紫外探测器紫外探测技术在国防预警与跟踪、电力工业、环境监测及生命科学领域具有重要的应用,其核心器件是高性能的紫外光电探测器。
基于半导体材料的固态紫外探测器件具有体重小、功耗低、量子效率高、和便于集成等系列优势。
以碳化硅(SiC)和III族氮化物为代表的宽禁带半导体是近年来国内外重点研究和发展的新型第三代半导体材料,具有禁带宽度大、导热性能好、电子饱和漂移速度高以及化学稳定性优等特点,用于制备紫外波段的光探测器件具有显著的材料性能优势。
我们实验室在宽禁带半导体紫外探测器领域具有较强的实力。
率先在国内实现4H-SiC基紫外雪崩单光子探测器;分别研制成功高增益同质外延GaN基紫外雪崩光电探测器、国际上领先的高增益AlGaN基日盲雪崩光电探测器、具有极低暗电流的AlGaN基MSM日盲深紫外探测器、高量子效率AlGaN基PIN日盲深紫外探测器、以及现有芯片面积最大的AlGaN基日盲深紫外探测器,相关结果多次获得国际主流媒体的跟踪报导。
目前,我们的工作重点是研制高灵敏度宽禁带半导体紫外探测器,包括:紫外单光子探测器件结构设计和物理分析,紫外单光子探测线阵和日盲紫外探测阵列制备。
宽禁带半导体功率电子器件针对未来高效电力管理系统、电动汽车和广泛军事应用大容量化、高密度化和高频率化的要求,将宽禁带半导体材料应用于高档次功率电子器件可以有效解决当今功率电子器件发展所面临的“硅极限”(silicon limit)问题,将大幅度降低电能转换过程中的无益损耗,在各领域创造可观的节能空间。
宽禁带Ⅲ族氮化物半导体具有强击穿电场、高饱和漂移速度、高热导率和良好化学稳定性等系列材料性能优势,是制备新一代功率电子器件的理想材料。
这一研究方向近年来成为国际上继GaN基发光二极管和微波功率器件之后的新兴研究热点。
我们小组在这一研究领域具有较好的基础,已经研制成功AlGaN/GaN平面功率二极管,其击穿电压大于1100V,功率优值系数高达280MW/cm2。
集成电路栅介质tddb失效预警电路设计
独创性声明本人声明所呈交的学位论文是本人在导师指导下进行的研究工作及取得的研究成果。
据我所知,除了文中特别加以标注和致谢的地方外,论文中不包含其他人已经发表或撰写过的研究成果,也不包含为获得暨南大学或其他教育机构的学位或证书而使用过的材料。
与我一同工作的同志对本研究所做的任何贡献均已在论文中作了明确的说明并表示谢意。
学位论文作者签名:签字日期:年月日学位论文版权使用授权书本学位论文作者完全了解暨南大学有关保留、使用学位论文的规定,有权保留并向国家有关部门或机构送交论文的复印件和磁盘,允许论文被查阅和借阅。
本人授权暨南大学可以将学位论文的全部或部分内容编入有关数据库进行检索,可以采用影印、缩印或扫描等复制手段保存、汇编学位论文。
(保密的学位论文在解密后适用本授权书)学位论文作者签名:导师签名:签字日期:年月日签字日期:年月日学位论文作者毕业后去向:工作单位:电话:通讯地址:邮编:暨南大学硕士毕业论文摘要当集成电路的特征尺寸发展到90nm时,MOS器件的栅介质层厚度将至2nm以下,仅相当于几个原子的厚度。
在电源电压与栅介质层厚度不再等比例减小的情况下,栅介质层内的电场强度不断增加,导致的经时击穿(TDDB)问题越来越受到人们的关注并成为集成电路的主要失效机理之一。
目前,电子产品的故障预测与健康管理(PHM)技术得到广泛的认可,无论从成本的节省,还是避免故障的发生,都具有较大的优势。
电子产品的PHM技术方法主要有三种:预兆单元法、失效先兆监测指针法和寿命消耗监控法。
本文基于PHM技术的预兆单元法,设计了一种监测MOS晶体管经时击穿的失效预警电路。
主要包括互不交叠的时钟模块、应力电压产生模块、降压模块和输出模块等电路。
其中,互不交叠的时钟模块为应力电压产生模块提供两个不交叠的时钟信号驱动;应力电压产生模块采用了一种新型升压电荷泵电路,该电荷泵在轻负载时能产生较高的输出电压,并且在产生高压应力的同时,避免自身MOS晶体管的栅介质处在应力之下,从而提高了可靠性;应力电压产生模块产生的应力电压经降压模块分别加载到MOS电容和输出模块;MOS电容在应力作用下加速失效,从而可预警发生的TDDB。
对相互影响的看法英语作文 范文
对相互影响的看法英语作文范文In the realm of human interaction, the concept of mutual influence reigns supreme, weaving its intricate web through the tapestry of social dynamics. From the subtle exchanges of body language to the profound impact of shared experiences, the interplay between individuals shapes our perceptions, behaviors, and relationships in profound ways.At the heart of mutual influence lies the fundamental truth that no person is an island unto themselves. Eachindividual exists within a network of connections, constantly sending and receiving signals that subtly mold their thoughts and actions. This interconnectedness forms the basis of social psychology, where the dynamics of influence are studied with meticulous curiosity.One of the most striking manifestations of mutual influence is observed in the phenomenon of conformity. As social beings, humans possess an innate inclination to conform to the norms and expectations of their social groups. This conformity can manifest in various forms, from adhering tofashion trends to adopting certain beliefs or behaviors simply because they are endorsed by the majority.Yet, the influence of others extends far beyond mere conformity; it seeps into the very fabric of our identities. Consider, for instance, the concept of social identity theory, which posits that individuals derive a sense ofself-esteem and belongingness from their membership insocial groups. In this light, the opinions and actions of others serve not only as sources of influence but also as mirrors reflecting back our own sense of identity.Moreover, the impact of mutual influence extends beyond the realm of individual psychology to shape broader societal trends and phenomena. The ripple effects of collective behavior can be witnessed in phenomena such as social movements, where the convergence of individual voices coalesces into a powerful force for change. Similarly, the spread of cultural norms and ideologies across societies highlights the interconnected nature of human influence ona global scale.Yet, for all its ubiquity, the phenomenon of mutualinfluence is not without its complexities and nuances. The interplay between individuals is often characterized by a delicate balance of power dynamics, where some wield influence more effortlessly than others. Additionally, the nature of influence itself can vary widely, ranging from subtle persuasion to overt coercion, depending on the context and intentions of those involved.Furthermore, the process of mutual influence is not always linear or predictable; it is often subject to the whims of chance and circumstance. Serendipitous encounters, unexpected events, and chance conversations can all serveas catalysts for profound moments of influence, shaping the course of our lives in ways we never could have anticipated.In conclusion, the phenomenon of mutual influence serves as a cornerstone of human interaction, permeating every aspect of our social existence. From the subtle nuances ofeveryday interactions to the sweeping currents of societal change, the interplay between individuals shapes the very fabric of our collective experience. In embracing thecomplexity of mutual influence, we gain a deeper understanding of ourselves and the world around us, navigating the intricate dance of human connection with newfound clarity and insight.。
李金华个人简介
主持参与的部分项目 • 高介电栅极有机薄膜晶体管的湿法制备及界面物理研究,国家自然科学基面上项目
(11574075),86.8 万,2016.1-2019.12,主持人。 • 柔性低压高性能晶体管的湿法制备及应用研究,湖北省自然科学杰出青年基金
工作经历
2015 年 12 月至今湖北大学材料科学与工程系; 2012.8-2015.11 香港理工大学应用物理系,博士后研究员; 2008.10-2009.1 香港理工大学应用物理系,助理研究员; 2002.7-2008.9 湖北大学,助教。
获奖 • 卢朝靖、李金华、王世敏、邝安祥,无机功能薄膜的制备、显微结构与生长机制研究,湖
湖北武汉 430062 Email:jinhua_li@ or jinhua_li@ Tel: +86-27-88661729
教育经历:
2009.1-2012.7 香港理工大学应用物理系应用物理专业,博士研究生,导师严锋教授和陈王 丽华教授;
2005.9-2008.6 湖北大学材料科学与工程学院 材料学专业,硕士研究生,导师卢朝靖教授; 1998.9-2002.7 湖北大学物理学与电子技术学院电子科学与技术专业,本科。
(2014CB660809),78 万,2014.10-2016.8,科技部,参法原位制备及激子分离动力学研究,国家自然科学基
金青年项目(11304088), 30 万, 2014.1-2016.12, 参与。 • 医用钛合金骨植入体表面激光合金化 Ag-HA 复合纳米涂层的抗菌及生物相容性研究,国
目,2 万,2017.01-2018.12,主持人。 • 高介电栅极柔性有机薄膜晶体管的制备及性能研究,湖北省教育厅科学技术研究计划重点
以门槛为话题的英语作文题目
