涡轮分子泵电源说明书
分子泵说明书-2012
FF-160/750 FF-160/750Z LF160 CF160
金属密封CF接口专用 在分子泵的前级口上
胶圈密封LF接口专用 FF-160/750中LF接口分子泵 FF-200/1200中LF接口分子泵 FB-250/1600中LF接口分子泵 FB-400/4200
10
卡钳（LF专用）
个
5 6 10
4.4 分子泵选购件 表 3 选购配件表
序号
名 称
单位
规格
数量
备
4.2 分子泵适配电源 每种型号分子泵必须配用其专用电源，否则可能造成分子泵损坏。若由此引起的 损失本公司概不负责。适配电源见表1。 表1 分子泵适配电源表 序号 分子泵型号 适配电源 1 FF-160/620、FF-160/620F FK-620 2 FF-160/750、FF-160/750Z FK-750 3 FF-200/1200 FK-1200 4 FB-250/1600、FF-250/1600 FK-1600 5 FB-400/4200 FK-4200
14
XC
系列分子泵使用说明书
图 12、FB-400/4200 安装简图
15
XC
系列分子泵使用说明书
5.5 分子泵排气口简图
图 13 KF40 接口
图 14 KF50 接口
图 15 LF100 接口
16
XC
系列分子泵使用说明书
6.安装
分子泵说明书2.2
F-100/110
F-100/150
110
110
150
N2：108； H2：5×102
≤6×10-6 (DN100 LF)
≤6×10-8①；≤6×10-7②(DN100 CF)
KF25(DN25 ISO-KF)
LF100(DN100 ISO-K)、CF100
陶瓷轴承
普通轴承
42300
＜2
≤0.1
脂润滑 任意角度
29
① 此极限为前级泵采用二级旋片泵加扩散泵或涡轮分子泵得出；
② 此极限为水冷条件下的测试结果；
③ 动静叶片做耐腐蚀处理、润滑油采用耐腐蚀润滑油。
北京中科科仪技术发展有限责任公司（KYKY）
3-孔M8×20
图 2-9 FF-200/1200、FF-200/1200C 安装简图
图 2-10 FF-200/1200N 安装简图
150
脂润滑
安装方式
竖直±5°
任意角度
竖直±5°
任意角度
重量（kg）
29
19
① 此极限为前级泵采用二级旋片泵加扩散泵或涡轮分子泵得出；此极限为水冷条件下的测试结果； ② 此极限为水冷条件下的测试结果； ③ 动静叶片做耐腐蚀处理、润滑油采用耐腐蚀润滑油。
北京中科科仪技术发展有限责任公司（KYKY）
图 2-4 FF-160/500F 安装简图
北京中科科仪技术发展有限责任公司（KYKY）
水嘴
泵腿 前级接口
KF40
控制器接口
图 2-12 F-250/1500 安装简图
图 2-13 F-250/1500N安装简图
图 2-14 FF-250/1600安装简图
图 2-15 FF-250/1800安装简图
Turbo 90 泵说明书
Features:The Turbo™ 90 is designed to operate directly from a 1000RPM PTO shaft without attachments. Peak performance at slower rotation means longer life of the seals. The Turbo 90 can pump suspended materials without accumulation unlike a conventional turbine pump. This is possible because of Pressure Relief Passages from the seal cavities to the inlet port. The sus-pension circulates, and therefore is cleaned from the inner cavi-ties. It can be used for large quantity liquid transfer, from truck to tanks, for instance. It is well suited to high volume sprayer pumping applications.The impeller is made of low moisture absorption, corrosion-resist, engineering grade thermoplastic. It has been designed to increase pump life and smooth operation because of less rotation weight. Seals available are either face seals or lip seals. Specify face seals for severe service (such as abrasives). Face seals feature hard, wear-resistant phenolic rings pressing against ceramic seats.Bearings are isolated by drain cavities. 1 1/2” inlet and outlet ports permit unrestricted high volume flow. Because of the high capacity of the Turbo 90, sufficient bypass flow is available to main -tain maximum agitation. Shaft is made of stainless steel and has a 15/16” diameter with 1/4” keyway.Severe Service model: A Turbo 90 pump is available with a stain-less steel impeller and long life face seals for severe service. The stainless steel impeller will not swell or absorb chemicals because of its steel construction; is tough, durable and virtually indestructible; and is corrosion resistant.Caution: Failure to use a suction strainer, as specified, may void the product warranty.Note: A high capacity strainer with a 20-mesh screen must be used on the inlet side. Note: A 1000 RPM PTO coupler must be used. The capacity or flow of the Turbo 90 pump used with a 540 RPM PTO coupler is about zero.1000 RPM Quick Couplers: Quick couplers provide quick and simple on-off installation. The body is steel and the collar is Super T ough Nylon, color-coded International Orange for 35979, 1 3/8” PTO Coupler, and International Yellow for 35992, 1 3/4” PTO Cou-pler, according to safety standards.Collar Coupler: This coupler reduces the chances of vibration be-cause it clamps a full 360º on a 15/16” pump shaft, and on either 1 3/8” or 1 3/4” tractor PTO, like a collet. This provides better center-ing of the pump shaft to the tractor PTO. Both ends of the coupler must be wrench tightened onto the PTO shaft and the pump shaft prior to operation.Note: Do not force coupler onto the PTO spline too far. 1/4” to 3/8” of PTO spline should be visible after coupler is in position.Torque Bar and Chain: This part is needed to anchor a pump mounted directly on a PTO to keep it from turning with the PTO shaft.Turbo 90 Repair Kits: 28455-1 repair kit for 26556-11 cast iron pump with face seals includes one gasket, two seal rings, for O-rings, two ceramic seats, two seat rings, two springs, and two seal supports. P/N 28455-2 repair kit for 26556-4 cast iron pump with lip seals includes one gasket and two lip seals.Warning: When using PTO-driven equipment, leave shields in place. Do not wear loose-fitting clothing near rotating PTO shafts.Turbo™ 90 Flow Rates — Gallons per minutePump G ALLONS PER MINUTE (GPM) AT POUNDS PER SQUARE INCH AT THE GAUGE (PSIG) Speed (RPM) 0 10 20 30 40 50 60 70 80 90 100 600 45 30 19 8 — — — — — — — 800 60 47 37 27 19 11 3 — — — — 1000 75 65 55 46 37 30 24 18 12 6 —12009080736557494236312520Figure 1. Plumbing for Pump InstallationWhen using a quick coupler, line up key in thequick coupler with keyway on pump shaft and slide coupler into place, also lining up other set screw with spot on shaft. Tighten the set screw over the spot on the shaft first, then the keyway set screw.When using quick couplers, pull collar back andslide onto the PTO shaft until it locks into place, release collar.When using a Collar Coupler, slide onto pumpshaft, then PTO shaft, leaving 1/4” to 3/8” of PTO spline visible. Tighten both ends of the coupler witha wrench.Position pump below liquid level in tank to assurepriming.On other than PTO installations, check pumprotation. An arrow on the pump shows direction of rotation.To keep pump from rotating with PTO shaft, usea torque bar and chain assembly 33680 (Fig. 3). Bolt bar to pump, using two adjacent flange bolts. Snap one end of chain to the torque bar and the other end to a stationary part of the tractor. Mount the torque bar so the counter force will raise up onPump Installation1. 2. 3. 4. 5. 6.7. 8.9.10.11.the pump and help relieve the side pressure due to weight of the pump and hose. Do not fasten pump rigidly to the tractor.With the pump in position, connect the inlet hose to the IN port. Use a 1 1/2” I.D. hose if you need maximum flow rates (Fig. 1).A high capacity strainer with a 20-mesh screen must be used on the inlet side (Fig. 1). For in-line protection of nozzles, use a 40-mesh strainer in the boom feed line. Use a 3/4” or 1” Y-type strainer (Fig. 1).To regulate pressure, install either a 1 1/4” ballvalve or 1” pressure regulating valve downstream from the pump discharge (Fig. 1). Do not use a spring-loaded valve.Check all hose connections. Loose connections can permit air to be drawn in and the pump may not prime properly.Note: Support hoses where necessary to keep weight off the pump.Caution: Failure to use a suction strainer, as specified, may void the product warranty.Pump MaintenanceBearings require no lubrication. Drain. If pump remains installed on tractor,remove drain plug to drain pump. If pump hasbeen removed from tractor, use IN and OUTports for draining.Flush. After use, thoroughly flush pump with clearwater. If available, use a solution of one cup ofammonia in 10 gallons of water. This will dissolvemost residue remaining in the pump. Drain, let dry,then flush pump with light lubricating oil. Store.Caution: Gasoline, kerosene or fuel oil can attack materials in pump. Do not use as storing solution. If pump is to be stored, follow flush with a 50 percent permanent antifreeze solution. Plug ports.Maximum Recommended Pressure:100 PSIG (7 Bars)Maximum Recommended Temperature:120º F (50º C)Maximum Recommended PTO Speed:1250 RPMBefore starting, make sure all air is removed frompump and lines.Do not use rusty supply barrels or sandy water.Caution: Running pump dry can cause exces -sive heat and damage seals.Do not start pump before priming. The pump is NOT self-priming. Be sure suction line and pump are filled with liquid. Open the pressure regulating and boom regulating valves to be sure there is no back pressure on pump. Do not close the discharge line of the pump unless a means of bypassing the liquid relief valve has been installed. Pump can then be started and should prime. To assure ease in prime and the bleeding of air in pumping system, install pump so that ports are upright.Caution: Operating above maximum limits candamage pump.Do not operate pump at a PTO speed in excess of1250 RPM, or a pressure higher than 100 psi (7 bars), or a temperature higher than 120º F (50º C).Pump Operation1. 