ALIGNER
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专利名称：ALIGNER
发明人：NEMOTO YOSHIJI,根本 芳司,KODA TORU,香田
徹
申请号：JP特願平7-127457
申请日：19950428
公开号：JP特開平8-306617A
公开日：
19961122
专利内容由知识产权出版社提供
专利附图：
摘要：PURPOSE: To provide an aligner capable of high precision projection alignment of a pattern on a mask on a large substrate surface of a liquid crystal display panel or the like, by preventing vibration and heat of an illumination system from travelling to other
parts of an equipment, in an aligner using a mirror projection optical system. CONSTITUTION: This aligner is equipped with the following; a slit imaging system 5, an illumination system 1 which illuminates a mask surface, in a slit type, via the slit imaging system, with an exposure light, a discharging means 13 which discharges the heat generated from the illumination system, a projection optical system 7 which projects a pattern on the mask surface illuminated in the slit type on a substrate surface, and a driving means 10 which relatively moves the mask and the substrate to the projection optical system. The illumination system and the slit imaging system are so isolated that a space exists between the cabinets of the systems.
申请人：CANON INC,キヤノン株式会社
地址：東京都大田区下丸子3丁目30番2号
国籍：JP
代理人：伊東 哲也 (外1名)
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