FMA-A2000系列气体质量流量计和控制器
AO2000操作手册
Limas11：铝化物采样检测器的清洁
Limas11：石英采样检测器的清洁
Limas11：安全采样器的清洁
Limas11UV：指示灯的更换
Limas11：放大器的优化
气体模块：更换过滤器
激活采样泵，采样泵输出的调整
改变模拟输出电流的量程
大气压力的修正
大气压力值的修正
校验的复位
充电电容：断电之后，电容10分钟之后放电完毕。
正确使用保险：必须使用熔断电流合适的保险，绝不可短接。
什么情况下不能继续使用：分析仪表已经很显然损坏了，或者已经使用，或者经过恶劣的环境中存储及运输。
第一章：安装准备工作
安装位置的选择
气路要短：气体分析仪离采样点越近越好。气样预处理装置离分析仪越短越好。
设备和人员安全：整套设备设计符合EN61010标准，为了设备和您的安全请认真与阅读本手册。
使用电气测量设备的安全提示
接地保护：完成其他接线之前先接地线。如果断开接地保护端子可能会对人员及设备造成伤害。
工作电压：确保工作电压在允许的范围之内。
开盖的风险：开盖之后电流有暴露得危险。
工作风险：操作之前必须断开所有电源。连接、断开电源需要有资质的人员来做。
Magnos17：
Magnos17：替换气的校验
4：
氧气检测器：
D节校验
分析仪模块手动校验
手动启动自动校验
第九章检查和维护
检查
检查气路密封性
Caldos15和Magnos17：更换温度连接机构
Uras14：光学对中
Uras14：相位对中
Limas11,Uras14：校验检测器的测量
Limas11,Uras14：线性化
FMA-1600A系列气体流量计说明书
Mass and Volumetric Gas Flow MetersFor Clean GasesU U p to 18 Hour Battery Charge on Portable“-B” Models U R anges of 0 to 0.5 SCCM Up to 0 to 3000 SLM U R eports Mass Flow, Volumetric Flow,Temperature, and Pressure U <10 ms Response Time—Field Adjustable U 130+ Gas Calibrations IncludingPure and Mixed Gases U P ressure, Temperature and Volumetric orMass Flow Simultaneously Displayed U N IST 5-Point Certificate Included U N o Straight Runs of Pipe Required U No Warm-Up TimeU Turndown Ratio of 200:1 (0.5% Maximum Flow)U RS232 StandardU Custom Live Gas Blend Programming U Store Up to 20 User Defined Gas BlendsThe FMA-1600A Series mass and volumetricflow meters use the principle of differential pressure within a laminar flow field to determine the mass flow rate. A laminar flow element (LFE) inside the meter forces the gas into laminar (streamlined) flow. Inside this region, the Poiseuille equation dictates that the volumetric flow rate be linearly related to thepressure drop. A differential pressure sensor is used to measure the pressure drop along a fixed distance of the LFE. This, along with the viscosity of the gas, is used to accurately determine the volumetric flow rate. Separate absolute temperature and pressure sensors are incorporated and correct the volumetric flow rate to a set of standard conditions. This standardized flow rate is commonly called the mass flow rate and is reported in units such as standard cubic feet per minute (SCFM) or standard liters per minute (SLM).Standard units include a 0 to 5V output (4 to 20 mA optional) and RS232 communications. The gas select feature can be adjusted from the front keypad or via RS232 communications. Volumetric flow, mass flow, absolute pressure, and temperature can all be viewed or recorded through the RS232 connection. It is also possible to multi-drop up to 26 units on the same serial connection to a distance of 38 m (125'). These flow meters are available in a portable version (“-B” option), the battery charge will last up to 18 hours.FMA-1600A SeriesSpecificationsAccuracy: ±(0.8% of rdg + 0.2% FS)Repeatability: ±0.2%Turndown Ratio: 200:1Response Time: 10 ms typical default response time for 63.2% of a step change. A variable register allows response time to be field adjustable to a certain extent via RS232 communications. The primary trade-off for response time is signal noiseOutput: 0 to 5 Vdc standardOperating Temperature: -10 to 50°C (14 to 122°F)Zero Shift: 0.02% FS/°C/atm Span Shift: 0.02% FS/°C/atmHumidity Range: 0 to 100% non-condensing Pressure (Maximum): 145 psig Measurable Flow Rate: 125% FSSupply Voltage: 7 to 30 Vdc (15 to 30 Vdc for 4 to 20 mA output)Supply Current: 35 mA typical current draw; 100 mA available supply recommended Cable Connection: 8-pin mini DINWetted Parts: 302 and 303 SS, FKM, heat cured silicone RTV, glass reinforced PPS, heat cured epoxy, aluminum, gold, brass, 430 FR stainless (416 stainless steel on large sizes), silicon, glassFMA-1603A includes 110 Vac power supply and a 1.8 m (6') cable 8-pin mini DIN connector,Shown smaller than actual size.Exploded View of InternalLaminar Flow Elements Absolute PressureSensorDifferential PressureSensor TemperatureSensorProgram Custom Mixed Calibrationsfor Bioreactors, Chromatography,Welding, Lasers, Stack/Flue, Fuel Gases and MoreComes complete with 24 Vdc universal power supply, 1.8 m (6') cable, 8-pin male Mini-DIN connector, operator’s manual, and NIST certificate. Units are calibrated to air @ 5 psig for 0 to 1 LPM, 15 psig for 2 to 10 LPM, 30 psig for 20 to 100 LPM, and 50 psig for 200 LPM and greater. Calibrations done at ambient 25ºC (77ºF) temperature only.To replace the standard RS232 communications with RS485, add suffix “-RS485” to the model number; for additional cost.Standard input is 0 to 5V, for optional 4 to 20 mA input add suffix “-IN” to the model number; no additional cost.Standard output is scaled to the mass flow rate. For volumetric flow rate as standard output add suffix “-VOL” to the model number; no additional cost. Standard output is 0 to 5V, for optional 4 to 20 mA output, add suffix, “-I” to model number; for additional cost.For two 4 to 20 mA output, add suffix “-I2” to model number; for additional cost.For two 0 to 5V output, add suffix “V2” to model number; for additional cost.**Optional secondary output are scaled the same as the primary output scale. For an alternate output scale add suffix “-T” to the model number for temperature or “-P” for pressure; no additional cost.For a portable version of the meter add suffix “-B” to the model number; for additional cost. Portable versions have an integral battery on the meter and come with one 9V battery installed. Option not available on “-I” or “I2” models where 4 to 20 mA is the chosen output.For units scaled in SCFH, add suffix “-SCFH” to model number; no additional cost. Please specify the desired range in SCFH.For totalizer option, add suffix “-TOT” to the model number; for additional cost. Please specify resolution.This is a 6-digit counter. Examples: For totalizing in liters with 1/100 liter resolution, the max count would be 9999.99. For totalizing in liters with 1 liter resolution, the max count would be 999999.Ordering Examples: FMA-1601A, 0.5 SCCM mass flow meter.FVL-1619A-VOL, 500 SCCM volumetric flow meter.。
