Towards fast femtosecond laser micromachining of fused silica the effect of deposited energy

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清华大学汤姆逊散射超短脉冲X射线源研究

清华大学汤姆逊散射超短脉冲X射线源研究杜应超;黄文会;颜立新;何小中;向导;唐传祥;林郁正【期刊名称】《强激光与粒子束》【年(卷),期】2009(21)2【摘要】介绍了清华大学加速器实验室近年来关于汤姆逊散射超短X射线源的研究工作;研究了在任意散射角度下电子束参数和激光束参数对散射光子参数的影响,给出了散射光子的参数如光子产额、脉冲长度、时间抖动等与电子束参数、激光束参数和散射角度的关系;利用实验室已有的16 MeV反波行波加速器与中国工程物理研究院激光聚变研究中心提供的ns调Q激光搭建了汤姆逊散射初步实验平台并开展了实验研究;加工了1.6-cell光阴极微波电子枪,搭建了高功率实验平台,对产生的电子束参数进行了初步测量;对汤姆逊散射超短X射线源进行了设计并开展了相关的平台建设工作,对产生的X射线脉冲参数进行了模拟.【总页数】6页(P265-270)【作者】杜应超;黄文会;颜立新;何小中;向导;唐传祥;林郁正【作者单位】清华大学,工程物理系,加速器实验室,北京,100084;清华大学,粒子技术与辐射成像教育部重点实验室,北京,100084;清华大学,高能辐射成像国防重点学科实验室,北京,100084;清华大学,工程物理系,加速器实验室,北京,100084;清华大学,粒子技术与辐射成像教育部重点实验室,北京,100084;清华大学,高能辐射成像国防重点学科实验室,北京,100084;清华大学,工程物理系,加速器实验室,北京,100084;清华大学,粒子技术与辐射成像教育部重点实验室,北京,100084;清华大学,高能辐射成像国防重点学科实验室,北京,100084;清华大学,工程物理系,加速器实验室,北京,100084;清华大学,粒子技术与辐射成像教育部重点实验室,北京,100084;清华大学,高能辐射成像国防重点学科实验室,北京,100084;清华大学,工程物理系,加速器实验室,北京,100084;清华大学,粒子技术与辐射成像教育部重点实验室,北京,100084;清华大学,高能辐射成像国防重点学科实验室,北京,100084;清华大学,工程物理系,加速器实验室,北京,100084;清华大学,粒子技术与辐射成像教育部重点实验室,北京,100084;清华大学,高能辐射成像国防重点学科实验室,北京,100084;清华大学,工程物理系,加速器实验室,北京,100084;清华大学,粒子技术与辐射成像教育部重点实验室,北京,100084;清华大学,高能辐射成像国防重点学科实验室,北京,100084【正文语种】中文【中图分类】TN248【相关文献】1.激光汤姆逊散射及HL-1M装置多道倍频激光散射系统 [J], 冯洁;郑永真2.汤姆逊X射线源激光系统的定时与同步诊断 [J], 杜强;李荐民;黄文会;邵贝贝3.汤姆逊硬X射线源中锁模脉冲激光稳频方法 [J], 杜强;黄文会;孙大睿;戴建枰;唐传祥4.散射参数对汤姆逊散射诊断的影响简析 [J], 朱巍;叶雁;李军;罗振雄;刘振清;朱鹏飞5.汤姆逊散射之跃迁几率和散射截面的量子场论方法处理 [J], 管立;郁可;孙一因版权原因，仅展示原文概要，查看原文内容请购买。

聚焦离子束技术雕刻出的纳米级图案

直径和电子结构决定其漂浮密度。单壁和多壁碳纳米管拥有有趣的特性，但是双壁碳纳米管是透明且导电的，因而具有单
壁、多壁碳纳米管混合特性的双壁碳纳米管更具有吸引力。西北大学的研究人员发现，ＤＷＮＴ的长度比ＳＴ长４％。由于双壁碳纳米管长度更ＷＮ４长，因而透明导电的ＤＴ在用于太阳能电池板时，其电导率提高了２ＷＮ．４倍。（英惠杨
内的发育。该项发现的关键之处在于，这种表面可直接激励细胞，因而无需借助药物，从而排除药物不良影响。科学家们利用化学试剂改变通常的医用金属（如钛）的表面。将这些金属置于选定的酸和氧化物混合液中，使金属表面形成海绵状、由纳米尺寸小坑组成的图案。研究表明，经过处理的表面使骨细胞生长加速、抑制了无用细胞的生长，并激发了支撑细胞。此外，由于与
纳米多孔表面的接触，有利于细胞附着，且生长的基因表达能力也提高了。．（英惠摘译）杨
聚焦离子束技术雕刻出的纳米级图案
美国国家标准与工艺研究所（ＩＴＮＳ）报道，将离子流聚焦成一个ｌｍ大小的光点技术ｎ在纳米工艺中有广泛用途，利用这项技术可在半导体上刻出比目前所有方法都更精小的图形，它还能进行以比目前电子显微镜所达到的分辨率更为细小的非破坏成像。研究人员制成了一个小的原子 “ ” 云，而后联合使用磁场及激光捉住这些原子并将其冷冻至极低温度。利用另一个激光器将原子离化，并使荷电粒子加速通过一个小孔，从而制成了带能离子束。这一装置被命名为ＭＯＩ，用作磁光离子源陷阱。ＭＯＩＴＳＴＳ首先以铬原子进行了演示，并确定除镓外其他元素均可达到相应亮度与强度，宛如聚集离子束。该项技术还可用于许多其他原子。这些离子束可用于切削纳米级图案，而不产生污染，还可用于提高离子束显微镜的对比度。（英惠摘译）杨

基于纳米技术的微透镜可能使卫星红外成像技术取得突破

一
这种量子点红外光电探测器的金表面的这些有趣特性有助于将入射光直接聚焦到微型圆孔内并将这些光有效地会聚在盛放量子点的池内。这种会聚可加强俘获光与量子点之间的相互作用，继而增强量子点将那些光子转换成电子的能力。最终的结果是，Ｌｎ的器件ｉ产生了比进入该量子点红外光电探测器的原始能量强４００％的电场。这种效应与用一个透镜覆盖该量子点红外光电探测器上每一个微小圆孔所产生的结果是相似的，但它没有超额的重量，而且省去了安装和校准数百万个透镜的麻烦和成本Ｌｎ的团队在一篇已经发ｉ
表的论文中曾经表明，覆盖在量子点红外光电探测器上的纳米级金层不会增加噪声或者给器件的响应时间产生负面影响。ｉ打算通过增加表面圆孔Ｌｎ的直径和使用更有效的量子点替代物两种方式继续对该技术进行磨练，并用金来提高量子点红外光电探测器的探测率。Ｌｎ认为，再过几年，他们ｉ将产生出一种信号比现在这个探测器高２０倍的金基量子点红外光电探测器。这是一个非常合理的目标，它将会开辟出个全新的应用范围，从更好的士兵用夜视镜到更精确的医用成像装置不等。
髓国墨圆
基于纳米技术的微透镜可能使卫星红外成像技术取得突破

扫描隧道显微镜在纳米材料表征中的应用

扫描隧道显微镜在纳米材料表征中的应用扫描隧道显微镜（Scanning Tunneling Microscopy， STM）是一种非常有用的技术，可以用来观察和表征纳米材料和表面结构。

STM 基于电子隧穿效应，通过在距离样品表面几个埃之内移动尖端来感测表面的电子结构和拓扑结构。

由于STM 能够在原子尺度下精确地检测表面的形貌和晶体结构，它已经被广泛用于材料科学和物理学中的表面物理研究领域，这让科学家们对纳米材料的结构和特性有了更深入的理解。

