P12异常报错处理(下)

3.Message
3.消息
3.1Stage Message
3.1阶段的信息
3.1.1Stage Message
3.1.1Stage消息
M0001STAGE INITIALIZATION NOT EXECUTED
M0001STAGE初始化不执行
M0002XY STAGE TRANSFER DESTINATION EXCEEDS SOFTWARE LIMIT
M0002XY阶段转移目的地超过软件限制
M0003Z STAGE TRANSFER DESTINATION EXCEEDS SOFTWARE LIMIT
M0003Z阶段转移目的地超过软件限制
M0004θ STAGE TRANSFER DESTINATION EXCEEDS SOFTWARE LIMIT
M0004θ阶段转移目的地超过软件限制
M0005UNABLE TO FIND SEARCH PATTERN
M0005UNABLE找到搜索模式
M0006PROCEED POINT IS NOT CORRECT
M0006PROCEED观点是不正确的
M0007ARITHMETIC ERROR
M0007ARITHMETIC错误
M0008MARKER NOT CONNECTED
M0008MARKER没有连接
M0009BRIDGE WILL INTERFERE WITH TARGET MOVEMENT
M0009BRIDGE将干扰目标运动
M0010COMMAND PARAMETERS EXCEED LIMIT
M0010COMMAND参数超过限制
M0011NO FILE NAME IS SPECIFIED
M0011NO指定文件名
M0012BRIDGE MOVEMENT NOT POSSIBLE BECAUSE OF 3 PIN IS UP
M0012BRIDGE运动不可能因为3针
M0013BRIDGE WILL INTERFERE WITH CHUCK TOP
M0013BRIDGE将干扰卡盘
M0014BRIDGE WILL INTERFERE WITH TARGET
M0014BRIDGE将干扰目标
M0015BRIDGE WILL INTERFERE WITH PROBE POLISHER
M0015BRIDGE将干扰探测器抛光机
M0016PROBE POLISHER WILL INTERFERE WITH BRIDGE
M0016PROBE抛光机将干扰桥
M0017PROBE POLISHER WILL INTERFERE WITH PROBE CARD
M0017PROBE抛光机将干扰探针卡
M0018BRIDGE WILL INTERFERE WITH CHUCK TOP DURING Z MOVEMENT M0018BRIDGE将在Z运动干扰卡盘上
M0019BRIDGE WILL INTERFERE WITH TARGET DURING Z MOVEMENT
在Z运动M0019BRIDGE将干扰目标
M0020POLISHER WILL INTERFERE WITH BRIDGE DURING Z MOVEMENT M0020POLISHER将在Z运动干扰桥
M0021PROBE CARD WILL INTERFERE WITH WAFER DURING Z MOVEMENT
M0022PROBE CARD WILL INTERFERE WITH POLISHER DURING Z MOVEMENT M0022PROBE卡将在Z运动干扰抛光机
M0023CHUCK WILL INTERFERE WITH UPPER ARM DURING Z MOVEMENT
M0023CHUCK将在Z运动干扰上臂
M0024CHUCK WILL INTERFERE WITH LOWER ARM DURING Z MOVEMENT
M0024CHUCK将在Z运动干扰下臂
M0025SURFACE MAP NOT COMPLETED
M0025SURFACE地图没有完成
M0026WAFER MACRO-ALIGNMENT NOT COMPLETED
M0026WAFER MACRO-ALIGNMENT没有完成
M0027WAFER MICRO-ALIGNMENT NOT COMPLETED
M0027WAFER MICRO-ALIGNMENT没有完成
M0028PAD REGISTRATION OVER LIMIT
M0028PAD登记超过限制
M0029INSPECTION PAD REGISTRATION OVER LIMIT
M0029INSPECTION垫登记超过限制
M0030THIS PAD NAME HAS ALREADY BEEN USED
M0030THIS垫名称已被使用
M0031STANDARD PROBE SETTING NOT COMPLETED
M0031STANDARD探头设置未完成
M0032PROBE SETTINGS OVER LIMIT
M0032PROBE设置了限制
M0033PROBE MACRO-ALIGNMENT NOT COMPLETED
M0033PROBE MACRO-ALIGNMENT没有完成
M0034PROBE MICRO-ALIGNMENT NOT COMPLETED
M0034PROBE MICRO-ALIGNMENT没有完成
M0035PROBE MICRO-ALIGNMENT NOT COMPLETED
M0035PROBE MICRO-ALIGNMENT没有完成
M0036PROBE ALIGNMENT NOT POSSIBLE WHILE 3 PIN IS UP
而3销M0036PROBE对齐不可能的
M0037NO PROBE CARD DATA SAVED
M0037NO探针卡数据保存
M0038NOT AN OPTION OR NOT SET
M0038NOT或没有设置一个选项
M0039SACC OR INKER’S ARM ARE INTERFERING
M0039SACC或墨棒的手臂是干扰
M0040THE MARKING COUNT IS NOT SET
M0040THE标记数没有设置
M0041THE MARKING PARAMETERS ARE ABNORMAL
M0041THE标记参数异常
M0042THE CONNECTOR PARAMETERS ARE ABNORMAL
M0042THE连接器参数异常
M0043SACC HOME TRANSFER WILL OCCUR
M0043SACC家里会发生转移
M0044PERFORMING AUTO HF OPERATION
M0044PERFORMING汽车高频操作
M0045AUTO HF STATUS ERROR
M0046THIS WILL INTERFERE WITH MARKER ARM
M0046THIS将干扰标记的手臂
M0047There is no wafer loaded
M0047There没有晶片加载
M0048The angle of the wafer on the chuck is abnormal
M0048The卡盘上的晶片角是不正常的
M0049The position of the wafer on the chuck is abnormal
M0049The卡盘上的晶片的位置是不正常的
M0050Cannot execute because the needle mark execution size is too large
M0050Cannot马克执行执行,因为针尺寸太大
M0053MACRO VISUAL FIELD Z POSITION OF THE MARKER IS OUT OF RANGE
M0053MACRO视野Z位置标记的范围
M0054MICRO VISUAL FIELD Z POSITION OF THE MARKER IS OUT OF RANGE
M0054MICRO视野Z位置标记的范围
M0055THERE IS NO PATTERN DATA FOR ALIGNMENT
M0055THERE没有模式数据对齐
M0056Transfer amount at offset is too large
M0056Transfer在抵消量太大
M0057The same probe is designated
M0057The相同的探针被指定
M0058A wafer is already loaded
M0058A晶圆已经加载
M0059The file count is excessive
M0059The文件数过多
M0060There is no Delete File at the Copy Source
M0060There不删除源文件副本
M0061The Transfer Amount at XY Position Offset is too large
M0061The转移金额在XY位置偏移量太大
M0064PROBE CONTACT OFFSET AMOUNT ERROR
M0064PROBE接触抵消金额错误
M0065CONTACT POSITION OFFSET AMOUNT ERROR
M0065CONTACT位置偏移误差
M0070THE SACC COVER IS OPEN
M0070THE、覆盖是开放的
M0071PRESS OK AFTER OPENING THE SACC COVER
M0071PRESS好后打开、封面
M0072THE SACC COVER IS CLOSED
M0072THE、关闭
M0073MOVE TO THE TRAY HAND-OVER POSITION
M0073MOVE托盘交接位置
M0080CHECK THAT THERE IS NO WAFER ON THE CHUCK
查克M0080CHECK没有晶片
M0081CHECK AGAIN THAT THERE IS NO WAFER ON THE CHUCK
M0081CHECK又没有晶片在卡盘上
M0084Perpendicular cumulative coefficient value was incorrect in the wafer alignment results. M0084Perpendicular累积系数值是不正确的在晶片对齐结果。