FC2000说明书
第一章1.0 简介为了计算气体的总能量、体积量和瞬时流量而设计了2000型气体测量修正仪。
在计算时，使用了涡轮流量计的脉冲输出（或者超声流量计的输出）以及温度变送器和测量管线压力的压力变送器的输出。
如果需要的话，该修正仪可以使用预先设定的或者实时输入的气体相对密度（即比重）、气体的组分数据和热值。
为了计算气体流量，采用了以下几种计算气体压缩因子（Z因子）的方法，如：AGA 8,ISO12213和AGA 3 ，NX19。
对于一些特定应用场所，也可以采用固定的Z因子。
修正仪能够对所有实时输入的信号进行上、下限报警，而在报警的状态下，可以使用默认值来取代处于报警状态的参数以进行流量计算。
对于发生和取消报警的时间都有指示，同时也提供报警的输出信号。
本修正仪的特点是它采用数字通讯，温度与压力变送器都采用HART协议进行通讯，从而消除了校准修正仪及调节电位器的必要。
这一特点也限制了由于环境温度所带来的流量测量误差，只有温度和压力变送器的温度系数会产生误差。
修正仪有两个RS232/RS485串行数据通讯接口，为了能和系统的其他器件通讯，通讯协议为MODBUS ASCII，还有一个ASCII的串行通讯协议可以和大多数打印机通讯。
为了使操作数据和流量测量结果具有最大的安全性同时保持辅助功能的灵活性，修正仪具有编辑功能：既可以更改已选定的数据同时又利用临界数据保持其安全性。
为确保所有的信号都在设计要求的范围内，对所有的输入输出信号都进行测试。
当报警发生和清除时，每一个报警显示都记录发生和清除的时间。
如有报警发生时，可以选定将报警期间的累计总量单独累计并单独显示。
第二章2000型气体测量修正仪，它包括一个19英寸标准尺寸的安装支架（但只有1/2 宽），还包括和母板连接的许多接插件式的印刷电路板。
修正仪的前面板包括一个液晶显示屏，键盘，操作按钮和LED显示器。
液晶显示屏（LCD）是图形点阵式的，用于显示输入数据和流量信息。
FL-2000-AL流量计报警器说明书
Standard mode: In this mode, the FL-2000-AL Alarm will alarm when the float crosses the sensing line, and will alarm until the reset button is pressed. While alarming, the red LED will be lit, the buzzer will sound, and the logic output will change state.
GUIDE ROD
SPACER NUMBER
Y
NO SPACER REQUIRED
Y
ESP003
N
ESP004
Y
ESP005
N
ESP006
Y
ESP007
TABLE 1, SPACER SELECTION
The FL-2000-AL Alarm uses an optical based sensing system, it is important that the flowmeter that it is to be installed on is free of dirt, grease, and that no large scratches are present on the sides of the flowmeter. If the flowmeter appears dirty or scratched, prepare the flowmeter for installation of the FL-2000-AL Alarm by follow the cleaning instructions included with the flowmeter.
FMA-5000系列电子质量流量计说明书
D-xU Unique Built-In DigitalDisplay for Direct Readout in SCCM and SLM Units (FMA-5600 Series)U 13 Flow Ranges,from 0 to 10 SCCM to 0 to 40 SLMU Excellent Performance:±1.5% Accuracy FS, 0.5% Repeatability, and Time Response of 2 SecondsU NIST Certificate IncludedFMA-5000 Series electronic mass flowmeters combine high performance and versatility into a state-of-the-art, compact package. These flowmeters measure themass flow rate of gases in 13 ranges from 0 to 10 SCCM (standard cubic centimeters per minute), to 0 to 50 SLM (standard liters per minute). For the complete listing of ranges, see the “Flow Range Table” on the next page. Accuracy is 1.5% FS over a wide temperature and pressure range. Time response is 2 seconds to within 2% of final flow. These unique flowmeters are available with (FMA-5600) or without (FMA-5700) digital display. The display is a 31⁄2 digit LCD, tiltable to 180°. An optional power supply (12 to 24 Vdc) can be purchased separately (see “Accessory”).With their analog output, integral/remote digital display, insensitivity to temperature and pressure variations, and low cost, the FMA-5600 meters are idealsubstitutes for rotameters; they canFMA-5000also be used to calibrate rotameters. Other applications include chemical and food processing, research and development, gas chromatography, and leak and filter testing.A 0 to 5 Vdc (standard) or 4 to 20 mA (optional) output signal is linearly proportional to gas mass flowrate—for recording, data logging, or control. A 9-pin “D” subconnector for the output signal, input power, and remote display drive is supplied with its mating connector for all FMA-5000 Series units.All wetted surfaces are constructed of corrosion-resistant glass-filled nylon 66 plastic, 316 SS, and FKM O-rings. Ordering option “-ST” replaces the FNPT-ported nylon flow body with a 316 SS flow body with 1⁄4" compression fittings fortubing. (The “-ST” option is available on the FMA-5600 display unit only). The plastic flow body is suitable for use with non-toxic, non-flammable gases; the 316 SS flow body is suitable for higher pressures and hazardous gases.FMA-5610 with tiltable digital display shown smaller than actual size.FMA-5703shown smaller than actual size.N o w A v a i l a b l e i t h a R u gg e d 316 S S F l o w B od y !VERSATILE ELECTRONIC MASSDD-xflow monitoring devices.The flowmeter is operated by 2 RTD coils around the sensor tube, which direct a constant amount of heat into the gas stream. The gas mass flow carries heat from the upstream coil to the downstream coil. The resulting temperature difference (T2 - T1) is detected by the RTD coils, producing the output signal.SPECIFICATIoNSAccuracy: 1.5% FS includinglinearity over 15 to 25°C (59 to 77°F) and 5 to 60 psia; 4% FS over 0 to 50°C (32 to 122°F) and 1 to 150 psiaPower: 12 to 15 Vdc @ 100 mA max Response Time: 800 ms time constant; 2 seconds typical to within ±2% of final value over 25 to 100% FS Temperature Coefficient: 0.08 to 15% FS/°CPressure Coefficient: 0.01% FS/psi Maximum Gas Pressure: 150 psig for nylon flow body, 500 psig for 316 SS flow body; units are calibrated standard for 20 psigGas and Ambient Temperature: 0 to 50°C (32 to 122°F)Leak Integrity (Standard cc/s He): 1 x 10-4 for nylon flow body; 1 x 10-7 for 316 SS flow body Connections: 1⁄4 FNPT standard Electrical Connections: 9-pin sub “D” connector Weight: 0.91 kg (2 lb)†Note 1: To order the FMA-5000 Series with 4 to 20 mA output, add suffix “-I ” to the model number and consult Flow Engineering for price.Note 2: To order the FMA-5600 Series with 316 SS body and 1⁄4" compression fittings, add suffix “-ST” to part number. Consult Flow Engineering for price.factor is used to determine the flow rate and the digital display must be rescaled in the field. Or request “Special Calibration” for _________gas at _________ (temperature) and ___________ (pressure).”