在 STM 技术的帮助下，科学家们可以直接观察和表征纳米材料的表面形貌和纳米结构。

例如，他们可以精确地测量样品表面的几何形状、表面成分的分布等信息，以及研究材料表面的电子结构和化学反应。

STM 还可以用来研究和开发新型纳米器件和材料，例如纳米电路、量子点等。

由于 STM 技术的高度敏感性，它能够探测细微的表面变化和结晶缺陷，这对科学家们设计和制造高效的新型材料来说至关重要。

使用 STM 就可以通过找到表明晶体生长的周期性表面几何形状来精确定位纳米结晶，还可以通过变化的电子能带结构和谱信号了解材料的化学反应和行为。

除此之外，STM 技术也被用于开发和制造新型的纳米设备。

例如，STM 可以用来制作和准确测量铁磁分子、单层石墨烯、量子点、超导体等纳米器件，这些器件可以用于 photonics、能源产业、半导体工业等领域。

总的来说，STM 技术在纳米材料表征上的应用是无与伦比的。

它不仅能够为科学家们提供有关纳米材料结构和特性的更深入理解，而且还帮助他们研究新型纳米器件和材料的研发，应用广泛。

尽管 STM 技术还存在一些局限性和挑战，但作为现代科学家的有力武器，STM 技术已经成为了纳米技术领域中一个不可或缺的工具。

Femtosecond laser excitation of multiple spin waves

Femtosecond laser excitation of multiple spin waves and composition dependence of Gilbert damping in full-Heusler Co2Fe1−xMnxAl filmsChuyuan Cheng, Kangkang Meng, Shufa Li, Jianhua Zhao, and Tianshu LaiCitation: Applied Physics Letters 103, 232406 (2013); doi: 10.1063/1.4838256View online: /10.1063/1.4838256View Table of Contents: /content/aip/journal/apl/103/23?ver=pdfcovPublished by the AIP PublishingArticles you may be interested inDifferent temperature scaling of strain-induced magneto-crystalline anisotropy and Gilbert damping in Co2FeAl film epitaxied on GaAsAppl. Phys. Lett. 105, 072413 (2014); 10.1063/1.4893949Magnetic and Gilbert damping properties of L 21-Co2FeAl film grown by molecular beam epitaxyAppl. Phys. Lett. 103, 152402 (2013); 10.1063/1.4824654Low spin-wave damping in amorphous Co40Fe40B20 thin filmsJ. Appl. Phys. 113, 213909 (2013); 10.1063/1.4808462Spin-transfer switching in full-Heusler Co2FeAl-based magnetic tunnel junctionsAppl. Phys. Lett. 100, 182403 (2012); 10.1063/1.4710521Exchange anisotropy and spin-wave damping in CoFe/IrMn bilayersJ. Appl. Phys. 93, 7717 (2003); 10.1063/1.1543126Femtosecond laser excitation of multiple spin waves and composition dependence of Gilbert damping in full-Heusler Co 2Fe 12x Mn x Al filmsChuyuan Cheng,1Kangkang Meng,2Shufa Li,1Jianhua Zhao,2,a)and Tianshu Lai 1,a)1State-Key Laboratory of Optoelectronic Materials and Technologies,School of Physics and Engineering,Sun Yat-Sen University,Guangzhou 510275,People’s Republic of China 2State-Key Laboratory for Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,P.O.Box 912,Beijing 100083,People’s Republic of China(Received 2September 2013;accepted 17November 2013;published online 3December 2013)Spin-wave dynamics in 30nm thick Co 2Fe 1Àx Mn x Al full-Heusler ﬁlms is investigated using time-resolved magneto-optical polar Kerr spectroscopy under an external ﬁeld perpendicular to ﬁlms.Damon-Eshbach (DE)and the ﬁrst-order perpendicular standing spin-wave (PSSW)modes are observed simultaneously in four samples with x ¼0,0.3,0.7,and 1.The frequency of DE and PSSW modes does not apparently depend on composition x ,but damping of DE mode signiﬁcantly on x and reaches the minimum as x ¼0.7.The efﬁcient coherent excitation of DE spinwave exhibits the promising application of Co 2Fe 0.3Mn 0.7Al ﬁlms in magnonic devices.VC 2013AIP Publishing LLC .[/10.1063/1.4838256]Cobalt-based full-Heusler ferromagnetic alloy ﬁlms have a high Curie temperature and spin polarization,which are cru-cial for spintronic devices.It was already reported that mag-netic tunnel junction using cobalt-based full-Heusler ﬁlms as electrodes showed a high tunnel magnetoresistance ratio and low switching current.1In addition,cobalt-based full-Heusler ferromagnetic alloy ﬁlms also showed low damping.2–4Such properties make cobalt-based full-Heusler ferromagnetic alloy ﬁlms become a promising material in magnonics,5,6where spin waves are utilized to transport,store,and process informa-tion.Consequently,the generation and manipulation of spin waves becomes vital in magnonics.Spin wave logic gates have been demonstared.7It has shown experimentally by Brillouin light scattering (BLS)that rich thermal spin wave modes existed in cobalt-based full-Heusler ferromagnetic alloy ﬁlms,8,9such as Damon-Eshbach (DE)spin-wave and perpen-dicular standing spin-wave (PSSW)modes.However,the coherent excitation of such spin wave modes has been an open issue,and has not been reported yet.Liu et al.studied spin-wave dynamics in Co 2MnAl (Ref.3)and Co 2MnSi (Ref.4)ﬁlms using all-optical time-resolved magneto-optical Kerr (TR-MOKE)spectroscopy with an external ﬁeld applied in plane,and observed only uniform precession or Kittel mode,but did not DE and PSSW modes excited.In this Letter,we investigate the dynamics of spin waves in Co 2Fe 1Àx Mn x Al full-Heusler ﬁlms using all-optical TR-MOKE spectroscopy.In contrast to previous in-plane ﬁeld applied,here an external ﬁeld is applied nearly normal to ﬁlms.Multiple spin-wave modes,including DE and PSSW modes as well as an external ﬁeld-independent spin wave mode,are observed simultaneously.The three spin-wave modes all can be excited in four samples with x ¼0,0.3,0.7,and 1,but DE spin wave is excited most efﬁ-ciently.The frequency of spin wave modes is not apparently dependent on the composition x ,but damping signiﬁcantly depends on x .The origin of external ﬁeld-independent spinwave mode is deeply studied and ascertained.Efﬁcient exci-tation of DE spin waves supports full-Heusler alloy ﬁlms as a promising material in magnonic devices because DE spin wave is a propagating wave which enables information transmission.Four samples under study are 30nm thick Co 2Fe 1Àx Mn x Al ﬁlms grown on GaAs (001)substrate by molecular-beam epi-taxy at the temperature of 160 C with x ¼0,0.3,0.7,and 1.All samples were capped with an aluminum layer of 2nm thickness to avoid oxidation.More details on the preparation and the magnetic properties of the samples can be found else-where.10The experimental setup for time-resolved polar Kerr measurement of spin wave dynamics was described in details elsewhere.11Laser pulses of 150fs from a Ti:sapphire regener-ative ampliﬁer with a repetition rate of 1kHz at the central wavelength of 800nm are split into stronger pump and weaker probe whose the ﬂuence ratio of pump to probe is larger than 30.The pump pulse is focused to a spot of 150l m in diameter on sample surface,while the focused spot of the probe is nearly half smaller than and is located at the centre of the pump spot.The polar Kerr rotation of the probe reﬂected from sample sur-face is detected by a balanced optical bridge and measured with the help of a lock-in ampliﬁer,which is synchronized to an optical chopper that modulates the pump beam.The external magnetic ﬁeld is generated by an electromagnet and applied nearly normal to ﬁlms.Fig.1(a)shows the pump-induced magnetization dynamics of the sample,Co 2Fe 0.3Mn 0.7Al ﬁlm,under differ-ent stationary external ﬁeld (H ).One can see that obvious oscillations occur,that is spin waves,but the oscillations are not simply harmonic damping,which implies multiple spin-wave modes are excited simultaneously.One can also discern oscillatory period decreases with increasing external ﬁeld,which shows the dispersion of spin waves that can be used to identify the type of spin waves.To obtain the disper-sion,it is necessary to achieve the spectrum of spin waves for different external ﬁeld.The oscillatory component is ﬁrst obtained by subtracting non-oscillatory component from the magnetization dynamics in Fig.1(a)and then is fast Fouriera)Authors to whom correspondence should be addressed.Electronic addresses:stslts@ and jhzhao@.0003-6951/2013/103(23)/232406/5/$30.00VC 2013AIP Publishing LLC 103,232406-1APPLIED PHYSICS LETTERS 103,232406(2013)transformed(FFT),while the non-oscillatory component is an exponential decay function which bestﬁts the magnet-ization dynamics and describes the recovery process of pump-induced demagnetization.In this way,FFT spectra corresponding to the spin waves in Fig.1(a)are obtained and plotted in Fig.1(b).It is obvious that three peaks occur in every FFT spectrum and