基于CMOS技术的太赫兹源和探测器设计@UCMMT2020
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Design of THz Source and Detector in CMOS
Leijun Xu，Zhijian Xie
School of Electrical and Information Engineering, Jiangsu University
OUTLINES
11Background 12THz source design 13
Fabrication & Measurement 14THz detector design Conclusion
15
Application: security, biomedical imaging, quality detection, etc.
1. Background
(a) THz-TDS (b) THz detection system based on
solid-state circuits
Low f max
Output power, DC-to-THz efficiency
Limits
On-chip antenna
THz detector
Matching
CMOS Challenges
Silicon substrate High loss
Specifications: Output power, DC-to-THz efficiency, Tuning range, etc.
Source types
Multiplier Oscillator
Harmonic Oscillator
The fundamental component is subtracted, while second harmonic is superimposed .
Output of the V 1:
Output of the V 2:
Output of the oscillator:
100
()cos()
n n V t a n t ωϕ∞
=+∑200()co s()
n n V t a n t n ωϕπ∞
=++∑out 1202,4,...
()=()()2cos()
n n n V t V t V t a n t ωϕ∞
=+=
+∑
Push-push oscillator Equivalent circuit
Y in1
Y in2
V out(t)
Y L
V 1(t)
V 2(t)
A
◆Triple-push oscillator’s third harmonic is superimposed, which is similar to push -push structure.
Our propsed Push-push VCO: (1) improved output power (2) bulk voltage control
Schematic of push-push VCO Output power
On-chip antenna with rectangular slot (280~340GHz)
Ground Plane
M10
M1
Model of the on-chip antenna with rectangular slot S11 of the on-chip antenna
1×2 VCO array
Schematic of1×2 push-push VCO
On-chip antenna with T-shaped slot for 1×
2 push-push VCO
Model of the on-chip antenna with T-shaped slot S11 of the on-chip antenna
2. THz source Design
3. THz detector design Sensitivity is the most concerned for THz detector.
Direct
Detection modes
Heterodyne
Principle of self-mixing detection for MOSFET.
CMOS or HEMT
0g ds ds i G V =（V ）g g g =cos =cos +ds ds ds ds ds g g V V V V V V V V V V δδωδδδωφδ⎧⎧→+⎪⎪⇒⎨⎨→+⎪⎪⎩⎩（） （）Background current Photon current 0g ds 0g g 1+cos 2ds ds i G G V δδφ=（V ）V （V ）V （） a.Materials with higher electron mobility;b.An efficient THz antenna.
Antenna efficiency
3. THz detector design
40nm CMOS
Dyakonov-Shur theory ：()th gs RF
V V V U --=∆42Principle of self-mixing detection for MOSFET.
3. THz detector design