以门槛为话题的英语作文题目The Threshold: A Gateway to Transformation and Beyond.In the tapestry of life, thresholds mark significant junctures, portals between distinct realms. They represent both the end of one stage and the beginning of the next, inviting us to step beyond our comfort zones and embrace the unknown. Throughout history and across cultures, thresholds have held profound significance, symbolizing transitions, challenges, and the potential for personal growth.From the physical threshold of a doorway to the metaphorical threshold of a new experience, they challenge us to confront our fears, embrace change, and ultimately discover our true potential. The concept of the thresholdis deeply ingrained in human consciousness, inspiring countless myths, legends, and works of art.In literature, thresholds often represent the beginningof a hero's journey. The protagonist must cross a physical or metaphorical threshold to enter a realm of adventure and self-discovery. In J.R.R. Tolkien's "The Hobbit," Bilbo Baggins embarks on an epic quest that begins by crossing the threshold of his comfortable hobbit-hole. This threshold symbolizes his willingness to leave behind the familiar and embrace the unknown.In "The Catcher in the Rye," J.D. Salinger explores the threshold between childhood and adulthood through the eyes of Holden Caulfield. As Holden grapples with the complexities of growing up, he finds himself on the cusp of a new stage in life. The threshold he faces is not only physical but also psychological, as he struggles to come to terms with the loss of innocence and the responsibilities of adulthood.Thresholds can also represent significant life events, such as marriage, birth, or death. These transitions mark profound shifts in identity and circumstance. The threshold of marriage symbolizes the union of two individuals and the creation of a new family. The threshold of birth marks thebeginning of a new life and the culmination of a transformative journey. The threshold of death, while often shrouded in mystery and fear, represents the transition to a different plane of existence.In spiritual and religious traditions, thresholds often symbolize the boundary between the mundane and the sacred. Temples, churches, and mosques are designed with specific thresholds that devotees must cross to enter the hallowed space. These thresholds serve as a reminder of the need for purification and reverence before entering a sacred realm.Thresholds can also be metaphorical, representing transitions in thought, belief, or understanding. The threshold of a new idea can challenge our preconceptions and force us to re-evaluate our beliefs. Embracing such thresholds can lead to intellectual growth and a deeper understanding of the world around us.However, thresholds are not always welcoming or easy to cross. They can be fraught with danger, uncertainty, and fear. The threshold of a new job may represent bothexcitement and trepidation. The threshold of a difficult conversation may evoke anxiety and resistance. It requires courage to step beyond these thresholds and face the unknown, but the rewards can be immense.Ultimately, thresholds serve as reminders of the fluidity of life. They are not simply barriers, but rather portals to new possibilities and potential. By embracing the challenges and opportunities presented by thresholds, we open ourselves up to growth, transformation, and the realization of our full potential.。
关于MOS布线时的天线效应(Antennaeffect)的解说
关于MOS布线时的天线效应(Antennaeffect)的解说关于mos布线的天线效应的解说The antenna effect, more formally plasma induced gate oxide damage, is an effect that can potentially cause yield and reliability problems during the manufacture of MOS integrated circuits.[1][2][3][4][5] Fabs normally supply antenna rules, which are rules that must be obeyed to avoid this problem. A violation of such rules is called an antenna violation. The word antenna is something of a misnomer in this context—the problem is really the collection of charge, not the normal meaning of antenna, which is a device for converting electromagnetic fields to/from electrical currents. Occasionally the phrase antenna effect is used in this context,[6] but this is less common since there are many effects,[7] and the phrase does not make clear which is meant.( e5 P6 t; L5 Y) f0 4 H# C8 X; ^& G1 `4 f/ l:天线效应,更正式地说叫做电浆引起的栅氧损伤,在MOS结构的制造过程中可能会带来良率损失或可靠性问题。
开关门对人的影响作文
开关门对人的影响作文英文回答:The impact of opening and closing doors on people canbe both physical and emotional. Physically, opening a door can provide access to a new space or allow someone to enter or exit a room. For example, when I open the door to my bedroom, I am able to enter and relax in my own personal space. On the other hand, closing a door can create a sense of privacy and security. When I close the door to my office, I can focus on my work without distractions.Emotionally, opening a door can symbolize new opportunities and beginnings. It can represent a freshstart or a chance to explore something new. For instance, when I open the door to a new restaurant, I am excited totry new dishes and experience a different atmosphere. Closing a door, on the other hand, can symbolize the end of something or the need for boundaries. When I close the door to my past, I am able to move forward and let go of anynegative experiences.In addition, the act of opening and closing doors can also affect our social interactions. For example, holding the door open for someone is seen as a polite gesture and can create a positive impression. It shows that we are considerate of others and willing to help. On the other hand, slamming a door shut in anger or frustration can have a negative impact on relationships. It can convey a lack of respect or disregard for the feelings of others.Overall, the simple act of opening and closing doorscan have a significant impact on our daily lives. It provides physical access, creates emotional symbolism, and influences our social interactions. Whether it is enteringa new space, seeking privacy, embracing new opportunities,or showing kindness to others, doors play a crucial role in shaping our experiences.中文回答:开关门对人的影响可以从身体和情感两方面来看。
盲道堵塞和损坏有关的英语作文