2. 3. 4. 1.2.3.4.Figure 2. DimensionsFigure 3. Torque bar and chain assembly, installedFigure 5. Turbo™ 90 Exploded ViewNote: Turbo 90 pumps, P/N 26556-11 are equipped with face seals. These seals are six-piece as-semblies, P/N 51387. Replace worn face sealswith P/N 51387. Be sure Wave Spring side istoward impeller (5).Note: Turbo 90 pump P/N 26556-4 is equipped with lip seals. These seals are two-piece assemblieswhich include a seal and a seal adapter in each.If your pump is equipped with two-piece seal as-semblies, use P/N 45005 (Turbo 90 Lip Seal)as the replacement seal. This seal is about 13/4” in diameter.If the seal adapter has been damaged, use P/N 45006 as the replacement adapter. Whenreplacing seal, be sure spring side facesliquid flow.REF. NO.PART NO.DESCRIPTION QUANTITY REQUIRED 26556-411 26556-4Cast Iron T-90 Pump Assembly with lip seals and thermoplastic impeller26556-11Cast Iron T-90 Pump Assembly with face seals and thermoplastic impeller117902Hex Nut (3/8”-16 UNC)66239923-1End Plate, Cast Iron11339924-1Body, Cast Iron11426545Gasket11528709Impeller, Thermoplastic115a30512Hub11826544Woodruff Key11926548Snap ring, Internal221026665Dust Shield111116228Bearing, Shielded221239934Cap Screw, Hex Head (3/8”-16 UNCx1 5/8”)661326547Snap ring, External221439935Cap111534793Shaft111625785Pipe Plug, Square Head111745005Lip Seal Assembly - Includes Lip Seal and Adapter2—1851387Face Seal Assembly—2A31352-225WasherB51210Ceramic SeatC51211Seal RingD31352-214O-RingE51212O-RingF51213Wave Spring33680Torque Bar and Chain Assembly——28455-1*Repair Kit for 26556-11, pumps with Face Seals(includes one P/N 26545, gasket, and one P/N 51387, Face Seals)——28455-2*Repair Kit for 26556-4, with Lip Seals(includes one P/N 26545, gasket and two P/N 45005 lip seal assemblies)——*Both repair kits may be used in all Turbo 90 pumps.Parts ListT o avoid confusion and possible delays when placing an order, always specify the Part Number and Description. T o find the correct part number, first locate the part in the exploded view to the left and note the reference number.Then, using the corresponding reference number in the chart above, find the part number in the parts list. All parts are available through your dealer.RepairKitsTurbo™ 90 Pump and Accessories Parts ListThe numbers in parentheses are reference numbers that are found in the exploded view on page 4. Underlined parts areincluded in repair kits, and can be discarded if using kit.Figure 6. Pulling end plate from body1. If coupler is on pump shaft, remove.2. With a 9/16” wrench, unscrew 6 nuts (1) from capscrews (12) and remove capscrews.3. Screw two screws (12) into opposite threaded holes on end plate (2). Install puller (Fig. 6). Tighten puller with a wrench topull end plate (2) from body (3). Lift off end plate (2).Note: Although a puller is recommended, you can sepa -rate the end plate (2) from the body (3) by using a 1” diameter brass rod at the shaft end, tapping it with a hammer.4. Remove gasket (4).Note: Snap rings (9,13) bearings (11) and shaft (15) shouldnot be removed unless damage has occurred.5. Use snap ring pliers to remove snap ring (9) from end plate (2).6. To remove bearing (11), push out with arbor press or use a small piece of brass rod and gently tap with hammer.7. Remove dust shield (10).8. Use snap ring pliers to remove snap ring (9) from body (3).9. Using screwdriver, pry nameplate (14) from body (3).10. Push shaft (15) and bearing (11) out of body (3) with an arbor press or by using a small piece of brass rod and tapping with hammer.11. Remove snap rings (13) from shaft (15).12. Press bearing (11) from shaft (15).13. P/N 26556-11, pump with face seals (skip to next section if your pump has lip seals): a. Pry out ceramic seat (B) and seat ring (C) from end plate (2). b. Lift out dust shield (10) from end plate. c. Slide seal ring (C) with O-ring from shaft. d. Lift out three springs (F) from impeller (5). e. Lift impeller (5) from body (3). f. Remove Woodruff key (8) from shaft. g. Slide other seal ring (C) with O-ring from shaft. h. Pry out ceramic seat (B) and seal ring (C) from body (3). i. Remove dust shield (10) from body.14. P/N 26556-4 pump with lip seals (return to previous sectionif your pump has face seals): a. Lift impeller (5) from body (3).b. Remove Woodruff key (8) from shaft (15).c. Using screwdriver, pry nameplate (14) from body (3).d. Remove snap ring (13) from pump shaft.e. Push the pump shaft out using an arbor press or a small brass rod by gently tapping with a hammer.f. Using a drift punch, from the painted side of each casting, drive the old lip seal (17) out by hitting on the old seal case. Discard old lip seals.1. Thoroughly clean all metal parts in solvent with a soft-bristle brush.2. Coat metal parts with light lubricating oil to assure easier assembly.3. Obtain repair kit 28455 which contains parts listed on the parts list, page 5. Replace all old parts with new parts from repair kit.1. If bearings (11) were removed, lightly oil bearing cavities.2. Place dust shield (10) in end plate (2) and, applying pressure to outer bearing race, press bearing (11) downward until it bottoms.3. Install snap ring (9) in end plate (2).4. Press other bearing (11) into body (3).5. Install snap ring (9) in body. Install inner snap ring (13) on shaft (15) and press shaft into bearing (11). Install outer snap ring (13) on end of shaft (15).6. P/N 26556-11, pump with face seals (skip to next section if your pump has lip seals):a. Place seal support (A) in body (3).b. Place the ceramic seat into the pump body all the way downo n the O-ring (A).Note: Ceramic seat (B) is installed with O-ring groove andside with marking toward the outside of the pump.c. Lubricate the O-ring groove on the ceramic seat (B) with clean oil or petroleum jelly. Place the ceramic seat into the body. Carefully force the seat down over the O-ring until it is against the seal support.Caution: The ceramic seat may be cracked or broken if it isplaced in the body cocked or if excessive force or metal objects are used to drive it in place.d. Slide the new seal ring (C) onto the shaft with the internal O-ring groove toward the inside of the pump. The small diameter of seal ring should mate with the ceramic seat.Pump DisassemblyPump AssemblyPreparationAssemblye. Slide the small O-ring (D) onto the shaft. Push the O-ring outof the key way to avoid cutting the O-ring. Push the O-ringinto the groove in the seal ring.f. Slide the small washer (E) over the shaft and into the recessin the seal ring.g. Slide the wave spring (F) over the shaft and onto the washer(E). The spring will rest against the impeller hub.h. Install the face seal in the end plate (2) in the same way asinto the body (3).6. P/N 26556-4 pump with lip seals (return to previous sectionif your pump has face seals):a. Install lip seals (P/N 45005) using sealant such as Permatexon the mating surfaces. Press to the bottom of the seal bores in both end plate and body. See exploded view, page 4.b. Tap lip seal (17) into pump body using pipe nipple or sealdriver of a diameter large enough to push on the inside of theconcave side of the seal. The cupped, concave side of theseal faces towards the inside of the pump. The spring facestoward the liquid flow.c. Make sure the seal bottoms against the seal supporting edgemachined into the casting.d. Install Woodruff key (8) in shaft (15). Be sure the key bottoms.e. Slide impeller (5) onto shaft.f. Tap lip seal (17) into end plate adapter (45006) using pipenipple or seal driver. Cupped or concave side goes toward the inside of pump; spring faces toward liquid flow.g. Make sure the seal bottoms against the seal supporting edgemachined into the casting.7. Place gasket (4) on body (3).8. With an arbor press, press on inner race and press end plate(2) onto shaft (15).Caution: Uneven tightening of nuts (1) and capscrews (12) to pull end plate (2) down can crack casting.Note: Although an arbor press is recommended, if none is available, you can pull end plate onto body by care-fully