shifted upward with external ﬁeld except for the peak at$43.9GHz.The strength of peak weakens rapidly with the rise of frequency.The posi-tion of peak or the frequency of spin wave mode is read out and plotted in Figs.1(c)and1(d)by scattered points as a function of externalﬁeld,which is just so-called the dis-persion of spin waves and will be exploited to identify these spin-wave modes.For the simplicity in description below,the three spin-wave modes are referred to as low-, middle-,and high-frequency modes in order of their fre-quency values.The theoretical dispersion relations of dipolar and exchange spin-wave modes in continuousﬁlms were estab-lished under arbitrary orientation of the internal magnetic ﬁeld.12According to this theory,as H is applied nearly nor-mal to theﬁlm plane as here,the dispersion equation of dipole-interaction-dominated DE spin-wave mode reads(in CGS units)x2 DE ¼x2Hsin2hþx H x Msin h1Àcos2hkdð1ÀeÀkdÞþx2Msin2hkdð1ÀeÀkdÞÂ1À1kdð1ÀeÀkdÞ;(1)where d is the thickness ofﬁlms,k is the wavevector of DE mode,and M s is the saturation magnetization.x H¼c H sin/ and x M¼c4p M s.c is the gyromagnetic ratio.h and/are the angles of the direction of magnetization and external mag-neticﬁeld with respect to the normal ofﬁlms,respectively.For exchange-dominated PSSW mode,its dispersion equation readsx2PSSW¼x Hsin hþx A n2xHsin hþx M sin2hþx A n2;(2)where x A¼c2A ex/M s(p/d)2,A ex is the exchange constant, and n is the index of PSSW mode.As n¼0,Eq.(2)reduces to the dispersion equation of the Kittel mode.In our experimental geometry,/is constant but h is changed with externalﬁeld,and is determined by the follow-ing magnetization equilibrium condition:2H sinðhÀ/ÞÀ4p M s sin2h¼0:(3)Obviously,none of the three spin-wave modes is Kittel mode because the frequency of Kittel mode should approach to zero as externalﬁeld reduces to zero.Weﬁrst try to best ﬁt the dispersion(ﬁlled circles in Fig.1(c))of the low-frequency mode with Eqs.(2)and(3).The bestﬁtting is also plotted in Fig.1(c)by solid line.It looks toﬁt well. However,the parameters given by theﬁtting,such as A ex and M s,are much different from the experimental values reported.Furthermore,the dispersion curves of the second-(dotted line),third-(dashed line),and fourth-(solid line) order PSSW modes deduced by the bestﬁtting are also plot-ted in Fig.1(c).One can discern the fourth-order PSSW mode seems toﬁt the middle-frequency mode(open circles) well.However,it is not reasonable physically because the fourth-order PSSW mode is excited less efﬁciently than the second-and third-order PSSW modes.It is impossible that the fourth-order PSSW mode is observed but the second-and third-order modes can not.Therefore,the low-frequency mode is excluded as theﬁrst-order PSSW mode,while the middle-frequency mode as higher-order PSSW mode. Next,we try to bestﬁt the low-frequency mode with Eqs.(1) and(3).Theﬁtting is plotted in Fig.1(d)by green solid line. One can see theﬁtting is very well.More importantly,the ﬁtting gives out reasonable parameters k¼2.58l mÀ1and M s¼900emu/cm3.The latter agrees well with the reportedFIG. 1.(a)Spin-wave dynamics ofCo2Fe0.3Mn0.7Al Heuslerﬁlm meas-ured by polar TR-MOKE spectroscopyunder a pumpﬂuence of$27mJ/cm2for different externalﬁelds appliednearly perpendicular toﬁlm.(b)FFTpower spectra corresponding to the os-cillatory components in(a).The dataare ampliﬁed by20times in the rightside of the vertical line.(c)Scatteredpoints denote the externalﬁeld de-pendence of three peaks in(b).Linesstand for bestﬁtting based on the dis-persion of PSSW mode.(d)The scat-tered points denote the externalﬁelddependence of three peaks in(b).Solidline is bestﬁtting with the dispersionof DE mode,and dashed line with theone ofﬁrst-order PSSW mode.Thesolid and dotted lines at43.9GHz arethe guide to eyes.value(1027emu/cm3)of Co2FeAlﬁlms,8while k¼2.58l mÀ1 is in the regime of dipolar-interaction-dominated spin waves.6 Therefore,we ascertain the low-frequency mode as DE spin-wave mode.We try to bestﬁt the middle-frequency mode with Eqs.(2)and(3),andﬁnd the bestﬁtting can be obtained as n¼1.The bestﬁtting is plotted in Fig.1(d)by dashed line,and gives out parameters A ex¼2.13l erg/cm and M s¼890emu/cm3.The M s¼890emu/cm3agrees well with M s¼900emu/cm3given by theﬁtting of low-frequency mode,while A ex¼2.13l erg/cm is comparable to the reported A ex¼1.55l erg/cm of Co2FeAlﬁlms.8Therefore,we believe the middle-frequency being theﬁrst-order PSSW mode. Theﬁtting of two modes gives almost identical saturation magnetization M s that agrees well with the reported value, which further enhance the reliability to assign the low-and middle-frequency modes to DE and PSSW modes, respectively.To reveal the inﬂuence of composition(x)on the spin-wave modes,another three samples with x¼0,0.3,and1are also studied on their magnetization dynamics under different externalﬁelds as described before.The oscillatory compo-nents are extracted as described before and then fast Fourier transformed.There are also similar low-,middle-,and high-frequency three peaks or spin-wave modes in every FFT spectrum for the three samples,and the low-and middle-frequency peaks are shifted upward with increasing external ﬁeld,but the high-frequency peak at43.9GHz not shifted. The externalﬁeld dependence of the frequency of the three modes is plotted in Figs.2(a),2(b),and2(d).Fig.1(d)is re-plotted as Fig.2(c).One can see they look very similar, showing that composition x does not apparently inﬂuence the frequency of spin-wave modes.The green solid lines show bestﬁtting to greenﬁlled circles with Eqs.(1)and(3),while blue dashed lines exhibit bestﬁtting to blue open circles with Eqs.(2)and(3)as n¼1.Thoseﬁttings give out parameters M s¼1000,980,900,and740emu/cm3,and A ex¼2.2,2.39, 2.13,and1.69l erg/cm,respectively,for x¼0,0.3,0.7,and 1.M s decreases monotonously with increasing x,which is in good agreement with the prediction of Slater-Pauling rule of Co2-based Heusler compounds.13,14Slater-Pauling rule predicted that the magnetic moment M per formula unit is 5l B for Co2FeAl,while it declines to4l B for Co2MnAl. Based on the reported lattice constants,10the calculated val-ues of M s are1012,945,856,and789emu/cm3,respectively, for x¼0,0.3,0.7,and1,which agree very well with M s¼1000,980,900,and740emu/cm3given by bestﬁttings. This further supports our assignment on DE and PSSW modes.In our out-of-plane experimental geometry,DE and PSSW can be efﬁciently excited,but they could not be excited in in-plane geometry.3,4Main reason may be large precession angle allowed in our geometry under enough pump excitation.For large precession angle,the Landau-Lifshitz equation of motion is intrinsically nonlinear, which is helpful to pump energy into certain spin-wave modes by nonlinear interaction.15Furthermore,in the out-of-plane geometry,externalﬁeld is applied perpendicularly toﬁlm plane,which is preferential for magnonic device applications because a strongﬁeld is easily generated in a small gap which corresponds to the thickness of magnonic devices.Gilbert damping is a vital parameter for magnonic applications.It is necessary to reveal the composition(x)de-pendence of the damping of Co2Fe1Àx Mn x Alﬁlms.An exponential sum function,including a single exponential decay and three harmonic damping functions,yðtÞ¼P3k¼1A k expðÀt=T kÞsinð2p f k tþ/kÞþB expðÀt=T demÞ,is used to best ﬁt all magnetization dynamics as plotted in Fig.1(a),where A k,T k,f k,and/k are the amplitude,lifetime,frequency,and initial phase of the k th spin-wave mode,respectively.B and T dem depict the amplitude and recovery time constant of pump-induced demagnetization,respectively.Partial signals (scattered points)in Fig.1(a)and their bestﬁttings (color solid lines)are plotted in Fig.3(a).One can see that the solid linesﬁt experimental points very well.Theﬁtting gives out the frequencies(f k)and lifetimes(T k)of three spin-wave modes.The frequencies are almost identical to ones depicted by FFT spectra.The lifetimes of low-frequency(DE)mode are plotted in Fig.3(b)by scat-tered symbols because DE spin wave is especially focused on in magnonic devices due to its propagating character, whereas the lifetimes of other modes are not shown here. One can see that the lifetime of DE mode is strongly depend-ent on composition x though the frequency of DE mode does not apparently depend on x.Gilbert damping a is calculated by the following formula:161a¼scH sin/sin hþ2p M s sin2h;(4)where s is the lifetime of spin waves,as shown in Fig.3(b).Based on Eqs.