电阻率和掺杂浓度的比率关系表
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掺磷硅的电阻率
磷或硼 掺杂浓度 (cm )
1.E+12 2.E+12 3.E+12 4.E+12 5.E+12 6.E+12 7.E+12 8.E+12 9.E+12 1.E+13 2.E+13 3.E+13 4.E+13 5.E+13 6.E+13 7.E+13 8.E+13 9.E+13 1.E+14 2.E+14 3.E+14 4.E+14 5.E+14 6.E+14 7.E+14 8.E+14 9.E+14 1.E+15 2.E+15 3.E+15 4.E+15 5.E+15 6.E+15 7.E+15 8.E+15 9.E+15 1.E+16 2.E+16 3.E+16 4.E+16 5.E+16 6.E+16
Baidu Nhomakorabea
1.05E-01 9.61E-02 8.87E-02 7.43E-02 5.11E-02 4.15E-02 3.60E-02 3.23E-02 2.97E-02 2.76E-02 2.59E-02 2.45E-02 2.16E-02 1.58E-02 1.27E-02 1.08E-02 9.34E-03 8.27E-03 7.42E-03 6.73E-03 6.16E-03 4.99E-03 2.99E-03 2.14E-03 1.68E-03 1.38E-03 1.18E-03 1.03E-03 9.18E-04 8.29E-04 6.57E-04 3.97E-04 3.00E-04 2.50E-04 2.20E-04 2.00E-04 1.80E-04 1.70E-04 1.60E-04
2.66E-01 2.40E-01 2.19E-01 2.02E-01 1.22E-01 9.32E-02 7.73E-02 6.71E-02 5.98E-02 5.43E-02 5.00E-02 4.65E-02 4.35E-02 2.81E-02 2.14E-02 1.76E-02 1.50E-02 1.31E-02 1.17E-02 1.06E-02 9.63E-03 8.87E-03 5.01E-03 3.53E-03 2.73E-03 2.23E-03 1.88E-03 1.63E-03 1.44E-03 1.29E-03 1.17E-03 6.02E-04 4.10E-04 3.10E-04 2.50E-04 2.10E-04 1.80E-04 1.60E-04 1.40E-04
ρp 0.30
3.30E+03 1.90E+03 1.30E+03 9.90E+02 8.00E+02 6.70E+02 5.80E+02 5.10E+02 4.60E+02 3.30E+02 1.80E+02 1.29E+02 9.92E+01 8.05E+01 6.78E+01 5.86E+01 5.16E+01 4.61E+01 3.31E+01 1.88E+01 1.32E+01 1.02E+01 8.30E+00 7.01E+00 6.08E+00 5.37E+00 4.81E+00 3.48E+00 2.02E+00 1.44E+00 1.12E+00 9.27E-01 7.92E-01 6.93E-01 6.17E-01 5.58E-01 4.15E-01 2.56E-01 1.90E-01 1.55E-01 1.32E-01 1.16E-01
ρb
1.20E+04 6.20E+03 4.20E+03 3.20E+03 2.60E+03 2.10E+03 1.80E+03 1.60E+03 1.40E+03 1.20E+03 6.20E+02 4.21E+02 3.19E+02 2.56E+02 2.14E+02 1.84E+02 1.62E+02 1.44E+02 1.19E+02 6.25E+01 4.24E+01 3.21E+01 2.59E+01 2.17E+01 1.87E+01 1.64E+01 1.46E+01 1.21E+01 6.42E+00 4.40E+00 3.36E+00 2.72E+00 2.30E+00 1.99E+00 1.76E+00 1.58E+00 1.32E+00 7.34E-01 5.22E-01 4.12E-01 3.43E-01 2.97E-01