tightening nuts (1) and capscrews (12).9. Install capscrews (12) and nuts (1) and tighten.10. Turn shaft to be sure the pump is not binding. If pump seems tobe binding, tap shaft lightly with a soft hammer.11. Replace nameplate (14) in body (3). Nameplate is merelypushed into place.Turbo™ 90 Troubleshooting GuidePROBLEM CAUSE PROCEDURE1. NO PRESSURE, OR NO CAPACITY a. Inlet line not immersed in liquid or low level a. Reposition inlet line or fill tank.b. Pump not primed b. Prime pump; be sure mounted below water level.c. Plugged strainer c. Clean strainer with water and soft brush if needed.d. Intake line air leaks d. Tighten all connections, using pipe joint compound.Check hoses for leaks.e. Intake line blocked e. Check line and clean.f. Pump turning wrong direction f. Check direction of arrow on pump, mount correctly.g. Pump parts worn g. Replace using Repair Kit, or return for repair or if under warranty.2. EXCESSIVE NOISE OR VIBRATION a. Loose couple a. Tighten or replace coupler.b. Bent or damaged shaft, improperly aligned b. Replace shaft.c. Intake line leaks; plugged strainer c. See PROCEDURES c. andd. above.d. Worn parts, broken rotor vanes d. See PROCEDURE g. above.3. PUMP RUNS, BUT LOW CAPACITY a. PTO speed too slow. a. 1000 RPM required.b. Intake line partially blocked or too small b. Clean line. Use 1 1/2” I.D. hose.c. Too many fittings, elbows, valves c. Replumb for more direct path.d. Plugged strainer or leaks d. See PROCEDURES c. and d., block 1.4. PRESSURE AT PUMP, BUT LOW OUTPUT AT NOZZLES a. Nozzle orifice too small or strainer plugged a. Replace nozzles; clean nozzle strainer.b. Discharge line too small b. Use 1 1/2” I.D. hose.c. Valves set incorrectly c. Check, adjust valves.5. IMPOSSIBLE TO ROTATE SHAFT a. Improper assembly a. Gasket in place? Review assembly instructions.b. Foreign material or corrosion in pump b. Disassemble and clean. Use clean water supply.6. LEAK a. Lip seal installed backward a. Check drawing page 4. Spring should be toward liquid.b. Worn parts b. Repair using repair kit.c. Worn casting c. Replace pump.ReturnsAll Delavan products are warranted against manufactur-ing defects (see warranty, below). In the event you feel you have a warranty-covered, returnable item, return the pump to your dealer, who will replace a warrantable pump for you. Delavan’s “No Hassle Warranty” puts you back in the field sooner!Important:Whether you are returning your pump for warranty or for repair, you must do the following:1. Flush chemical residue from the pump (best donein the field).2. Tag pump with type of chemicals having beensprayed.3. Include complete description of operation prob-lem, such as how pump was used, symptoms ofmalfunction, etc.Since pumps can contain residues of toxic chemicals these steps are necessary to protect all the people who handle return shipments, and to help pinpoint the rea-son for the breakdown.Delavan Products WarrantyAll products sold by Delavan are warranted only to pur-chasers from Delavan for resale or for use in purchas-ers’ own business or original equipment manufacture, against defects in workmanship or materials under nor-mal use, maintenance and service (rental use exclud-ed), if notice of said defect is received by Delavan at the factory within 90 days after installation or one year from date of shipment from the factory, whichever first occurs. The sole and exclusive obligation of Delavan under this or any implied warranty shall be to replace or, at its option, to repair, without charge, any product which is determined by Delavan to be defective in work-manship or materials after the product is returned to the Delavan factory, shipping costs prepaid. In no event shall Delavan be liable to any person for indirect or consequential damages or for injury or commercial loss resulting from any use or inability to use and Delavan product. Delavan expressly negates any other warranty, express or implied, including any warranty of merchant-ability or fitness for a particular purpose, or arising from any course of dealing or custom or usage of trade.No person, including any dealer or representative of Delavan, is authorized to make any representation or warranty on behalf of Delavan in addition to or inconsis-tent with these provisions. Purchasers to whom these provisions apply agree to hold Delavan harmless from claims by their customers in excess of the obligations of Delavan expressly set forth herein.1228 Chestnut Ave. • Minneapolis, MN 55403 Toll Free: 1-866-DELAVAN (335-2826)(612) 333-3189Toll Free Fax: 1-888-726-5906(612) 333-3231。
涡轮分子泵说明书
涡轮分子泵说明相关零件资料如下：TURBOMOLECULAR PUMP TG220FVWB-94 涡轮分子泵POWER SUPPLY TO TMP TC223-10 涡轮分子泵供电中频电源REMOTE TRANSFORM CABLE ON P/S SIDE 连接线MOTOR TRANSFORM CABLE ON P/S SIDE 连接线MOTOR TRANSFORM CABLE ON BODY SIDE 连接线该涡轮分子泵及配套电源用于电子束焊机电子枪室的抽真空，真空度要求高。
主要规格：排气速度：N2220L/s最大压缩比：N21×108到达压力：＜1×10-8Pa起动时间：1—1.2min停止时间： 2.5—3.5min所需冷却水量：0.4l/min以上所需电力：最大400VA工作原理：涡轮分子泵是应用高速旋转的叶轮将动量传给气体分子，使气体产生定向活动的原理来抽气。
其优点是启动快，耐大气冲击，无气体存储和解吸效应，无油蒸气污染或污染很少，能取得清洁的超高真空。
性能和特性：泵的排气压力与进气压力之比称为紧缩比。
紧缩比除与泵的级数和转速有关外，还与气体品种有关。
分子量大的气体有高的紧缩比。
对氮(或空气)的紧缩比为108～109;对氢为102～104；对分子量大的气体如油蒸气则大于1010。
泵的极限压力为10-9帕,工作压力范围为10-1～10-8帕,抽气速率为几十到几千升每秒(1升＝10-3米3)。
涡轮分子泵必需在分子流状态(气体分子的均匀自在程远大于导管截面最大尺寸的流态)下工作才干显现出它的优越性,因而请求配有工作压力为1～10-2帕的前级真空泵。
分子泵自身由转速为10000～60000转／分的中频电动机直联驱动。
维克斯（Vickers）单涡轮泵（Vane Pump）产品参数表说明书
Vane Type Single Pump (F3)-V10(*) Series -10 & 20 DesignsService Data Vickers®Vane PumpsRevised 05-01-87M-2005-S31767431767531767631767731767835564133181311156127824603964016662317681351247357286V10F control S/A2706 SeatTorque 41–61 N.m. (35–45 lb. ft.)229613233018232794232795232796232797232798232799233019233020923471923470923496923469923468923497923498295344432511295346SAE rated capacity (V10/F/P cartridge kits)USgpm Rotor Vane Kit Ring Pin (V10)Pin (V10F/V10P)Bolt (V10)Bolt (V10F)Bolt (V10P)Cart. Kitd d d d 1234567432509295344432511923499923500923501Pressure setting – V10P/V10F (Omit for V10)250 PSI 500 PSI 750 PSI 1000 PSI 1250 PSI 1500 PSI 1750 PSI 2000 PSI 2250 PSI 2500 PSICode A B C D E F G H J KPressure setting V10P/V10FV10P Spring252886228022822281z z x 2310422456351963d Included in V10 cartridge kit.YIncluded in seal kit 923548F3 equivalent seal kit 919772Eaton Hydraulics, Incorporated 2000All Rights ReservedShaft (See table) Model Shaft Key Nut Shaft typeV10–****–1 V10–****–3 V10–****–4 V10–****–6 V10–****–11 V10–****–12 V10–****–27 V10–****–34 V10–****–3837433837434037895938225037433937548038028137548538748114284316051606160989488948StraightTheadedTheadedStraightSplinedSplinedTangTheadedSplinedModelBodyV10–*F**–**–20V10–*P**–**–20V10–*S**–**–20V10–*T**–**–10574164352699317668370468 Typical Cutaway ViewK – 1 5/16–12 UN 2B thread P – 1” NPT threadS – 1 5/16–12 straight thread T – 1 3/16–12 straight threadF – Flow control cover P – Priority valve cover Omitted – Standard cover1 –2 Bolt flange (SAE “A ” size)2 – Foot bracket at 12 O ’Clock(Viewed from shaft end)23 – Foot bracket at 3 O ’Clock 26 – Foot bracket at 6 O ’Clock 29 – Foot bracket at 9 O ’ClockPump cover optionsModel CodeSpecial sealsVane PumpMountingF3 – Special “O ”Rings & seals for mineral oil & fire resistant fluidDesign & ModificationRotation(Viewed from shaft end of pump)Pressure setting ,V10F & V10P (Omit for standard cover)A – 250 psiB – 500 psiC – 750 psiD – 1000 psiE – 1250 psiCode Code F – 1500 psi G – 1750 psi H – 2000 psi J – 2250 psi K – 2500 psiL – Left hand for counterclockwise812345141011121315Series 10Outlet port connectionsK – 9/16–18 straight thread V10 standard cover V10F Flow control coverP – 3/4–16 straight thread T – 3/4–16 straight thread PressureTankP – 1/2” NPT threadT – 3/4–16 straight threadV10P Priority valve coverPrimary outletSecondary outletK – 3/4–16 straight thread K – 9/16–18 straight threadTankA – Opposite inletB – 90_ CCW from inletC – Inline with inletD – 90_ CCW from inletPressure port positions (Viewed from cover end)Flow rate in USGPM through orfice in cover1 – 1 USGPM (V10P)2 – 2 USGPM (V10F)Special feature suffixF – 1.156 DIS. portH – 1” O.D. tube connection K – 1 5/16–12 UN 2B thread P – 1” NPT threadS – 1 5/16–12 straight thread T – 1 3/16–12 straight threadInlet port connections61 – Straight –keyed 3 – Threaded 4 – Threaded6 – Straight stub –keyed 11 – Spline –9 tooth 12 – Spline –13 tooth 27 – Tang34 – Threaded38 – Spline –13 toothShaft types9SAE rated ring capacity USGPM(1200 RPM – 100 PSI)1 – 1 USgpm2 – 2 USgpm3 – 3 USgpm4 – 4 USgpm5 – 5 USgpm6 – 6 USgpm7 – 7 USgpm7Printed in U.S.A.。