†† Add additional cost to price for range code “01” and “02”.Ordering Examples: FMA-5601, flowmeter with display, nylon body and 0 to 10 SCCM range.FMA-5702, flowmeter without display or nylon body, 0 to 20 SCCM.low BodyPlastic Flow Body。
流量计FL-2000A系列产品说明书
B-59SPeciFicAtioNSAccuracy: ±2% FS Repeatability: ±1%Dimensions: 48 x 43 mm(1.9 x 1.7") for 116°C (240°F) units Length: 121 mm (4.75") for 116°C (240°F) units; 168 mm (6.6") for 204°C (400°F) units Maximum Pressure: 241.3 bar (3500 psig)Maximum temperature: Standard: 116°C (240°F)optional: 204°C (400°F) at 124 bar (1800 psig) max Shipping Weight:Water Meters: 453 g (1 lb) oil Meters: 227 g (8 oz)The FL-2000A Series of general purpose flowmeters is designed to provide economical, accurate flow rate indication for oil and water. These industrial flowmeters utilize a spring-and-piston type assembly, which enables them to be mounted in any position and makes them immune to changes in viscosity. The FL-2000A meters can be used in severe environments, at up to 241.3 bar (3500 psig) and 116°C (240°F). Correlation equations with other fluids, are available in the user’s manual.U ±2% Full Scale Accuracy U ±1% RepeatabilityU Mounts in Any Position U Good Viscosity Stability U D irect Readings for oil or Water U 241.3 bar (3500 psig) Pressure Rating U VU t U F Pressure Drop: Approximate pressure losses in flowmeters using oil at normal temperatures. Add 10% to pressure for equal water flows.connections: 1⁄4 FNPTWetted Parts: Polyphenylene sulfide/ceramic magnet and FKM O-rings; FL-2100A has aluminum body and 302 SS spring; FL-2300ABR has brass body and 302 SS springECONOMICAL IN-LINE FLOWMETERSCAPACITIES: 0.05 to 2.0 GPM of Water, 0.05 to 2.0 GPM of OilFor units with BSPP threads add suffix “-BSPP ” to model number, no additional cost.For 204°C (400°F) units, add suffix “-H ” to model number, for additional cost. * “-H ” option not available with these units.Ordering Examples: FL-2301ABR, for a brass water flowmeter, 1.0 GPM. FL-2102A, aluminum oil flowmeter, 2.0 GPM.FL-2000A0.0510150.5 1.0 1.5 2.0Flow, GPMP r e s s u r e D r o p , p s i1/4"0.00.252460.50.75.02-.20.05-.50.10-1.0.20-2.0FL-2102A shownsmaller than actual size.。
OMEGA FMA-700A 和 FMA-800A 系列流量计与控制器说明书
Current Consumption: FMA-800A: <45 mA DC FMA-700A: <250 mA DC
Dimensions: mm (in); Weight: kg (lb)
Model No.
FMA-78C50 208 15 m (50') interconnect cable with connectors
FPW-15
75 15 Vdc power supply**
Note: All flow ranges are specified for nitrogen or air. When used for other gases, a correlation factor is used to determine flow rate.
Power: 117 Vac ±10%, 50 to 60 Hz, 50 Watts Dimensions: 215.9 W x 123.8 H x 247.7 mm D (81⁄2 x 47⁄8 x 93⁄4") Display: 0 to 102.4%
Rate Indicators/Electronics Boxes
HIGH FLOW-RATE GAS MASS CONTROLLERS AND METERS For Clean Gases
FMA-700A/800A Series Starts at
$982
FMA-775A, $2998.
Optional†
ߜ ±1% Accuracy (Up to 500 SLM), ±0.2% Repeatability
气体质量流量控制器 MFC 流量传感器说明书
气体质量流量控制器 MFC 流量传感器产品名称气体质量流量控制器 MFC 流量传感器公司名称北京堀场汇博隆精密仪器有限公司价格8000.00/个规格参数建议零售价:¥8000.00加工定制:否品牌:HORIBAMETRON/堀场汇博隆公司地址北京市朝阳区北苑路40号23号、25号联系电话010-******** 130********产品详情提示：以下模板中任意文字及图片均可执行修改、复制、删除的操作，添加更多的图片和文字描述有助于增加产品对买家的吸引力。
产品介绍产品信息重量： 2.8kg毛重： 2.8kg 产地： 北京堀场汇博隆精密仪器有限公司流量规格流量规格： （100,150,200)l/min 调节阀类型：电磁调节阀 调节阀静止状态： 常闭 准确度： ± 1.0%f.s. 线性： ±0.5%f.s.重复性精度： ±0.2%f.s.响应时间：2s（t98）产品性能简介企业介绍北京堀场汇博隆精密仪器有限公司是一支由中方经营管理，中日双方共同协作的国际化团队，是由全球顶级热式质量流量控制器（mfc）制造商——horiba stec与中国知名热式质量流量控制器(mfc)制造商——北京汇博隆仪器有限公司共同出资成立，是以研发、生产、销售热式质量流量控制器为主业的高新技术企业。
公司经营层和整个国际化团队坚持"群策群力，持续发展，立足国内，走向世界"的企业总体发展方向。
力循"中外结合，品质为本"的经营理念，努力在人才、技术、生产、工艺、质量、市场、服务等各个方面引入和完善现代企业经营管理机制，以适应全球经济一体化的市场竞争，为加速我国相关产业的不断发展贡献一份力量。
企业证书购买须知1、货源说明厂家一手货源，公司生产周期短、产品品质有保证2、关于尺码与使用手册里尺寸一致，以收到实物为准3、关于颜色本店产品均为实物拍摄， 与实物平铺图最为接近，收到实物与图片颜色不一致的，可能与电脑显示器的色彩对比度和色温等因素有关4、关于客服如您的提问未能及时回复，可能是因为咨询量过大或系统故障5、关于售后6、关于发货合作快递 中通、德邦本产品的建议零售价是¥8000.00，加工定制是否，品牌是HORIBAMETRON/堀场汇博隆，型号是S4828，类型是质量流量计，测量范围是12（m3/h），精度等级是1.0%，适用介质是气体，工作压力是3（MPa ），工作温度是5~45（℃），产品属性是仪器仪表。
AO2000操作手册
内容：页数前言操作员手册和软件版本的联系安全须知电气测量设备安全使用技巧第一章安装准备工作安装位置的选择采样气体进口和出口条件校验用测试气吹扫气电源交货范围安装需要的材料（不在交货范围）安装清单安装、启动方法第二章气体分析仪的拆箱及安装气体分析仪的拆箱气体分析仪的识别尺寸图气体连接口的安装气体分析仪的安装第三章气路连接分析仪模块连接图气体流路图壳体吹扫压力传感器气路连接吹扫气路的连接第四章电气连接电器模块的连接系统总线的连接Profibus总线单元、RS232/RS485通信单元接线图模拟输出单元接线图八通道模拟输出卡接线图模拟量输入/输出卡接线图离散量输入/输出单元接线图离散量输入/输出卡接线图标准功能块的连接信号、控制和接口线的连接电源线连接安全注意事项24V直流电源线连接115/230V交流电源线连接第五章分析仪系统的操作显示控制单元屏幕信息显示状态灯数字键盘取消键软键文字的输入数值的输入按键的输入密码保护用户接口优先级访问锁菜单栏第六章分析仪系统组态A 节气体组份测量功能量程变换更改量程范围Limas11、Uras14：更改量程范围改变小数点位数过滤器初始化自动量程初始化极限值监测器初始化激活组份选择更改模块名称B节功能模块功能块的定义标准组态功能块子菜单C节系统功能设定时区及时间、日期选择用户界面语言修改密码禁止操作安装系统模块添加系统模块修改系统模块删减系统模块保存组态信息配置状态信号配置互联网连接配置Modbus总线连接配置Profibus总线配置I/O总线D节显示显示的特点显示综述页面综述参数综述用户页面配置显示元素换页显示元素页内位置变换配置柱状图或者点阵图输入数值输入数值的配置按键输入按键输入的配置第八章分析仪系统的校验A 节原理校验控制手动校验自动校验自动校验的测试气供给控制外部控制校验校验方法B节校验数据校验数据子菜单手动校验的校验数据自动校验的校验数据确认外部校验的校验数据当前输出响应C节校验分析仪单元注意事项Caldos15Caldos17Caldos17：校验气的单点校验Caldos15和Caldos17:替换气的校验Limas11Magnos106：Magnos106：单点校验Magnos106：替换气的校验Magnos17:Magnos17：替换气的校验Uras14:氧气检测器：D节校验分析仪模块手动校验手动启动自动校验第九章检查和维护检查检查气路密封性Caldos15和Magnos17：更换温度连接机构Uras14：光学对中Uras14：相位对中Limas11,Uras14:校验检测器的测量Limas11,Uras14：线性化Limas11：更换温度连接机构Limas11：铝化物采样检测器的清洁Limas11:石英采样检测器的清洁Limas11：安全采样器的清洁Limas11UV：指示灯的更换Limas11：放大器的优化气体模块:更换过滤器激活采样泵，采样泵输出的调整改变模拟输出电流的量程大气压力的修正大气压力值的修正校验的复位交叉敏感度载气第十章状态信息，故障修理处理状态系统状态：状态信息系统状态：状态信号状态信息的分类状态信息分析仪系统故障Caldos15、Caldos17、Magnos106、Magnos17故障Limas11故障Uras14故障气体模块故障通报服务附录1 气体分析仪概述气体分析仪分析仪模块带氧气探头的气体模块电气模块系统外壳显示控制单元附录二分析仪模块操作规范Caldos15操作规范Caldos17操作规范Limas11操作规范Magnos106操作规范Magnos17操作规范Uras14操作规范氧气操作规范电气安全前言操作手册内容：AO2000系列气体分析仪的安装、启动、操作和维护等信息，该手册包含了所有功能单元的内容，可能与交货的分析仪有差别。