盲道堵塞和损坏有关的英语作文Blind Pathway Blockage and DamageBlind pathway blockage and damage are serious issuesthat can greatly impact the safety and accessibility of visually impaired individuals. In this essay, we will explore the causes and consequences of blind pathway blockage and damage, as well as potential solutions to address these problems.Causes of Blind Pathway Blockage and DamageThere are several factors that contribute to blind pathway blockage and damage. One common cause is the improper placement of objects such as trash cans, bicycles, or outdoor furniture in the pathway. These obstructions can pose a significant hazard to visually impaired individuals who rely on clear pathways to navigate their surroundings.Additionally, natural elements such as overgrown vegetation or fallen branches can obstruct blind pathways and create potential trip hazards. Poorly maintained infrastructure, such as cracked or uneven pavement, canalso contribute to the blockage and damage of blind pathways.Consequences of Blind Pathway Blockage and DamageThe consequences of blind pathway blockage and damage are significant and can severely impact the mobility and independence of visually impaired individuals. Blocked pathways can force individuals to deviate from their intended route, leading to confusion and disorientation. Furthermore, obstacles and damaged pathways increase the risk of falls and injuries, posing a serious threat to the safety of visually impaired pedestrians.Moreover, the presence of blockages and damage can create barriers to accessing essential services and amenities, such as public transportation, healthcare facilities, and community spaces. This can result in social isolation and limited participation in daily activities for visually impaired individuals.Solutions to Address Blind Pathway Blockage and Damage There are several measures that can be taken to address blind pathway blockage and damage. One effective solutionis to implement regular maintenance and inspection of blind pathways to identify and remove obstacles and repair damage. This can involve the collaboration of local government agencies, community organizations, and residents to ensure the upkeep of blind pathways.Furthermore, public education and awareness campaignscan help to inform the general public about the importanceof maintaining clear pathways for visually impaired individuals. This can foster a sense of responsibility and consideration among community members to keep blind pathways unobstructed and safe.In addition, the use of tactile paving and audiblesignals at intersections can enhance the accessibility of blind pathways and provide clear guidance for visually impaired pedestrians. These features can help individuals navigate their surroundings with greater confidence and independence.ConclusionBlind pathway blockage and damage pose significant challenges for visually impaired individuals, impactingtheir safety and accessibility. By addressing the causes ofblockage and implementing effective solutions, we can create a more inclusive and supportive environment for all members of the community.盲道堵塞和损坏盲道的堵塞和损坏是一个严重的问题,它会严重影响视障人士的安全和可访问性。
有因果逻辑的英语作文初中
有因果逻辑的英语作文初中Article Title: The Evolution of Artificial Intelligence and Its Impact on Society。
In the dawn of the 21st century, artificialintelligence (AI) has emerged as one of the most transformative technologies, reshaping the landscape of virtually every industry and aspect of human life. From automated manufacturing to personalized healthcare, from smart homes to autonomous vehicles, AI is poised to revolutionize the way we work, live, and interact with the world.The evolution of AI can be traced back to the early20th century, when scientists began exploring the possibilities of creating machines that could mimic human intelligence. However, it was not until the advent of digital computers in the 1950s that the field of AI truly began to take shape. Since then, AI has undergone several waves of technological advancements, each bringing newcapabilities and applications to the forefront.The first wave of AI, known as symbolic AI, focused on the development of expert systems and rule-based reasoning. These systems were designed to mimic the logical reasoning abilities of humans by applying rules and algorithms to specific problems. While these early AI systems werelimited in scope and often prone to errors, they provided a foundation for subsequent advancements in the field.The second wave of AI, known as machine learning, emerged in the 1980s and has since become the dominant approach to AI development. Machine learning algorithms allow computers to learn from data and improve their performance over time, without being explicitly programmed. This shift in。
影响类开头英语作文
影响类开头英语作文Title: The Profound Impact of Technological Advancements.In our dynamic world, technological advancements have become an integral part of our daily lives, shaping the way we interact, learn, and progress. Their influence is profound, and their reach is far-reaching, touching every aspect of society. This essay delves into the various impacts of technological advancements, exploring both their positive and negative ramifications.Firstly, let's consider the positive impacts. Technology has revolutionized the way we access and share information. The internet, in particular, has opened up a world of knowledge and connectivity, allowing us to access vast amounts of data instantly. This has led to a more informed society, one that is able to make informed decisions based on a wide range of perspectives and viewpoints.Moreover, technology has also transformed the way we work and learn. Remote working and online classrooms have become the norm, providing flexibility and accessibilitythat was previously unimaginable. This has opened up opportunities for individuals who may have been geographically or economically disadvantaged, enabling them to participate in the global economy and educational system.In addition, technological advancements have had a significant impact on medicine and healthcare. Diagnostic tools and procedures have become more accurate andefficient, leading to better patient outcomes. Furthermore, the use of technology in areas such as telemedicine and remote patient monitoring has expanded access to healthcare, particularly in rural and underserved areas.However, while the benefits of technological advancements are numerous, they are not without their costs. One of the most significant negative impacts is the rise of cybercrime and privacy concerns. As we become increasingly reliant on technology, so do the opportunities for hackersand malicious actors to steal personal information and cause harm. This has led to a growing need for robust cybersecurity measures and greater awareness of online privacy practices.Another concern is the potential for technological advancements to create economic disparities. While they have opened up new opportunities, they have also displaced traditional jobs and created a skills gap that can be difficult to bridge. This has led to increased income inequality and social tension, particularly in industries that have been heavily impacted by automation and digitization.Finally, technology has also had an impact on oursocial and psychological well-being. The constant stream of information and social media interactions can lead to feelings of anxiety and isolation. The need for constant connectivity can erode our ability to focus and maintain healthy boundaries between our personal and professional lives.In conclusion, technological advancements have had a profound impact on our lives, shaping the way we work, learn, and interact with the world. While they have brought numerous benefits, including greater access to information, flexibility in work and learning, and advancements in medicine and healthcare, they have also presentedchallenges such as cybercrime, privacy concerns, economic disparities, and social and psychological well-being issues. It is important that we continue to explore the potentialof technology while also being mindful of its costs and striving to mitigate its negative impacts.。