M0086Z PTPA Correction reached maximum overdrive value.
M0087Z PTPA Correction reached Z Down Amount.
M0087Z PTPA校正达到Z数量。

M0094Cannot execute needle polish due to set limit of XY stage.
M0094Cannot执行针波兰由于XY限量阶段。

M0095The surface of the needle polish wafer is used up.
M0095The针表面抛光晶片用完了。

M0098Sectioned polishing WAPP setting error.
M0098Sectioned抛光WAPP设置错误。

M0125TEST HEAD OPEN ERROR
M0125TEST头打开错误
M0151Cannot section-polished as Polish Pattern is not "Up/Down". M0151Cannot section-polished作为波兰模式不是“上/下”。

M0270CANNOT DOWNLOAD INK MARK TRAINING DATA
M0270CANNOT下载墨水标记训练数据
M0271CANNOT DOWNLOAD INK COUNT TRAINING DATA
M0271CANNOT下载墨水计算训练数据
M0272CANNOT DOWNLOAD PAD TRAINING DATA
M0272CANNOT下载垫训练数据
M0273CANNOT LIGHT INK INSPECTION LIGHT.
M0273CANNOT光油墨检验光。

M0274CANNOT LIGHT INK COUNT CHECK LIGHT.
M0274CANNOT光油墨计数检查。

M0275CANNOT LIGHT PROBE MARK INSPECTION LIGHT
M0275CANNOT光探针标记检查光
M0276INK MARK INSPECTION TIME OUT
M0276INK马克检查时间
M0277INK COUNT CHECK TIME OUT
M0277INK计数检查时间
M0278PROBE MARK INSPECTION TIME OUT
M0278PROBE马克检查时间
M0279NO INK MARK TRAINING DATA
M0279NO墨水标记训练数据
M0280NO INK COUNT TRAINING DATA
M0280NO墨水计算训练数据
M0281NO PAD TRAINING DATA
M0281NO垫训练数据
M0282The PMI Class in the Pad Coordinates is not set.
垫M0282The PMI类坐标没有设置。

M0900REMOVE THE WAFER ON THE CHUCK
M0900REMOVE卡盘上的晶片
M0901PUT THE WAFER ON THE CHUCK
M0901PUT卡盘上的晶片
M0902POSITION THE MACRO PATTERN ON THE CROSSHAIRS
M0902POSITION瞄准器上的宏观模式
M0903POSITION THE MICRO PATTERN ON THE CROSSHAIRS
克罗斯M0903POSITION微观模式
M0904POSITION THE REFERENCE DIE ON THE CROSSHAIRS
3.2Loader Message
3.2加载程序信息
3.2.1Undefined Loader Message
3.2.1Undefined装载机的信息
M2001UNDEFINED LOADER ERROR
M2001UNDEFINED加载程序错误
M2005A WAFER SIZE VALUE OTHER THAN 200mm OR 300mm HAS BEEN SET. M2005A晶片大小价值以外的200毫米或300毫米。

3.2.2Upper Arm Message
3.2.2Upper部门消息
M2010UPC MOTOR DRIVER BOARD DEFECTIVE
M2010UPC电机驱动板有缺陷
M2020UPPER ARM MOTOR DRIVER BOARD DEFECTIVE
M2020UPPER臂电机驱动板有缺陷
M2021UPPER ARM MOTOR DRIVER BOARD DEFECTIVE
M2021UPPER臂电机驱动板有缺陷
M2022LOADER Z NOT ON TABLE POSITION (ARM DRIVE)
M2022LOADER Z不是表位置(臂驱动)
M2023UPPER ARM ENCODER DEFECTIVE (CHECK THE WAFER).
M2023UPPER手臂编码器缺陷(检查晶片)。