Omega FMA-A2000系列电子质量流量计 控制器说明书
D-1The FMA-A2000 Series electronic mass flow meters/controllers provide high performance, versatility, and state-of-the-art design in one compact package. The FMA-A2000 uses capillary-type thermal technology to directly measure mass flow of gases. No temperature, pressure, or square root corrections are required.The FMA-A2300/2400 Series comes with an LCD display, and all models have linear 0 to 5 Vdc and 4 to 20 mA output.The FMA-A2000 measures the mass flow rate of gases in 24 ranges from 0 to 100 SLM. For the complete listing, refer to the range table on pageD-20. The FMA-A2000 Series is compatible with most non-corrosive gases. The user is advised to check the wetted materials against gas compatibility.OMEGA’s mass flow controllers use an internal electromagnetic proportional valve to control the mass flow rate. A command signal can be supplied either by the internal setpoint pot or by a 0 to 5 Vdc external source.U ±1% AccuracyU Linear Analog Output U Low CostU Thermal TechnologyU For Flow Rates Up to 100 SLM U Power Supply IncludedFMA-A2000 SeriesGAS MASS FLOW METERS AND CONTROLLERSFor Clean GasesWith Optional Integral Display FMA-A2417 with display, shown smaller than actual size.FMA-A2117 without display,shown smaller than actual size.D-2SPECIFICATIONSAccuracy: ±1% of full scale including linearityRepeatability: ±0.15% full scale or betterTurndown Ratio: 100:1Response Time: 5 seconds Gas Ambient Temperature: 0 to 50°C (32 to 122°F)Temperature Coefficient:0.05% full scale per 1°C or better Pressure Coefficient:0.01% full scale per psi or betterMeters: 20 SLM: 20 psiPolyacetal: 316 SS:Leak Integrity:1 x10-6Wetted Parts:Standard: Optional:Connections: 1⁄41⁄4Control Signal:Control Valve:normally closed Output Signal:1000 Ω500 Ω 316 SS Body: Polyacetal:Input Power:M eters: Controller: Dimensions:Weight:with power supplyNIST calibration (5 data points).* Insert range code from table at top of page to complete model number.For optional 316 stainless steel body, add suffix “-SS ” to model number for additional cost (1⁄4" compression fittings standard). SS body standard on FMA-A22 and FMA-A24 controllers.Note: All controller flow ranges specified are for nitrogen or air at 20 psig; when used for other gases, a correlation factor is needed to determine the flow rate.** Specify gas, inlet/outlet pressure, temperature.For 10-point NIST calibration certificate, add suffix “-NIST10” to model number for additional cost.Ordering Examples: FMA-A2316, mass flow meter with display, calibrated for nitrogen at 20 psig inlet, room temperature for 0 to 45 SLM. ∆P: 5 to 20 psi.FMA-A2102-SS , 316 stainless steel body mass flowmeter without display, 0 to 50 SCCM.6Tubing and fittings of various materials and styles are available. Visit us online for details.more details.。
Omega FMA7400 7500 多范围多气体流量计与控制器说明书
DMulti-Range Multi-gas FlowMeteRs and ContRolleRs FMA7400/7500U In-Process ProgrammingU Programmable Full ScaleU 50:1 TurndownU RS485 StandardU 316 SS VCRFitting Available U F ast ResponseTime <1 Second U M ultiple Native GasCalibration Reference U C onfigurableOmega ®Fma7400/7500(elastomer seal) and (-SS) (metal seal) thermal mass flow meters and controllers achieve unprecedented performance, reliability, and flexibility in many gas flow measurement and control applications. The Fma7400/7500 is designed to overcome a long-standing limitation of many thermal mass flow units when changing gas types, a simple correction factor, such as the ratio of heat capacities between the calibration gas and new gas, cannot account for accuracy- robbing viscosity and density differences.The Omega Fma7400/7500 database is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases making the Fma7400/7500 series among the most accurate and flexible mass flow designs available today. The Fma7400/7500 series is the perfect choice for customers who use thermal mass flowmeters or controllers on a variety of gases, who need to change gas type frequently, or who need to re-range while preserving gas measurement and control accuracy.The Omega Fma7400/7500 series features a corrosion- resistant Hastelloy ®C-22 sensor for durable, long-term operation. SPeCIFICATIoNS Full Scale Flow Range: 3 sccm to 50 slm (depending on model number)Flow Accuracy: ±1% set-point 35 to 100%, ±0.35% full scale 2 to 35%, ±3% with selected gas feature Repeatability and Reproducibility: < 0.2% S.P .Linearity: ±0.5% full scale (included in accuracy)Response Time (Settling Time): <1 second (within 2% for steps 0 to 10 through 0 to 100%)Control Range: 2 to 100% (normally closed valve)Number of Bins: 10 bins Valve Shut Down: < 1% of full scale (normally closed valve)Zero Stability: < ±0.5% full scale per year Pressure Coefficient: 0.03% per psi (0 to 50 psi N2)Attitude