半导体各工艺简介5
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Bubbler
Wet Thermal Oxidation
Techniques
Film Deposition
Deposition is the process of depositing films onto a substrate. There are three categories of these films:
* POLY
* CONDUCTORS
* INSULATORS (DIELECTRICS)
Poly refers to polycrystalline silicon which is used as a gate material, resistor material, and for capacitor plates.
Conductors are usually made of Aluminum although sometimes other metals such as gold are used. Silicides also fall under this category.
Insulators refers to materials such as silicon dioxide, silicon nitride, and P-glass (Phosphorous-doped silicon dioxide) which serve as insulation between conducting layers, for diffusion and implantation masks,and for passivation to protect devices from the environment.
…
MoF 6+SiH 4
WF 6+SiH 4……
+PH 3+O 2Cl 2+NH 3SiH 4+O 2SiO 2
SiH 2Cl 2Epi -Si
SiH 4Poly -Si
半导体工艺中所涉及的常用薄膜：
PSG = Phospho-Silicate Glass)
There are two major classifications of deposition techniques each having its own subset of related techniques:
Deposition Method:
Sputtering (溅射）
Evaporation (蒸发）