M2024WAFER TABLE DOOR IS OPEN (ARM DRIVE)
M2024WAFER表门是开放的(驱动)
M2025UPPER ARM DOWN LIMIT CHECK ERROR
M2025UPPER手臂下极限检查错误
M2026UPPER ARM UP LIMIT CHECK ERROR
M2026UPPER手臂极限检查错误
M2027LOAD PORT 1 DOOR IS OPEN (ARM DRIVE)
M2027LOAD端口1门是开放的(驱动)
M2028LOAD PORT 2 DOOR IS OPEN (ARM DRIVE)
M2028LOAD端口2门是开放的(驱动)
3.2.3Lower Arm Message
3.2.3Lower部门消息
M2029LOWER ARM MOTOR DRIVER BOARD DEFECTIVE
M2029LOWER臂电机驱动板有缺陷
M2030LOWER ARM MOTOR DRIVER BOARD DEFECTIVE
M2030LOWER臂电机驱动板有缺陷
M2031LOWER ARM MOTOR DRIVER BOARD DEFECTIVE
M2031LOWER臂电机驱动板有缺陷
M2033LOWER ARM ENCODER DEFECT (CHECK THE WAFER).
M2033LOWER手臂编码器缺陷(检查晶片)。

M2035LOWER ARM DOWN LIMIT CHECK ERROR
M2035LOWER手臂下极限检查错误
M2036LOWER ARM UP LIMIT CHECK ERROR
M2036LOWER手臂极限检查错误
3.2.4Loader θ θ θ θ Message
3.2.4Loaderθθθθ消息
M2037LOADER θ MOTOR DRIVER BOARD DEFECTIVE (ORIGIN DRIVER DATA) M2037LOADERθ电机驱动板有缺陷(起源司机数据)
M2039LOADER θ MOTOR DRIVER BOARD DEFECTIVE (AT INITIALIZATION)
M2039LOADERθ电机驱动板有缺陷(初始化)
M2040LOADER θ ENCODER DEFECTIVE (CHECK THE WAFER).
M2040LOADERθ编码器缺陷(检查晶片)。

M2041LOAD ER θ DOWN LIMIT CHECK ERROR
M2041LOADERθ下极限检查错误
M2042LOADER θ UP LIMIT CHECK ERROR
M2042LOADERθ极限检查错误
M2043UPPER ARM IS NOT AT HOME POSITION (LOADER θ DRIVE)
M2043UPPER手臂不在家位置(装载机θ驱动器)
M2044LOWER ARM IS NOT AT HOME POSITION (LOADER θ DRIVE)
M2044LOWER手臂不在家位置(装载机θ驱动器)
M2045LOAD PORT 1 DOOR IS OPEN (LOADER θ DRIVE)
M2045LOAD端口1门是开放的(装载机θ驱动器)
M2046LOAD PORT 2 DOOR IS OPEN (LOADER θ DRIVE)
M2046LOAD端口2门是开放的(装载机θ驱动器)
M2047WAFER TABLE DOOR IS OPEN (LOADER θ DRIVE)
M2047WAFER表门是开放的(装载机θ驱动器)
3.2.5Subchuck θθ θ θ Message
3.2.5Subchuckθθθθ消息
M2049SUBCHUCK θ MOTOR DRIVER BOARD DEFECTIVE
M2049SUBCHUCKθ电机驱动板有缺陷
M2050SUBCHUCK θ MOTOR DRIVER BOARD DEFECTIVE
M2050SUBCHUCKθ电机驱动板有缺陷
M2051SUBCHUCK θ MOTOR DRIVER BOARD DEFECTIVE
M2051SUBCHUCKθ电机驱动板有缺陷
M2053SUBCHUCK θ ENCODER DEFECTIVE (CHECK THE WAFER).
M2053SUBCHUCKθ编码器缺陷(检查晶片)。

