微纳结构三维形貌高精度测试系统

第37卷第1期 光电工程V ol.37, No.1 2010年1月Opto-Electronic Engineering Jan, 2010

文章编号：1003-501X(2010)01-0019-06

微/纳结构三维形貌高精度测试系统

谢勇君1,2,3，史铁林2,3，刘世元2

( 1. 暨南大学电气自动化研究所，广东珠海 519070；

2. 华中科技大学数字制造装备与技术国家重点实验室，武汉 430074；

3. 武汉光电国家实验室(筹) 光电材料与微纳制造研究部，武汉 430074 )

摘要：为实现微/纳结构三维形貌的高精度测量，提出利用显微干涉技术和偏振技术相结合的方法来研制微/纳结构三维形貌亚纳米级精度测试系统。首先，利用五步相移干涉技术采集5幅带有π/2相移增量的干涉条纹图。然后，通过Hariharan五步相移算法得到包裹相位图。最后，利用分割线相位去包裹算法和相位高度关系转换得到微/纳结构三维形貌。在测试过程中通过偏振片产生强度可调的线偏振光，再由1/2波片改变偏振光在分光镜中的分光比，补偿参考镜与试件的反射性能差异，可得到亮度适中且对比度高的干涉条纹图，从而有利于实现微/纳结构三维形貌的高精度测量。系统的轮廓算术平均偏差R a的重复测量精度可达0.06 nm，最大示值误差不到±1%，示值变动性不到0.5%。通过对标准多刻线样板、硅微麦克风膜和硅微陀螺仪折叠梁的三维形貌测量验证了系统的有效性和实用性。

关键词：微/纳结构；显微干涉；偏振技术；三维形貌

中图分类号：TH741.8 文献标志码：A doi：10.3969/j.issn.1003-501X.2010.01.04 Measurement System for 3D Profile of Micro/Nano

Structures with High Resolution

XIE Yong-jun1,2,3，SHI Tie-lin2,3，LIU Shi-yuan2

( 1. Institute of Electric Automatization, Jinan University, Zhuhai 519070, Guangdong Province, China;

2. State Key Laboratory of Digital Manufacturing Equipment and Technology,

Huazhong University of Science and Technology, Wuhan 430074, China;

3. Division of Optoelectronic Materials & Micro-Nano Manufacture,

Wuhan National Laboratory for Opto-electronics, Wuhan 430074, China )

Abstract: In order to test 3D profile of micro/nano structures with high resolution, a measurement system was developed based on microscopic interferometry and polarization technique. First, five interferograms with π/2-phase increase were acquired by five-step phase-shift interferometry. Then wrapped phase maps were calculated with Hariharan five-step-phase-shift algorithm. Finally, 3D profile of micro/nano structure could be gotten with branch-cut unwrapping algorithm and the phase-height formula. A polarizer provided a polarization beam and adjusted its illumination power. The polarized beam was parceled into two perpendicular directions by a polarization-beam splitter, and the intensities proportion of the two beams could be adjusted by rotating a 1/2-waveplate making it possible to compensate the differences of the reflectances between the sample and the reference mirror. This arrangement allowed that the interferograms had the advantages of high contrast and optimum intensity, and this was useful to increase system

收稿日期：2009-07-13；收到修改稿日期：2009-09-03

基金项目：国家自然科学基金重点项目(50535030); 国家自然科学基金(50775090); 新世纪优秀人才支持计划(NCET-06-0639);

国家博士后科学基金(20070410930); 广东省自然科学基金博士研究启动项目(9451063201002281); 广东高校优秀青年创新人才

培育项目(LYM08019)；广西制造系统与先进制造技术重点实验室开放课题基金; 暨南大学青年基金项目(51208027).

作者简介：谢勇君(1977-)，女(汉族)，广西全州人。讲师，博士，主要研究工作是精密测控技术。E-mail:xyj919@。