英语作文砍伐树木后的影响
英语作文砍伐树木后的影响The Impact of DeforestationDeforestation, or the act of cutting down trees, has significant impacts on our environment, economy, and society. This practice has been occurring for centuries, but with the advancement of technology and increased demand for resources, the rate of deforestation has accelerated in recent years. In this essay, we will explore the various effects of deforestation and discuss potential solutions to address this issue.One of the most immediate impacts of deforestation is the loss of biodiversity. Trees provide habitat for countless species of plants and animals, and when they are removed, these organisms are forced to find new homes or face extinction. Deforestation also disrupts the ecosystem by altering the flow of water and nutrients in the soil, leading to decreased fertility and increased erosion.Furthermore, deforestation contributes to climate change by releasing stored carbon dioxide into the atmosphere. Trees absorb carbon dioxide during photosynthesis and store this carbon in their biomass. When trees are cut down or burned, thiscarbon is released back into the atmosphere, contributing to the greenhouse effect and global warming.In addition to environmental impacts, deforestation also has economic consequences. Forests provide valuable resources such as timber, fuel, and medicinal plants, which are essential for various industries and communities. When forests are destroyed, these resources become scarce, leading to higher prices and increased competition for remaining supplies. This can have negative effects on local economies and the livelihoods of people who depend on forest products for their income.Finally, deforestation has social implications as well. Indigenous communities and rural populations often rely on forests for food, shelter, and cultural practices. When forests are destroyed, these communities lose vital resources and face displacement and marginalization. In some cases, conflict can arise between different groups competing for control over dwindling forest resources.To address the issue of deforestation, concerted efforts are needed from governments, businesses, and individuals. Policies and regulations should be implemented to promote sustainable forest management practices and protect critical ecosystems. Companies should adopt responsible sourcing practices andinvest in reforestation and conservation projects. Individuals can contribute by reducing their consumption of paper and wood products, supporting sustainable agriculture, and advocating for policies that prioritize forest protection.In conclusion, deforestation has far-reaching impacts on our environment, economy, and society. It is essential that we take action to address this issue and protect our forests for future generations. By working together and implementing sustainable practices, we can ensure a healthier planet and a more sustainable future.。
逻辑重要性的英语作文
逻辑重要性的英语作文Title: The Significance of Logic in Decision-Making。
In the realm of human cognition, logic serves as a cornerstone, guiding our thoughts, actions, and decisions. Its importance reverberates across various aspects of life, from problem-solving to critical thinking, and from scientific inquiry to ethical reasoning. In this essay, we delve into the significance of logic in decision-making processes.First and foremost, logic provides a structured framework for reasoning. It enables individuals to analyze information systematically, identify patterns, and draw sound conclusions. By adhering to logical principles such as validity and soundness, one can navigate complex situations with clarity and coherence. Whether it's assessing the validity of an argument or evaluating the evidence supporting a claim, logical reasoning serves as a reliable compass, steering us away from fallacious thinkingand towards rational judgments.Moreover, logic fosters intellectual integrity and fosters a culture of accountability. In a world inundated with misinformation and half-truths, the ability to discern logical inconsistencies is invaluable. By honing ourlogical faculties, we empower ourselves to question dubious assertions, challenge conventional wisdom, and demand rigorous evidence. In doing so, we uphold the integrity of discourse and safeguard against the propagation of falsehoods. In academic settings, adherence to logicalrigor is not merely encouraged but essential for the advancement of knowledge. Whether conducting scientific research or engaging in philosophical inquiry, scholarsrely on logic to construct cogent arguments and advance understanding.Furthermore, logic cultivates analytical thinkingskills essential for problem-solving. By breaking down complex problems into manageable components, individuals can devise systematic approaches to address challenges effectively. Whether it's devising a business strategy,troubleshooting technical issues, or navigating interpersonal conflicts, logical thinking provides a roadmap for identifying underlying causes, exploring potential solutions, and weighing their respective merits. In professional settings, individuals adept at logical reasoning are often prized for their ability to make well-informed decisions under pressure, mitigate risks, and optimize outcomes.In addition, logic serves as a bulwark againstcognitive biases and irrational impulses. Human decision-making is inherently prone to various cognitive biases, stemming from heuristic shortcuts and emotional influences. By grounding decision-making processes in logical analysis, individuals can mitigate the impact of cognitive biases and make more