宝石级单晶金刚石外延生长的研究

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宝石级单晶金刚石外延生长的研究
1. 研究目的:
探究宝石级单晶金刚石外延生长的制备方法。

2. 研究方法:
采用化学气相沉积法,在高温高压条件下,通过热解镁、钛、铬等金属有机物及甲烷、氢气等气体,在金刚石衬底上生长单晶金刚石外延片。

3. 研究结果:
通过对实验条件的优化、反复试验及多种表征手段的检测,得到了高质量的宝石级单晶金刚石外延片。

4. 研究意义:
该项研究为宝石级单晶金刚石材料的制备提供了新的方法和思路。

宝石级单晶金刚石具有很高的硬度、导热性和光学透明性,在高科技领域中有着广泛的应用前景,如激光器、光纤通信、微电机等。

5. 研究展望:
今后,还可以通过进一步改善实验条件、探究新的金属有机物、优化单晶金刚石衬底的品质等方面,进一步提高外延片的质量和生长速率。

English Translation:
1. Research Purpose:
To explore the preparation method of gem-quality single crystal diamond epitaxial growth.
2. Research Method:
Chemical vapor deposition method was used to grow single crystal diamond epitaxial films on diamond substrates by thermally decomposing metal organic
compounds such as magnesium, titanium, chromium, and gases such as methane and hydrogen under high temperature and pressure conditions.
3. Research Results:
Through optimizing experimental conditions, repeated experiments and testing with various characterization methods, high-quality gem-quality single crystal diamond epitaxial films were obtained.
4. Research Significance:
This research provides new methods and ideas for the preparation of gem-quality single crystal diamond materials. Gem-quality single crystal diamond has high hardness, thermal conductivity, and optical transparency, and has broad application prospects in high-tech fields such as lasers, fiber optics, and micro-mechanics.
5. Research Prospect:
In the future, the quality and growth rate of epitaxial films can be further improved by improving experimental conditions, exploring new metal organic compounds, optimizing the quality of diamond substrates, etc.。

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