2.63E-01 2.37E-01 2.17E-01 1.88E-01 1.18E-01 9.12E-02 7.61E-02 6.63E-02 5.92E-02 5.39E-02 4.96E-02 4.62E-02 4.10E-02 2.72E-02 2.10E-02 1.73E-02 1.48E-02 1.30E-02 1.16E-02 1.05E-02 9.55E-03 8.22E-03 4.81E-03 3.43E-03 2.67E-03 2.19E-03 1.86E-03 1.61E-03 1.43E-03 1.28E-03 1.07E-03 5.75E-04 3.90E-04 3.00E-04 2.40E-04 2.00E-04 1.70E-04 1.50E-04 1.40E-04
ρb
1.30E+04 6.50E+03 4.30E+03 3.30E+03 2.60E+03 2.20E+03 1.90E+03 1.60E+03 1.50E+03 1.30E+03 6.50E+02 4.35E+02 3.27E+02 2.61E+02 2.18E+02 1.87E+02 1.64E+02 1.45E+02 1.31E+02 6.56E+01 4.38E+01 3.29E+01 2.64E+01 2.20E+01 1.89E+01 1.66E+01 1.48E+01 1.33E+01 6.74E+00 4.54E+00 3.44E+00 2.78E+00 2.33E+00 2.02E+00 1.78E+00 1.59E+00 1.44E+00 7.67E-01 5.37E-01 4.20E-01 3.49E-01 3.01E-01
ρp 0.10
3.90E+03 2.00E+03 1.40E+03 1.00E+03 8.30E+02 7.00E+02 6.00E+02 5.20E+02 4.70E+02 3.90E+02 2.00E+02 1.37E+02 1.04E+02 8.37E+01 7.00E+01 6.02E+01 5.28E+01 4.71E+01 3.90E+01 2.06E+01 1.40E+01 1.07E+01 8.62E+00 7.24E+00 6.24E+00 5.50E+00 4.91E+00 4.09E+00 2.20E+00 1.53E+00 1.18E+00 9.61E-01 8.16E-01 7.11E-01 6.31E-01 5.69E-01 4.81E-01 2.76E-01 2.00E-01 1.61E-01 1.36E-01 1.19E-01
ρp 0.20
3.60E+03 1.90E+03 1.30E+03 1.00E+03 8.20E+02 6.90E+02 5.90E+02 5.20E+02 4.60E+02 3.50E+02 1.90E+02 1.33E+02 1.02E+02 8.21E+01 6.89E+01 5.94E+01 5.22E+01 4.66E+01 3.58E+01 1.97E+01 1.36E+01 1.04E+01 8.46E+00 7.12E+00 6.16E+00 5.43E+00 4.86E+00 3.76E+00 2.11E+00 1.48E+00 1.15E+00 9.44E-01 8.04E-01 7.02E-01 6.24E-01 5.63E-01 4.45E-01 2.65E-01 1.95E-01 1.58E-01 1.34E-01 1.17E-01
7.E+16 8.E+16 9.E+16 1.E+17 2.E+17 3.E+17 4.E+17 5.E+17 6.E+17 7.E+17 8.E+17 9.E+17 1.E+18 2.E+18 3.E+18 4.E+18 5.E+18 6.E+18 7.E+18 8.E+18 9.E+18 1.E+19 2.E+19 3.E+19 4.E+19 5.E+19 6.E+19 7.E+19 8.E+19 9.E+19 1.E+20 2.E+20 3.E+20 4.E+20 5.E+20 6.E+20 7.E+20 8.E+20 9.E+20
ρb
1.10E+04 5.90E+03 4.10E+03 3.10E+03 2.50E+03 2.10E+03 1.80E+03 1.60E+03 1.40E+03 1.10E+03 5.90E+02 4.08E+02 3.11E+02 2.51E+02 2.11E+02 1.82E+02 1.60E+02 1.42E+02 1.09E+02 5.97E+01 4.11E+01 3.14E+01 2.54E+01 2.13E+01 1.84E+01 1.62E+01 1.44E+01 1.11E+01 6.14E+00 4.26E+00 3.28E+00 2.67E+00 2.26E+00 1.96E+00 1.74E+00 1.56E+00 1.22E+00 7.04E-01 5.08E-01 4.03E-01 3.38E-01 2.93E-01
