MEMS_IMU介绍ppt课件
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Required to determine spin about gravity vector
az
ay
ax
IMU
18
9DOF Board – Sparkfun
Triaxial accelerometer
±3g, 300 mV/g, 550 Hz
Triaxial gyro
±300 deg/sec (dps), 3.3mV/dps, 140 Hz
Vehicle navigation
Intercontinental ballistic missiles (ICBM) Nuclear submarines Cruise missiles
MEMS
Automotive Consumer products
IMU
4
MEMS IMUs - Automotive
IMU
16
Two-Dimensional (2D) IMU
Biaxial accelerometer Uniaxial gyro
IMU
17
Three-Dimensional (3D) IMU
Triaxial accelerometer Triaxial gyro Triaxial magnetometer
IMU
11
MEMS accelerometer
IMU
12
MEMS gyro (torsion)
IMU
13
MEMS gyro (planar)
IMU
14
MEMS magnetometer (magnetoresistive)
IMU
15
MEMS IMU Outputs
Signal
Analog voltage (0 to 3V)
MicroElectroMechanical Systems (MEMS) Inertial Measurement Unit (IMU)
Attitude relative to gravity vector Magnetic heading Rotational velocity Translational acceleration
Fixed frequency, variable duty cycle
Digital (internal A/D converter)
Nominal Bandwidth
550 Hz for accelerometer
150 Hz for gyro
50 Hz for magnetometer
Automotive
Accelerometers to deploy airbags Vehicle roll handling
IMU
5
MEMS IMUs – Consumer Products
Games (WiiMote) PDA (iPhone) Camera stabilization Hard disks
IMU
1
Positives
Absolute rotational attitude of object Direct measurement of angular velocity Direct measurement of translational
acceleration
IMU
2
Negatives
Does not provide –
absolute location translational velocity rotational acceleration
Data communication Medium resolution < 150 Hz
IMU
3
History of IMUs
± 250, ± 500, ± 1000, and ± 2000dps
Triaxial compass On-board motion fusion, I2C serial
MEMS IMU
20
Triaxial magnetometer
50 Hz
On-board CPU, serial I/O
IMU
19
9DOF Chip – Invensense MPU-9150
Triaxial accelerometer
± 2g, ± 4g, ± 8g and ± 16g
Triaxial gyro
IMU
6
MEMS Fabrication
百度文库
IMU
7
MEMS accelerometer (proof mass)
acceleration
IMU
gravity
8
MEMS Comb Sensor/Drive
IMU
9
MEMS Differential Capacitance
IMU
10
MEMS Differential Capacitance
az
ay
ax
IMU
18
9DOF Board – Sparkfun
Triaxial accelerometer
±3g, 300 mV/g, 550 Hz
Triaxial gyro
±300 deg/sec (dps), 3.3mV/dps, 140 Hz
Vehicle navigation
Intercontinental ballistic missiles (ICBM) Nuclear submarines Cruise missiles
MEMS
Automotive Consumer products
IMU
4
MEMS IMUs - Automotive
IMU
16
Two-Dimensional (2D) IMU
Biaxial accelerometer Uniaxial gyro
IMU
17
Three-Dimensional (3D) IMU
Triaxial accelerometer Triaxial gyro Triaxial magnetometer
IMU
11
MEMS accelerometer
IMU
12
MEMS gyro (torsion)
IMU
13
MEMS gyro (planar)
IMU
14
MEMS magnetometer (magnetoresistive)
IMU
15
MEMS IMU Outputs
Signal
Analog voltage (0 to 3V)
MicroElectroMechanical Systems (MEMS) Inertial Measurement Unit (IMU)
Attitude relative to gravity vector Magnetic heading Rotational velocity Translational acceleration
Fixed frequency, variable duty cycle
Digital (internal A/D converter)
Nominal Bandwidth
550 Hz for accelerometer
150 Hz for gyro
50 Hz for magnetometer
Automotive
Accelerometers to deploy airbags Vehicle roll handling
IMU
5
MEMS IMUs – Consumer Products
Games (WiiMote) PDA (iPhone) Camera stabilization Hard disks
IMU
1
Positives
Absolute rotational attitude of object Direct measurement of angular velocity Direct measurement of translational
acceleration
IMU
2
Negatives
Does not provide –
absolute location translational velocity rotational acceleration
Data communication Medium resolution < 150 Hz
IMU
3
History of IMUs
± 250, ± 500, ± 1000, and ± 2000dps
Triaxial compass On-board motion fusion, I2C serial
MEMS IMU
20
Triaxial magnetometer
50 Hz
On-board CPU, serial I/O
IMU
19
9DOF Chip – Invensense MPU-9150
Triaxial accelerometer
± 2g, ± 4g, ± 8g and ± 16g
Triaxial gyro
IMU
6
MEMS Fabrication
百度文库
IMU
7
MEMS accelerometer (proof mass)
acceleration
IMU
gravity
8
MEMS Comb Sensor/Drive
IMU
9
MEMS Differential Capacitance
IMU
10
MEMS Differential Capacitance