Sensitivity: <0.25% span change @ 90º after re-zeroing (N2 @ 50 psi)Auto Zero: Optional Reference Temperature: 0ºC (standard), 15, 20 or 21.1ºC (optional)operating Temperature Range: 5 to 50ºC (41 to 122ºF)Maximum operating Pressure: 150 psig (10 bar)Differential Pressure Range: 3 to 860 sccm = 7 to 45 psid, 861 to 7200 sccm = 15 to 45 psid, 7201 to 50000 sccm = 25 to 45 psid Note:High density gases require additionaldifferential pressure. Example: Argon gasapplications require an additional 10 psid differential pressure.FMA7400 shownsmaller than actual size.Settling time is less than a second and full scale accuracy is 1%, this ensures that the Fma7400/7500 will provide reliable flow measurement or flow control in demanding gas flow applications. Both Fma7400/7500 and the (-SS) version achieve excellent internal to external leak integrity for challenging process gases as found in CVD, solar, and other processes. a major advancement over traditional single point gas conversion factors, Omega delivers up to a three times improvement in process gas accuracy. This is achieved through advanced gas modeling plus extensive actual gas testing protocols that provide extremely accurate compensation. This also allows the device to be quickly and easily configured for another gas and/or flow range without sacrificing accuracy or range-ability. Selecting a new gas automatically creates a new calibration curve, establishes optimized PID settings for dynamic control, compensates for gas density and viscosity effects, and ensures smooth, overshoot-free transitions between flow rates with excellent steady state stability supplying unparalleled flexibility. Re-programming is simple and fast; a new gas and range can beprogrammed in under 60 seconds.elastomerseal 1x10-9 atm. cc/sec He, metal seal1x10-10 atm. cc/sec HeValve Type: Normally closed(controllers only), normally openwith automatic shut-off (optional)Fitting: ¼" compression (standard),¼" VCR (standard for -SS models)Downstream Conditions:atmosphere (standard), vacuum orpositive pressure (optional)Primary Wetted Materials:316 stainless steel, hastelloy C-22,17-7 PH, 430 SSexternal Seals: FKm (standard)optional: Buna, Perfluroelastomer,ePDm or Neoprene, 316 SS(standard for -SS)Internal Seals/Valve Seat: FKm(standard), PFa (standard for -SS)optional: Buna, Perfluroelastomer,ePDm or NeopreneelectricalDiagnostic/Service Port: all variationshave an RS485 diagnostic/service portvia 2.5 mm jackRS485/Analog (Standard)Digital Communication Protocol:Proprietary protocol based on HaRT®command setelectrical Connection: 1 x 15-pin maleSub-D, (a), aUX valve drive (ReLaY)Analog I/o: 0 to 5V (standard),0 to 10V, 0 to 20 ma, or 4 to 20 ma(optional)Power: 12 to 24 Vdc/normaloperation 7 watt maximum purge 8 wattProfibus (optional)electrical Connection: 1 x 15-pin malesub-D/1 x 9-pin female sub-DAnalog I/o: 0 to 5V, 0 to 20 maor 4 to 20 maPower: ±13.5 Vdc to ±27 Vdc/7 wattmaximum, purge 8 wattDeviceNet (optional)electrical Connection: 1 x m12 withthreaded coupling nut (B)Analog I/o: 0 to 5VPower: ±11 Vdc to ±25 Vdc/7 wattmaximum, purge 8 wattDiagnostics and DisplayStatus Lights: Controller health,network statusAlarms: Sensor output, control valveoutput, over temperature, power surge/sag, network interruptionComplianceenvironmental: Ce, RoHS。
FMA4000 FVL4000系列流量计和FMA-4100 FVL4100系列控制器说明书
MASS FLOWMETERS AND CONTROLLERSD-15ߜGood for ManyAggressive/Corrosive GassesߜGas Mass or VolumetricAvailableߜAdvanced MaterialCoating and PVC Wetted Materials ߜMeasures Flow Rateand Total FlowߜRS232 Communication ߜAnalog OutputThe FMA4000/FVL4000 Series Meters and FMA-4100/FVL4100Series Controllers offer a solution for real-time metering and control of gasses which are injected,pumped, dosed or dispensed.Flow ranges of less than 100 CCM to 1000 LPM for gases (30 LPM for Control model) at pressures from 20 to 250 psi meet thegeneral range of use in Laboratory Analytical, R & D, ProcessAutomation, Environmental, Fuel Cell, Industrial, CPI, Food and Beverage, and Pharmaceutical marketplaces. The ±1% Full Scale accuracy insures precision. A 2 line x 16 character digital display enables the user to gatherinformation, reset totalizer and input control commands within seconds.RS232, and 0 to 5 Vdc are standard.An advanced material coatingprocess combined with a PVC body provide resistance to aggressiveflow media.FMA4008, $775,shown smaller than actual size.FMA4108, $995,shown smaller than actual size.FMA4006$895DSPECIFICATIONSAccuracy:±1% full scaleRepeatability:±0.5% full scale Linearity:±0.25% full scale Response Time:(typical) 50 millisecondsTemperature Range:0°to 70°C (32º to 158ºF)Temperature Coefficient:0.50%/°C Turndown Ratio:50:1Standard Conditions:25°C and 1 atmosphereMaximum Pressure:250 psig Humidity Range:0 to 100%Supply Current:0.025 amp with back lighting on meters Supply Rating:15 Vdc maximum@ 300 mA maximum current on meters, 500 mA maximum on controllers Supply Voltage4 to 20 mA Output Models:loop powered—no supply necessary Controller Input Signal:Compatible 0 to 5 VdcOutput Standard Signals:0 to 5 Vdc or 4 to 20 mA output (optional)1 RS232 serial port (19200 baud rate)Power Consumption:Less than 3.5 wattsIndicating Display:2 Line x 16character LCD—back lightedElectrical/Communication Connector:9 pin sub D 15 pin sub DMechanical Connector:3⁄8" NPT Standard Wetted Materials:PVC, Viton ®O-RingsOptional Wetted Materials:CPVC, Kel-F, Teflon ®, 316SS,Dimensions:203 H x 127 W x 