FMI无阀微流量计量泵应用-2

FMI无阀微流量计量泵应用‐2
百万次无故障运行 -
玻璃浆液控制中的精确分配
RSM电子公司在生产高品质半导体及微电子产品时，决定在其二极管生产线上采用自动玻璃浆分配系统，他们选择了我们的QV系列陶瓷无阀计量泵以及V200转速控制器。

RSM 公司的Sensitron产品主要用于航天，军事，医药以及高可靠性的工业用途。

在二极管生产过程中，QV陶瓷计量泵为经过输送带的每个二极管分配5微升密封玻璃浆。

该二极管的密封设计保证了其在高温，高海拔，高频以及恶劣环境下的高可靠性。

When RSM Electron Power Inc., manufacturer of high reliability hermetic semiconductor and icroelectronic components, decided to automate the slurry dispensing process on their diode manufacturing line, they chose the QV CeramPump® valveless piston pump and V-200 Controller from Fluid Metering, Inc. RSM's line of Sensitron products is designed for use in industries that require high reliability components. These components are typically used for aerospace, military, medical, and high
reliability industrial applications. During the diode manufacturing process, the QV CeramPump® metering pump dispenses a hermetic coating of 5u glass slurry individually to each diode as it moves down a conveyor system. The hermetic design ensures high reliability in applications having temperature
extremes, high altitude, high frequency, and severe environmental conditions.
Yunii l Corcoran博士，RSM公司副总裁兼总经理解释他们选择QV泵的原因时解释说，二极管生产中玻璃浆的分配精度和连续性至关重要，因为该操作通常是在批处理条件下进行，而在批处理条件下，单独调整个体的分配量事实上是不可能的。

Dr. Yunji L. Corcoran, vice president and general manager at RSM, explains that RSM chose the QV because accuracy and consistency in the amount of slurry dispensed from diode to diode is extremely important since many of the operations to follow will be performed in lots as batch processes. When
processing in lots or batches, correction to compensate for individual component variation is not possible.
因此，过程中要求每个单独的操作相对其他操作的偏差要小，这非常重要。

在分配中要求能够同时控制分配的精确度和精密度。

精确度的要求指平均的分配值与目标值之间的偏差。

精密度指的是单次操作之间的偏差度。

QV系列泵可以满足精确度和精密度两方面的要求，其精确度范围为1%，精密度为0.5%。

配备V200速度控制器，系统可以替代人工分配流量的方法，能通过节省因非连续性浆液喷涂所造成的二次调试而产生的成本。

QV泵不同于其他类似产品的特点还在于其独特的无阀活塞式设计。

整个泵仅有一个活动部件，一个特殊的循环转动往复的完成所有泵送功能而不需要阀来辅助实现。

活塞往复运动完成一个冲程，同时活塞旋转实现介质的吸入和分配过程。

活塞转动的过程可以代替常规的阀的功能。

因为在泵送过程中泵吸入口和输出口永远不会联通，因而就不需要额外的止回阀。

Therefore it is important that processes performed individually yield components with properties near identical with one another. Consistency in dispensing can be measured in monitoring both the accuracy and precision of the dispenses. Accuracy is a comparison of the average value of dispensed amounts to the desired or target value. Precision is the range or degree of variation from dispense to dispense and will affect component variation. The QV system is both accurate and precise, capable of providing a 1% dispense accuracy with a 0.5% precision. Along with the V- 200 controller, the system replaced a manual dispensing method and produced cost savings by reducing the number of components requiring rework due to inconsistent slurry coatings.What makes QV CeramPump® technology so unique is its valveless piston design. One moving part, a special rotating and reciprocating ceramic piston, accomplishes all fluid control functions of the pump without valves. The reciprocating action performs the pumping function, while the simultaneous rotation of the piston alternately aligns a flat on the piston with the inlet and discharge ports of the pump. The flat creates a fluid path between the ports and the pump chamber, effectively functioning like a valve. At no time during the pumping cycle are the inlet and discharge ports interconnected, thereby eliminating the need for check valves.
RSM公司氧化物涂层过程中要求所有个体的介质分配量均为5微升。

只有一个活动件的设计使得在陶瓷泵活塞可以采用高硬度的蓝宝石陶瓷材料，该材料具有极好的耐玻璃浆液磨损的性能。

Tom Merck, RSM公司设备经理，估计QV泵每周的运行次数约为二十万次，泵大约可以使用三年，即总寿命约三千两百万次，此后泵才会因为磨损而需要更换。

QV泵的单次分配量很容易调整，不需要专用工具，在运行时，或者停工时，通过一个方便的流量控制把手即可调节。

一个交互式显示器可以显示调整分配量时极其细微的流量调整变化，使得调整分配量变得非常简单。

分配速度的调整通过V200控制器来实现，可以手动以0.1%的精度调节，或者通过4-20mA的控制信号自动调节。

通常情况下，只需调整泵送频率来调整泵送速度，同时也调整泵提升速度。

理论上百万分之一英寸的活塞与衬套间隙使得泵耐压可达100PSI（约 7bar)。

QV泵的扬程，垂直干介质可以达到15英尺，湿介质可达30英尺。

The fluid dispensed during RSM's diode coating process is a proprietary 5u glass slurry. In addition to having only one moving part, the CeramPump® has internal components made of sapphire-hard ceramics, providing excellent wear resistance against the abrasive glass slurry. Tom Merck, facility manager at RSM, estimates that the QV CeramPump® delivers 200,000 dispenses per week and will operate for about three years or approximately 32 million dispenses before internal components show enough wear to require replacement.
The QV dispense volume is easily adjusted, without tools, while running or while at rest by using a convenient flow control knob. A dial indicator gives a direct reading for ultra-fine flow adjustments in dispense volume settings enabling changing from one dispense volume to another with little or no downtime. Dispense speed is controlled by the V-200 Stroke Rate Controller, and is adjustable either manually in 0.1% increments or electronically via a 4-20 mA input common for most process controls. It is useful in controlling production speed, as well as for fast priming. With virtually only millionths of an inch clearance, the interface between the precision ceramic piston and mating liner form a
fluid seal capable of maintaining pumping pressures up to 100 psig. The QV pump can also self prime up to 15-ft. vertical lift dry, 30-ft. wet.。