mems 应用分析(李政璋)

New ver.:
MEMS & IC in different dies
Delta Confidential
Ref. Yole Oct. 2009
Accelerometer
More information about ADi Accelerometer (another file )
Delta Confidential
Comparisons of Approaches
- How to integrate mechanics and electronics -
p2-Chip approach (Hybird):
pMonolithic approach: (ADI-old, MEMSIC, …) ØSmall size ØLow cost at high volumes at high yields ØSimpler packaging Ølonger time-to market Ølower flexibility
主題 ：微機電系統 報告人：李政璋 John Lee
時間 ： Nov. 16, 2010
Delta Confidential
MEMS Market
Delta Confidential
MEMS Market
Delta Confidential
Ref. Yole
MEMS Foundry
Delta Confidential
Delta Confidential
Introduction
Delta Confidential
Applications
Delta Confidential
InvenSense
MEMS gyro wafer with batch processed wafer-scale integration
Delta Confidential
Ref. Yole; Jason
InvenSense
Delta Confidential
Ref. Yole; Jason
InvenSense
IDG-300 Dual-Axis Angular Rate Gyroscope Sensor
- Based on Nasiri-Fabrication process - Wafer-to-wafer bonding process allows for direct integration of the fabricated MEMS wafers to any off-the-shelf CMOS wafers at wafer level. (offer hermetic environment for Gyro.) - Replace the using of traces & wire bond interconnects (Larger S/N ratio ) - Allow plastic package in standard IC assembly avoiding the need for more costly and customized ceramic. (10X cost than plastic package )
ASIC
SOI? SOI??
The cap cavities feature 8-side “pyramid” structures –may provide support during thinning of MEMS wafer, after fusion bonding, and also during eutectic wafer bonding to ASIC.
Delta Confidential
ASIC die
Cavity Ref. Yole; Jason
InvenSense
-Using eutectic bonding (GeAl) of the MEMS wafers directly to the aluminum layer on the CMOS wafer ( to replace the using of traces & wire bond interconnects which add major sources of signal attenuation and noise due to parasitics and the environment.) - Electrodes drive the sensor into rocking vibration. (electrostatic force actuating) ������ - Coriolis forces induce lateral motion in plane, sensed by capacitor plates. (capacitance change sensing )
Delta Confidential
Delta Confidential
Ref. Yole; Jason
InvenSense
IDG-300 Dual-Axis Angular Rate Gyroscope Sensor
- Device fabrication uses a three-wafer process������ - 500 um cap, with wet-etched MEMS cavity, and top-side Al metallization������ - 35 um deep reactive ion etched (DRIE) bulk silicon MEMS, oxide fusion bonded to cap wafer and eutectic Ge Al-bonded to ASIC wafer - Integrated ASIC uses 0.5 um, three metal, BiCMOS- DMOS process, with DRIEetched cavities for MEMS.
InvenSense, Inc. is a fabless MEMS design house and the leading provider of motion sensing solutions for consumer products. The innovative NasiriFabrication process is the patented fabless technology. Based on its NasiriFabrication, it has culminated in the world’s first integrated dual-axis gyroscope which overcomes the major challenges for adoption into handheld consumer products.
Delta Confidential
Accelerometer
Delta Confidential
Ref. ADI
Accelerometer
Delta Confidential
Ref. Dr. George Collines
Accelerometer
Old ver.: MEMS & IC in the same die
MEMS Foundry
TSMC: 8” MEMS line UMC: 8” MEMS line
Delta Confidential
Ref. Yole
MEMS in Cellular Phone
Delta Confidential
MEMS in Cellular Phone
Delta Confidential
ASIC
Solder Balls
Delta Confidential
Ref. Yole; Jason
InvenSense
~27% >$1.3 (50% gross profit)
~54%
~$2
~19%
$15 (Assumed)
Delta Confidential
Ref. Yole; Jason
Accelerometer
Delta Confidential
Applications
Delta Confidential
Ref. Game in Wii (file)
Delta Confidential
Applications
Delta Confidential
Ref. ADi
Accelerometer
Delta Confidential
Ref. Yole; Jason
InvenSense
Possible Process
1st Si substrate where cavities and pyramids formed. -> 2nd Si substrate bonded with 1st Si substrate. -> Thining 2nd Si substrate until required structure thickness -> PR lithography, DRIE, pyramids revealed too. -> bonding to ASIC substrate (ASIC using epi-layer offer better performance ? )
FBAR Filter
Delta Confidential
Introduction
Delta Confidential
Introduction
Delta Confidential
Introduction
• Current Conditions