M2054SUBCHUCK θ DOWN LIMIT CHECK ERROR
M2054SUBCHUCKθ下极限检查错误
M2055SUBCHUCK θ UP LIMIT CHECK ERROR
M2055SUBCHUCKθ极限检查错误
M2056NO WAFER SHOULD BE ON SUBCHUCK
SUBCHUCK M2056NO晶片应该
M2057WAFER SHOULD BE ON SUBCHUCK
M2057WAFER SUBCHUCK应该
M2058SUBCHUCK IS AT ITS LOWEST POINT BUT THERE IS A WAFER PRESENT M2058SUBCHUCK在最低点,但有一个晶片
(CANNOT TRANSFER)
(不能转移)
3.2.6Loader Z Message
3.2.6Loader Z的信息
M2059LOADER Z MOTOR DRIVER BOARD DEFECTIVE
M2059LOADER Z电机驱动板有缺陷
M2060LOADER Z MOTOR DRIVER BOARD DEFECTIVE
M2060LOADER Z电机驱动板有缺陷
M2063LOADER Z ENCODER DEFECTIVE (CHECK THE WAFER)
M2063LOADER Z编码器缺陷(检查晶片)
M2064LOADER Z SOFTWARE INTERLOCK ERROR
M2064LOADER Z联锁软件错误
M2065LOADER Z DOWN LIMIT CHECK ERROR
M2065LOADER Z极限检查错误
M2066LOADER Z UP LIMIT CHECK ERROR
M2066LOADER Z极限检查错误
M2067NO TRAY ON WAFER TABLE IN LOADER Z
表在装载机Z M2067NO托盘在晶片
M2068LOADER Z HAS BEEN TRANSFERRED TO HOME POSITION
M2068LOADER Z已经转移到中心位置
M2069A DOOR IS OPEN OR THE DRIVER BOARD IS DEFECTIVE (LOADER Z DRIVE) M2069A门打开或驱动板有缺陷(装载机Z驱动器)
M2070LOAD PORT 1 DOOR IS OPEN (LOADER Z)
M2070LOAD端口1门是开放的(装载机Z)
M2071LOAD PORT 2 DOOR IS OPEN (LOADER Z)
M2071LOAD端口2门是开放的(装载机Z)
M2072WAFER TABLE DOOR IS OPEN (LOADER Z)
M2072WAFER表门打开(装载机Z)
M2073LOADER Z WAFER TABLE BASE
M2073LOADER Z圆片表基础
M2074LOADER Z UPPER ARM POSITION
M2074LOADER Z上臂位置
M2075LOADER Z LOWER ARM POSITION
M2075LOADER Z下臂的位置
M2076LOADER Z LOADER θ POSITION
M2076LOADER Z装载机θ的位置
M2077LOADER Z SLIDE POSITION
M2077LOADER Z幻灯片的位置
M2079UPPER ARM NOT AT HOME POSITION
M2079UPPER手臂不在家的地位
M2080LOWER ARM NOT AT HOME POSITION
M2080LOWER手臂不在家的地位
M2081THE LOAD PORT 1,2 OR WAFER TABLE DOOR HAD BEEN OPENED. M2081THE负载端口1、2或圆片表门已经打开。

3.2.7Slide Message
3.2.7Slide消息
M2082SLIDE MOTOR DRIVER BOARD DEFECTIVE
M2082SLIDE电机驱动板有缺陷
M2083SLIDE MOTOR DRIVER BOARD DEFECTIVE
M2083SLIDE电机驱动板有缺陷
M2084SLIDE MOTOR DRIVER BOARD DEFECTIVE (AT INITIALIZATION)
M2084SLIDE电机驱动板有缺陷(初始化)
M2086SLIDE MOTOR DRIVER ENCODER DEFECTIVE
M2086SLIDE电机驱动编码器缺陷
M2088SLIDE DOWN LIMIT CHECK ERROR
M2089SLIDE UP LIMIT CHECK ERROR
M2089SLIDE极限检查错误
M2090THE LOADER Z IS NOT IN ITS HOME POSITION SO THE SLIDER CANNOT COME TO THE M2090THE装载机Z不是在国内地位因此滑块不能来
OUTSIDE POSITION.
外面的位置。

M2091THE SLIDER IS NOT IN THE UNLOADING POSITION. TRANSFER TO THE UNLOAD
M2091THE滑块不卸货位置。

转移到卸载
POSITION BY PRESSING CONFIRM.
按下确认位置。

M2092Slide drive is possible because the door is closed.
M2092Slide开车是有可能的,因为门是关闭。

M2093YOU CANNOT USE THE SLIDE SWITCH DURING LOADER DIAGNOSTICS
在装载机诊断M2093YOU不能使用的滑动开关
M2094YOU CANNOT ACCESS THE CASSETTE BECAUSE LOADER INDIVIDUAL OPERATION
M2094YOU不能访问磁带,因为装载机个人操作
HAS NOT BEEN SELECTED
没有被选中
M2095SLIDE MOVEMENT NOT POSSIBLE BECAUSE WAFER TABLE DOOR IS OPEN
M2095SLIDE运动不可能因为晶片表门是开着的
3.2.8Vacuum Message
3.2.8Vacuum消息
M2110ARM VACUUM ON ERROR
M2110ARM真空上错误
M2111ARM VACUUM OFF ERROR
M2111ARM真空了错误
M2120SUBCHUCK VACUUM ON ERROR
M2120SUBCHUCK真空上错误
M2121SUBCHUCK VACUUM OFF ERROR
M2121SUBCHUCK真空了错误
3.2.9Subchuck Z Message
3.2.9Subchuck Z的信息
M2130SUBCHUCK Z DOWN ERROR
M2130SUBCHUCK Z下错误
M2131SUBCHUCK Z UP ERROR
M2131SUBCHUCK Z上的错误
M2132SUBCHUCK Z MIDDLE ERROR
M2132SUBCHUCK Z中错误
M2133SUBCHUCK LOW SOLENOID POSITION SENSOR DEFECTIVE M2133SUBCHUCK低电磁位置传感器有缺陷
M2134SUBCHUCK UP SOLENOID POSITION SENSOR DEFECTIVE M2134SUBCHUCK电磁位置传感器有缺陷
3.2.10Loader Z Message
3.2.10Loader Z的信息
M2140LOADER Z DOWN ERROR
M2140LOADER Z下错误
M2141LOADER Z UP ERROR
M2141LOADER Z上的错误
M2143LOADER Z锁销解锁错误
M2144LOADER Z LOCK PIN LOCK ERROR
M2144LOADER Z锁销锁错误
M2145LOADER Z POSITION ILLEGAL
M2145LOADER Z位置非法
M2146UPC IS NOT AT ITS HOME POSITION (LOADER Z DRIVE)
M2146UPC不是在国内位置(装载机Z驱动器)
M2147LPC IS NOT AT ITS HOME POSITION (LOADER Z DRIVE)
M2147LPC不是在国内位置(装载机Z驱动器)
M2148LOADER θ IS NOT AT ITS HOME POSITIO N (LOADER Z DRIVE)
M2148LOADERθ不是在国内位置(装载机Z驱动器)
M2149LOAD PORT 1 DOOR IS OPEN (LOADER Z DRIVE)
M2149LOAD端口1门是开放的(装载机Z驱动器)
M2150LOAD PORT 2 DOOR IS OPEN (LOADER Z DRIVE)
M2150LOAD端口2门是开放的(装载机Z驱动器)
M2151WAFER TABLE DOOR IS OPEN. (LOADER Z DRIVE)
M2151WAFER表门是开着的。