objective judgments. Whether it's overcoming confirmation bias by actively seeking out disconfirming evidence or resisting the allure of sunk costs, logical reasoning enables individuals to transcend instinctual impulses and act in accordance with reason.Moreover, logic underpins ethical reasoning and moraldeliberation. In navigating moral dilemmas and ethical quandaries, individuals rely on logical principles to evaluate competing interests, reconcile conflicting values, and justify moral judgments. By subjecting ethical arguments to logical scrutiny, one can discern whether purported moral principles are internally consistent and compatible with broader ethical frameworks. Moreover, logical reasoning facilitates constructive dialogue and consensus-building among individuals with divergent ethical perspectives, fostering a more nuanced understanding of complex moral issues.In conclusion, the importance of logic in decision-making processes cannot be overstated. From fostering intellectual integrity to enhancing problem-solving skills, logic serves as a linchpin of rational inquiry and critical thinking. By embracing logical reasoning, individuals can navigate the complexities of the modern world with clarity, coherence, and confidence. As we confront myriad challenges and opportunities, let us heed the timeless wisdom of logic and harness its power to inform our decisions and shape a more rational and just society.。
快乐之门英语作文赏析
快乐之门英语作文赏析Title: Analysis of "The Gate of Happiness" English Composition。
"The Gate of Happiness" is a captivating piece of writing that delves into the intricacies of finding joy amidst life's challenges. Through vivid imagery and profound insights, the author takes the reader on a journey of self-discovery and enlightenment.The composition begins by painting a vivid picture of a gate, symbolic of the threshold one must cross to attain happiness. This imagery immediately captures the reader's attention and sets the tone for the rest of the piece.One of the key themes explored in the composition is the notion that happiness is not a destination but rather a journey. The author emphasizes that true happiness is found in the pursuit of meaningful goals and the cultivation of inner peace. This idea is beautifully conveyed through themetaphor of a garden, where happiness blooms through nurturing and care.Moreover, the composition highlights the importance of gratitude and mindfulness in achieving happiness. By appreciating the beauty of the present moment and acknowledging the blessings in one's life, the author suggests that individuals can overcome adversity and find contentment.Another noteworthy aspect of the composition is its exploration of the interconnectedness of happiness and personal growth. The author argues that challenges and setbacks are not obstacles to happiness but rather opportunities for self-improvement and resilience. Through perseverance and a positive mindset, individuals can transform hardships into valuable lessons and emerge stronger and wiser.Furthermore, the composition addresses the role of relationships and community in fostering happiness. The author emphasizes the significance of meaningfulconnections and acts of kindness in enriching one's life and spreading joy to others. This underscores the idea that happiness is not only a personal pursuit but also a collective experience shared with loved ones and fellow human beings.In terms of style, the composition is characterized by its lyrical prose and thought-provoking reflections. The author employs vivid descriptions and poetic language to evoke emotions and stimulate the imagination of the reader. Additionally, the use of rhetorical devices such as metaphors and similes enhances the richness and depth of the writing.Overall, "The Gate of Happiness" is a compelling exploration of the human experience and the quest for fulfillment. Through its profound insights and lyrical beauty, the composition inspires readers to embark on their own journey towards happiness and to embrace life's challenges with courage and optimism.。
莫扎特效应对孩子智力影响英语作文
莫扎特效应对孩子智力影响英语作文The Mozart Effect on Children's IntelligenceIntroductionThe Mozart Effect refers to the idea that listening to classical music, particularly the works of Wolfgang Amadeus Mozart, can improve cognitive function and intelligence. This theory has gained popularity in recent years, with many parents and educators believing that exposing children to classical music at an early age can have a positive impact on their intellectual development. In this essay, we will explore the Mozart Effect and its potential influence on children's intelligence.The Mozart Effect and Cognitive DevelopmentThe idea of the Mozart Effect gained widespread attention in the early 1990s, following a study conducted by researchers Rauscher, Shaw, and Ky in which they found that college students who listened to Mozart's Sonata for Two Pianos in D major performed better on a spatial reasoning task compared to students who listened to other types of music or did not listen to music at all. This study sparked interest in the possible cognitive benefits of listening to classical music, particularly Mozart's compositions.It is believed that listening to classical music can stimulate the brain and enhance neural pathways, leading to improvements in cognitive function. Studies have shown that music activates various regions of the brain, including those involved in memory, attention, and problem-solving. By listening to music, children may be able to improve their ability to concentrate, think creatively, and solve complex problems.The Influence of Classical Music on Children's IntelligenceMany parents and educators have embraced the idea of the Mozart Effect and have introduced classical music into children's lives from a young age. It is believed that listening to classical music can stimulate brain development and enhance learning abilities in children. Some schools have even incorporated music education programs into their curriculum in an effort to promote cognitive development through music.Research has shown that exposure to classical music can have a positive impact on children's intelligence. A study published in the journal Psychology of Music found that children who participated in music lessons scored higher on measures of cognitive ability, such as IQ tests, compared to children who did not receive music education. Furthermore, a