50.8 mm D (8 x 5 x 2")Typical Pressure Drop at Full Scale:2.8 to 60 psiAdd “–I” to model number for 4 to 20 mA output add $75 to price.Add “–NIST5” to model number for a 5 point NIST traceable certificate, add $250to price Add “–NIST10” to model number for a 10 point NIST traceable certificate, add $350 to price.Add “–TOT” to model number for totalizer option, and add $75 to price.Ordering Example: FMA4012,5 LPM max. mass flow meter, $795.Ordering Example: FMA4112, 5 LPM max. mass flow controller, $995.FlowmetersCANADA www.omega.ca Laval(Quebec) 1-800-TC-OMEGA UNITED KINGDOM www. Manchester, England0800-488-488GERMANY www.omega.deDeckenpfronn, Germany************FRANCE www.omega.frGuyancourt, France088-466-342BENELUX www.omega.nl Amstelveen, NL 0800-099-33-44UNITED STATES 1-800-TC-OMEGA Stamford, CT.CZECH REPUBLIC www.omegaeng.cz Karviná, Czech Republic596-311-899TemperatureCalibrators, Connectors, General Test and MeasurementInstruments, Glass Bulb Thermometers, Handheld Instruments for Temperature Measurement, Ice Point References,Indicating Labels, Crayons, Cements and Lacquers, Infrared Temperature Measurement Instruments, Recorders Relative Humidity Measurement Instruments, RTD Probes, Elements and Assemblies, Temperature & Process Meters, Timers and Counters, Temperature and Process Controllers and Power Switching Devices, Thermistor Elements, Probes andAssemblies,Thermocouples Thermowells and Head and Well Assemblies, Transmitters, WirePressure, Strain and ForceDisplacement Transducers, Dynamic Measurement Force Sensors, Instrumentation for Pressure and Strain Measurements, Load Cells, Pressure Gauges, PressureReference Section, Pressure Switches, Pressure Transducers, Proximity Transducers, Regulators,Strain Gages, Torque Transducers, ValvespH and ConductivityConductivity Instrumentation, Dissolved OxygenInstrumentation, Environmental Instrumentation, pH Electrodes and Instruments, Water and Soil Analysis InstrumentationHeatersBand Heaters, Cartridge Heaters, Circulation Heaters, Comfort Heaters, Controllers, Meters and SwitchingDevices, Flexible Heaters, General Test and Measurement Instruments, Heater Hook-up Wire, Heating Cable Systems, Immersion Heaters, Process Air and Duct, Heaters, Radiant Heaters, Strip Heaters, Tubular HeatersFlow and LevelAir Velocity Indicators, Doppler Flowmeters, LevelMeasurement, Magnetic Flowmeters, Mass Flowmeters,Pitot Tubes, Pumps, Rotameters, Turbine and Paddle Wheel Flowmeters, Ultrasonic Flowmeters, Valves, Variable Area Flowmeters, Vortex Shedding FlowmetersData AcquisitionAuto-Dialers and Alarm Monitoring Systems, Communication Products and Converters, Data Acquisition and Analysis Software, Data LoggersPlug-in Cards, Signal Conditioners, USB, RS232, RS485 and Parallel Port Data Acquisition Systems, Wireless Transmitters and Receivers。
omegaFMA1700电子气体质量流量计
omegaFMA1700电子气体质量流量计产品特点∙无需温度或压力补偿，即可读取气体质量流量∙可选经济实惠的铝质结构和耐腐蚀的316不锈钢结构∙LCD显示屏角度可调，方便读数∙NIST可溯源校准产品描述FMA1700／1800系列电子气体质量流量计可监测流速在10 SCCM到1000 SLM范围内的多种气体的流量。
FMA1700／1800利用通过加热管进行的热传递测量分子气体流量，可提供直接的气体质量流速测量值，并且无需对（规定限值以内）的气体温度或压力变动进行补偿。
该产品可提供经济型铝质／铜质结构，适合测量普通气体流量的，同时可提供316不锈钢结构，适合有更高耐腐蚀要求的应用场合。
不带一体式显示屏的FMA1700系列流量计具有可在现场选择的0 ~ 5 Vdc或4 ~ 20 mA模拟输出，以便进行远程监测；FMA1800系列流量计兼具一体式3½位数字显示屏和模拟输出。
显示屏可倾斜90度，查看读数方便。
显示屏经过校准，可直接显示以SCCM或SLM为单位的氮气流速，您可以通过专门订购来获得其它气体校准。
由于其成本低、具有数字显示屏、模拟输出功能，并且对气体温度与压力的变化不敏感，FMA1700／1800系列是许多转子流量计的理想替代品。
在与FMA178BP便携式电池组一起使用时，FMA1800系列非常适合进行流量计的现场校准或者空气采样设备的测试。
FMA178BP电池组包括电池、充电器和配有肩带和腰带的手提箱。
借助FMA178BP电池组，流量计可以工作40小时以上；电池至少可以充电200次。
FMA1700／1800系列需要使用 12 Vdc电源（最大电流200 mA）， FMA178PW插接式插座电源可满足其要求。
电子装置具备反向极性保护，并配有可从外部检查的保险丝。
型号为FMA178C（单独提供）的配件提供插接式9针"D"连接器（带3英尺扁平电缆），用于0 ~ 5 Vdc输出信号和电源输入连接（4 ~ 20 mA输出信号连接使用FMA178C-MA配件）。
AS200 气体质量流量控制器说明书
AS200说明书气体质量流量控制器●可同时支持数字信号，0～5V 模拟信号，4～20mA 或0~20mA 模拟信号●使用双电源（±15VDC ）或单电源（+15～+28VDC ）●支持自动故障报警，多气体多量程等功能应用范围气体质量流量控制器（AS200系列）用于对气体的质量流量进行精密控制和测量。
它们在半导体集成电路工艺、特种材料、化学工业、石油工业、医药、环保和真空等多种领域的科研和生产中有着重要的应用。
其典型的应用场合包括:集成电路工艺设备,如外延炉、扩散炉、CVD、等离子刻蚀机、溅射台、离子注入机;以及镀膜设备、光纤熔炼设备、微反应装置、混气配气系统、气体取样装置、毛细管测量仪、气相色谱仪及其它分析仪器。
图1.AS200质量流量控制器产品简述AS200系列气体质量流量控制器，为气体质量流量的控制、测量提供了高准确度及高可靠性。
该型产品可支持数字信号，0～5V 模拟信号，4～20mA 或0~20mA 模拟信号，可以使用双电源（±15VDC ）或单电源（+15～+28VDC ）。
支持自动故障报警，多气体多量程等功能。
标准开放的通讯协议为客户自行开发控制、采集软件提供便利。
提供功能强大的免费客户端上位机软件。
1.产品说明1.1.声明本手册已经严格审校，但不保证手册中不含错误与遗漏，制造商不承担任何由于错误或遗漏的责任，亦不承担由于使用本手册中的信息所导致的损失的任何责任。
1.2.使用须知本手册详细叙述了正确、安全使用该系列产品的必要事项。
产品使用者，请务必认真参阅本手册并理解后使用，在使用过程中，请注意带有标志的文字及注意事项中包含的所有内容。
对于未按照使用手册使用造成的财产损失或人身伤害，本公司有权不承担责任。
本手册在您安装、维护及故障维修时必不可少，请妥善留存保管。
1.3.安全注意事项下列注意事项请结合使用手册查看。
未按照注意事项进行操作所产生的一切后果本公司不予承担。
富士电机 FMA1700A 1800A 系列经济型气体质量流量计 产品手册说明书
Economical Gas mass Flow mEtErs For clean Gases with optional integral DisplayFMA1700A/1800A SeriesU R eads Gas Mass Flow Without Temperatureor Pressure Compensation U A vailable in Economical Aluminum or Corrosion-Resistant 316 SSU T iltable LCD Displayfor Easy ReadingU N IST TraceableCalibration IncludedFMA1828A,shown smallerthan actual size.SPECIFICATIONSAccuracy: ±1.5% of full scale,including linearity over 15 to 25°C and5 to 60 psia (0.35 to 4.2 kg/cm2)Repeatability: ±0.5% of full scaleand for units ≥100 scm from 0 to 20%of rangeTemperature Coefficient: 0.15% of fullscale per °C or betterPressure Coefficient: 0.01% of fullscale per psi (0.07 bar)Maximum Pressure Drop:Response Time: 800 msec timeconstant; 2 seconds (typical) to within±2% of set flow rate over 25 to 100% offull scaleMaximum Gas Pressure: 500 psig(35 kg/cm2 gage);1000 psig (70 kg/cm2gage) for ranges up to 100 SLM;20 psig