(装载机Z驱动器)
M2152LOADER Z POSITION SENSOR DEFECTIVE
M2152LOADER Z位置传感器有缺陷
M2160CANNOT OPEN SHUTTER (ARM DRIVE)
M2160CANNOT打开快门(驱动)
M2161CANNOT CLOSE SHUTTER (ARM DRIVE)
M2161CANNOT关闭快门(驱动)
M2162THE SHUTTER CAN’T OPEN BECAUSE THE BRIDGE ISN’T AT THE HOME
M2162THE快门不能打开,因为不是家里的桥梁
M2163SHUTTER OPEN CLOSE SENSOR DEFECTIVE
M2163SHUTTER打开关闭传感器缺陷
M2164BOTH ARMS ARE NOT INTERRUPTING THE ORIGIN SENSORS M2164BOTH武器不打断原点传感器
3.2.11Wafer Table Message
3.2.11Wafer表信息
M2170NO WAFER IS ON WAFER TABLE
M2170NO晶片晶圆桌子上
M2171WAFER IS ON WAFER TABLE
M2171WAFER圆片表
M2173THE WAFER IS NOT RETURNED TO THE WAFER TABLE
M2173THE晶片不是返回到晶圆桌子
M2175WAFER ON WAFER TABLE NOT RETURNED
M2175WAFER晶圆桌子上不会返回
M2176WAFER TABLE LOADING FAILURE
M2176WAFER表加载失败
M2177WAFER TABLE UNLOADING FAILURE
M2177WAFER表卸载失败
3.2.12Buffer Table Message
3.2.12Buffer表信息
M2180NO WAFER IS ON BUFFER TABLE
M2180NO晶片缓冲表
M2181WAFER IS ON BUFFER TABLE
M2181WAFER缓冲表
M2183BUFFER TABLE LOADING ERROR
M2183BUFFER表加载错误
M2184BUFFER TABLE UNLOADING ERROR
M2184BUFFER表卸载错误
M2185CANNOT MOVE WAFER AS THERE IS NO WAFER ON MAIN CHUCK.
M2185CANNOT移动晶片没有晶片主要查克。

3.2.13Prealign Message
3.2.13Prealign消息
M2203PREALIGN SENSOR DATA ERROR
M2203PREALIGN传感器数据错误
M2205PREALIGNMENT DATA ILLEGAL
M2205PREALIGNMENT数据非法
3.2.14Slide Sensor Message
3.2.14Slide传感器信息
M2210THE SLIDER IS NOT AT ITS HOME POSITION PRESS THE CONFIRM BUTTON TO
M2210THE滑块不是在国内位置按下确认按钮
TRANSFER TO THE UNLOAD POSITION
转移到卸载的位置
M2215THE SLIDE IS NOT INITIALIZED. PRESS OK AND MOVE TO THE UNLOAD POSITION. M2215THE幻灯片不是初始化。

按OK,搬到卸载位置。

M2220THE SLIDER IS NOT AT ITS DRAW-OUT POSITION PRESS THE CONFIRM BUTTON TO M2220THE滑块并不在其抽取的位置按下确认按钮
TRANSFER TO THE UNLOAD POSITION
转移到卸载的位置
3.2.15Arm Message
3.2.15Arm消息
M2300ARM NUMBER ERROR
M2300ARM数量错误
M2301THERE SHOULD BE NO WAFER ON ARM
M2301THERE应该没有晶片的手臂
M2302WAFER SHOULD BE ON ARM
M2302WAFER应该是手臂
M2304Because there is a jig on the arm it cannot move to home position. M2304Because手臂上有一个夹具不能搬到中心位置。