1.06E-01 9.69E-02 8.94E-02 7.86E-02 5.25E-02 4.22E-02 3.65E-02 3.27E-02 2.99E-02 2.78E-02 2.61E-02 2.47E-02 2.25E-02 1.62E-02 1.30E-02 1.09E-02 9.47E-03 8.36E-03 7.50E-03 6.79E-03 6.22E-03 5.35E-03 3.11E-03 2.20E-03 1.71E-03 1.41E-03 1.20E-03 1.04E-03 9.28E-04 8.37E-04 7.08E-04 4.12E-04 3.10E-04 2.50E-04 2.20E-04 2.00E-04 1.80E-04 1.70E-04 1.70E-04
1.08E-01 9.78E-02 9.01E-02 8.38E-02 5.41E-02 4.30E-02 3.69E-02 3.30E-02 3.01E-02 2.80E-02 2.62E-02 2.48E-02 2.36E-02 1.66E-02 1.32E-02 1.11E-02 9.60E-03 8.46E-03 7.57E-03 6.86E-03 6.27E-03 5.78E-03 3.25E-03 2.27E-03 1.75E-03 1.43E-03 1.21E-03 1.06E-03 9.38E-04 8.45E-04 7.70E-04 4.29E-04 3.10E-04 2.60E-04 2.20E-04 2.00E-04 1.80E-04 1.70E-04 1.70E-04
-3
ρp 0.00
4.30E+03 2.10E+03 1.40E+03 1.10E+03 8.50E+02 7.10E+02 6.10E+02 5.30E+02 4.70E+02 4.30E+02 2.10E+02 1.42E+02 1.07E+02 8.53E+01 7.12E+01 6.11E+01 5.35E+01 4.76E+01 4.29E+01 2.16E+01 1.45E+01 1.09E+01 8.79E+00 7.36E+00 6.33E+00 5.56E+00 4.96E+00 4.48E+00 2.31E+00 1.57E+00 1.20E+00 9.78E-01 8.28E-01 7.20E-01 6.38E-01 5.74E-01 5.23E-01 2.87E-01 2.06E-01 1.64E-01 1.38E-01 1.20E-01
磷或硼 掺杂浓度 (cm )
1.E+12 2.E+12 3.E+12 4.E+12 5.E+12 6.E+12 7.E+12 8.E+12 9.E+12 1.E+13 2.E+13 3.E+13 4.E+13 5.E+13 6.E+13 7.E+13 8.E+13 9.E+13 1.E+14 2.E+14 3.E+14 4.E+14 5.E+14 6.E+14 7.E+14 8.E+14 9.E+14 1.E+15 2.E+15 3.E+15 4.E+15 5.E+15 6.E+15 7.E+15 8.E+15 9.E+15 1.E+16 2.E+16 3.E+16 4.E+16 5.E+16 6.E+16
Baidu Nhomakorabea
1.05E-01 9.61E-02 8.87E-02 7.43E-02 5.11E-02 4.15E-02 3.60E-02 3.23E-02 2.97E-02 2.76E-02 2.59E-02 2.45E-02 2.16E-02 1.58E-02 1.27E-02 1.08E-02 9.34E-03 8.27E-03 7.42E-03 6.73E-03 6.16E-03 4.99E-03 2.99E-03 2.14E-03 1.68E-03 1.38E-03 1.18E-03 1.03E-03 9.18E-04 8.29E-04 6.57E-04 3.97E-04 3.00E-04 2.50E-04 2.20E-04 2.00E-04 1.80E-04 1.70E-04 1.60E-04
2.66E-01 2.40E-01 2.19E-01 2.02E-01 1.22E-01 9.32E-02 7.73E-02 6.71E-02 5.98E-02 5.43E-02 5.00E-02 4.65E-02 4.35E-02 2.81E-02 2.14E-02 1.76E-02 1.50E-02 1.31E-02 1.17E-02 1.06E-02 9.63E-03 8.87E-03 5.01E-03 3.53E-03 2.73E-03 2.23E-03 1.88E-03 1.63E-03 1.44E-03 1.29E-03 1.17E-03 6.02E-04 4.10E-04 3.10E-04 2.50E-04 2.10E-04 1.80E-04 1.60E-04 1.40E-04