optimumGas and Ambient Temperature:0 to 50°C (0 to 122°F)Leak Integrity: 1 x 10-9 std cc/secof helium maximum tooutside environmentMa t erials in Fluid Contact:Aluminum Models: Anodizedaluminum, 316 SS, brass andFKM O-ringsThe FMA1700A/1800A Series eletronic gas mass flow meters provide for monitoring the flow of a wide variety of gases from 10 SCCM up to 1000 SLM. Utilizing heat transfer through a heated tube to measure molecular gas flow rate, the FMA1700A/1800A provides measurement of direct gas mass flow rate, without the need to compensate for variations in gas temperature or pressure (within stated limits). They are available in an economical aluminum/brass construction for typical gas flows and a 316 SS construction for applications requiring more corrosion resistance. TheFMA1700A series withoutintegral display is supplied with a field selectable analog 0 to 5 Vdcor 4 to 20 mA output for remote monitoring; the FMA1800A series has both an integral 3¹⁄₂ digit display and analog output. The display is tiltable over 90 degrees for viewing convenience. The display is calibrated standard to read out directly in SCCM or SLM for nitrogen (other gas calibrations available on special order).Due to their low cost, digital display, analog output capability, and insensitivity to variations in gas temperature and pressure, the FMA1700A/1800A Series are ideal substitutes for many rotameter applications. When used with the FMA178BP portable battery pack, the FMA1800A Series are ideal for in-the-field calibration of flow meters or testing of air sampling equipment. The FMA178BP battery pack includes batteries, recharger, and carrying case with shoulder strap and belt loop. With the FMA178BP, the flow meter can operate in excess of 40 hours; the batteries can be recharged at least 200 times.The FMA1700A/1800A Series require 12 to 26 Vdc power @200 mA maximum, which can be supplied by the FMA178PW plug-in socket power supply. The electronics are reverse polarity protected and has externally-accessible fusing. Model number FMA178C (supplied separately) provides a mating 9-pin “D” connector with 3 feet of ribbon cable for accessing the 0 to 5 Vdc output signal and power input connections (use FMA178C-MA for 4 to 20 mA output signal connection).The LCD supplied with theFMA1800A Series is connectedto the lower electronics via a modular plug. The LCD can be remotely located by purchasing an FMA18RC remote cable assembly-you must then build your own assembly for panel mountingthe LCD.D-11D-12D Stainless Steel Models: 316 SSand FKM O-ringsOutput Signal Linear 0 to 5 Vdc: 1000 Ωminimum load 4 to 20 mA: 50 to 250 Ωloop resistanceTransducer Power: 12 Vdc @ 200 mA maximum Shipping Weight: 1.1 kg (2.5 lb)Compliance: EN55011 class 1, class B; EN50082-14** Insert range code, see table above.Flow ranges specified are for nitrogen or air at 20 psig. When used for other gases, a multiplication factor is used to determine the flow rate, and the digital display must be rescaled in the field. To request a custom calibration add the gas abbreviation and pressure as a suffix to the model number.For oxygen cleaned units, add suffix “-02CLEAN” to model number for additional cost.Ordering Examples: FMA1712A, AL/BR body flow meter without an integral display, calibrated for nitrogen at 20 psig, ambient temperaturefrom 0 to 500 SCCM.FMA1810A, AL/BR body with display and FMA178PW, power supply.See instruction manual for dimensions。
X-am 2000 说明书
显示 1． 所测量的气体 2． 测量值 3． 专用符号
8
专用符号
错误信息，参见第 14 页 警告信息，参见第 14 页
所有测量气体的峰值，参见第 14 页 H2S 和 CO 的时间加权平均值 TWA，参见第 14 页
H2S 和 CO 的短期暴露极限值 STEL，参见第 14 页 仪器设置为用标定气进行功能测试，参见第 28 页 仪器设置为新鲜空气标定功能，参见第 35 页 仪器设置为一键标定功能，参见第 37 页 仪器设置为单一气体标定功能，参见第 39 页 持密码进入菜单功能已激活，参见第 16 页 电池/充电电池的电量为 100% 电池/充电电池的电量为 2/3 电池/充电电池的电量为 1/3 电池/充电电池的电量为空
安全指令
注意： 为了降低爆炸的危险，不要将新旧电池混合使用，不要将不同厂家的电池混合使用。
注意： 在进行任何维护之前，都要将该仪器与电源断开。
注意： 更换元件可能会降低本质安全性。
当心： 未在大量含氧（>21%O2）的空气中进行过测试.
7
功能说明
功能说明
前面板 1． 进气口 2． 报警发光二极管 3． 蜂鸣器 4． OK 键 5． “+”号键 6． 显示屏
注意： 请阅读使用说明中的安全措施。 不要在有爆炸危险的区域对电池进行更换或充电。
德国德尔格安全公司,23560 吕贝克
电源组 83 18 703，批准为 ABT 0000 型 温度等级：T4 -20ºC≤Ta≤+50ºC 配碱性电池增能型编号：E91 增能型编号：EN91（工业用） VARTA 类型 4106 （电源一）
21故障原因与补救措施故障原因与补救措施故障原因补救措施镍氢电池放电给镍氢电池充电42无法开启仪器碱性电池放电插入新的碱性电池41仪器未设定在测量模式选择测量模式无法关闭仪器仪器设置为禁止关闭用ccvision将仪器设置为允许关闭测量范围未正确标定重新标定测量范围34电子元件或传感器有问题必须由德尔格安全设备有限公司维修部修理警告信息专用符号和故障编码
FCM2000质量流量计中文手册(V 0.7)
1.1.4 允许介质
z 只有根据技术信息或用户的使用经验能够确认的介质才可以被测量，并且接触介质的 部件（过程连接、测量管道）对介质的抗化学和物理能力不会在仪表的使用寿命中受 到负面影响。
压力设备制造商名称。
本铭牌包括铭牌a)中的大部分内容，除了以下区 别：
根据PED/DGRL中第3章第3节，压力设备上没有CE标志。 此例外的原因在PED/DGRL中第3章第3节中有描述。 压力设备被分类为SEP（良好的工程实例）。
c) 标准转换器典型铭牌
订单号 完整型号 电源电压 最大功率 流量计尺寸和防护等级 过程连接和压力等级 流量计管道材料 标定因子 标定精度 最大流速 允许的介质温度
标准转换器典型铭牌订单号完整型号电源电压最大功率流量计尺寸和防护等级过程连接和压力等级流量计管道材料标定因子标定精度最大流速允许的介质温度d184b111u02fcm2000基本安全信息和使用方法d带有atex认证的转换器典型铭牌atex认证atex温度等级订单号完整型号电源电压和最大功率流量计尺寸和防护等级环境温度过程连接和压力等级流量计管道材料和标定因子标定精度最大流速和tag号码e带有fm认证的转换器典型铭牌fm认证订单号完整型号流量计尺寸防护等级环境温度电源电压和最大功率过程连接和压力等级流量计管道材料和标定因子标定精度最大流速和tag号码117人员资质只有经系统操作员培训并授权的人员才可进行仪表的电气安装开车以及维护
铭牌包括下列规格： CE-标志（认证机构的标志编号），证明仪表（压 力设备）符合PED/DGRL的要求。
FMA3200 3400ST系列气体流量控制器产品说明书
545
FMA3309ST
FMA3110ST
699
FMA3310ST
FMA3111ST
820
FMA3311ST
FMA3112ST
900
FMA3312ST
Stainless Steel Controllers
Model No. (No Display) FMA3202ST
FMA3203ST FMA3204ST FMA3205ST FMA3206ST FMA3207ST FMA3208ST FMA3209ST
All units are calibrated to air unless specified, 20/0 psig, 21°C (70°F). Flow ranges are based on dry air or nitrogen as standard. Other gases available; for ranges up to 10 SLM add $125; for ranges 20 to 100 SLM add $225.