(3)and(4),the damping(a)of four sam-ples is calculated and plotted in Fig.3(c).One can see that a is signiﬁcantly dependent on x but not on the externalﬁeld, implying that the damping is mainly intrinsic because mainly extrinsic damping should apparently decrease with increas-ing externalﬁeld.16One can also discern that a is changed non-monotonously with x and reaches the minimum ($0.006)as x¼0.7,which seems to be comparable to the case of Co2Fe1Àx Mn x Siﬁlms where a approaches to the min-imum($0.003)as x¼0.6.2FIG.2.Scattered points denote the externalﬁeld dependence of three spin-wave modes in four Co2Fe1Àx Mn x Al samples with x¼0(a),0.3(b),0.7 (c),and1(d).Solid lines denote the bestﬁtting with the dispersion formula of DE mode,while dashed lines represent the bestﬁtting with the dispersion equation of PSSW mode.Dotted lines are the guides to eyes.Finally,the origin of the high-frequency mode at43.9GHz is discussed.One can see it appears in all four samples and is independent of externalﬁeld,as Fig.2shows.Externalﬁeld-independent spin-wave modes were reported in some patterned ferromagnetic microstructures,such as CoFeB antidote latti-ces,17where such a spin-wave mode was explained as localized spin-wave mode which is conﬁned near the border of antidots. However,our samples have no patterned microstructure,but are continuousﬁlms.Consequently,the localized spin-wave or-igin of the mode at43.9GHz may be excluded.Another possi-ble origin is coherent acoustic phonon(CAP)in GaAs substrate.18It has been reported that femtosecond laser excita-tion to GaSb/GaAs heterostructure could generate CAP in GaAs substrate,where GaSb layer absorbed photon energy so that its lattice expansion led to strain acoustic wave traveling into GaAs substrate.In our experiment,Co2Fe1Àx Mn x Al layer absorbs photon energy,which may lead to CAP in GaAs sub-strates.The frequency of CAP can be calculated by the for-mula,f¼(2nV s cos b)/k,18where n is the refractive index of GaAs,V s is the propagating speed of CAP in GaAs at room temperature,b and k are the refraction angle in GaAs and wavelength of probe light,respectively.The calculated fre-quency of CAP is f¼43.75GHz for the parameters n¼3.7,19 V s¼4730m/s,20b¼0,and k¼800nm,and agrees excellently with43.9GHz,the frequency of high-frequency mode. Therefore,CAP is possible as the origin of the high-frequency mode at43.9GHz.To experimentally conﬁrm the CAP origin of the high-frequency mode,we perform a transient photoreﬂectivity measurement because the transient photoreﬂectivity is sensi-tive to CAP.18We measure the transient differential photore-ﬂectivity on the four samples under the same experimental geometry as Kerr measurement but the balanced optical bridge detectors are replaced by a single photodetector and polarization beamsplitter is removed.The oscillatory tran-sient differential reﬂectivity(D R/R)is indeed observed and similar in all samples.A set of typical D R/R measured on Co2MnAlﬁlm are plotted in Fig.4(a)for different external ﬁelds and pumpﬂuence.One can see that D R/R is sensitive to pumpﬂuence but insensitive to externalﬁelds.The FFT spec-tra of D R/R are obtained as described before,and plotted in Fig.4(b).One can discern that a peak indeed occurs atFIG. 4.(a)Transient differentialreﬂectivity D R/R of Co2MnAlﬁlmunder different externalﬁelds andpumpﬂuence.(b)FFT power spectracorresponding to(a).The verticaldashed line indicates the position of43.9GHz.FIG.3.(a)Partial spin-wave dynamicsin Fig.1(a)and their bestﬁttings withan exponential sum function.Thescattered points shows externalﬁelddependence of the lifetime(b)anddamping(c)of DE mode in four sam-ples with x¼0,0.3,0.7,and1.Solidlines are the guides to eyes.43.9GHz in FFT spectra,and is not shifted with pumpﬂu-ence and externalﬁeld,but its strength is increased with pumpﬂuence.In contrast,DE and PSSW modes do not occur in Fig.4(b).Those phenomena reveal non-magnetic origin of the peak at43.9GHz or origin of CAP.In other words,we have conﬁrmed experimentally that the high-frequency mode originates from CAP in GaAs substrate.In summary,all-optical pump-probe polar magneto-optical Kerr spectroscopy has been employed to investigate the spin-wave dynamics in Co2Fe1Àx Mn x Al Heuslerﬁlms excited by femtosecond laser pulses under the experimental geometry where an externalﬁeld is applied nearly normal to ﬁlms.DE and PSSW modes are observed simultaneously in all samples.It is found that the frequency of DE and PSSW modes is not apparently dependent on the composition x of the samples,but the damping of DE mode signiﬁcantly on x. Minimum damping is observed as x¼0.7.An external ﬁeld-independent mode at43.9GHz is also observed,and is conﬁrmed experimentally to originate from coherent acous-tic phonon in GaAs substrate.Saturation magnetization and exchange constants of the four samples are obtained by best ﬁtting.The former agrees well with theoretical prediction based on Slater-Pauling rule.This work was partially supported by National Natural Science Foundation of China under Grant Nos.11274399, 11127406,and61078027,National Basic Research Program of China under Grant Nos.2013CB922403,2013CB922303, and2010CB923200,and doctoral specialized fund of MOE of China under Grant No.20090171110005as well as NSF of Guangdong Province under Grant No.9151027501000077.1H.Sukegawa,Z.C.Wen,K.Kondou,S.Kasai,S.Mitani,and K.Inomata, Appl.Phys.Lett.100,182403(2012).2T.Kubota,S.Tsunegi,M.Oogane,S.Mizukami,T.Miyazaki,H. Naganuma,and Y.Ando,Appl.Phys.Lett.94,122504(2009).3Y.Liu,L.R.Shelford,V.V.Kruglyak,R.J.Hicken,Y.Sakuraba,M. Oogane,Y.Ando,and T.Miyazaki,J.Appl.Phys.101,09C106(2007).4Y.Liu,L.R.Shelford,V.V.Kruglyak,R.J.Hicken,Y.Sakuraba,M. Oogane,and Y.Ando,Phys.Rev.B81,094402(2010).5A.A.Serga,A.V.Chumak,and B.Hillebrands,J.Phys.D43,264002 (2010).6B.Lenk,H.Ulrichs,F.Garbs,and M.M€u nzenberg,Phys.Rep.507,107 (2011).7T.Schneider,A.A.Serga,B.Leven,B.Hillebrands,R.L.Stamps,and M. P.Kostylev,Appl.Phys.Lett.92,022505(2008).8O.Gaier,J.Hamrle,S.Trudel, A.Conca Parra, B.Hillebrands, E. Arbelo,C.Herbort,and M.Jourdan,J.Phys.D:Appl.Phys.42,084004 (2009).9T.Kubota,J.Hamrle,Y.Sakuraba,O.Gaier,M.Oogane,A.Sakuma,B. Hillebrands,K.Takanashi,and Y.Ando,J.Appl.Phys.106,113907 (2009).10K.K.Meng,S.L.Wang,P.F.Xu,L.Chen,W.S.Yan,and J.H.Zhao, Appl.Phys.Lett.97,232506(2010).11X.D.Liu,Z.Xu,R.X.Gao,H.N.Hu,Z.F.Chen,Z.X.Wang,J.Du,S. M.Zhou,and i,Appl.Phys.Lett.92,232501(2008).12B.A.Kalinikos and A.N.Slavin,J.Phys.C19,7013(1986).13G.H.Fecher,H.C.Kandpal,S.Wurmehl,C.Felser,and G.Scho€u nhense, J.Appl.Phys.99,08J106(2006).14S.Trudel,O.Gaier,J.Hamrle,and B.Hillebrands,J.Phys.D:Appl.Phys. 43,193001(2010).15B.Lenk,G.Eilers,J.Hamrle,and M.M€u nzenberg,Phys.Rev.B82, 134443(2010).16Z.Chen,M.Yi,M.Chen,S.Li,S.Zhou,and i,Appl.Phys.Lett. 101,222402(2012).17H.Ulrichs,B.Lenk,and M.M€u nzenberg,Appl.Phys.Lett.97,092506 (2010).ler,J.Qi,Y.Xu,Y.J.Cho,X.Liu,J.Furdyna,I.Perakis,T. Shahbazyan,and N.Tolk,Phys.Rev.B74,113313(2006).19D.Aspnes and A.Studna,Phys.Rev.B27,985(1983).20J.S.Blakemore,J.Appl.Phys.53,R123(1982).。