3.2.16Cassette Slot Message
3.2.16Cassette槽消息
M2352THERE SHOULD BE NO WAFER ON CASSETTE SLOT
M2352THERE应该没有晶片盒槽
M2353WAFER SHOULD BE ON CASSETTE SLOT
M2353WAFER应该在磁带插槽
3.2.17Positon Check Message
3.2.17Positon检查消息
M2360ARM ROBOT POSITION ILLEGAL
M2360ARM机器人位置非法
3.2.18Motor Message
3.2.18Motor消息
M2370MOTOR PROTECT
M2370MOTOR保护
M2371UPPER ARM ORIGIN SENSOR DEFECTIVE
M2371UPPER手臂起源传感器缺陷
M2372UPPER ARM ORIGIN SENSOR DEFECTIVE
M2372UPPER手臂起源传感器缺陷
M2374LOADER θ ORIGIN SENSOR DEFECTIVE
M2374LOADERθ原点传感器缺陷
M2375LOADER Z ORIGIN SENSOR DEFECTIVE
M2375LOADER Z源传感器缺陷
M2376SLIDER ORIGIN SENSOR DEFECTIVE
M2376SLIDER原点传感器缺陷
3.2.19Loader System Message
3.2.19Loader系统消息
M2380SYSTEM MEMORY ALLOCATION ERROR
M2380SYSTEM内存分配错误
M2381SYSTEM CLOCK ERROR
M2381SYSTEM时钟误差
M2383POWER TRIPPED (FUSE BLOWN)
M2383POWER绊倒(保险丝吹)
3.2.20Prealignment Message
3.2.20Prealignment消息
M2401PREALIGNMENT CONVERTED DATA ERROR
M2401PREALIGNMENT转换数据误差
M2402PREALIGNMENT CONVERTED DATA ERROR
M2402PREALIGNMENT转换数据误差
M2404PREALIGNMENT ECCENTRICITY CALCULATION ILLEGAL M2404PREALIGNMENT偏心率计算非法
M2410PREALIGNMENT INPUT WAFER SIZE ERROR
M2410PREALIGNMENT输入晶片大小错误
M2411PREALIGNMENT SPECIAL FLAT ORIENTATION ERROR
M2411PREALIGNMENT特殊平面方向错误
M2420PREALIGNMENT WAFER ECCENTRICITY SIZE ERROR
M2420PREALIGNMENT晶圆偏心大小错误
M2421PREALIGNMENT FLAT ORIENTATION OR NOTCH NOT FOUND M2421PREALIGNMENT平面取向或切口没有找到
M2422PREALIGNMENT FLAT ORIENTATION OVER 90°
M2422PREALIGNMENT平面取向超过90°
M2425PREALIGNMENT FLAT ORIENTATION OR NOTCH COUNT ERROR M2425PREALIGNMENT平面取向或切口计数错误
M2430Position wafer FO on WT in same direction as one on MC.
M2430Position晶片FO WT在同一方向一个MC。

3.2.21Common Message
3.2.21Common消息
M2550UNABLE TO CLEAR LOADER MOTOR ALARM
M2550UNABLE装载机发动机报警
M2552UNABLE TO MAGNETIZE LOADER MOTOR
M2552UNABLE磁化装载机发动机
M2554UNABLE TO RELEASE LOADER MOTOR BRAKE
M2554UNABLE释放装载机发动机制动
M2600INITIAL PROCESSING ERROR
M2600INITIAL处理错误
M2610UNABLE TO READ MACHINE DATA ON HARD DISK
M2610UNABLE阅读机器硬盘上的数据
M2612UNABLE TO READ CASSETTE DATA ON HARD DISK
M2612UNABLE读盒式数据在硬盘上
M2614UNABLE TO READ MOTOR DATA ON HARD DISK
M2614UNABLE硬盘读取电机数据
M2615UNABLE TO WRITE MACHINE DATA TO HARD DISK
M2615UNABLE机数据写入硬盘
M2616UNABLE TO WRITE MOTOR DATA TO HARD DISK
M2616UNABLE电动机数据写入硬盘
M2617UNABLE TO WRITE CASSETTE DATA TO HARD DISK
M2617UNABLE盒式数据写入硬盘
M2620UNABLE TO DELETE TASK FOR LOADER INTERRUPT PROCESS
装载机M2620UNABLE删除任务中断过程
M2622UNABLE TO DELETE LOADER INITIAL TASK
M2622UNABLE删除加载程序初始任务
M2624UNABLE TO LOAD FUNCTION TASK DELETE
任务删除M2624UNABLE加载函数
M2626UNABLE TO LOAD DIAGNOSTIC TASK DELETED
M2626UNABLE加载诊断任务删除
M2627CANNOT DELETE LOADER SLIDE TASK
M2627CANNOT删除加载程序幻灯片的任务
M2632UNABLE TO DELETE MESSAGE QUEUE FOR LOADER INITIAL TASK
M2632UNABLE装载机初始任务删除消息队列
M2634UNABLE TO DELETE MESSAGE QUEUE FOR LOADER FUNCTION TASK
M2634UNABLE装载机函数删除消息队列的任务
M2636UNABLE TO DELETE MESSAGE QUEUE FOR LOADER DIAGNOSTIC TASK M2636UNABLE装载机诊断任务删除消息队列
M2637CANNOT DELETE MESSAGE Q FOR LOADER SLIDE TASK
M2637CANNOT删除消息问装载机幻灯片的任务
M2700UNEXPECTED MESSAGE RECEIVED
M2700UNEXPECTED信息收到了
M2701UNDEFINED ERROR MESSAGE
M2701UNDEFINED错误消息
M2702FORMAT ERROR MESSAGE RECEIVED
M2702FORMAT收到错误消息
M2710ORIGIN POSITION TRANSFER NOT COMPLETED
M2710ORIGIN位置转移没有完成
M2711ARMS NOT INTERRUPTING ORIGIN SENSORS
M2711ARMS不打断起源传感器
M2712THE INDEX IS TOO LARGE
M2712THE指数太大
M2720UNLOAD ALARM STOP WAFER
M2720UNLOAD报警停止晶片
M2750UNLOAD ALARM STOP WAFER
M2750UNLOAD报警停止晶片
M2751WAFER TAKE-OUT COMPLETED
M2751WAFER外卖完成
M2752Unloaded the wafer for PMI to the wafer table.
M2752Unloaded PMI的晶圆片表。

M2760PLEASE EXCHANGE THE NEEDLE POLISH WAFER
M2760PLEASE交换波兰晶圆针
M2761PLEASE SET THE NEEDLE POLISH WAFER ON THE WAFER TABLE
波兰M2761PLEASE设置针晶片圆片表
M2770WAFER REARRANGING COMPLETED.
M2770WAFER重新整理完成。