study conducted by E. Glenn Schellenberg found that children who listened toclassical music for 10 minutes before taking an IQ test performed better on the test compared to children who listened to silence or pop music.Practical Applications of the Mozart EffectGiven the potential benefits of the Mozart Effect on children's intelligence, many parents and educators are keen to incorporate classical music into children's daily routines. Some suggestions for implementing the Mozart Effect include:1. Playing classical music in the background while children are studying or doing homework.2. Encouraging children to listen to classical music during leisure time.3. Enrolling children in music lessons to expose them to different genres of music.4. Attending classical music concerts or performances with children to foster an appreciation for music.ConclusionThe Mozart Effect has the potential to positively influence children's intelligence by stimulating brain development and enhancing cognitive function. While more research is needed tofully understand the mechanism behind the Mozart Effect, there is evidence to suggest that listening to classical music, particularly Mozart's compositions, can have a beneficial impact on children's intellectual development. By incorporating classical music into children's lives, parents and educators can potentially help children reach their full cognitive potential.。
神圣之门观后感英语作文
The movie The Divine Gate is a visual and emotional feast that captivated me from start to finish. As a fan of both fantasy and animation, this film delivered on all fronts, offering a rich narrative, stunning visuals, and a memorable score.The story revolves around a group of young warriors who possess unique abilities, each with their own backstory and motivations. The plot is intricate and wellpaced, with twists and turns that kept me on the edge of my seat. The characters are welldeveloped, and their relationships evolve in a way that feels organic and true to life.What truly sets The Divine Gate apart, however, is its breathtaking animation. The attention to detail in every frame is astounding, from the intricate patterns on the characters clothing to the sweeping landscapes that serve as the backdrop for their adventures. The color palette is vibrant and rich, creating a world that feels both fantastical and grounded in reality.The films score is equally impressive, adding depth and emotion to each scene. The music is both epic and intimate, perfectly complementing the visuals and enhancing the overall viewing experience.One of the most striking aspects of The Divine Gate is its exploration of themes such as friendship, sacrifice, and the struggle between good and evil. These themes are woven seamlessly into the narrative, providing a thoughtprovoking and emotionally resonant experience for the viewer.In conclusion, The Divine Gate is a mustsee film for anyone who appreciates highquality animation, engaging storytelling, and complex characters. It is a testament to the power of cinema to transport us to new worlds and touch our hearts. I look forward to revisiting this film many times in the future and exploring the rich universe it has created.。
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Influence of the gate dielectric on the mobility of rubrene single-crystal field-effect transistorsA. F. Stassen, R.W.I. de Boer, N.N. Iosad, and A.F. Morpurgo.Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ DELFT, The NetherlandsWe have performed a comparative study of rubrene single-crystal field-effect transistors fabricated using different materials as gate insulator. For all materials, highly reproducible device characteristics are obtained. The achieved reproducibility permits to observe that the mobility of the charge carriers systematically decreases with increasing the dielectric constant of the gate insulator, the decrease being proportional to ε -1. This finding demonstrates that the mobility of carriers in organic single-crystal field-effect transistors is an intrinsic property of the crystal/dielectric interface and that it does not only depend on the specific molecule used.PACS numbers: 71.20.Rv, 70.80.Le, 73.40.Qv.Recent research effort has led to the successful fabrication of field-effect transistors at the surface of single crystals of organic molecules. Work performed by different groups has resulted in single-crystal devices of very high quality, exhibiting an unprecedented level of reproducibility. For molecules such as tetracene, pentacene and rubrene, essentially identical results (e.g., comparable values for charge carrier mobility) have been obtained in different laboratories and using different device fabrication techniques.[1-6]The quality of organic single-crystal FETs opens new opportunities for investigations of both fundamental and applied character. In particular, the use of single-crystalline devices permits to study the intrinsic –not limited by disorder- transport properties of organic semiconductors as a function of carrier density, as recently demonstrated by the observation of an anisotropic mobility in rubrene FETs exhibiting a “metallic-like”temperature dependence.[7, 8] In addition, the reproducibility of single-crystal FETs permits to investigate in detail how different aspects of the devices influence transistor operation, which is necessary to individuate the ultimate performance limits of organic transistors.In this paper, we report a comparative experimental study of the electrical characteristics of rubrene single-crystal FETs fabricated using Ta2O5, Al2O3, SiO2, and Parylene C as gate insulator. For the different dielectrics, field-effect transistors exhibiting stable and hysteresis-free electrical behavior can be reproducibly realized. In all cases, the hole mobility extracted from room-temperature measurement of the transistor characteristics is remarkably gate-voltage independent. From these measurements, we find that the mobility decreases from 10 cm2/Vs (Parylene C, ε=3.15) to 1.5 cm2/Vs (Ta2O5, ε=25) with increasing the relative dielectric constant. By comparing our data to those recently reported for transistors fabricated using Parylene N (µ = 15 cm2/Vs; ε= 2.65)[2, 9] and PDMS air-gap stamps (µ=20 cm2/Vs; ε=1)[7], we conclude that a decrease in mobility with increasing the dielectric constant of the gate dielectric occurs systematically in rubrene single-crystal FETs. This result demonstrates that the mobility measured in organic transistors is not only a property of the specific organic molecule used, but that it intrinsically depends on the organic/dielectric interface.The devices used in our investigations have been fabricated by means of two different, recently developed techniques. Transistors based on Parylene C have been built following the processing described in Ref. [1], using aqueous colloidal graphite or silver epoxy for the source, drain, and gate electrodes (with colloidal graphite resulting in better performances as compared to epoxy). For these devices, rather thick crystals (typically 100 µm or thicker) were used. All other transistors were fabricated by means of electrostatic bonding of much thinner (approximately 1 micron thick) crystals on doped silicon substrates with pre-fabricated FET circuitry, using a process identical to the one described in Ref.