飞秒激光微加工的研究进展

飞秒激光微加工的研究进展顾理;孙会来;于楷;赵方方【摘要】The article reviews the progress of micro-fabrication by femtosecond laser at home and abroad in recent years. Femtosecond laser pulses have undergone through the laboratory process to become a useful tool for material mi-cro-nano-processing in industrial field. In this paper, we introduce the process of femto-second laser precise micro-nanofabrication. Two different fabrication mechanisms are described which are laser ablation and two photo polymerization. Finally,the existing problems and future development of micro-manufacture by femtosecond laser are discussed.%综述了近年来国内外利用飞秒激光微加工的研究进展.飞秒激光脉冲作为材料微纳加工的一项工具,已经从实验室进入到工业化阶段.介绍了飞秒激光在微纳加工领域的一些研究情况,分别就飞秒激光烧蚀微加工以及双光子聚合加工进行了阐述.最后分析了飞秒激光微加工目前存在的问题及未来发展的主要方向.【期刊名称】《激光与红外》【年(卷),期】2013(043)001【总页数】5页(P14-18)【关键词】飞秒激光;微加工;烧蚀;双光子聚合【作者】顾理;孙会来;于楷;赵方方【作者单位】天津市现代机电装备重点实验室天津工业大学机械工程学院,天津300387;四川省制造与自动化重点实验室西华大学,四川成都610039;天津市现代机电装备重点实验室天津工业大学机械工程学院,天津300387;四川省制造与自动化重点实验室西华大学,四川成都610039;辽宁省铁岭港华燃气有限公司技术设备部,辽宁铁岭112000;天津市现代机电装备重点实验室天津工业大学机械工程学院,天津300387;四川省制造与自动化重点实验室西华大学,四川成都610039【正文语种】中文【中图分类】TN2491 引言激光作为20世纪最伟大的发明之一，自1960年Maiman利用红宝石实现的第一台激光器，已经经历了五十余年。

光纤传输系统在超快激光加工中的应用研究

光纤传输系统在超快激光加工中的应用研究邹兆安】，崔庞博】，朱文宇2,麻丁龙3(1.中国航发西安航空发动机有限公司，陕西西安710100；2.中国科学院西安光学精密机械研究所，陕西西安710119；3.西安中科微精光子制造科技有限公司，陕西西安710119)摘要：随着对超快激光应用安全、高效和灵活需求不断增强，采用Kagome结构空心光子晶体光纤传导来代替传统镜片结构是一种全新选择。

开发了基于超快激光光纤传输的可调耦合系统，并对该系统下与自由空间传输光路下的加工质量进行对比。

结果表明，超快激光光纤耦合系统传输效率稳定、焦斑能量分布均匀、像散程度小，可有效解决传统镜片组合下的光路损耗与像散问题。

关键词:超快激光;空芯光子晶体光纤;光纤耦合系统中图分类号:TG665文献标志码:A文章编号：1009-279X(2021)02-0056-05Application of Fiber-optic Transmission System in Ultra-fast Laser ProcessingZOU Zhaoan1,CUI Pangbo1,ZHU Wenyu2,MA Dinglong3(1.China Hangfa Xi'an Aero Engine Co.,Ltd.,Xi'an710100,China；2.Xi'an Institute of Optics and Precision Machinery,Chinese Academy of Sciences,Xi'an710119,China；3.Xi'an Micromach Technology Co.,Ltd.,Xi'an710119,China)Abstract：With the increasing demand for the safety,efficiency and flexibility of ultra-fast laser applications,it's a new choice to replace the traditional lens structure with kagome hollow photonic crystal fiber conduction.In this research,a tunable coupling system based on ultra-fast laser fiber transmission was developed,and the processing quality of the system was compared with that of free space transmission.The results showed that the transmission efficiency of ultra-fast laser fiber coupling transmission system is stable,the energy distribution of focal spot is uniform,and the astigmatism degree is small,which can effectively solve the problem of optical path loss and astigmatism under the traditional lens combination.Key words：ultra-fast laser;hollow core photonic crystal fiber;laser fiber coupling system超快激光以脉冲宽度低、瞬时功率高的特点应用于材料加工，扮演着创新尖兵的角色，引领制造技术进入激光制造的新时代，极大地提升了传统制造业的水平，也带来产品设计、制造工艺和生产观念的巨大变革[1-4]。

