电子显微分析
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– – – – Structure determination (BF, DF, HREM) Phase analysis (SAD, NED, CBED) Composition analysis (EDS, EELS) Electron structure analysis (EELS)
Incident beam
• element distribution
Convergent Beam Electron Diffraction （CBED）
•symmetry of crystal structure
•thickness of the specimen •strain
Electron Energy Loss Spectrometry (EELS)
Graphite
Energy (eV)
35000 30000 25000 20000 15000
10000
Evaporated Carbon
8000 6000 4000 2000
DLC
10000
5000 0 280 285 290 295 300 305 310 315 320
0 280 285 290 295 300 305 310 315 320
• Analysis of chemical composition from H (Z=1) to U (Z=92).
determination of nature of chemical bonding
Diamond
80000 70000 60000 50000 40000 30000 20000 10000 0 280 285 290 295 300 305 310 315 320
Different type of electron microscopes
• • • • Transmission Electron Microscope (TEM) Scanning Electron Microscope (SEM) Electron Probe Microanalyzer (EPMA) Scanning Transmission Electron Microscope (STEM)
清华大学精品课
电子显微分析
授课教师：章晓中教授 办公室：东主楼(11区）一楼电镜实验室 Tel： 62773999 e-mail: xzzhang@tsinghua.edu.cn
教学手段
• 双语教学：
– 讲课：英文 – 作业、实验、考试用中文
• • • •
使用多媒体和板书 教学内容课后会放在清华大学“网络学堂”上 无英文教材，有英文ppt课件和自编中文教材 推荐参考书
Sumio Iijima (饭岛澄男）discovered carbon nanotubes using TEM in 1991 Nature，354 (1991) 56.
TEM images
Structure model of carbon nanotubes
High resolution TEM (HREM)
microstructural analysis
• Optical Microscopy Advantage:
– observe surface morphology – Easy to operate – Result interpretation is straightforward
Disadvantage:
microstructural analysis
• Electron microscopy Disadvantage:
– – – – – only give localized information very expensive (US$:0.1-1million) interpretation is not straightforward operation is complex Specimen preparation is difficult
Why learn this course?
Question? If we have a materials with heterogeneous composition and we want to know its structure , phase and composition, what microstructural analysis technique shall we use ?
Electron Diffraction Pattern
Phase analysis
Single crystal polycrystal amorphous
X-ray energy dispersive spectrometer （EDS）
• composition analysis
(from element of Z=4 to Z=92)
Energy (eV)
Energy (eV)
Virus structure
Influenza virus
SARS virus
Scanning Electron Microscope (SEM)
• Interaction of incident electron beam with materials at surface of specimen results in many useful signals. • Using these signals one can do surface morphology observation and composition analysis • resolution： 4Å • specimen： thick specimen
Thin specimen
• resolution： <1Å • specimen： thin specimen (10-100nm)
Screen/detector
JEM-2010F FEG TEM
various TEMs
FEI Titan
Characterization of nanomaterials
Transmission Electron Microscope (TEM)
• Electron beam go through the thin specimen. Due to the interaction between the incident electron beam with the specimen, the transmitted beam will give out the structural and compositional information of materials. • Can do
• resolution
– Horizontal (x-y direction ): 0.1nm – Vertical (z direction): 0.01nm
• detection depth: 1-2 atomic layer (no damage on the specimen) • Can work in air, solution, vacuum • can only be used for conductor and semiconductor
Application in Materials Science
Application in Bio-science
Electron Backscattered Diffraction (EBSD)
30um
Grain orientation distribution
pseudo-Kikuchi patterns
B A
Methods of microstructure analysis
The most commonly used microstructure analysis methods in materials science and engineering
• • • optical microscopy X-ray diffraction electron microscopy
Incident beam detector
Thick specimen
JSM-6301F FEG SEM
Various SEMs
Quanta 400 FEG ESEM
Hitachi S5500
SEM image (IC)
Cross-section of IC showing layers
Bonding wire
– Low resolution (0.2m) – Can not do composition analysis and phase analysis
microstructural analysis
• X-ray diffraction Advantage:
– phase analysis – High accuracy – Give average composition
Why learn electron microscopy
• The properties of materials are mainly determined by its microstructure. By controlling the microstructure of the materials, one can make a material with the required properties. • To achieve such goal, one should first “know” the microstructure of the materials. • Electron microscopy is a method to analyses the microstructure of the materials， especially for nanomaterials and nanotechnology
Disadvantage:
– Can not “see” image – Can not do “localized” analysis
microstructural analysis
• Electron microscopy Advantage:
– High resolution: TEM (<1Å)， SEM (4Å） – Do image observation (BF, DF, HREM), structure analysis (SAD, CBED), composition analysis (EDS) and electronic structure analysis (EELS) on one instrument (TEM) – Can do analysis in very small volume (~nm3)
Байду номын сангаас
Electron beam lithography system in SEM
Scanning Probe Microscope（SPM)
• Scanning Tunneling Microscope (STM) • Atomic Force Microscope (AFM)
STM
SPM
Scanning Tunneling Microscope (STM)
Topics of this lecture
• Comparison of electron microscopy with other microstructure analysis techniques • Briefly introduce various electron microscopes and their application • History of development of electron microscope and electron microscopy • course contents, teaching target, teaching arrangement and reference books
Incident beam
• element distribution
Convergent Beam Electron Diffraction （CBED）
•symmetry of crystal structure
•thickness of the specimen •strain
Electron Energy Loss Spectrometry (EELS)
Graphite
Energy (eV)
35000 30000 25000 20000 15000
10000
Evaporated Carbon
8000 6000 4000 2000
DLC
10000
5000 0 280 285 290 295 300 305 310 315 320
0 280 285 290 295 300 305 310 315 320
• Analysis of chemical composition from H (Z=1) to U (Z=92).