[3]. In all cases, the crystals were grown in a horizontal oven similar to the system used in Ref.[10] with argon as carrier gas (50 ml/min). The majority of the rubrene crystals used in our investigations were needle shaped. As discussed in [7], these needle-shaped crystals grow preferentially along the crystallographic b-axis, which corresponds to the direction of highest hole mobility[7]. Both the parylene gate and the oxide-gate transistors were fabricated with a large source-drain distance (always larger than 300 µm and typically ~ 1 mm) to ensure that the measured transport occurred preferentially along this direction and to minimize contact effects on measurements performed in a two-terminal configuration.In the case of SiO2-based transistors, the gate insulator was a 200 nm thick, thermally grown oxide layer. In the case of Ta2O5, a Nb layer acting as a gate was sputter-deposited onto the Si substrate, followed by a 375 nm thick layer of Ta2O5. Sputtering of Ta2O5 was performed from a metallic Ta target in the presence of oxygen in an argon plasma, with the substrate held at approximately 300 C, according to the procedure developed in Ref.[11]. Contrary to the case of Ta2O5 layers sputtered from a ceramic target[12], this procedure results in negligibly low leakage current, at least up to gate fields of 3 MV/cm. finally, Al2O3 devices were fabricated by sputtering a 25 nm layer of Al2O3 on top of a Ta2O5 layer. The roughness of the three different oxide layers was measured using an atomic force microscope and found to be less than 0.1 nm. Figure 1 shows optical images of two rubrene single-crystal FETs fabricated by means of electrostatic bonding on Al2O3 (A) and on SiO2 (B).Figure 2 shows typical source-drain voltage-current I d vs. V sd sweeps taken at different values of the voltage applied to the gate electrode (V g ) for a single-crystal FET on SiO 2(the inset shows similar data for a transistor fabricated using Parylene C). All measurements discussed here were performed in a two-terminal configuration in vacuum (10-6 mbar), at room temperature, using a HP4156A semiconductor parameter analyzer.As shown in figure 2, essentially no hysteresis is present in the measurements and the I d vs. V sd are linear down to small applied V sd voltages. For electrostatically bonded transistors we performed in a number of cases four-terminal measurements and observed that owing to large length of the FET channel the contact resistance does not significantly affect the value of mobility observed in a two terminal configuration. In the case of Parylene C, the manually deposited contacts are often of lower quality and the application of a large source-drain bias is required to avoid that the current contact limitations to the current flowing through the devices.We use the relation (W is the channel width, L the channel length, and C d the capacitance per unit area)g d sd d V I V C W L δδµ×××=11 (1)to extract the value of the mobility from the linear part of the transistor characteristics, as a function of gate voltage. Figure 3A shows the mobility data obtained using this relation for different values of the source drain voltage (V sd = -5, -7.5, -10, -12.5, and –15 V respectively) for one of the electrostatically bonded transistors with SiO 2 gate insulator.The same value of mobility is obtained independent of V g and V sd in all cases, as long as the device operates in the linear regime for which Eq. 1 applies, i.e. if V g is sufficiently larger than Vsd (the apparent peak in mobility present at low V g is an artifact due to the violation of this condition). The field-effect mobility extracted from the transistor I-V characteristics as a function of the applied gate voltage is shown in Fig. 3B for transistors fabricated using all the different gate insulators.Figure 3B also shows that the mobility of rubrene single-crystal FETs is different for devices fabricated with the different gate dielectrics. Although all transistors fabricated show a spread in the values of measured mobilities, probably originating from defects induced by the crystal handling during the fabrication process, we found that a large fraction of devices exhibit mobilities in a rather narrow range of values. Specifically, for transistors fabricated using Parylene C µ typically ranges between 6 and 10 cm2/Vs, for SiO2 between 4 and 6 cm2/Vs, for Al2O3 devices best µ values are 2-3 cm2/Vs, and for Ta2O5 1-1.5 cm2/Vs. From these data, it is apparent that for all investigated rubrene FETs the measured mobility systematically decreases when increasing the dielectric constant of the gate insulator. This trend is consistent with the results obtained by others on rubrene FETs fabricated using Parylene N (ε=2.65), for which the measure mobility ranges between 10 and 15 cm2/Vs [9] , and vacuum (ε=1) where the mobility range is 16-20 cm2/Vs [7].Figure 4 summarizes the available data and clearly demonstrates the dependence of µ on the dielectric constant ε. The inset of Fig. 4 additionally shows that, when plotted on a log-log scale, the mobility decrease with increasing ε as ε-1 over the entire range available (slightly more than one decade). From these data we directly conclude that the mobility of organic FETs cannot be simply considered to be an intrinsic property of the molecular material used but rather that it is intrinsically a property of the organic/dielectric interface. This conclusion is also supported by our measurements on tetracene single-crystal FETs, in which we have observed that the mobility of SiO2 based devices is systematically larger than that of transistors fabricated using Ta2O5 as a gate insulator.A systematic decrease in µ with increasing ε has recently been reported for disordered polymeric organic FETs of lower mobility[13]. In that context, the effect has been attributed to the localized nature of the charge carriers in the material and their interaction with the induced polarization in the gate insulator. Specifically, according to the authors of Ref. [13], dipolar disorder in the dielectric, which is stronger the larger the value of the dielectric constant, induces a broadening of the density of states (DOS) at thepolymer/insulator interface. This broadening results in a decrease of the DOS at the Fermi energy, which, in a disordered material, causes a lower hopping probability. This lower hopping probability leads to a suppression of the carrier mobility, in agreement with theoretical work by Bassler.