集成电路版图设计7

集成电路版图设计7
教师：张喜凤
内容提要
• • • • PMOS管版图的绘制 NMOS管版图的绘制 CMOS反相器版图的绘制 LVS反相器
需说明的问题
• 一个files里可以包含多个cell • 编辑时可先按照pdf文档的提供的编辑顺 序及尺寸进行编辑绘图，完成后可以尝 试变换尺寸及位置查看错误所在，有利 于领会DRC（设计规则检查） • 绘图单位为lambda
Rule Type Rule Layers
Spacing Surround Surround Exact Width Spacing Surround Spacing Spacing Spacing Metal1 to Metal1 Poly Contact to Metal1 Active Contact to Metal1 Via NotOnPad Via NotOnPad to ViaNotOnPad Via NotOnPad to Metal1 Via NotOnPad to Poly Contact Via NotOnPad to Active Contact Via NotOnPad to Poly
ActCnt_not_on_act
Active to Poly N Select P Select N Select to N Select P Select to P Select pSelect&nSelect Not Selected Active 2 Lambda 2 Lambda 2 Lambda 2 Lambda 2 Lambda
Rule DisLeabharlann ance10 Lambda
0
1.3 Well to Well (Same potential ) Spacing
2.1 Active Minimum Width 2.2 Active to Active Spacing 2.3a Source/Drain Active to Well Edge 2.3b Source/Drain Active to Well spacing 2.4a WellContact (Active) to Well Edge 2.4b SubsContact(Active) to Well spacing
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
5.1A Poly Contact Exact Size 5.2A/5.6B FieldPoly Overlap of PolyCnt 5.2b Not Exists: PolyCnt not on Poly
Rule Type Rule Layers
Rule Distance
3 Lambda 1 Lambda 1 Lambda 2 Lambda 3 Lambda 1 Lambda 2 Lambda 2 Lambda 2 Lambda
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
8.5b Via(On Poly) to Poly Edge 8.5c Via to Active Spacing 8.5d Via (On Active) to Active Edge 9.1 Metal2 Minimum Width
Spacing
Exact Width Surround Spacing Spacing Minimum Width
Poly Contact to Poly Contact
Active Contact Active Contactto field active Active Contactto Active Contact Active Contact to gate1 Metal1
6 Lambda
3 Lambda 3 Lambda 5 Lambda 5 Lambda 3 Lambda 3 Lambda
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
3.1 Poly Minimum Width 3.2 Poly to Poly Spacing 3.3 Gate Extension out of Active 3.4a/4.1a Source/Drain Width 3.4b/4.1b Source/Drain Width 3.5 Poly to Active Spacing 4.2a/2.5 Active to N-Select Edge 4.2a/2.5 Active to P-Select Edge 4.3a Select Edge to ActCnt
范例NMOS管相关图层的尺寸
• • • • • Active 14*5 N Select 18*9 Poly 2*9 Active Contact 2*2 Metal1 4*4
范例反相器相关图层的尺寸
• ndiff to N Well 5 Lambda • PMOS 基板节点元件 N Well 15*15 Active 5*5 N Select 9*9 Active Contact 2*2 Metal1 4*4 • NMOS 基板节点元件 Active 5*5 P Select 9*9 Active Contact 2*2 Metal1 4*4
Rule Distance
2 Lambda 2 Lambda 2 Lambda 3 Lambda 3 Lambda 1 Lambda 2 Lambda 2 Lambda 1 Lambda
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
4.3b Select Edge to ActCnt
Rule Type
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
1.1 Well Minimum Width
1.2 Well to Well (Different potential ) Not checkd
Rule Type
Minimum Width
Minimum Width
Rule Layers
N Well
Rule Type
Minimum Width Spacing Extension Extension Extension Spacing Surround Surround Surround
Rule Layers
Poly Poly to Poly Active to Poly Poly to n Active Poly to p Active Poly to Active Active not in NPN to NSelect Active not in NPN to PSelect Active Contact to ndiff
Exact Width Surround Not Exist Poly Contact Poly Contact to Field Poly PolyCnt_not_on_Poly
Rule Distance
2 Lambda 1.5 Lambda
5.3A PolyContact to PolyContact Spacing
Surround
Rule Layers
Active Contact to pdiff
Rule Distance
1 Lambda
4.3c Not Exists: ActCnt not on Active
4.3 Gate Extension out of Active 4.4a Select Edge Width 4.4b Select Edge Width 4.4c Select to Select Spacing 4.4d Select to Select Spacing 4.5 Not Existing: pSel Overlap of nSel 4.6 Not Existing: Not Selected Active Extension Minimum Width Minimum Width Spacing Spacing Not Exist Not Exist
6.1A Active Contact Exact Size 6.2A FieldActive Overlap of ActCnt 6.3A ActCnt to ActCnt Spacing 6.4A Active Contact to Gate Spacing 7.1 Metal1 Minimum Width
2 Lambda
2 Lambda 1.5 Lambda 2 Lambda 2 Lambda 3 Lambda
MOSIS/ORBIT 2.0U SCAN设计规则
Rule
7.2 Metal1 to Metal1 Spacing 7.3 Metal1 Overlap of PolyContact 7.4 Metal1 Overlap of ActiveContact 8.1 Via Exact Size 8.2 Via to Via Spacing 8.3 Metal1 Overlap of Via 8.4a Via to PolyContact spacing 8.5b. Via to ActiveContact Spacing 8.5a Via to Poly Spacing
Spacing
Minimum Width Spacing Surround Spacing Surround Spacing
N Well to N Well
Active Active to Active P diff to N Well N diff to N Well N Active to N Well P Active to N Well
范例反相器相关图层的尺寸
• 输入端口（poly contact） Poly contact 2*2 Poly 5*5 Metal1 10*4 Via 2*2 Metal2 4*4 • 输出端口 Via 2*2 Metal2 4*4