determination of nature of chemical bonding
Diamond
80000 70000 60000 50000 40000 30000 20000 10000 0 280 285 290 295 300 305 310 315 320
Different type of electron microscopes
• • • • Transmission Electron Microscope (TEM) Scanning Electron Microscope (SEM) Electron Probe Microanalyzer (EPMA) Scanning Transmission Electron Microscope (STEM)
清华大学精品课
电子显微分析
授课教师：章晓中教授 办公室：东主楼(11区）一楼电镜实验室 Tel： 62773999 e-mail: xzzhang@tsinghua.edu.cn
教学手段
• 双语教学：
– 讲课：英文 – 作业、实验、考试用中文
• • • •
使用多媒体和板书 教学内容课后会放在清华大学“网络学堂”上 无英文教材，有英文ppt课件和自编中文教材 推荐参考书
Sumio Iijima (饭岛澄男）discovered carbon nanotubes using TEM in 1991 Nature，354 (1991) 56.
TEM images
Structure model of carbon nanotubes
High resolution TEM (HREM)
microstructural analysis
• Optical Microscopy Advantage:
– observe surface morphology – Easy to operate – Result interpretation is straightforward
Disadvantage:
microstructural analysis
• Electron microscopy Disadvantage:
– – – – – only give localized information very expensive (US$:0.1-1million) interpretation is not straightforward operation is complex Specimen preparation is difficult
Why learn this course?
Question? If we have a materials with heterogeneous composition and we want to know its structure , phase and composition, what microstructural analysis technique shall we use ?
Electron Diffraction Pattern
Phase analysis
Single crystal polycrystal amorphous
X-ray energy dispersive spectrometer （EDS）
• composition analysis
(from element of Z=4 to Z=92)
Energy (eV)
Energy (eV)
Virus structure
Influenza virus
SARS virus
Scanning Electron Microscope (SEM)
• Interaction of incident electron beam with materials at surface of specimen results in many useful signals. • Using these signals one can do surface morphology observation and composition analysis • resolution： 4Å • specimen： thick specimen
Thin specimen
• resolution： <1Å • specimen： thin specimen (10-100nm)
Screen/detector
JEM-2010F FEG TEM
various TEMs
FEI Titan
Characterization of nanomaterials
Transmission Electron Microscope (TEM)
• Electron beam go through the thin specimen. Due to the interaction between the incident electron beam with the specimen, the transmitted beam will give out the structural and compositional information of materials. • Can do
• resolution
– Horizontal (x-y direction ): 0.1nm – Vertical (z direction): 0.01nm
• detection depth: 1-2 atomic layer (no damage on the specimen) • Can work in air, solution, vacuum • can only be used for conductor and semiconductor
Application in Materials Science
Application in Bio-science
Electron Backscattered Diffraction (EBSD)
30um
Grain orientation distribution
pseudo-Kikuchi patterns
B A
Methods of microstructure analysis
The most commonly used microstructure analysis methods in materials science and engineering
• • • optical microscopy X-ray diffraction electron microscopy
Incident beam detector
Thick specimen
JSM-6301F FEG SEM
Various SEMs
Quanta 400 FEG ESEM
Hitachi S5500
SEM image (IC)
Cross-section of IC showing layers
Bonding wire
– Low resolution (0.2m) – Can not do composition analysis and phase analysis
microstructural analysis
• X-ray diffraction Advantage:
– phase analysis – High accuracy – Give average composition
Why learn electron microscopy
• The properties of materials are mainly determined by its microstructure. By controlling the microstructure of the materials, one can make a material with the required properties. • To achieve such goal, one should first “know” the microstructure of the materials. • Electron microscopy is a method to analyses the microstructure of the materials， especially for nanomaterials and nanotechnology
Disadvantage:
– Can not “see” image – Can not do “localized” analysis
microstructural analysis
• Electron microscopy Advantage:
– High resolution: TEM (<1Å)， SEM (4Å） – Do image observation (BF, DF, HREM), structure analysis (SAD, CBED), composition analysis (EDS) and electronic structure analysis (EELS) on one instrument (TEM) – Can do analysis in very small volume (~nm3)
Байду номын сангаас
Electron beam lithography system in SEM
Scanning Probe Microscope（SPM)
• Scanning Tunneling Microscope (STM) • Atomic Force Microscope (AFM)
STM
SPM
Scanning Tunneling Microscope (STM)
Topics of this lecture
• Comparison of electron microscopy with other microstructure analysis techniques • Briefly introduce various electron microscopes and their application • History of development of electron microscope and electron microscopy • course contents, teaching target, teaching arrangement and reference books