Edwards nEXT Turbomolecular Pumps 商品介绍说明书
nEXT TURBOMOLECULAR PUMPSEDWARDS THE PARTNER OF CHOICEEdwards is a world leader in the design, technology and manufacture of vacuum pumps with over 95 years’ history and more than 75 years’ manufacturing experience.We believe in delivering results that bring value to our customers by using our breadth of industry experience to identify and apply solutions to your problems. Using the most innovative and up-to-date modelling techniques and know-how, we can optimise the pumping configuration to achieve the maximum performance in the most reliable and cost-effective way.ApplicationsResearch & Development»Chamber evacuation, coating systems,turbomolecular pump systemsHigh Energy Physics»Beam Lines, accelerators, mobile pump carts, Electron Microscopy»TEM, SEM, EPMA, sample prep benches Industrial»Glove boxes, coating systems, XRD/XRF systems, lamp evacuationnEXT240 nEXT300 nEXT400 The pump name refers to the true peak pumping speed for nitrogen gas.BOOST TECHNOLOGYFor our Analytica Instrument OEMs the “T” variants of nEXT employ a unique viscous pumping stage which can be used to ‘boost’ the performance of the backing pump. This offers a much simplified vacuum solution with greatly improved pumping speeds and system power reduction. The example in the image below shows how the boost ports can be used to replace a primary pump on a differentially pumped system.Customers in general laboratory and R&D applications will also benefit from the improved compression achieved with the "T" variant. To take maximum advantage of boost technology, please contact Edwards.END USER SERVICEABLITYNew technologies employed in nEXT have enabled the pumps to be serviced by the end user in the field. An interim oil lubrication cartridge change can be performed, where access allows, typically in less than 5 minutes and a full bearing change can also be performed by the end user in around 10 minutes both with the minimum of specialist tooling. These simple interventions will, in many cases, mean that the pump never requires a full return to base service during its lifetime.nEXT turbomolecular pumps will advise the user when aservice is due and what level of intervention is required.The user is alerted to a service request by a simple flashingLED sequence on the pumps and by serial comms notification.Flexibility is again key as these simple services can beperformed either by the end user, on site by an EdwardsField Service Technician, or the pump can be returned to anEdwards service hub.Using remote diagnostics, a user can interrogate the pumpto determine how long it is to the next service so that aproactive approach to preventative maintenance can beplanned.systems for maximum system rationalisationnEXT300 turbomolecular pump sectional viewintegration* a smaller backing pump may be used depending on application.Controllers and AccessoriesThe TIC (Turbo and Instrument Controller) automatically recognisesand supports one turbomolecular pump from the nEXT range, plusthree Edwards active gauges. Cooling and vent valve support is provideddirectly from the controller. Backing pump power is provided for acompact 24V diaphragm pump (on 200W versions only), or where greaterpumping speeds are required, mains backing pumps (up to RV12) may becontrolled via an optional relay box.nXDS and large XDS pumps can be controlled directly via the backingpump connector on a TIC 200. The relay box can also be used to controla mains heater band and backing line isolation valve. Time delays andnormal speed signals may be used to control events such as turbo startand there is a comprehensive selection of protection and safety interlockfeatures. The TIC turbo controller may be either rack or bench mountedand provides a useful hub for the flexible operation of a wide range ofvacuum system configurations.The TAG (Turbo and Active Gauge) controller is a small,compact, low cost pumping system controller, which issuitable for a wide range of vacuum applications. It is a 24Vcontroller that is compatible with all Edwards DX and nEXTturbomolecular pumps. It contains no power source andtherefore you either need to supply your own power or buythe optional power supply. In addition to a turbomolecularpump it can control a backing pump, a vent valve, an aircooler and an Edwards active gauge. The TAG Controlleris controlled by an easy to use interface. A large clear LEDdisplay shows the pump speed or vacuum pressure. Thecompact size of the controller is ideal for use on bench-topsor suitable mobile platforms.nEXT Turbomolecular PumpsEDWARDSnEXT240 nEXT300 nEXT400EMEAUK+44 1444 253 000(localrate************ Belgium+32 2 300 0730 France+33 1 4121 1256 Germany 0800 000 1456 Italy+ 39 02 48 4471 Israel+ 972 8 681 0633ASIA PACIFICChina+86 400 111 9618 India+91 20 4075 2222 Japan+81 47 458 8836 Korea+82 31 716 7070 Singapore+65 6546 8408 Taiwan +886 3758 1000 AMERICASUSA+1 800 848 9800 Brazil+55 11 3952 5000Publication Number: 3601 0096 01© Edwards Limited 2016. All rights reservedEdwards and the Edwards logo are trademarks ofEdwards LimitedWhilst we make every effort to ensure that weaccurately describe our products and services,we give no guarantee as to the accuracy orcompleteness of any information provided inthis brochure.Edwards Ltd, registered in England and WalesNo. 6124750, registered office: Innovation Drive,Burgess Hill, West Sussex, RH15 9TW, UK.Global contactsnEXT Turbomolecular Pumps EDWARDSPart of the Atlas Copco Group。
分子泵TURBOVAC 450说明书
分子泵TURBOVAC 450说明书分子泵安全使用说明在安装与使用分子泵前，泵的安装与操作人员都应仔细阅读本使用说明书，并按照说明书中规定的条款安装与操作，以免造成人员伤害与设备损坏。
安全警示说明危险：表示为了防止危及人身安全，需要引起高度注意且必须遵守的事项；警告：表示为了防止损伤或损坏泵，需要引起中度注意且必须遵守的事项：小心：表示为了使泵的使用效果最佳，需要引起轻度注意且需要遵守的事项。
保修说明凡购买我公司生产的分子泵，从发货之日起，用户凭保修单可保修一年。
凡属下列情况之一的，不予保修：1.用户未经授权对产品私自拆卸；2.用户保管或使用不当（如撞击、强放射性环境、强磁场环境等）;3.属于用户其他原因造成的损坏。
免责声明当用户严格遵照本说明书中的规定安装和使用时，分子泵TURBOVAC 450是安全、方便和有效的。
泵的操作人员必须仔细阅读并严格遵守本说明书中的条款。
由于用户没有仔细阅读说明书或未按照使用说明书的要求操作而造成的任何伤害和损失，KYKY 将不负担任何责任。
本说明书仅作为信息使用，如遇改版，恕不另行通知。
如本说明书与实际产品有所出入，本公司拥有最终解释权。
由本说明书引起、产生和包含的知识产权均属KYKY所有。
本说明书所列分子泵，按口径不同，从100mm到400mm （对应抽速从110l/s到3500/s）共5个系列，20种泵。
分子泵一般有两种结构形式，一种是由动静叶列组成的涡轮分子泵，一种是由涡轮级加牵引级构成的复合型分子泵。
复合型分子泵的特点是使得分子泵高压强区的抽速有所提高，另一特点是使得出口耐压得到提高，因此可以适当减小前级泵的规格，可使用户节省投资。
根据分子泵轴承润滑方式不同，分子泵有油润滑、脂润滑两种。
一一般情况下，油润滑分子泵需竖直安装（F一100/110、 F一100/150 可以水平安装），脂润滑分子泵可以任意角度安装。
B型TYFB-3600综合说明书
1.2 安装尺寸
初次使用分子泵时必须先注油！正常工作后，每 5000 小时即应换油一次！必须使用本厂提供的分子泵专用润
滑油，违规操作后果自负
4.3 高真空法兰的连接 分子泵的连接可利用高真空法兰吊装或将分子泵固定于基
座上，分子泵的高真空法兰通过金属波纹管与系统连接时分子泵 必须固定。
法兰密封面不得有划痕，
密封圈上不得有异物
闸板阀和隔断阀的密封面应在分子泵侧，当分子泵与真空室之间压差很大时（如预抽过程前后）， 能确保阀门不会在强气压差下被顶开。
旁抽阀密封面应在前级泵侧，当真空室恢复大气压时，能确保旁抽阀不会被大气压顶开。 隔断放气阀的密封面应在隔断阀和预抽阀一侧（其放气口在前级泵侧）。
第 10 页 共 20 页
10
6.6 电磁干扰
10
6.7 强放射性限制
10
6.8 前级泵
10
二、B-3600 分子泵电源
1、参数与功能
11
1.1 简介
11
1.2 安装尺寸
11
1.3 电气参数
11
1.4 前面板按键与接口功能
12
1.5 后面板接口功能
13
2、常规装配与通电试机
15
2.1 整机配电与注意事项
பைடு நூலகம்
15
2.2 遥控接口的应用
启动时间(min)
<10
停机时间(min)
<20
建议采用的前级泵（L／S）
30-70
冷却方式
水冷
冷却水温度（℃）
≤20
冷却水流量(L/min)
1
泵体烘烤温度（℃）
<80
环境温度（℃）
5-40
中科科仪分子泵说明书
企业通过ISO 9001质量管理体系认证分子泵全系列 使用说明书¾分子泵安全使用说明在安装与使用分子泵前，泵的安装与操作人员都应仔细阅读本使用说明书，并按照说明书中规定的条款安装与操作，以免造成人员伤害与设备损坏。
¾安全警示说明危险：表示为了防止危及人身安全，需要引起高度注意且必须遵守的事项；警告：表示为了防止损伤或损坏泵，需要引起中度注意且必须遵守的事项；小心：表示为了使泵的使用效果最佳，需要引起轻度注意且需要遵守的事项。
¾保修说明凡购买我公司生产的分子泵，从发货之日起，用户凭保修单可保修一年。
凡属下列情况之一的，不予保修：1)用户未经授权对产品私自拆卸；2)用户保管或使用不当（如撞击、强放射性环境、强磁场环境等）；3)属于用户其他原因造成的损坏。
¾免责声明当用户严格遵照本说明书中的规定安装和使用时，KYKY分子泵是安全、方便和有效的。
泵的操作人员必须仔细阅读并严格遵守本说明书中的条款。
由于用户没有仔细阅读说明书、或未按照使用说明书的要求操作而造成的任何伤害和损失，KYKY将不负担任何责任。
本说明书仅作为信息使用，如遇改版，恕不另行通知。
如本说明书与实际产品有所出入，本公司拥有最终解释权。
由本说明书引起、产生和包含的知识产权均属KYKY所有。
1概述1.1 分类与特点本说明书所列分子泵，按口径不同，从100mm到400mm（对应抽速从110l/s到3500l/s）共5个系列，12种泵。
分子泵一般有两种结构形式，一种是由动静叶列组成的涡轮分子泵，一种是由涡轮级加牵引级构成的复合型分子泵。
复合型分子泵的特点是使得分子泵高压强区的抽速有所提高，另一特点是使得出口耐压得到提高，因此可以适当减小前级泵的规格，可使用户节省投资。
根据分子泵轴承润滑方式不同，分子泵有油润滑、脂润滑两种。
一般情况下，油润滑分子泵需竖直安装（F-100/110可以水平安装），脂润滑分子泵可以任意角度安装。
分子泵说明书下
6.安装6.1 注意事项分子泵不能用于抽除液体或者带有粉尘、固体颗粒的气体；除了耐腐蚀型泵以外，其他任何分子泵不能用于抽除腐蚀性气体，耐腐蚀型泵在抽除腐蚀性气体时，必须给分子泵的保护气体入口连续通惰性保护气体如氮气等，且泵油使用我公司提供的专用耐腐蚀分子泵油。
确认分子泵与电源相配套。