SPECIFICATIONS
Accuracy/Linearity: ±1.5% FS (10 to 100% of rated flow); ±3% FS (20 to 100% of rated flow) for second and third gas selection on FMA3400ST Repeatability: ±0.25% FS Power Requirements:
† Refer to footnote on page D-24 for NIST
calibration ordering information
The FMA3200/3400ST Series flow controllers will precisely measure and control flow rates of virtually any clean, dry gas as low as 0.4 to 20 SCCM or as high as 0.2 to 10 SLM. The FMA3200/3400ST Series feature an integrated 3-digit display for flow-rate monitoring right on the unit. Electrical connections are made via the included 1 m (3') cable. Either a mating cable (FMA3000C) or power adaptor is required. See accessories below. The units are available with or without a display for a wide range of applications.
FMA-2600A系列气体质量与体积流量控制器说明书
规格精度: ±（读数的0.8% + 满量程的0.2%）重复性: 满量程的±0.2% 量程比：100:1控制响应时间: 100 ms输入控制信号: 0 ~ 5 Vdc, RS232输出信号: 0 ~ 5 Vdc, RS232可选输入/输出: 4 ~ 20 mA , 0 ~ 10 Vdc 工作温度: 10 ~ 50°C (14 ~ 50.00°C)零点偏移: 满量程的0.02%/°C 量程偏移: 满量程的0.02%/°C 湿度量程: 0 ~ 100% RH ，无冷凝附加流速: 满量程的2.4%接液材质：303和302不锈钢、氟橡胶、硅酮RTV （橡胶）、玻璃强化型尼龙、铝、铜、410不锈钢、硅酮、玻璃；>250SLM ：416不锈钢和镍替换铜最大压力质量流量控制器: 145 psig使用体积模式: 使用体积模式：近大气，建议最大15 psig 。
体积流量计和控制器不保证超出流量计额定流量范围的质量流速的准确性。
这些值仅适用于近大气压力条件。
建议最大工作压力为15 psigD-29U 20多种气体校准，包括氦气、氧气、氖气、一氧化二氮、氮气、大气、氩气、一氧化碳、二氧化碳、甲烷、乙烷、氢气、丙烷、丁烷、异丁烷、乙烯、乙炔、氪气、氙气、六氟化硫U 同时显示压力、温度、体积以及质量流量 U 简单易用的按钮界面U NIST 可溯源性标准U 满量程范围：0.5 SCCM ~ 3000 SLM U 常规响应时间：50 ~ 100 毫秒U 常规量程比：100:1U 位置不敏感U ±0.8%读数精度U 标配RS232FMA-2600A 系列质量与体积流量控制器在层流场中使用差压原则来确定和控制质量流速。
流量计中的层流元件(LFE)迫使气体进入层流。
泊肃叶方程规定， 在这一区域体积流速与压力下降呈线性关系。
使用压差传感器衡量LFE 固定距离中的压力下降情况。
- 1、下载文档前请自行甄别文档内容的完整性，平台不提供额外的编辑、内容补充、找答案等附加服务。
- 2、"仅部分预览"的文档,不可在线预览部分如存在完整性等问题,可反馈申请退款(可完整预览的文档不适用该条件!)。
- 3、如文档侵犯您的权益，请联系客服反馈,我们会尽快为您处理(人工客服工作时间：9:00-18:30)。
气体质量流量计和控制器
可选配一体式显示屏，用于测量洁净气体
FMA-A2000系列
∙精度为±1%
∙线性模拟输出
∙成本低
∙采用热感技术
∙可测量高达100 SLM的流量
∙内含电源
∙产品描述
∙FMA-A2000系列电子质量流量计／控制器性能出众、功能多样、设计先进、外形紧凑。
FMA-A2000利用毛细管式热感技术直接测量气体的质量流量。
无需进行温度、压力或平方根校正。
FMA-A2300／2400系列配备LCD显示屏，并且所有型号都提供线性0 ~ 5 Vdc和4 ~ 20 mA输出。
FMA-A2000测量0 ~ 100 SLM之间24个量程的气体质量流量。
要查看完整列表，请参阅下一页的量程表。
FMA-A2000系列与大部分非腐蚀性气体相容。
建议用户对
照气体相容性检查接液材料。
OMEGA的质量流量控制器利用内部电磁比例阀控制质量流量。
可以通过内部电位器设定值或者通过0 ~ 5 Vdc外部源提供指令信号。
规格:
精度：满量程的±1%（包括线性度）
重复性：满量程的±0.15%或者更佳
量程比：100:1
响应时间：5秒
气体环境温度：0 ~ 50°C (32 ~ 122°F)
温度系数：每1°C为满量程的0.05%或更佳
压力系数：每psi为满量程的0.01%或更佳
最低压力要求：
流量计：1英寸水柱
最大流速为1 SLM的控制器： 1 psi
流速大于20 SLM的控制器：20 psi
质量流量控制器的压差：<5 LPM，5 ~ 50 psi（标准）
>5 LPM，20 ~ 40 psi（标准）
气体最大压力：
聚甲醛：250 psig
316不锈钢：500 psig
泄漏完整性： 1 x10-6 cc/min氦气或更佳
接液部件：
标配：聚甲醛、氟橡胶O形圈
选配：316不锈钢、氟橡胶O形圈
连接口：¼ FNPT（标配）；
¼"压合接头（适用于所有不锈钢型号流量计）
输入／输出连接口：9针sub-D连接器
控制信号：0 ~ 5 Vdc
控制阀：常闭电磁阀
输出信号：线性0 ~ 5 Vdc（最小负载1000 Ω），4 ~ 20 mA（环路电阻500 Ω）安装螺纹：
316不锈钢壳体：6⁄32"螺纹
聚甲醛材料：#4/6自攻螺丝
输入电源：
流量计：24 Vdc @ 150 mA、115 Vac和220 Vac（带交流适配器）
控制器：24 Vdc @ 300 mA、115 Vac和220 Vac（带交流适配器）
外形尺寸：参见图纸
重量： 1.25 kg (2.75 lb)（含电源）。