ρp 0.30
3.30E+03 1.90E+03 1.30E+03 9.90E+02 8.00E+02 6.70E+02 5.80E+02 5.10E+02 4.60E+02 3.30E+02 1.80E+02 1.29E+02 9.92E+01 8.05E+01 6.78E+01 5.86E+01 5.16E+01 4.61E+01 3.31E+01 1.88E+01 1.32E+01 1.02E+01 8.30E+00 7.01E+00 6.08E+00 5.37E+00 4.81E+00 3.48E+00 2.02E+00 1.44E+00 1.12E+00 9.27E-01 7.92E-01 6.93E-01 6.17E-01 5.58E-01 4.15E-01 2.56E-01 1.90E-01 1.55E-01 1.32E-01 1.16E-01
ρb
1.20E+04 6.20E+03 4.20E+03 3.20E+03 2.60E+03 2.10E+03 1.80E+03 1.60E+03 1.40E+03 1.20E+03 6.20E+02 4.21E+02 3.19E+02 2.56E+02 2.14E+02 1.84E+02 1.62E+02 1.44E+02 1.19E+02 6.25E+01 4.24E+01 3.21E+01 2.59E+01 2.17E+01 1.87E+01 1.64E+01 1.46E+01 1.21E+01 6.42E+00 4.40E+00 3.36E+00 2.72E+00 2.30E+00 1.99E+00 1.76E+00 1.58E+00 1.32E+00 7.34E-01 5.22E-01 4.12E-01 3.43E-01 2.97E-01
2.63E-01 2.37E-01 2.17E-01 1.88E-01 1.18E-01 9.12E-02 7.61E-02 6.63E-02 5.92E-02 5.39E-02 4.96E-02 4.62E-02 4.10E-02 2.72E-02 2.10E-02 1.73E-02 1.48E-02 1.30E-02 1.16E-02 1.05E-02 9.55E-03 8.22E-03 4.81E-03 3.43E-03 2.67E-03 2.19E-03 1.86E-03 1.61E-03 1.43E-03 1.28E-03 1.07E-03 5.75E-04 3.90E-04 3.00E-04 2.40E-04 2.00E-04 1.70E-04 1.50E-04 1.40E-04
ρb
1.30E+04 6.50E+03 4.30E+03 3.30E+03 2.60E+03 2.20E+03 1.90E+03 1.60E+03 1.50E+03 1.30E+03 6.50E+02 4.35E+02 3.27E+02 2.61E+02 2.18E+02 1.87E+02 1.64E+02 1.45E+02 1.31E+02 6.56E+01 4.38E+01 3.29E+01 2.64E+01 2.20E+01 1.89E+01 1.66E+01 1.48E+01 1.33E+01 6.74E+00 4.54E+00 3.44E+00 2.78E+00 2.33E+00 2.02E+00 1.78E+00 1.59E+00 1.44E+00 7.67E-01 5.37E-01 4.20E-01 3.49E-01 3.01E-01
ρp 0.10
3.90E+03 2.00E+03 1.40E+03 1.00E+03 8.30E+02 7.00E+02 6.00E+02 5.20E+02 4.70E+02 3.90E+02 2.00E+02 1.37E+02 1.04E+02 8.37E+01 7.00E+01 6.02E+01 5.28E+01 4.71E+01 3.90E+01 2.06E+01 1.40E+01 1.07E+01 8.62E+00 7.24E+00 6.24E+00 5.50E+00 4.91E+00 4.09E+00 2.20E+00 1.53E+00 1.18E+00 9.61E-01 8.16E-01 7.11E-01 6.31E-01 5.69E-01 4.81E-01 2.76E-01 2.00E-01 1.61E-01 1.36E-01 1.19E-01
ρp 0.20