每种泵都只能使用本说明书中规定的与之匹配的电源供电，否则造成的损失，本公司概不负责。
确认安装环境必须满足如下条件：1)泵体表面径向和轴向磁场强度均不得大于3mT(30Gs)；2)环境放射性强度<105rad；3)环境温度为5~40℃；4)空气相对湿度：≤85%；5)电压：220±22V，频率：50±1Hz；6)海拔：≤3000米。
安装前应检查分子泵运输中是否被损坏：打开泵高真空端法兰盖板，戴好手套，拨动涡轮转子，应转动灵活，无异常现象。
若存在异常现象，应及时通知我公司，不得自行处理，否则由此带来损失我公司概不负责。
不允许将分子泵长期置于大气状态下存放，在打开进气口和排气口盲板时，应注意真空卫生要求，严禁杂物、灰尘等落入泵内。
安装环境应符合技术要求和真空卫生要求。
6.2 连接安装6.2.1真空联接分子泵的进气口和排气口法兰采用国际标准见表4分子泵技术数据表,尺寸见分子泵安装简图和分子泵排气口简图。
注意：法兰密封面不得有划痕、刀口不得磕碰。
泵的联接可利用进气口法兰吊装或将泵置于基座平面上，但F-400/4200不建议吊装，若一定要吊装必须用活套法兰（订货时单独订购）固定。
分子泵的进气口法兰通过金属波纹管与系统联接时，分子泵必须固定。
为保护分子泵转子，防止外界物质落入泵内，可在泵口装上防护网，但装入此网后，抽速约降低15％左右。
前级泵与分子泵的联接应采用具有减震效应的金属波纹管，管路上应装有隔断放气阀，作为停机时对前级机械泵放气。
放气阀可选用手动阀或电磁阀。
放气过程的操作请参照停机部分。
为保护泵体真空卫生，防止潮湿，放气时，可通氮气或干燥空气。
涡轮泵使用方法说明书
涡轮泵使用方法说明书一、产品简介涡轮泵是一种常用的离心泵，它利用涡轮在高速旋转时产生的离心力来输送液体或气体。
本说明书将详细介绍涡轮泵的使用方法以及必要的注意事项，以确保用户能正确、安全地操作涡轮泵。
二、安全须知在使用涡轮泵之前，请务必仔细阅读并理解以下安全须知：1. 在操作涡轮泵之前，确认所有电源已经断开，并将泵与外部电源完全隔离，并用防护盖或其他遮挡物遮挡泵体。
2. 在进行维护保养或检修时，一定要先切断电源，并等待涡轮泵完全停止旋转后才能进行操作。
3. 长时间使用涡轮泵时，请定期检查泵体是否有异物堵塞，是否需要清理和维护。
同时，检查电机和轴承工作情况，并进行润滑工作。
4. 在泵体运转期间，严禁用手或其他物体接触旋转的涡轮或运动部件，以免造成安全事故。
必要时，可以使用专业工具进行维护和操作。
5. 涡轮泵工作时会产生较高的温度，使用过程中应避免直接接触泵体以免烫伤。
同时，切勿将易燃物品靠近运行中的泵，以免引发火灾。
6. 若发现涡轮泵出现异常声响、漏电等情况，请立即停止使用，并联系售后服务或专业技术人员处理。
三、使用方法为了正确使用涡轮泵，您可以按照以下步骤进行操作：1. 将涡轮泵放置在水平、稳定的工作台面上，并确保周围环境清洁、干燥。
2. 连接好涡轮泵的进出口管道，确保管道连接牢固，无泄漏。
3. 涡轮泵使用前，需先将泵内充满液体（水或其他介质），以防干转损坏泵体。
具体充液方法可参考涡轮泵的产品说明书。
4. 确保电源已经与涡轮泵隔离，并启动电源。
5. 打开涡轮泵进口阀门，允许流体进入泵体，并观察涡轮泵是否正常运转。
6. 在使用过程中，可通过观察压力表、流量指示器等参数来监测涡轮泵的工作状态，确保其正常运行。
7. 使用完毕后，先关闭出口阀门，再停止电源。
并等待涡轮泵完全停止旋转后，方可进行下一步操作。
四、维护保养为了延长涡轮泵的使用寿命和确保其正常工作，用户需要定期进行维护保养：1. 在使用涡轮泵前，先检查泵体是否有异物堵塞，如有堵塞应及时清理。
电源说明书-2012
感谢您购买我公司的系列分子泵电源产品。
该产品属于我公司生产系列分子泵的驱动和控制设备。
在使用前请详细阅读和理解本说明书的各项内容，以便正确使用。
不正确的使用，将可能造成运行不正常、设备故障、寿命降低，甚至危及人身安全。
电源的操作人员必须仔细阅读并严格遵守本说明书中的条款。
由于用户没有仔细阅读说明书、或未按照使用说明书的要求操作而造成的任何伤害和损失，我公司将不负担任何责任。
使用本资料后，务必进行妥善保管，以备使用。
凡购买我公司生产的分子泵电源，从发货之日起，用户凭保修单可保修一年。
外地用户可延长一个月。
在保修期内不收修理费，如需更换零件，一般核收半费，不超过半年可免费。
凡属下列情况之一的，不予保修：1)用户未经授权对产品私自拆卸；2)用户保管或使用不当（如雨淋、曝晒、进入杂物、撞击、强腐蚀环境、强放射性环境、强磁场环境等）；3)属于用户其他原因造成的损坏。
本说明书仅作为信息使用，如遇改版，恕不另行通知。
如本说明书与实际产品有所出入，本公司拥有最终解释权。
由本说明书引起、产生和包含的知识产权均属本公司所有。
1. 安全注意事项在安装、运行、操作、维护检查前，必须熟悉本说明书内容，以保证正确使用。
使用前也必须熟知一切有关安全注意事项。
1) 分子泵电源只能驱动与其适配的分子泵，同时分子泵电源必须良好接地，接地电阻不得大于4Ω。
否则可能发生产品损坏、人员受伤、触电或干扰。
2) 分子泵电源的维修必须返回公司由专业人员进行。
否则可能发生产品损坏、人员受伤或触电事故。
3) 分子泵电源的日常维护必须确认输入电源已断开15分钟以上方可进行电源外壳除尘等日常维护。
否则可能发生产品损坏、人员受伤或触电事故。
4) 湿手不能操作开关。
否则可能发生触电事故。
5) 不能带电接触电源后面板的接线及端子。
否则可能发生产品损坏或触电事故。
6) 分子泵电源必须断开电源5分钟以上，才能对其进行检查或接线。
否则可能发生触电事故。
7) 分子泵电源通电启动前必须检查是否满足分子泵启动要求,详见《分子泵使用说明书》。
涡轮分子泵电源说明书
-6-
4.1 运行前检查和准备 4.1.1 检查输出接线是否正确、可靠、接地保护线要牢靠（输出线
的连接如图 4—1—1）。 4.1.2 输入电源是否符合技术参数的要求。 4.1.3 投入电源前使所有的开关处于断开状态，保证投入电源时，
本电源不会起动和不发生异常动作。 4.1.4 投入电源后
在停机过程中，若切断了电源键（13），且断开时间超过 5 秒钟 时，只有在分子泵处于停止运转状态，方可重新启动运行。 注意事项：
启动运行程序已写入变频器内，绝对不能任意改写，否 则有可能严重损坏本电源和分子泵，严重时还可能危害 人身安全！ 操作时，一般只需要操作机箱面板（1）（如图 3—2—2） 上的“电源”（13）、“启动”（8）和“停止”（9）三个按
3.2.3 操作面板及按键说明
图 3—2—3 VFD-A/H 型变频器操作面板及按键说明图
特别说明： ⒈ 本电源的操作面板及按键是用于将分子泵电机运转的预定程
序写入变频器中，本电源在出厂之前已经预先将程序写入变频器了， 因此用户不能重新写入程序或更改原程序。否则，由此不作操作使用， 平常只操作电源箱面板上的启动按钮（8）、停止按钮（9）和电源按 钮（13）即可（如图 3—2—2）。
5.3 主电路电气测量 由于变频器的输入/输出电压和电流含有高次谐波，选择不同
电流 AXXX 是指本电源在运行中电源内的变频器的输出电流（不 是该电源的输出电流）。在启动前均为 A000，启动后则显示与该时刻 负载相对应的电流值。启动阶段电源大，启动完成后进入正常运行时， 电流最小。在正常运行时段因突发原因引起负载加大到一定限度时， 电流就会增大，直到发生故障报警并停止运行。
断开电源后经过 5 分钟，并确认充电 指示灯熄灭，测量端子 P—N 间电压 小于 25V 时，才能开始开盖检查作业。 防止电击事故。 非指定人员不能进行维护检查和更 换部件等工作。（作业前应取下手表、 戒指等金属物品。作业时应使用带绝 缘的工具。） 绝对不能对变频器进行改造。 防止电击和设备事故。
Yamada Pump SCU-350 Turbo Pump Control Unit 说明书
STP301/451 series ●STPL301/L451 series●Better vibration property●No peak vibration movement across all frequencies ●Compact design●Smallest size control unit in its class ●Energy saving●Features & BenefitsApplicationsPump to controller cableMagnetic bearing control system Digital control Input voltage100-120 / 200-240V a.c.Power consumption (Start up)Max 350 VA Power consumption (continuous)Max 150 VA Input frequency 50/60 ±2 Hz Leak current3.5 mA Main breaker rated current 5 A Motor drive system3-phase DCAllowable ambient temperature 0 to 40 °C (32 to 104 °F)Weight 8 kg Panel displayLCDDimensions Technical DataProduct DescriptionOrder No.SCU-350 Turbo Pump Control UnitYT21Z3ZC0SCU-350 Turbo Pump Control Unit with RS232YT21ZEZC0Type B P/Cab 3M Ring Terminals B70700090Type B P/Cab 5M Ring Terminals B70700040Type B P/Cab 10M Ring Terminals PT21Y0A00Type B P/Cab 15M Ring Terminals PT21Y0A01STP straight connection cable, 3m B70700010STP straight connection cable, 5m B70700000STP straight connection cable, 10m B70700130STP straight connection cable, 15m B70700070STP straight connection cable, 20mB70700150Ordering Information2Page 112The Edwards new SCU-350 control unit is a EU-RoHS compliant controller for small sized turbo pumps. It is fully compatible with the current control unit models, but has an improved vibration property at low frequency range. It also has lower input voltage, which contributes to a reduction in electric capacity and tool power consumption.The SCU-350 has improved noise immunity and is equipped with universal voltage function for operation with supply voltage from 100-240 VAC without switching.STP603/1003 series ●STPH301/H451 series ●STPH803/H1303 series ●STPA803C/A1303 series ●STPA1603 series●Universal Controller●Single controller is used for middle sized pumps. No requirement for different controllers for each pump type ●Service back up stocks will be reduced ●Advanced Pre-maintenance Function●AVR (Auto Vibration Reduction) minimizes the rotate system vibration during acceleration.●Features & BenefitsApplicationsPump to controller cableMagnetic bearing control system Digital control Input voltage100 – 120 ±10 V a.c.200 – 240 ±10 V a.c.Power consumption (without Temperature Management System, TMS)Max 850 VA Power consumption (with TMS)Max 1200 VA Input frequency 50/60 ±2 Hz Leak current3.5 mA Main breaker rated current 10 A Motor drive system3-phase d.c.Allowable ambient temperature 0 to 40 °C (32 to 104 °F)Weight8.5 kg TMS control unitBuilt-in Serial communication function (RS232/RS485)Standard Panel displayLCDDimensions Technical DataProduct DescriptionOrder No.Power Cable 5m PT49Y0A00Power Cable 10m PT49Y0A01Power Cable 15m PT49Y0A02Power Cable 20mPT49Y0A03STP straight connection Cable, 5m B75130020STP straight connection cable ,10m B75130060STP straight connection cable, 15M B75130070STP straight connection cable, 20MB75130190Ordering Information2Page 113The Edwards SCU800 turbo pump control unit is a fully digital controller, and has perfect compatibility for middle sized pumps. New AVR (Auto vibration reduction) technology achieves a further reduction in vibration levels, and the advanced pre-maintenance call function provides advanced notice of precise maintenance time.The reliability focused design, enhanced communication function, and perfect compatibility bring significant back up units savings and contributes to a reduction in total C 0O.STP-A2203/2503/2803/3003/3503●STP-F2203●STP-XA2703/3203/4503●STP-XH2603/3203●Advanced pre-maintenance function ●Precise maintenance timing ●Two stage warning messages ●Rotor imbalance monitoring●Back-up bearing damage monitoring●Features & BenefitsApplicationsPump to controller cableMagnetic bearing control system Digital control Input voltage200 – 240 ±10 V a.c.Power consumption (without Temperature Management System, TMS)Max 1600 VA Power consumption (with TMS)Max 2100 VA Input frequency 50/60 ±2 Hz Leak current3.5 mA Main breaker rated current 15 A Motor drive system3-phase d.c.Allowable ambient temperature 0 to 40 °C (32 to 104 °F)Weight12 kg TMS control unitBuilt-in Serial communication function (RS232/RS485)StandardOperation switch Start, Stop, Reset, Select, Up,Down, Enter, Manual/Remote Panel displayLCDDimensions Technical DataProduct DescriptionOrder No.Power cable, 5m YT76Y0A01Power cable, 10m YT76Y0A02Power cable, 15m YT76Y0A03Power cable, 20mYT76Y0A04STP straight connection cable, 5m B75030010STP straight connection cable, 10m B75030040STP straight connection cable, 15m B75030220STP straight connection cable, 20mB75030230Ordering Information2Page 114The fully digital SCU-1600 turbo pump control unit is compatible with STP turbo pumpsranging from 2000 ls -1 to 4500 ls -1. It provides reliability, enhanced communication and pump compatibility with reduced back-up unit requirements and minimized overall cost of ownership.。