[14]In single-crystalline devices, disorder is much weaker than in polymers. Nevertheless, even in the best rubrene single-crystal FETs at room temperature holes are nearly localized by polaronic effects and cannot be described in terms of extended states, as it is the case for conventional inorganic semiconductors. Therefore, also in single-crystal FETs, a (nearly) localized charge carrier at the rubrene/dielectric interface locally polarizes the dielectric. The electrostatic potential generated by the induced polarization exerts an attractive force on the charge carrier itself that increases the tendency towards carrier self-trapping. As the attractive force is larger for larger ε, this qualitatively explains why the mobility is reduced with increasing ε. Stated differently, at the interface between the crystal and the gate insulator, the electrical polarizability of the environment experienced by the charge carriers is determined by the dielectric constant of the insulating material. In this way, the polaronic dressing of charge carriers is enhanced by the presence of a gate insulator with a large dielectric constant. As a consequence of this enhanced polaronic dressing, the mobility is reduced.The detailed microscopic understanding of the mechanism just proposed clearly requires (and deserves) further experimental and theoretical investigations. From a fundamental perspective, this mechanism is interesting, since it permits to tune polaronic effects in a FET configuration, thus offering a new tool for their study. For instance, experimentally, it will be interesting to look in detail at how the temperature dependence of the mobility evolves from the metallic-like regime (dµ/dT <0) [8] to the thermally activated regime (du/dT >0) [15] with increasing ε (work is in progress in this direction). Finally, our findings are also relevant for applications, as they clearly demonstrate that the speed of organic transistors can be enhanced by using low-ε gate insulators.We acknowledge useful discussions with D. de Leeuw, M.E. Gershenson, S. Goennenwein, T.M. Klapwijk, and J. Veres. This work was financially supported by FOM. The work of AFM is part of the NWO Vernieuwingsimpuls 2000 program.References[1] V. Podzorov, V. M. Pudalov and M. E. Gershenson, Appl. Phys. Lett. 82 (11), 1739 (2003).[2] V. Podzorov, S. E. Sysoev, E. Loginova, V. M. Pudalov and M. E. Gershenson, Appl. Phys. Lett. 83 (17), 3504 (2003).[3] R. W. I. de Boer, T. M. Klapwijk and A. F. Morpurgo, Appl. Phys. Lett. 83 (21), 4345 (2003).[4] V. Y. Butko, X. Chi, D. V. Lang and A. P. Ramirez, Appl. Phys. Lett. 83 (23), 4773 (2003).[5] J. Takeya, C. Goldmann, S. Haas, K. P. Pernstich, B. Ketterer and B. Batlogg, J. Appl. Phys. 94 (9), 5800 (2003).[6] R. W. I. de Boer, M. E. Gershenson, A. F. Morpurgo and V. Podzorov, Phys. Stat. Sol. A 201 (6), 1302 (2004).[7] V. C. Sundar, J. Zaumseil, V. Podzorov, E. Menard, R. L. Willett, T. Someya, M. E. Gershenson and J. A. Rogers, Science 303 (5664), 1644 (2004).[8] V. Podzorov, E. Menard, A. Borissov, V. Kiryukhin, J. A. Rogers and M. E. Gershenson, cond-mat/, 0403575 (2004).[9] M. E. Gershenson (private communication).[10] R. A. Laudise, C. Kloc, P. G. Simpkins and T. Siegrist, J. Cryst. Growth 187 (3-4), 449 (1998).[11] N. N. Iosad, G. J. Ruis, E. V. Morks, A. F. Morpurgo, N. M. van der Pers, P. F. A. Alkemade and V. G. M. Sivel, J. Appl. Phys. 95 (12), 8087 (2004).[12] R. M. Fleming, D. V. Lang, C. D. W. Jones, M. L. Steigerwald, D. W. Murphy, G.B. Alers, Y. H. Wong, R. B. van Dover, J. R. Kwo and A. M. Sergent, J. Appl. Phys. 88, 850 (2000).[13] J. Veres, S. D. Ogier, S. W. Leeming, D. C. Cupertino and S. D. Khaffaf, Adv. Mater 13 (3), 199 (2003).[14] H. Bässler, Philos. Mag. 50, 347 (1984).[15] R. W. I. de Boer et al. unpublished results.Figures CaptionsFigure 1.Two rubrene single-crystal FETs fabricated by means of electrostatic bonding on Al2O3 (A) and SiO2 (B). In (A) the electrodes have been defined by evaporation through a shadow mask, whereas in (B) photo-lithography and lift-off were used. In both figures, the bar is 200 µm long.Figure 2.Source-drain current vs. source-drain voltage measured at different gate voltages for a device fabricated on SiO2, with a L=1.2 mm channel lenght and W=200 µm channel width. The inset shows similar data for a FET fabricated using parylene C (L= 650 µm, W=340 µm).Figure 3.(A) Mobility vs. gate voltage for a device on SiO2, measured at different values of source-drain voltage (V sd = -5, -7.5, -10, -12.5, -15 V, respectively), obtained using Eq. 1. Note that in the linear regime (V g>> V sd) µ does not depend on V g and V sd (the apparent peak at low V g values is an artifact originating from the use of Eq. 1 outside the linear regime). (B) µ(V g) curves as measured for the four different gate insulators. For device based on parylene C, the suppression of contact effects often requires the use of a rather large value V sd (and thus V g, to remain in the linear regime).Figure 4.Decrease of the mobility with increasing ε, as observed in rubrene single-crystal FETs with different gate insulators. The bars give a measure of the spread in mobility values. Inset: when plotted on a log-log-scale, the available data show a linear dependence with slope –1 (i.e. the variation in µ is proportional to ε-1).ABFigure 1 A. F. Stassen et al.V(V)sdFigure 2 A. F. Stassen et al.Figure 3 A. F. Stassenet al.510152025-30-20-10V g (V)µ (c m 2/V s )036-35-30-25-20-15V g (V)µ (c m 2/V s )Figure 4 A. F. Stassen et al.µ (c m 2/V s )ε。