3.60E+03 1.90E+03 1.30E+03 1.00E+03 8.20E+02 6.90E+02 5.90E+02 5.20E+02 4.60E+02 3.50E+02 1.90E+02 1.33E+02 1.02E+02 8.21E+01 6.89E+01 5.94E+01 5.22E+01 4.66E+01 3.58E+01 1.97E+01 1.36E+01 1.04E+01 8.46E+00 7.12E+00 6.16E+00 5.43E+00 4.86E+00 3.76E+00 2.11E+00 1.48E+00 1.15E+00 9.44E-01 8.04E-01 7.02E-01 6.24E-01 5.63E-01 4.45E-01 2.65E-01 1.95E-01 1.58E-01 1.34E-01 1.17E-01
7.E+16 8.E+16 9.E+16 1.E+17 2.E+17 3.E+17 4.E+17 5.E+17 6.E+17 7.E+17 8.E+17 9.E+17 1.E+18 2.E+18 3.E+18 4.E+18 5.E+18 6.E+18 7.E+18 8.E+18 9.E+18 1.E+19 2.E+19 3.E+19 4.E+19 5.E+19 6.E+19 7.E+19 8.E+19 9.E+19 1.E+20 2.E+20 3.E+20 4.E+20 5.E+20 6.E+20 7.E+20 8.E+20 9.E+20
ρb
1.10E+04 5.90E+03 4.10E+03 3.10E+03 2.50E+03 2.10E+03 1.80E+03 1.60E+03 1.40E+03 1.10E+03 5.90E+02 4.08E+02 3.11E+02 2.51E+02 2.11E+02 1.82E+02 1.60E+02 1.42E+02 1.09E+02 5.97E+01 4.11E+01 3.14E+01 2.54E+01 2.13E+01 1.84E+01 1.62E+01 1.44E+01 1.11E+01 6.14E+00 4.26E+00 3.28E+00 2.67E+00 2.26E+00 1.96E+00 1.74E+00 1.56E+00 1.22E+00 7.04E-01 5.08E-01 4.03E-01 3.38E-01 2.93E-01
1.06E-01 9.69E-02 8.94E-02 7.86E-02 5.25E-02 4.22E-02 3.65E-02 3.27E-02 2.99E-02 2.78E-02 2.61E-02 2.47E-02 2.25E-02 1.62E-02 1.30E-02 1.09E-02 9.47E-03 8.36E-03 7.50E-03 6.79E-03 6.22E-03 5.35E-03 3.11E-03 2.20E-03 1.71E-03 1.41E-03 1.20E-03 1.04E-03 9.28E-04 8.37E-04 7.08E-04 4.12E-04 3.10E-04 2.50E-04 2.20E-04 2.00E-04 1.80E-04 1.70E-04 1.70E-04
1.08E-01 9.78E-02 9.01E-02 8.38E-02 5.41E-02 4.30E-02 3.69E-02 3.30E-02 3.01E-02 2.80E-02 2.62E-02 2.48E-02 2.36E-02 1.66E-02 1.32E-02 1.11E-02 9.60E-03 8.46E-03 7.57E-03 6.86E-03 6.27E-03 5.78E-03 3.25E-03 2.27E-03 1.75E-03 1.43E-03 1.21E-03 1.06E-03 9.38E-04 8.45E-04 7.70E-04 4.29E-04 3.10E-04 2.60E-04 2.20E-04 2.00E-04 1.80E-04 1.70E-04 1.70E-04
-3
ρp 0.00
4.30E+03 2.10E+03 1.40E+03 1.10E+03 8.50E+02 7.10E+02 6.10E+02 5.30E+02 4.70E+02 4.30E+02 2.10E+02 1.42E+02 1.07E+02 8.53E+01 7.12E+01 6.11E+01 5.35E+01 4.76E+01 4.29E+01 2.16E+01 1.45E+01 1.09E+01 8.79E+00 7.36E+00 6.33E+00 5.56E+00 4.96E+00 4.48E+00 2.31E+00 1.57E+00 1.20E+00 9.78E-01 8.28E-01 7.20E-01 6.38E-01 5.74E-01 5.23E-01 2.87E-01 2.06E-01 1.64E-01 1.38E-01 1.20E-01