美华裔科学家研发出全球首个纳米光驱动马达

反映迅速．相关论文于２１００年１份发表在Ａ — 月ｄ
达旋转的速度和方向，进而创造出更快的旋转速度
或更大的动力。张翔表示，项技术的先进之处在于这大大缩小了马达的尺寸，可实际应用范围很广泛，包
构，海胆一样，像使得结构的表面积大大增加。这种纳米结构的表面注定会被用于光伏应用，
成了一种毛细芯（ａｉａｙＷｉｋｇ。碳纳米管本来Ｃｐｌｒｃｉ）ｌｎ不具备亲水性，为此研究人员们使用一种叫作电子
纳米结构。海胆刺状结构南氧化锌纳米线组成。这种结构化的表面可以被用来提高光伏产品的转化效率。赋予材料新特性的工艺往往复杂且重复性差，但令人感到惊讶的是．科学家报告的新工艺不仅使用了廉价的原材料，而且不需要昂贵的设备。们使用他聚苯乙烯小球实现似脚手架的功能，在多种衬底材料上生长出半导体氧化锌维纳米结构。研究者相信，这种有序结构化表面可以被广泛用于电子和光电子器件，比如太阳能电池、波激光器、Ｅ和场短ＬＤ致发射显示器（ｅｄｅｉｉｎｄｓｌｙ。科学界对此ｉｆｌｍｓｏｉａ）ｓｐ
于生物细胞和ＤＡ分子的检验研究。Ｎ
来源：国《界日报》美世十倍于传统热管：米毛细芯散热新方向纳

医用镁合金微弧氧化

第52卷第12期表面技术2023年12月SURFACE TECHNOLOGY·315·医用镁合金微弧氧化/有机复合涂层的研究现状及演进方向冀盛亚a，常成b，常帅兵c，倪艳荣a，李承斌a（河南工学院 a.电缆工程学院 b.车辆与交通工程学院c.电气工程与自动化学院，河南新乡 453003）摘要：医用镁及镁合金过快的降解速率严重缩短了其有效服役时间，过高的析氢速率引发局部炎症，束缚了其临床应用前景。

微弧氧化（MAO）/有机复合涂层良好的抑蚀降析性能，在医用镁及镁合金表面改性领域展现出巨大的应用潜力。

首先，从有机材料（植酸（PA）、壳聚糖（CS）、硬脂酸（SA）、多巴胺（DA）、聚乳酸-乙醇酸共聚物（PLGA）、聚乳酸（PLA）、聚已内酯（PCL））自身的组织及性能特征入手，分析了单一有机涂层提高镁及镁合金耐蚀性的作用机理，并指出单一涂层自身的性能弱点（单一MAO涂层微孔和裂纹的不可避免，单一有机涂层与镁合金结合强度低，易于剥落）限制了对镁合金降解保护效能。

其次，从结合强度、耐蚀性、多功能性（生物安全性、生物相容性、诱导再生性、抑菌抗菌性、载药缓释性等）的角度，详细阐述了各MAO/有机复合涂层的结构特点、优势特征。

在此基础上，明确指出以MAO/PCL （MAO/CS）复合涂层为基底涂层，通过PCL（CS）涂层与其他涂层的交叉组合，是实现医用镁合金植入材料的生物活性及多功能性的最佳路径。

最后，对镁合金MAO/有机复合涂层的演进方向进行了科学展望。

关键词：镁合金；微弧氧化；有机材料；复合涂层；演进方向中图分类号：TG174.4 文献标识码：A 文章编号：1001-3660(2023)12-0315-20DOI：10.16490/ki.issn.1001-3660.2023.12.026Research Status and Evolution Direction of Micro-arc Oxidation/Organic Composite Coating on Medical Magnesium Alloy SurfaceJI Sheng-ya a, CHANG Cheng b, CHANG Shuai-bing c, NI Yan-rong a, LI Cheng-bin a(a. School of Cable Engineering, b. School of Vehicle and Traffic Engineering, c. School of Electrical Engineering andAutomation, Henan Institute of Technology, Henan Xinxiang 453003, China)ABSTRACT: Good biosafety, biocompatibility and valuable self-degradation properties endow medical magnesium and magnesium alloys with great potential to replace inert implant materials in the field of traditional clinical applications.The excessive degradation rate of magnesium alloy, however, leads to its premature loss of structural integrity and mechanical support, being unable to complete the effective service time necessary for tissue healing of the implant site. At the same time, it is also its excessive degradation rate that leads to the intensification of hydrogen evolution reaction of收稿日期：2023-02-01；修订日期：2023-05-14Received：2023-02-01；Revised：2023-05-14基金项目：河南省科技攻关项目（222102310337，222102240104，232102241029）；博士科研资金（9001/KQ1846）Fund：Henan Province Science and Technology Research Project (222102310337, 222102240104, 232102241029); Doctoral Research Funding (9001/KQ1846)引文格式：冀盛亚, 常成, 常帅兵, 等. 医用镁合金微弧氧化/有机复合涂层的研究现状及演进方向[J]. 表面技术, 2023, 52(12): 315-334.JI Sheng-ya, CHANG Cheng, CHANG Shuai-bing, et al. Research Status and Evolution Direction of Micro-arc Oxidation/Organic Composite·316·表面技术 2023年12月magnesium alloy. Because it cannot be absorbed by the human body in a short time, the excessive H2 will easily gather around the implant or form a subcutaneous airbag, which will not only cause the inflammation of the implant site, but also hinder the adhesion and growth of cells in the implant, limiting its clinical application prospects. Surface modification technology can effectively delay the degradation rate of medical magnesium and magnesium alloys, and reduce the rate of hydrogen evolution.Firstly, starting from the structure and performance characteristics of organic materials (phytic acid (PA), chitosan (CS), stearic acid (SA), dopamine (DA), polylactic acid glycolic acid copolymer (PLGA), polylactic acid (PLA), and polycaprolactone (PCL)), the mechanism of improving the corrosion resistance of magnesium and magnesium alloys by a single organic coating was analyzed, and the performance weaknesses of a single coating were also pointed out: ①Micro arc oxidation (MAO) is an anodic oxidation process that generates a highly adhesive ceramic oxide coating on the surface of an alloy immersed in an electrolyte through high voltage (up to 300 V) spark discharge. The continuous high voltage discharge and the bubbles generated by the reaction bring about the inevitable occurrence of a large number of volcanic micropores and cracks in the coating. The diversity of discharge modes also gives rise to the unpredictable morphology of micropores and cracks. Therefore, the preparation of a single MAO coating on different alloy surfaces does not only require proper adjustment of MAO electrical parameters (current density, voltage, duty cycle, frequency, oxidation time) and the coupling effect of its electrolyte system to decrease (small) the pores and cracks on the MAO coating surface, but also increases the sealing process at the later stage. ② A single organic coating has a low bonding strength with magnesium alloy, being easy to flake off. These performance weaknesses limit the protection effect of a single coating on magnesium alloy degradation.Secondly, from the perspectives of bonding strength, corrosion resistance, and versatility (biosafety, biocompatibility, induced regeneration, antibacterial and antibacterial properties, drug loading and sustained-release properties, and so on), the structural characteristics and advantages of each MAO/organic composite coating were elaborated in detail. It has revealed that MAO/organic composite coating has an enormous application potentiality in the field of surface modification of medical magnesium and magnesium alloys, thanks to its good corrosion inhibition and degradation performance. On this basis, it is clearly pointed out that, in order to achieve the biological activity and versatility of medical magnesium alloy implant materials, the best way is to adopt the MAO/PCL (MAO/CS) composite coating as the base coating and make the cross combination of PCL (CS) coating and other coatings. Finally, the evolution direction of magnesium alloy MAO/organic composite coating is scientifically predicted.KEY WORDS: magnesium alloy; micro-arc oxidation; organic materials; composite coating; evolution direction作为人体所必须的营养元素，镁不但辅助600多种酶的合成(包括参与、维护DNA和RNA聚合酶的正确结构和活性)，而且改善胰岛素稳定和糖类正常代谢、舒张血管、降低冠心病、高血压及糖尿病的患病风险[1]。

