气体性质表 Gas Classification Sheet

C4F6 PH3 SiHCl3 Si2H6 SiH4 < 0.67% 0.67-10% < 10% < 10% < 0.4% 0.4-10% ≤ 10% ≤ 10% <4.1% 4.1-25% <3% 3-10% ≤ 5% 5% 10% < 6.1% 6.1-92% < 2.8% 2.8-20% < 2.8% 2.8-20% <2.9% 2.9-15% <8.7% 8.7-15% < 5.7% 5.7-15% < 8.2% < 8.2% 8.2-27% Any% <3% 3-99% < 0.72% 0.72-3% 3-23% ≤ 23% ≤ 20% < 2% < 1.39% 1.39-2% 2-30% <3% 3-10% 10-25% < 2%
L L L L G G G G G G G G G G G G G G G G G G G G G G G ቤተ መጻሕፍቲ ባይዱ G G G G G G G G G G G G G G G G G G G G G G G
I
I I
I I I I
I I
I
SiH4( inert) SiH4( inert) SiH4( inert, H2)
GAS CLASSIFICATION
Cylinder Molecular Pressure（气 Formula（分子 瓶压力） 式） (psig) Column2 Column3 Ar 2640 CO2 838 CF4 2000 CHF3 611 C2F6 415 C3F8 99 C4F8 25 C4F8O 17.07 He 2640 N2 2640 SF6 295 C2H2F4 70 Xe 750 NF3 1450 N2O 738 O2 2640 BCl3 4.9 Cl2 84 ClF3 6.7 HBr 296 HCl 614 HF -0.56 NO 400 C5F8 -2.5 SiF4 1000 SO2 35 WF6 2.3 C2H2 250 D2 1660 C2H4 1200 CH2F2 206 CH3F 491 H2 2640 CH4 2400 (CH3)SiH3 188 (CH3)3SiH3 9 NH3 114 AsH3 203 CO 1650 SiH2Cl2 8.5 GeH4 150 H2S 248 Gas（气体状 态） Liq Column4 G L G L L L L L G G L L G G L G L L L L L L G L G L L G G G L L G G L L L L G L G L I Column5 I I I I I I I I I I I I I
W W W W
C C C C
LT T T T LT T T T
O O F
O O W W
C C
LT T F P P F F F F LT F
C C C
O LT T HT HT HT F P P P F F P W W C C C LT T F F F
F P
0ppm m 0000ppm
剧毒 有毒的 低毒性 压缩气体 液化压缩气体
剧毒 有毒的 低毒 压缩 液化
O O O O O,W C C C C C C
LT
O W C C C
T T T T T T HT T T T T F F F F F F F F F F F F F P F
C
W W
C
LT HT LT T T T
W
C
T HT T
F P F P P F F P F F P F
1,3 Hexafluorobutadiene Phosphine Trichlorosilane Disilane Silane AsH3 (inert) AsH3 (inert) AsH3 (H2) AsH3 (SiH4) B2H6 (inert) B2H6 (inert) B2H6 (H2) B2H6 (SiH4) C2H4 (He) C2H4 (He) CF4 (O2) CF4 (O2) (CH3)SiH3 H2) CH4 Ar ( (P5)) CH4 Ar ( (P10)) F2( Inert) F2( Inert) GeH4( H2) GeH4( H2) GeH4 (inert) GeH4( inert) H2 (Ar) H2 (Ar) H2 (He) H2 (He) H2 (N2) H2 (N2) H2S (H2) H2S( inert) H2S( inert, H2) inert (inert) O2 (inert) O2 (inert) PH3( inert) PH3( inert) PH3( inert) PH3 (H2) PH3( SiH4) Si2H6( H2) Si2H6( inert) Si2H6( inert) Si2H6( inert, H2) SiH2Cl2( H2) SiH2Cl2( H2) SiH2Cl2( H2) SiH4( H2)
< 1.39% 1.39-2% 2-30%
> 1350 > 1350 > 1350
G G G
I
ION
备注：
O/W Column6
C Column7
T Column8
F/P Column9
I O W C F P HT T LT G L
inert (no hazard) 惰性 oxidizer 氧化 water reactive 水反应 corrosive - HPM 腐蚀 flammable - HPM 易燃 pyrophoric - HPM 自燃 Highly toxic. LC50 level 0-200ppm toxic. LC50 level 200-3000ppm Low toxic. LC50 level 3000-10000ppm compressed gas liquefied compressed gas
11 512.7 -4.7 32 1350 >1800 >1500 >1500 >1500 2100 2100 2100 2100 >1200 >1200 2000 2000 2000 2400 2400 > 400 > 400 > 249 > 249 > 249 > 249 2400 2400 2400 2400 2400 2400 > 248 > 248 > 248 2400 2200 2200 ≥ 1800 ≥ 1800 ≥ 1800 ≥ 1800 875 ≥ 1800 ≥ 1800 1800 > 100 > 900 > 900 > 500 > 1350
Product（产品） Column1 Argon Carbon Dioxide Tetrafluoromethane [H-14] Trifluoromethane [H-23] Hexafluoroethane [H-116] Octafluoropropane[R-218] Octafluorocyclobutane[H-C318] Perfluorotetrahydrofuran Helium Nitrogen Sulfur Hexafluoride Tetrafluoroethane Xenon Nitrogen Trifluoride Nitrous Oxide Oxygen Boron Trichloride Chlorine Chlorine Trifluoride Hydrogen Bromide Hydrogen Chloride Hydrogen Fluoride Nitric Oxide Octafluorocyclopentene Silicon Tetrafluoride Sulfur Dioxide Tungsten Hexafluoride Acetylene Deuterium Ethylene Difluoromethane [H-32] Methyl Fluoride Hydrogen Methane Methylsilane Trimethylsilane Ammonia Arsine Carbon Monoxide Dichlorosilane Germane Hydrogen Sulfide