METHOD AND SYSTEM FOR FABRICATING A PIEZOELECTRIC
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专利名称：METHOD AND SYSTEM FOR FABRICATING A
PIEZOELECTRIC DEVICE
发明人：Suryaprakash Ganti,Leonard Eugene
Fennell,Ming Tung,Brian James Gally
申请号：US16723363
申请日：20191220
公开号：US20210193900A1
公开日：
20210624
专利内容由知识产权出版社提供
专利附图：
摘要：A method for providing a piezoelectric device is described. The method includes providing a first electrode layer on a substrate and coating at least one layer of
piezoelectric material. The coating using at least one of clot-die coating, dip coating, aerosol coating and R2R coating such that a layer of the at least one layer of piezoelectric material has a variation in thickness of not more than ten percent. The layer(s) of piezoelectric materials are also heat treated. Multiple layers of piezoelectric material may be slot-die coated and heat treated to provide a multilayer having the desired thickness. A second electrode layer is provided on the layer(s) of piezoelectric material.
申请人：Frore Systems Inc.
地址：San Jose CA US
国籍：US
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