紧凑型单能伽马射线源

紧凑型单能伽马射线源
杜应超;陈寒;张鸿泽;高强;田其立;迟智军;张智;查皓;施嘉儒;颜立新;邱睿;程诚;杜泰斌;李任恺;陈怀璧;黄文会;唐传祥
【期刊名称】《强激光与粒子束》
【年(卷),期】2022(34)10
【摘要】基于高亮度电子束与超短强激光相互作用的逆康普顿散射X/γ射线源具有单色性好、能量可调、偏振可控等特点,在核安全及核安保领域具有广泛的应用前景。

清华大学将研制国际上首套能量达MeV的紧凑准单能伽马源装置并开展包括先进辐射成像、基于核共振荧光的物质分析检测等应用工作。

给出该光源设计方案,以及针对其关键性能指标进行的优化及光源最终性能指标。

目前已完成光源的设计,正在进行部件的加工采购,预计将于2023年启动装置的安装调试工作,于2025年完成项目的调试和验收。

【总页数】9页(P89-97)
【作者】杜应超;陈寒;张鸿泽;高强;田其立;迟智军;张智;查皓;施嘉儒;颜立新;邱睿;程诚;杜泰斌;李任恺;陈怀璧;黄文会;唐传祥
【作者单位】清华大学工程物理系;北京师范大学核科学与技术学院
【正文语种】中文
【中图分类】TL929;TL53
【相关文献】
1.脉冲中子源密度测井俘获伽马射线强度的数值模拟
2.基于单能窄束伽马射线算法计算高分辨率屏蔽自然伽马探测器的三维测井响应
3.紧凑型玉米掖单12号产量源库特征及高产栽培对策
4.中国散裂中子源反角白光中子
源束内伽马射线研究5.头部多源伽马射线立体定向放射治疗机房屏蔽效果计算与分析
因版权原因，仅展示原文概要，查看原文内容请购买。

飞秒激光双光子聚合方法加工图案化微透镜及其成像测试

第28卷第12期2020年12月光学精密工程Optics and Precision EngineeringVol.28No.12Dec.2020文章编号1004-924X(2020)12-2629-07飞秒激光双光子聚合方法加工图案化微透镜及其成像测试苏亚辉1>2'3*,秦天天】，许兵4，吴东4(1.安徽大学电气工程与自动化学院，安徽合肥230601；2.安徽大学电子信息工程学院，安徽合肥230601；3.信息材料与智能感知安徽省实验室，安徽合肥230601；4.中国科学技术大学精密机械与精密仪器系，安徽合肥230022)摘要：为改善以往图案化透镜加工工艺复杂、制造技术昂贵、图案设计方面有限制等缺点，本文将飞秒激光双光子聚合加工技术应用于图案化微透镜的快速、高精度加工。

通过球面波因子的变形设计了不同图案的微透镜，利用飞秒激光双光子聚合加工技术在光刻胶样品中加工出图案化的微透镜，然后将光刻胶样品置于显影液中去除未聚合部分，得到图案化微透镜，最后对图案化微透镜进行成像测试和光强均一化分析。

将LED光源分别置于不同图案微透镜的下方，光线透过图案化微透镜成功聚焦出光强一致的焦点图案。

实验结果表明，使用飞秒激光双光子聚合加工可以实现灵活可控的3D图案化微透镜结构的加工，采用加工功率为7mW，曝光时间为2ms，扫描xy步距为0.5pm，步距为0.8〜1.5卩m,不仅保证了微透镜结构表面光滑，而且实现了微透镜的快速加工。

该技术在加工光学超材料、光学微器件、集成光学器件等方面具有广阔的应用前景。

关键词：激光加工；飞秒激光；双光子聚合；微透镜；光刻胶中图分类号:TN249文献标识码：A doi：10.37188/OPE.20202812.2629Patterned microlens processed using two-photon polymerization of femtosecond laser and its imaging testSU Ya-hui1,2,3*,QIN Tian-tian1,XU Bing4,WU Dong4(1.School of E lectrical Engineering a^id Automation，Anhui Uni r v ersity，Hefei230601，China；2.School of E lectronic Information Engineering，Anhui University，Hefei230601，China；3.AnhuiProvincialLaboratory of InformationMaterialsandlntelligentPerception，Hefei230601，China；4.Department of P recision Machinery and Precision Instrumientation，University of Science and Technology of China，Hefei230022，China)*Corresponding author，E-mail：u stcsyh@Abstract：Two-photon polymerization technology for use in a femtosecond laser was used in the rapid and high-precision processing of a patterned microlens to improve the previous shortcomings，including a com-收稿日期:2020-09-01；修订日期：2020-09-28.基金项目：安徽省高等教育学校自然科学基金重点项目(No.KJ2018A014)；中国博士后科学基金会资助项目(No.2019M662190)；中央高校基础研究经费资助项目(No.WK2090000016)2630光学精密工程第28卷plex processing technology,expensive manufacturing technology,and limited pattern design.First,threedimensional software was used to design the microlens pattern through the deformation of the spherical wave factor,and the two-photon polymerization processing technology for a femtosecond laser was used to process the patterned microlens in the photoresist sample.The sample was then placed in a developer to remove the unprocessed area and obtain the corresponding patterned microlens.Finally,an imaging test and a light intensity homogenization analysis of the patterned microlens were carried out.An LED light source was placed below the patterned microlens,and the light was successfully focused through the patterned microlens to obtain the corresponding patterns with the same light intensity.The experiment shows that the two-photon polymerization of a femtosecond laser can realize the flexible and controllable processing of a 3D microlens structure,a processing power of7mW,an exposure time of2ms,a scanning xy-step of0.5 pm,and a z-step of 0.8-1.5pm,ensuring the smooth surface of the microlens structure and realizing a rapid microlens processing.The two-photon polymerization technology for a femtosecond laser will play an important role in the processing field such as optical metamaterials，optical microdevices，and integrated optical devices.Key words:laser fabrication；femtosecond laser；two-photon polymerization；microlens；photoresist1引言光学器件的小型化、集成化是现代光学系统发展的重要趋势［11o近几十年来，作为一种重要的微光学器件，微透镜由于其体积小、质量轻、光学性能优异等优点在微成像［21、光束整形［31、人工复眼［41等方面的应用十分广泛。