涡轮分子泵机组使用说明书
企业通过ISO 9001质量体系认证FJ-1200涡轮分子泵机组使用说明书目录一、概述 (1)二、机组主要配置 (1)三、机组技术参数 (1)四、系统结构 (2)五、安装 (2)六、操作规程 (3)七、常见故障及处理方法 (5)八.注意事项 (5)九、保养、维护 (5)一、概述FJ-1200C非标涡轮分子泵机组是一台清洁的高真空获得设备。
此设备是根据真空知识原理，利用机械泵、涡轮分子泵组合成的真空获得系统，具有启动时间快、真空度高、操作方便等特点。
广泛应用于表面分析、加速器技术、等离子体技术、电真空器件制造及真空的各个领域。
设备的具体组成主要包括真空测量系统、真空室、阀门及真空管路、泵体加热控制、电器控制系统、水冷却保护控制等。
二、机组设备主要配置名称数量FF200/1200C分子泵（刀口） 2RVP-12机械泵 2KF40电磁隔断放气阀 2三、技术参数极限真空度（泵口）：≤1×10－7Pa真空系统漏率：≤5×10－9PaM3/S电源电压：220V±10/50Hz冷却方式：水冷（冷却水温度≤25℃）设备总功率：1.6Kw设备环境使用温度：5-40℃设备环境使用湿度：≤80%四、系统结构系统的工作原理图如下图所示，主要分为机械部分、气路系统和电器部分。
系统工作原理图五、安装拆开包装箱，将设备从箱体中取出，检查设备有无损坏，将设备的电源线接好，将地线与设备机壳连接。
如果是三相供电方式，第一次通电时需要观察机械泵的相序，打开总电源开关，观察分子泵机组电源的相序指示灯，如果相序指示灯亮表明机械泵相序正常；如果相序指示灯不亮表明机械泵相序不正常。
关掉总电源，将三相电源线中的任意两相对调，以确保机械泵相序正确。
危险！在接入供电电源时，务必要确认是否和设备要求的电源电压相符。
在调整相序时，务必将总电源关掉，以确保人身安全。
安装时应注意以下几点：1、设备安装应平地上,竖直方向上与垂直方向夹角小于5度。
莱宝真空 Turbolab 80 型涡旋分子泵系统 使用说明书
TURBOLAB 80 Turbomolecular pump system with dry compressing backing pumpOperating Instructions GA501591_002_A2Material number501591VxxxContents1D scription 31.1Ordering Information 31.2Supplied Equipment 31.2.1Pump System Components 31.2.2Accessories 31.3Technical Data 42Conn ctions 42.1Conforming Utilisation 53Op ration 63.1Electrical Connection 63.2Switching the System on 73.3Changing the Default Settings of the System 73.3.1 Selecting the HV Gauge Head 83.3.2 Selecting the Forevacuum Gauge Head 93.3.3 Selecting the Language 93.4Commissioning the System 103.4.1 Changing the Display Settings 113.4.2 Pressure History 113.4.3 Operating Hours 113.4.4 Venting Valve 123.4.5 Pressure Units 133.5Shutting the System Down 133.6Operating Information 134Spare Parts 145Options 141 DescriptionDescribed in these Operating Instructions is the equipment and operation of the turbomolecular pump system TURBOLAB 80.1.1 Or d ering InformationTURBOLAB 80, DN63ISO-K 501591V1xyz*TURBOLAB 80, DN63CF 501591V2xyz**xyz indicate the precise version of the system together with the possible options.1.2 Supplie d EquipmentTURBOLAB 80Mains cord 230V/1ph/50HzOperating Instructions for the pump systemOperating Instructions for the turbomolecular pumpInlet screen for the turbomolecular pump1.2.1 Pump System Componentsx Turbomolecular pump SL80x Frequency converter TURBO.DRIVE 400x24 V DC power supply unitx Diaphragm pumpx Control unit1.2.2 AccessoriesOptional accessories for the pump systems are:x High vacuum gauge ITR90x High vacuum gauge PTR90x Forevacuum gauge TTR91x Venting valve1.3 Technical DataPumping spee d for N2 60 l/sAttainable ultimate pressure range 10-7 mbar *Run-up time for the turbomolecular pump 1.5 minutesPumping speed of the diaphragm pump 0.7 m³/hUltimate pressure of the diaphragm pump 3 mbarMains voltages 100-240V, 1ph,50-60HzMain fuses (at the main switch) 10 ADimensions 255 x 355 x 355 mmAmbient conditionsTemperature 0 – 35°CHumi d ity 5 – 95%,non-condensingWeight 14.5 kg* At ambient temperature 20°C.2 ConnectionsNever expose any parts of the body to the vacuum.The turbomolecular pump must be firmly attached usingbolts.If the pump is not affixed adequately, parts from inside thepump may come loose and fly around should the pumpseize. Never operate the pump system without having flanged it to the vacuum chamber first in the course of a benchtop test, for example.After a mains power failure in the pump may run up automatically as soon as the mains power returns.If the pump has been pumping hazardous gases before, then introduce suitable precautions before opening the intake or exhaust connections.If necessary, wear protection gloves, breathing protection or protective clothing and work under a fume hood.The turbomolecular pump system is not suited for pumping of dusty, aggressive or corrosive media.The turbomolecular pump system must only be uninstalled when not in operation.Accelerating forces must be avoided or reduced to such a level that the rotor unit is not excited by vibrations. In critical applications consult our application department first.The pump must be only opened by persons duly authorised by Leybold.2.1 Conforming UtilisationVacuum pump systems as described in the catalogue are not suited for pumping of:Ŷҏo xygen at levels exceeding the concentration present in theatmosphere,Ŷҏh azardous gases,Ŷҏe asily flammable, explosive or toxic gases,Ŷҏe xtremely aggressive or corrosive mediaŶҏl iquidsŶҏo r solid materials.The operator is responsible for assessing the danger potential of the process media which as to their composition differ from the normal atmosphere.3 Operation3.1 Electrical ConnectionWarningRisk of suffering injury!During all connection work deenergise mains power lines(lockout/tag out). The electrical connections must only beprepared by a trained electrician as, for example, in accordancewith EN 50110-1.The mains connection of the pump system can be found on the right at thebottom on the rear of the pump system. There also the main switch can befound. The main fuse is located behind a cover panel on the main switch.Main switchMains connection Connectionfor the highvacuumgaugeFuses for theturbomolecular pump,forepump and controlunit3.2 Switching the System onThe TURBOLAB 80 is switched on through the main switch on the rear ofthe housing.After switching on, the display will indicate: Self-Test PassedAfter a few seconds the display changes to the welcome screenBy pressing the pushbutton within 15 seconds, the default settings of thesystem can be changed, see Chapter 3.3.3.3 Changing the Default Settings of the SystemWelcomescreenDepending on which high vacuum gauge and which forevacuum gauge hasbeen connected to the TURBOLAB 80 the software must be set upaccordingly. This is done through the default settings. In order to enter the mode of the default settings, the pushbutton mustbe pressed within 10 seconds.Then it is possible to select one after the other the type of high vacuumgauge, the type of forevacuum gauge and the language. After the 10 seconds have elapsed without operating the pushbutton thedisplay automatically changes to the operating display mode. In order toredisplay the welcome screen and enter the mode of the default settings, thepump system must be switched off and on again at its main switch.Display/change thedefault settings3.3.1 Selecting the HV Gauge Head After having pressed the pushbutton in the welcome screen (seeChapter 3.3) the display will indicate the enabled settings for the highvacuum measurement. Example:Depending on how the TURBOLAB 80 has been equipped on delivery, thefollowing will be indicated:For systems without a gauge head HV-MESSUNG OHNEFor systems with an ITR90: HV-MESSUNG ITR90For systems with a PTR90: HV-MESSUNG PTR90In order to change the setting, the ENTER pushbutton must be pressed.Thereafter the bottom area with the information on the high vacuum gauge(OHNE / ITR90 / PTR90) is displayed with a black background. Through the pushbuttons and a different setting can be selected.Possible settings:x OHNE (no high vacuum gauge)x ITR90x PTR90By pressing the ENTER pushbutton once more the setting is enabled.HV – MESSUNGOHNE ENTER pushbutton Pushbuttons for selecting the possible parameters3.3.2 Selecting the Forevacuum Gauge HeadBy pressing the pushbutton the display will indicate the enabled settings for the forevacuum measurement.Example:VV – MESSUNGOHNEDepending on how the TURBOLAB 80 has been equipped on delivery, the following will be indicated:For systems without a gauge head: VV-MESSUNG OHNEFor systems with a TTR91: VV-MESSUNG TTR91In order to change the setting, the ENTER pushbutton must be pressed. Thereafter the bottom area with the information on the forevacuum gauge (OHNE / TTR91) is displayed with a black background.Through the pushbuttons and a different setting can be selected. Possible settings:x OHNE (no forevacuum gauge head)x TTR91By pressing the ENTER pushbutton once more the setting is enabled.3.3.3 Selecting the LanguageWhen pressing the pushbutton once more the display will indicate the currently enabled language.Example:SPRACHEDeutschUpon delivery of the TURBOLAB 80 the language has been set to German. In order to change the setting, the ENTER pushbutton must be pressed. Thereafter the bottom area with the information