超声扫描仪原理

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Scanning Acoustic Microscope(SAM)

超声波扫描显微镜

Scanning Acoustic Microscope(SAM)超声波扫描显微镜H.S. Jang

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What is Ultrasonics ?

什么是超声波

What is Ultrasonics ?什么是超声波•Sound waves which have a frequency over 20kHz. 频率超过20Khz 的声波

(Audible frequency: 16Hz -20kHz) (人耳能人耳能听听到的声音频率为:16Hz-20kHz)

•

The sound waves which can not be heard by the human ear .超声波是人耳波是人耳听听不到的

16Hz -20,000Hz

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Types of Ultrasonic Waves

超声波的波形

Types of Ultrasonic Waves 超声波的波形1. Shear Wave(横波)

1)The vibration direction and propagation direction are

perpendicular .

振幅方向和传播方向是垂直的

2)Transmission in liquid or air is impossible.

在液在液体体和空气中无法传播

Vibration

Propagation

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Types of Ultrasonic Waves

超声波的波形

Types of Ultrasonic Waves 超声波的波形2. Longitude Wave (纵波)

1)The vibration direction and propagation direction are same .

振幅方向和传播方向是一致的2)Transmission in liquid is possible.

可以在液可以在液体体中传播

Propagation

Vibration

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Characteristics of Ultrasonics

超声波的特性

Characteristics of Ultrasonics 超声波的特性1.100% reflection when it meets air(delamination)

碰到空气(分层或离层)100%反射2.Reflects at interfaces

在任何界面会反射

3. Travels straight as light because of the very short wavelength.

由于它的波长非常短, 所以和光线一样直线传播

50%

50%

Air

100%

Die

EMC

Advantages of Ultrasonics超声波的优点

Advantages of Ultrasonics超声波的优点

1.High resolution:

很高的分辨率:

Detectable minimum gap thickness of Sonix : 0.13 micro meter

Sonix 能够检测到的最小间隙厚度为0.13微米

2.High sensitivity :

很高的灵敏度:

The measuring of size, location, shape of fine defects is possible.

能够检测出细微缺陷的大小,位置和形状

3.Real time inspection is possible.

可以实时检测

4.Safe : Harmless to human body.

安全:对人体无害

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Weak Points of Ultrasonics

超声波的弱点

Weak Points of Ultrasonics 超声波的弱点1.Difficult to inspect samples that have a rough surface or bubbles.

很难检测出表面出表面很很粗糙或者内部有部有很很多气泡的样品2. Liquid is required to transmit ultrasonic

需要液需要液体体进行超声波传输

3.Needs expertise(Solution:TAMI )

需要专家分析和判断(解决方案:TAMI)

rough surface

bubbles

100%

100%

100%

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Uses for Ultrasonics

超声波的用途

Uses for Ultrasonics 超声波的用途1.

Nondestructive test equipment.(S.A.M.)超声波无损探伤测试设备(如:超声波扫描显微镜)2. Sonar to find submarine, fish-finder

用声纳找潜找潜水艇和水艇和鱼群

3. Medical examination equipment

身体检查设备4. Cleaner(15~50KHz)

超声波清洗机5.Humidifier 超声波增湿机6.

Welding(15~40KHz)超声波焊接