飞秒激光制备可见光水分解催化Fe纳米晶

低，宜大规模生产。但是Ｆ的电荷扩散长度很短，有几ｎ到几十ａ这对光致载流子的收集来说适］ｅＯ。仅ｍｍ，很困难，大量研究都致力于改善其电荷扩散距离，中对表面形貌的改善就是一种有效的提高电荷收集能力的其
氧气，此催化剂不需要放在特定的体系中。在光催化过程中Ｆ纳米晶被氧化成Ｆ。纳米晶，ｅｅｏ。氧化过程中吸
收了水分解生成的氧气。表面纳米微结构改善了其电荷扩散距离，使其具有光催化特性生成了氢气。
参考文献：
手段。飞秒激光脉冲作用产生的纳米微结构，光致载流子提供了有效传输途径，为增加了ｚ纳米晶表面产生光致载流子，分子捕获Ｆ纳米晶表面产生的电子，ｅＯ。水ｅＯ。被
光催化水分解的实现。．
金属颗粒纳米微结构光催化仅见Ｃｏ金属颗粒光催化的报导，见关于Ｆ金属颗粒纳米微结构光催化鲜ｅ报导。Ｆ纳米晶经光催化后出现棕红色物质和六面体结晶物，ｅ这说明Ｆｅ纳米晶被氧化成了Ｆ。纳米晶。ｅＯ。Ｆ。带隙在２０．Ｖ之间，ｅＯ。．～２２ｅ这对可见光光催化是很有利的，时自然界中储量很丰富，且加工成本很同并
１３８２９ — ４１３（）：３８２０．
［］ＯｓｅｌｈＦＥ，ａｋｎｏ２ｔｒｏＰｒｉｓｏＢＡ．Ｒｅｅｔｄｖｌｐｎｓｉｏａａｅ－ｐｉｉｇｐ０ｏａａｙｉ［］ｃｎｅｅｍｅｔｓｌｒｗｔｒｓｌｔｈｔｃｔ１ｓＪ．ＭＲＳＢｕｌｉ，０１６１：７２．ｏｎｔｎｓｌｔｎ２１，３（）１－２ｅ

仿生润湿阵列微芯片开发和生物医学应用

仿生润湿阵列微芯片开发和生物医学应用下载提示：该文档是本店铺精心编制而成的，希望大家下载后，能够帮助大家解决实际问题。

文档下载后可定制修改，请根据实际需要进行调整和使用，谢谢！本店铺为大家提供各种类型的实用资料，如教育随笔、日记赏析、句子摘抄、古诗大全、经典美文、话题作文、工作总结、词语解析、文案摘录、其他资料等等，想了解不同资料格式和写法，敬请关注！Download tips: This document is carefully compiled by this editor. I hope that after you download it, it can help you solve practical problems. The document can be customized and modified after downloading, please adjust and use it according to actual needs, thank you! In addition, this shop provides you with various types of practical materials, such as educational essays, diary appreciation, sentence excerpts, ancient poems, classic articles, topic composition, work summary, word parsing, copy excerpts, other materials and so on, want to know different data formats and writing methods, please pay attention!引言仿生润湿阵列微芯片是一种结合仿生学原理与微技术的创新产物，其在生物医学领域具有广阔的应用前景。

美国科学家演示全球首次纳米尺度波导

美国科学家演示全球首次纳米尺度波导
无
【期刊名称】《军民两用技术与产品》
【年(卷),期】2011(000)007
【摘要】美国能源部下属劳伦斯伯克利国家实验室的研究人员基于“混合等离激元（HPP）”演示了首个真正的纳米尺度波导。

【总页数】1页(P26-26)
【作者】无
【作者单位】不详
【正文语种】中文
【中图分类】TN814
【相关文献】
1.美国科学家首次合成石墨烯纳米带 [J], ;
2.我国首次发现保偏等离激元纳米波导和纳米光子路由器 [J],
3.美首次演示纳米尺度波导可用于新一代光子集成电路及光子计算机 [J],
4.美国科学家首次利用纳米通道技术来精确检测DNA [J], 贾红春
5.美首次演示纳米尺度波导 [J],
因版权原因，仅展示原文概要，查看原文内容请购买。

用聚焦飞秒激光描绘未来计算机用芯片

用聚焦飞秒激光描绘未来计算机用芯片
邱建荣
【期刊名称】《《科技中国》》
【年(卷),期】2004(000)001
【摘要】现在的计算机用芯片采用光刻等精细半导体工艺，形成高度集成的平面电路。

为了提高计算机的运行速度和运算能力，一个研究方向是进一步挑战半导体加工极限，使线路更精细，功能结构更紧凑密集。

【总页数】1页(P32)
【作者】邱建荣
【作者单位】中国科学院上海光学精密机械研究所
【正文语种】中文
【相关文献】
1.IBM纳米新技术为未来超微计算机芯片提供基础 [J], 方明
2.聚焦3GSM大会,描绘产业未来 [J],
3.用聚焦飞秒激光描绘未来计算机用芯片 [J], 邱建荣
4.聚焦开放合作创新,描绘未来发展蓝图——京津沪渝综合性工程咨询单位第六届年会在渝成功召开 [J], 重咨集团
5.英特尔未来芯片:重构计算机,改写人机交互 [J],
因版权原因，仅展示原文概要，查看原文内容请购买。

基于电光聚合物薄膜的芯片式光学硅基电场传感器传感及温度特性研究

基于电光聚合物薄膜的芯片式光学硅基电场传感器传感及温度特性研究饶宇飞;魏诗超;刘阳;刘景轩;李海峰;梁纲;杨庆;陈柠【期刊名称】《高压电器》【年(卷),期】2024(60)4【摘要】“双碳”背景下,新型电力系统的数字化转型对电力传感技术提出了更高的要求。

文中针对光学电场传感器温度稳定性差的问题,提出了基于电光聚合物薄膜的芯片式光学硅基电场传感器。

首先介绍了电光效应原理,电光聚合物的2阶非线性光学效应以及电光能量耦合方法,其次设计了传感器的加工流程并完成了制备,同时在敏感芯片上成功涂覆电光聚合物,最后通过搭建实验测试平台,完成了传感器的线性度、交流响应以及温度特性测试。

实验结果表明,所制备的光学电场传感器在工频电场下拥有较好的线性度且灵敏度高达0.945 mV·(kV·m^(-1))^(-1),传感器在0~75℃温度范围内输出幅值及相位稳定,其幅值比最大波动为0.481 dB,相位差最大为3.82°。

文中提出的传感结构切实可行地提升了光学硅基集成电场传感器的温度特性,为硅基集成光学电场传感器在电力系统中的使用提供参考方案。

【总页数】7页(P65-71)【作者】饶宇飞;魏诗超;刘阳;刘景轩;李海峰;梁纲;杨庆;陈柠【作者单位】国网河南省电力公司电力科学研究院;河南诺盾科技有限公司;重庆大学电气工程学院【正文语种】中文【中图分类】TP2【相关文献】1.一种基于多孔硅微腔光学特性的气体传感器的研究2.基于DE-SVM的硅基压阻式压力传感器温度补偿研究3.高精度硅基集成光学温度传感器研究4.基于氮化钛薄膜表面等离子体共振特性的双芯光子晶体光纤温度传感器（英文）5.基于Comsol软件仿真技术的光学式电场传感器特性研究因版权原因，仅展示原文概要，查看原文内容请购买。

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#133139 - $15.00 USD
Received 10 Aug 2010; revised 5 Sep 2010; accepted 8 Sep 2010; publisOSA
27 September 2010 / Vol. 18, No. 20 / OPTICS EXPRESS 21490
Abstract: Femtosecond laser micromachining of glass material using lowenergy, sub-ablation threshold pulses find numerous applications in the fields of integrated optics, lab-on-a-chips and microsystems in general. In this paper, we study the influence of the laser-deposited energy on the performance of the micromachining process. In particular, we show that the energy deposited in the substrate affects its etching rate. Furthermore, we demonstrate the existence of an optimal energy deposition value. These results are not only important from an industrial point-of-view but also provide new evidences supporting the essential role of densification and consequently stress-generation as the main driving factor promoting enhanced etching rate following laser exposure.
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Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy.
Sheeba Rajesh and Yves Bellouard
Micro- & Nano- Scale Engineering, Mechanical Engineering Department, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands. y.bellouard@tue.nl
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