M2771WAFER REARRANGING DATA DEFECTIVE.
M2771WAFER重新排列数据缺陷。

3.2.22No Wafer in Cassette Slot Message
3.2.22No晶片盒槽消息
M2801CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 1 OF CASSETTE 1 M2801CANNOT取出晶片,因为没有一个槽盒1的1
M2802CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 2 OF CASSETTE 1 M2802CANNOT取出晶片,因为没有一个槽盒1的2
M2803CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 3 OF CASSETTE 1 M2803CANNOT取出晶片,因为没有一个槽盒1的3
M2804CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 4 OF CASSETTE 1 M2804CANNOT取出晶片,因为没有一个槽盒1的4
M2805CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 5 OF CASSETTE 1 M2805CANNOT取出晶片,因为没有一个槽盒1的5
M2806CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 6 OF CASSETTE 1 M2806CANNOT取出晶片,因为没有一个槽6盒1
M2807CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 7 OF CASSETTE 1 M2807CANNOT取出晶片,因为没有一个槽盒1的7
M2808CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 8 OF CASSETTE 1 M2808CANNOT取出晶片,因为没有一个槽盒1的8
M2809CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 9 OF CASSETTE 1 M2809CANNOT取出晶片,因为没有一个槽盒1的9
M2810CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 10 OF CASSET TE 1 M2810CANNOT取出晶片,因为没有一个槽10盒1
M2811CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 11 OF CASSETTE 1 M2811CANNOT取出晶片,因为没有一个槽11盒1
M2812CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 12 OF CASSETTE 1 M2812CANNOT取出晶片,因为没有一个槽12盒1
M2813CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 13 OF CASSETTE 1 M2813CANNOT取出晶片,因为没有一个插槽13盒1
M2814CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 14 OF CASSETTE 1 M2814CANNOT取出晶片,因为没有一个插槽14盒1
M2815CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 15 OF CASSETTE 1 M2815CANNOT取出晶片,因为没有一个槽15盒1
M2816CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 16 OF CASSETTE 1 M2816CANNOT取出晶片,因为没有一个槽盒1的16
M2817CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 17 OF CASSETTE 1 M2817CANNOT取出晶片,因为没有一个槽盒1的17
M2818CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 18 OF CASSETTE 1 M2818CANNOT取出晶片,因为没有一个槽18盒1
M2819CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 19 OF CASSETTE 1 M2819CANNOT取出晶片,因为没有一个槽盒1的19
M2820CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 20 OF CASSETTE 1
M2820CANNOT取出晶片,因为没有一个槽20盒1
M2821CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 21 OF CASSETTE 1 M2821CANNOT取出晶片,因为没有一个槽盒1的21
M2822CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 22 OF CASSETTE 1 M2822CANNOT取出晶片,因为没有一个槽盒1的22
M2823CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 23 OF CASSETTE 1 M2823CANNOT取出晶片,因为没有一个槽盒中有23个1
M2824CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 24 OF CASSETTE 1
M2824CANNOT取出晶片,因为没有一个槽24盒1
M2825CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 25 OF CASSETTE 1 M2825CANNOT取出晶片,因为没有一个槽25盒1
M2826CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 26 OF CASSETTE 1 M2826CANNOT取出晶片,因为没有一个槽盒1的26个
M2827CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 27 OF CASSETTE 1 M2827CANNOT取出晶片,因为没有一个槽盒1的27个
M2828CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 28 OF CASSETTE 1 M2828CANNOT取出晶片,因为没有一个槽28 1盒
M2829CANNOT TAKE OUT WAFER BECAUSE THER E ISN’T ONE IN SLOT 29 OF CASSETTE 1 M2829CANNOT取出晶片,因为没有一个槽盒1的29
M2830CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 30 OF CASSETTE 1 M2830CANNOT取出晶片,因为没有一个槽30盒1
M2831CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 31 OF CASSETTE 1 M2831CANNOT取出晶片,因为没有一个槽盒1的31
3.2.23A Wafer In Cassette Slot Message
3.2.23A晶片盒槽消息
M2901THERE IS A WAFER IN SLOT 1 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2901THERE是盒式的晶片槽1 1所以晶片不能被卸载
M2902THERE IS A WAFER IN SLOT 2 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2902THERE是盒式的晶片槽2 1所以晶片不能被卸载
M2903THERE IS A WAFER IN SLOT 3 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2903THERE晶圆槽3盒1所以晶片不能被卸载
M2904THERE IS A WAFER IN SLOT 4 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2904THERE是盒式的晶片槽4 1所以晶片不能被卸载
M2905THERE IS A WAFER IN SLOT 5 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2905THERE是盒式的晶片槽5 1所以晶片不能被卸载
M2906THERE IS A WAFER IN SLOT 6 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2906THERE是盒式的晶片槽6 1所以晶片不能被卸载
M2907THERE IS A WAFER IN SLOT 7 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2907THERE的晶片槽7盒1所以晶片不能被卸载
M2908THERE IS A WAFER IN SLOT 8 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2908THERE是盒式的晶片槽8 1所以晶片不能被卸载
M2909THERE IS A WAFER IN SLOT 9 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2909THERE是盒式的晶片槽9 1所以晶片不能被卸载
M2910THERE IS A WAFER IN SLOT 10 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2910THERE是盒式的晶片槽10 1所以晶片不能被卸载
M2911THERE IS A WAFER IN SLOT 11 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2911THERE是盒式的晶片槽11中1所以晶片不能被卸载
M2912THERE IS A WAFER IN SLOT 12 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2912THERE是盒式的晶片槽12 1所以晶片不能被卸载
M2913THERE IS A WAFER IN SLOT 13 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2913THERE是盒式的晶片槽13 1所以晶片不能被卸载
M2914THERE IS A WAFER IN SLOT 14 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2914THERE是盒式的晶片槽14 1所以晶片不能被卸载
M2915THERE IS A WAFER IN SLOT 15 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2915THERE是盒式的晶片槽15 1所以晶片不能被卸载
M2916THERE IS A WAFER IN SLOT 16 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2916THERE是盒式的晶片槽16 1所以晶片不能被卸载
M2917THERE IS A WAFER IN SLOT 17 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2917THERE是盒式的晶片槽17 1所以晶片不能被卸载
M2918THERE IS A WAFER IN SLOT 18 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2918THERE的晶片槽18盒1所以晶片不能被卸载
M2919THERE IS A WAFER IN SLOT 19 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2919THERE是盒式的晶片槽19 1所以晶片不能被卸载
M2920THERE IS A WAFER IN SLOT 20 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2920THERE的晶片槽20盒1所以晶片不能被卸载
M2921THERE IS A WAFER IN SLOT 21 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2921THERE的晶片槽21盒1所以晶片不能被卸载
M2922THERE IS A WAFER IN SLOT 22 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2922THERE 22是一个晶片槽盒1所以晶片不能被卸载
M2923THERE IS A WAFER IN SLOT 23 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2923THERE是晶片槽23盒1所以晶片不能被卸载
M2924THERE IS A WAFER IN SLOT 24 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2924THERE的晶片槽24盒1所以晶片不能被卸载
M2925THERE IS A WAFER IN SLOT 25 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2925THERE的晶片槽25盒1所以晶片不能被卸载
M2926THERE IS A WAFER IN SLOT 26 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2926THERE是晶片槽26盒1所以晶片不能被卸载
M2927THERE IS A WAFER IN SLOT 27 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2927THERE是盒式的晶片在槽27 1所以晶片不能被卸载
M2928THERE IS A WAFER IN SLOT 28 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2928THERE是盒式的晶片槽28 1所以晶片不能被卸载
M2929THERE IS A WAFER IN SLOT 29 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2929THERE是盒式的晶片槽29 1所以晶片不能被卸载
M2930THERE IS A WAFER IN SLOT 30 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2930THERE是盒式的晶片槽30 1所以晶片不能被卸载
M2931THERE IS A WAFER IN SLOT 31 OF CASSETTE 1 SO WAFER CANNOT BE UNLOADED M2931THERE是盒式的晶片槽31 1所以晶片不能被卸载
3.2.24No Cassette Message
3.2.24No盒式消息
M2950THERE IS NO NUMBER 1 CARRIER
M2950THERE没有1号航母
M2951THERE IS NO NUMBER 2 CARRIER
M2951THERE没有2号航母
M2952THERE ARE NO CARRIERS
M2952THERE没有航空公司
3.2.25Cassette Clamp Message
3.2.25Cassette夹消息
M2955NO. 1 CASSETTE HAS NOT BEEN CLAMPED
M2955NO。