on the language (Deutsch / Italiano / Francaise / English) is displayed with a black background. Through the pushbuttons and a different setting can be selected.Possible settings:x Deutschx Italianox Francaisex EnglishBy pressing the ENTER pushbutton once more the setting is enabled. After pressing the pushbutton once more, the welcome screen will bedisplayed again which after approximately 10 seconds automaticallychanges to the operating mode display.3.4 Commissioning the SystemAfter the display has switched over to the operating mode display thefollowing is indicated.If no high vacuum or forevacuum gauge has been selected, then nothing willbe displayed in the corresponding field. Through the pushbutton next to “ON” the pump system can be started.The display will then change to “OFF“ and the operating status will indicate“VV EIN ”.As soon as the factory default cut-in pressure of 20 mbar has been attained,the turbomolecular pump will start automatically and the operating displaywill change to “TMP HOCHLAUF ”.After run-up has completed, the operating status “HV ERREICHT ” will bedisplayed.Optional driving High vacuum pressure Forevacuum pump Display change through the pushbuttons and Current drawn andfrequency of the turbomolecular pump Operatingstatus3.4.1 Changing the Display SettingsDuring operation of the TURBOLAB 80 different display settings can be set up through the pushbutton .The following displays are available which may be selected by pressing the pushbutton once more and alternatively backwards through the pushbutton.3.4.2 Pressure HistoryThe pressure history may be displayed by way of the pumpdown curve overthe last eight minutesThe pressure unit will be the unit which has been set up.3.4.3 Operating HoursForevacuum pump operating hoursHigh vacuum pump operating hoursGenerally the number of operating hours for the high vacuum pump will be higher than those for the forevacuum pump, since the high vacuum pump has been subjected to an endurance test in the factory over several hours. This time is recorded by the turbomolecular pump. The displayed value is composed of the number of operating hours during the test run in the factory plus the number of operating hours of the pump system.The number of operating hours for the forevacuum pump will only indicate the number of operating hours for the pump system.Pressure (Value as exponent)Example: -3 = 10E-3Time (min)STUNDEN VV 000006.7 hSTUNDEN HV 000024.9 h3.4.4 Venting ValveThe venting valve can be set up to fulfil different functions .Operating setting Position FunctionAutoOPEN or CLOSED60 seconds after theturbomolecular pump has been switched off and decelerated, the venting valve opens for two minutes. Thereafter it closes automatically.Manual CLOSEDThe pump system is not vented. ManualOPEN 60 seconds after theturbomolecular pump has been switched off, venting is effected. Thereafter the venting valve remains open. When the pump system starts, the venting valve closes.BELUEFTUNG AutoOperating setting automatic or manual (Change this setting throughand, and thereafter confirm with)Position of the venting valve after switching the system off AUF or ZU3.4.5 Pressure UnitsDifferent pressure units can be set upEINHEITmbarThrough the pushbuttons and the pressure unit can be changed, thereafter confirm through .Possible pressure units:x mbarx Pax TorrBy pressing the pushbutton the operating display is displayed once more.3.5 Shutting the System DownTo shut down the system, is selected with the pushbutton next to it.The display will indicate the message “TMP BREMST”.After the turbomolecular pump has arrived at standstill, the display will change to “AUS”.3.6 Operating InformationWith connected gauge heads, only automatic operation is possible.Without gauge heads, only manual operation is possible.To read out the parameters on a PC please contact Oerlikon Leybold Vacuum, Cologne.4 SparePartsFuses 10 A P/N 500 007 9556504920 Controller with Software P/N5 OptionsVenting valve kit P/N 6504899 Adapter for PTR gauge head P/N 6504112DescriptionEC - Declaration of ConformityThe manufacturer: Oerlikon Leybold Vacuum GmbHBonner Straße 498D-50968Cologne347-0Tel.:+49(0)221************************herewith declares that the following product:Product designation: Turbomolecular pump systemType designation: TURBOLAB 80 Full FeaturedPart number: 501591Vxxxxcomplies with all pertinent regulations of the Directive on Machinery (2006/42/EC).Furthermore the machinery complies with all regulations of the Directive Electrical Equipment(2006/95/EC) and Electromagnetic Compatibility(2004/108/EC).The following harmonised standards have been applied:EN 1012-2, 1996 Compressors and vacuum pumps - Safety requirements - Part 2: VacuumpumpsEN 60204-1, 2006 Safety of machinery - Electrical equipment of machines – Part 1: GeneralrequirementsEN 61010-1 2002 Safety of electrical measure, control and laboratory equipmentEN 61000-6-4, 2007 Electromagnetic compatibility (EMC) - Part 6-4: Generic standards -Emission standard for industrial environmentsEN 61000-6-2 2005 Electromagnetic compatibility (EMC) - Part 6-2: Generic standards -Immunity for industrial environmentsDocumentation officer Herbert EtgesTel.: +49(0)221 347-0Fax: + 49(0)221 347 1250****************************************Oerlikon Leybold Vacuum GmbHBonner Straße 498 , D-50968 KölnCologne, August 04, 2010 Cologne, August 04, 2010_______________________________ ______________________UdelhovenHaraldHans-JürgenBlumHead of Oerlikon Leybold Vacuum :solutions Senior ManagerHead of Quality ManagementSales and ServiceGermanyOerlikonLeybold Vacuum GmbH Bonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 1234Fax: +49-(0)221-3471245*************************OerlikonLeybold Vacuum GmbHSales Area North/EastBranch Office BerlinIndustriestr. 10bD-12099 BerlinPhone: +49-(0)30-435 609 0Fax: +49-(0)30-435 609 10****************************OerlikonLeybold Vacuum GmbHSales Area South/Southwest Branch Office MunicSendlinger Strasse 7D-80331 MunicPhone: +49-(0)89-357 33 9-10 Fax: +49-(0)89-357 33 9-33**************************** service.vacuum.mn@OerlikonLeybold Vacuum GmbHSales Area West & Benelux Bonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 1270Fax: +49-(0)221-3471291****************************OerlikonLeybold Vacuum GmbH Service Competence Center Emil-Hoffmann-Strasse 43D-50996 Cologne-SuerthPhone: +49-(0)221-347 1439Fax: +49-(0)221-3471945******************************OerlikonLeybold Vacuum GmbHMobil Customer ServiceEmil-Hoffmann-Strasse 43D-50996 Cologne-SuerthPhone: +49-(0)221-347 1765Fax: +49-(0)221-3471944******************************OerlikonLeybold Vacuum GmbH, DresdenZur Wetterwarte 50, Haus 304D-01109 DresdenService:Phone: +49-(0)351-88 55 00Fax: +49-(0)351-88 55 041***************************OerlikonLeybold Vacuum USA Inc. 5700 Mellon RoadExport, PA 15632Phone: +1-724-327-5700 Fax: +1-724-325-3577***************************EuropeBelgiumOerlikon Leybold VacuumNederland B.V.Belgisch bijkantoorLeuvensesteenweg 542-9AB-1930 ZaventemSales:Phone: +32-2-711 00 83Fax: +32-2-7208338****************************Service:Phone: +32-2-711 00 82Fax: +32-2-7208338******************************FranceOerlikonLeybold Vacuum France S.A.7, Avenue du QuébecZ.A. Courtaboeuf 1 - B.P. 42F-91942 Courtaboeuf CedexSales and Service:Phone: +33-1-69 82 48 00Fax: +33-1-69 07 57 38****************************OerlikonLeybold Vacuum France S.A.Valence Factory640, Rue A. Bergès - B.P. 107F-26501 Bourg-lès-Valence CedexPhone: +33-4-75 82 33 00Fax: +33-4-75 82 92 69***************************Great BritainOerlikonLeybold Vacuum UK LTD.Unit 2Silverglade Business ParkLeatherhead RoadUK-Chessington, Surrey KT9 2QLSales:Phone: +44-13-7273 7300Fax: +44-13-72737301****************************Service:Phone: +44-20-8971 7030Fax: +44-20-89717003******************************ItalyOerlikonLeybold Vacuum Italia S.p.A.8, Via TrasimenoI-20128 MilanoSales:Phone: +39-02-27 22 31Fax: +39-02-27 20 96 41****************************Service:Phone: +39-02-27 22 31Fax: +39-02-27 22 32 17******************************OerlikonLeybold Vacuum Italia S.p.A.Field Service BaseZ.I. Le CapanneI-05021 Acquasparta (TR)Phone: +39-0744-93 03 93Fax: +39-0744-944287******************************NetherlandsOerlikon Leybold VacuumNederland B.V.Computerweg 7NL-3542 DP UtrechtSales and Service:Phone: +31-346-58 39 99Fax: +31-346-58 39 90**********************************************************SpainOerlikonLeybold Vacuum Spain, S.A.C/ Huelva, 7E-08940 Cornellà de Llobregat(Barcelona)Sales:Phone: +34-93-666 46 16Fax: +34-93-666 43 70****************************Service:Phone: +34-93-666 49 51Fax: +34-93-685 40 10SwedenOerlikon Leybold VacuumScandinavia ABBox 9084SE-40092 GöteborgSales and Service:Phone: +46-31-68 84 70Fax: +46-31-68 39 39***************************Visiting/delivery address:Datavägen 57BSE-43632 AskimSwitzerlandOerlikonLeybold Vacuum Schweiz AGLeutschenbachstrasse 55CH-8050 ZürichSales:Phone: +41-044-308 40 50Fax: +41-044-302 43 73****************************Service:Phone: +41-044-308 40 62Fax: +41-044-308 40 60AmericaUSAOerlikonLeybold Vacuum USA Inc.5700 Mellon RoadExport, PA 15632Phone: +1-724-327-5700Fax: +1-724-325-3577***************************Sales:Eastern & Central time zonesPhone: +1-724-327-5700Fax: +1-724-733-1217Pacific, Mountain, Alaskan &Hawaiian time zonesPhone: +1-480-752-9191Fax: +1-480-752-9494Service:Phone: +1-724-327-5700Fax: +1-724-733-3799OerlikonLeybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 0Fax: +49-(0)221-347 1250************************AsiaP.R. ChinaOerlikonLeybold Vacuum (Tianjin)International Trade Co., Ltd.Beichen EconomicDevelopment Area (BEDA),Shanghai RoadTianjin 300400ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-26974061Fax: +86-22-26972017****************************OerlikonLeybold Vacuum(Tianjin) Co., Ltd.Beichen EconomicDevelopment Area (BEDA),Shanghai RoadTianjin 300400ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-26974061Fax: +86-22-26972017***************************OerlikonLeybold Vacuum (Tianjin)International Trade Co., Ltd.Shanghai Branch:Add: No. 3376 Futedong San Rd.Waigaoqiao FTZShanghai 200131ChinaSales and Service:Phone: +86-21-5064-4666Fax: +86-21-5064-4668***************************OerlikonLeybold Vacuum (Tianjin)International Trade Co., Ltd.Guangzhou Office andService Center1st F, Main Building,Science City Plaza,No.111 Science Revenue,Guangzhou Science City(GZSC) 510663, Guangzhou,ChinaSales:Phone: +86-20-22323980Fax: +86-20-22323990***************************OerlikonLeybold Vacuum (Tianjin)International Trade Co., Ltd.Beijing Branch:1-908, Beijing Landmark Towers8 North Dongsanhuan RoadChaoyang DistrictBeijing 100004ChinaSales:Phone: +86-10-6590-7622Fax: +86-10-6590-7607IndiaOerlikonLeybold Vacuum India Pvt Ltd.EL-22, J BlockMIDC BhosariPune 411026IndiaSales:Phone: +91-20-3061 60000Fax: +91-20-27121571****************************JapanOerlikonLeybold VacuumJapan Co., Ltd.Head OfficeTobu A.K. Bldg. 4th Floor23-3, Shin-Yokohama3-chomeKohoku-ku, Yokohama-shiKanagawa-ken 222-0033Sales:Phone: +81-45-471-3330Fax: +81-45-471-3323OerlikonLeybold VacuumJapan Co., Ltd.Osaka Sales Office5-13, Kawagishi-choSuita-chiOsaka-fuPhone: +81-6-4860-2212Fax: +81-45-471-3323OerlikonLeybold VacuumJapan Co., Ltd.Tsukuba Technical S.C.Tsukuba Minami DaiichiKogyo Danchi21, Kasumi-no-Sato,Ami-machi, Inashiki-gunIbaraki-ken, 300-0315Service:Phone: +81-29-889-2841Fax: +81-29-889-2838KoreaOerlikonLeybold Vacuum Korea Ltd.3F.Jellzone 2 Tower159-4 Jeongja-Dong, Bundang-Gu,Sungnam-Si, Gyeonggi-Do,Korea 463-834Sales:Tel.: +82-31-785-1367Fax: +82-31-785-1359Service:Tel.: +82-41-589-3035Fax: +82-41-588-0166SingaporeOerlikonLeybold VacuumSingapore Pte Ltd.1 Science Park RoadSingapore Science Park 2#02-12 Capricorn BuildingSingapore 117528Sales und Service:Tel.: +65-63037000Fax: +65-67730039***************************TaiwanOerlikonLeybold Vacuum Taiwan Ltd.No 416-1, Sec. 3Chung-Hsin Rd., Chu-TungHsin-Chu, Taiwan, R.O.C.Sales and Service:Phone: +886-3-500 1688Fax: +886-3-5833999****************************。
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注：若直接按下电源开关（13），则分子泵处于自由停车状态。 4.2.3 停车后再启动运转
在停机过程中，即只按下“停止”键（9）而未切断电源键（13）， 则可随时重新启动运行。
5.3 主电路电气测量 由于变频器的输入/输出电压和电流含有高次谐波，选择不同
强迫冷风
使用场所
无腐性气体、液体、无尘垢
环境温度 环
环境湿度 境
振动
-10℃～50℃（超过 40℃时须移至通风良好处） 90％RH 以下（无结霜）
20HZ 以 下 9.80665m/s2(1G) ， 20 ～ 50HZ ， 5.88 m/s2(0.6G)
重 量 （KG）
2023Biblioteka 272.3 型号及表示意义
电流 AXXX 是指本电源在运行中电源内的变频器的输出电流（不 是该电源的输出电流）。在启动前均为 A000，启动后则显示与该时刻 负载相对应的电流值。启动阶段电源大，启动完成后进入正常运行时， 电流最小。在正常运行时段因突发原因引起负载加大到一定限度时， 电流就会增大，直到发生故障报警并停止运行。
1 序言
本文件对 FD-
/
BG 型涡轮分子泵电源的用途和
实用范围,工作原理和结构特征,使用操作与维护保养,故障分析与排
除,运输储存与开箱检查,外行尺寸与安装均作了详细说明。在使用
前，请仔细阅读本说明书，以便正确使用。
本使用说明书使用后，务请随同电源妥善保存，以备随时查用。
本说明书实用于 FD-150/450BG、FD-250/1400BG、FD-400/3500BG
本电源在启．动．过．程．中．，“操作面板”上的频率显示有时会出现反 复。例如：运行频率显示已升至 75HZ 后，又降至 74HZ，然后又上升 至 75HZ、76HZ，又降至 75HZ，然后又上升，这样经过多次反复，基
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本上在设定时间内，最后直至升到额定输出频率。出现上述现象的原 因是电流限流功能在起作用，也就是启动中电机的最大转矩限定在一 定范围内，也就是电机的实际转速的上升速度被限制，而频率的上升 是时间的函数。频率上升快了，就形成转差，转差增大，电流就增大， 当电流达到上限时，就反过来限制频率的上升速度，频率显示也跟着 出现反复。此现象一般在 FD—400/3500BG 电源有可能出现。 4.2.2 停机
⒉ 在下列情况下操作面板上的按钮可操作。 操作面板上的主显示器显示的内容设定为：设定频率 FXXX，运 行频率 HXXX，变频器运行时的输出电流 AXXX，及故障信息显示。 设定频率 FXXX 是指本电源输出电压频率的最高限额。如 FD—
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150/450BG 型和 FD—250/1400BG 型电源设定频率为 F400，FD— 400/3500BG 型电源设定频率为 F250 等，设定频率是不变的。
电源按钮开关上的电源指示灯应点亮（图 3—2—2 中的 13） 操作面板上的显示器应显示 机箱内冷却风扇应正常运行 分子泵电机的旋转方向应符合标识。 特别注意： ⒈ 投入电源前凡水冷却分子泵必须通水！否则将对分子泵造成 损坏！ ⒉ 为防止干扰和保护人身安全，务必连接牢靠接地保护线。
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说明： X2—分子泵电源输出插头座，电源箱附件（P284Q、P28K4A）。 X3—分子泵电源输出插入插座之一，分子泵附件，插座在泵体上。 X4—是一根控制线的两个端头。当需要用分子泵的冷却水来控制
等型涡轮分子泵电源。
2 概述
2.1 主要用途
FD-150/450BG、FD-250/1400BG、FD-400/3500BG 型分子泵电源
专门用来与我公司生产的 F-150/450、F-250/1400、F-400/3500 型的
涡轮分子泵配套使用，完成其拖动运行及各种故障保护等功能；也可
与国内外使用同类型电源的同型号分子泵调试后配套使用。
3.2.3 操作面板及按键说明
图 3—2—3 VFD-A/H 型变频器操作面板及按键说明图
特别说明： ⒈ 本电源的操作面板及按键是用于将分子泵电机运转的预定程
序写入变频器中，本电源在出厂之前已经预先将程序写入变频器了， 因此用户不能重新写入程序或更改原程序。否则，由此不作操作使用， 平常只操作电源箱面板上的启动按钮（8）、停止按钮（9）和电源按 钮（13）即可（如图 3—2—2）。
2.2 主要技术参数
表 2—1
型
号
FD-150/450BG FD-250/1400BG FD-400/3500BG
额定输出电压（V）
输 额定输出频率
（HZ）
400
最大启动电流（A）
＜4
出
正常工作电流（A）
＜1
3×50 400 ＜5 ＜1.2
250 ＜8 ＜2.5
-1-
型
号
FD-150/450BG FD-250/1400BG FD-400/3500BG
输 额定输入电压（V）
入
额定输入频率 （HZ）
控 控制方式
220±10％ 50/60±5％ 正弦波 PWM 方式
制 过负载耐量
输出最大启动电流的 140％，一分钟
特 启动加速时间
＜5 分
＜8 分
＜30 分
征 停车减速时间
＜10 分
＜20 分
＜60 分
保护功能
过电压、过电流、欠电压、过负载、过热等
冷却方式
操作面板上的其余各项键请勿操作。 4 操作运行
-6-
4.1 运行前检查和准备 4.1.1 检查输出接线是否正确、可靠、接地保护线要牢靠（输出线
的连接如图 4—1—1）。 4.1.2 输入电源是否符合技术参数的要求。 4.1.3 投入电源前使所有的开关处于断开状态，保证投入电源时，
本电源不会起动和不发生异常动作。 4.1.4 投入电源后
分子泵电源的运行，可将水压控制器的两个常开触点（无水断开，有 水闭合）串入即可；若不需要如此，就将两个端头短接（出厂时是短
-8-
接的）。
说明： 外控接线前需焊熔取掉④、⑤短接线
4.2 操作方法 4.2.1 按下机箱面板（2）（如图 3—2—2）上的电源开关键（13）， 分子泵电源得电，再按“启动”键（8），本电源就将按照预先设定的 启动和运行程序进行工作。操作面板上的显示器显示的运行频率或电 流应随即变化；运行频率由 000 逐渐上升，并在设定时间内达到额定 输出频率；若是电流显示，其值即表示本电源内的变频器的输出电流， 而非本电源的输出电流值。达到额定频率 1～3 分钟后，其显示的电 流值即为本电源在分子泵正常工作时变频器输出的电流值（但不是本 电源的输出电流值）。 特别说明：
FD — 400 / 3500 BG
BG 系列，变频器电源改进系列
配用涡轮分子泵的抽速
配用涡轮分子泵的进气口径
Fen Zi Beng Dian Yuan
-2-
2.4 使用环境条件 2.4.1 工作环境应干燥、清洁、无灰尘、无腐蚀性气体、液体，无
可燃性气体、油雾、水滴、振动，不受阳光直晒，更应避免含 盐分的环境。 2.4.2 使用场所：室内。 2.4.3 使用环境温度：-10℃～+50℃，超过 40℃时，应移至通风良 好的环境。 2.4.4 相对湿度 20—95％，不因温度突变而产生结露。 2.4.5 海拔高度 H≤1000m。 2.4.6 振动≤5.9 m/s2(0.6G)。 2.5 工作条件 2.5.1 输入电源电压 220V±10％ 2.5.2 输入电源频率 50/60HZ±5％ 2.5.3 输入电源容量 4.5KV 以上 2.6 安装方法 2.6.1 本电源应平放，面板在前方，安装应紧固牢靠。 2.6.2 本电源运行时将产生热量，因此本电源周围应留有足够的空 间，保证良好的通风。若安装在电柜上，本电源上下应留出不 小于 40mm 的空间，且电柜应设送风排风装置，使用中温度不超 过表 2—1 所规定的值。 3 工作原理及结构说明 3.1 工作原理
-3-
本电源的工作原理是将工频单相电源经过变频器后，变成频率可 调、电压可变的三相交流电，去驱动分子泵内的中频电机，从而带动 分子泵的涡轮加速旋转，在较短的时间内达到额定的转速，使分子泵 进入正常工作状态。 3.2 结构 3.2.1 电气原理
本电源主要由变频器、变压器、控制线路和故障报警线路及输出 等组成（见分子泵电源电路图 3—1—2）。
图 3—2—1 FD-
/
BG 型分子泵电源电路图
3.2.2 产品结构与各部分名称（见图 3—2—2）
图 3—2—2 FD-
/
BG 型分子泵电源外形及结构图
⒈面板 ⒋ 箱体底板 ⒌ 变频器 ⒍ 煞车电阻 ⒎ 变压器 ⒏ 启动按钮开关
-4-
⒐ 停止按钮开关 ⒑ 蜂鸣器 ⒒ 报警指示灯 ⒓ 运行指示灯 ⒔ 电源开关 M 风扇 X1 外控输出插头座 X2 输出插头座
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钮开关即可，不要随意按动操作面板上的操作键。 操作面板（入图 3—2—2 上的“FUNC/DATA”、“MODE”、 键），可切换显示内容（电流或频率）。 发生故障跳闸时，将以代码方式显示故障原因，此时必 须停机检查，排除故障，然后复位，再重新启动运行。 复位方法如下：按下电源开关（13），断开电源约五分钟， 再重新开通电源，即可自动复位。 5 维护和检查 本电源的维护和检查，主要是对机内变频器（或称逆变器）的 维护和检查，为使变频器能长期可靠连续运行，防止发生故障，进行 日常和定期的检查是很必要的。变频器主要是由半导体器件组成。它 的老化和使用与使用条件（例如温度、尘、埃和振动）有关。为了延 长使用寿命和使之正常工作，要进行以下的日常和定期维修检查。 特别注意事项！！！ 至少要在切断电源 5 分钟之后进行维修。因为平滑电容器即使 在变频器关掉之后仍带有高压。以防止人身伤害！ 以下 5（维护和检查）和 6（故障诊断）两项主要是对变频器而 言。对整机而言，再加上对保险器、变压器、风扇、继电器和按钮开 关的检查和维护。 5.1 日常检查 通电和运行时不取去外盖，从外部检查变频器的运行，确认没 有异常情况。下列各点必须经常检查。