1盒没有被夹紧
M2956NO. 2 CASSETTE HAS NOT BEEN CLAMPED M2956NO。

2盒没有被夹紧
M2957CANNOT RELEASE CASSETTE 1
M2957CANNOT释放磁带1
M2958CANNOT RELEASE CASSETTE 2
M2958CANNOT释放盒2
3.2.26Flat Sensor Message
3.2.26Flat传感器信息
M2959LOAD PORT 1 WILL NOT GO FLAT
M2959LOAD端口1不会平坦
M2960LOAD PORT 2 WILL NOT GO FLAT
M2960LOAD端口2不会平坦
M2961LOAD PORT 1 WILL NOT TILT
M2961LOAD端口1不会倾斜
M2962LOAD PORT 2 WILL NOT TILT
M2962LOAD端口2不会倾斜
3.2.27Protruding Message
3.2.27Protruding消息
M2970A WAFER IS PROTRUDING FROM CASSETTE 1 M2970A晶片的磁带1
M2971A WAFER IS PROTRUDING FROM CASSETTE 2 M2971A晶片的磁带2
M2980SMIF COMMUNICATION ERROR
M2980SMIF通信错误
M2990MOVEMENT OF THE LOADER Z FAILED
M2990MOVEMENT装载机Z的失败
M2991THERE IS NO EMPTY SLOT
M2991THERE没有空槽
M2992THE LOADER Z IS NOT AT THE HOME POSITION
M2992THE装载机Z不是家里的位置
M2993THE LOADER Z FAILED TO MOVE, OR THERE IS NO EMPTY SLOT
M2993THE装载机Z未能移动,或者没有空槽
M2994ADJUSTMENT WAS NOT COMPLETED.
M2994ADJUSTMENT未能完成。

3.2.28Wafer Search Message
3.2.28Wafer搜索信息
M3001CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 1 OF CASSETTE 2 M3001CANNOT取出晶片,因为没有一个插槽1盒2
M3002CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 2 OF CASSETTE 2 M3002CANNOT取出晶片,因为没有一个槽2盒2
M3003CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 3 OF CASSETTE 2 M3003CANNOT取出晶片,因为没有一个插槽3盒2
M3004CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 4 OF CASSETTE 2 M3004CANNOT取出晶片,因为没有一个插槽4盒2
M3005CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 5 OF CASSETTE 2 M3005CANNOT取出晶片,因为没有一个槽盒2的5
M3006CANNOT TAKE OUT WAFER BECAUSE THERE ISN’T ONE IN SLOT 6 OF CASSETTE 2 M3006CANNOT取出晶片,因为没有一个槽6盒2。