OCM_TRAINING_30MIN-Charles
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Introduction
What is OCM?
• Operating Curve Management ( Infineon ) • Continuous Flow Manufacturing ( IBM )
Why OCM?
• Manufacturing Line Performance Improvement
NS : Tool hook up , Tool Reallocation , Facility yearly PM etc. UD : Tool down , process down etc. SD : PM , Tool monitor etc. EN : Engineer lent for technology develop , process tuning etc. SB : Standby , Idle PR : Production run
UP Uptime
For internal use only
14 - 32
MCD Charles 2003/10/16
Calculation of Alpha
Example: 2003/10/22 CT : 69.8 days , RPT : 19 days , UUm : 70% FF = 69.8 / 19 = 3.67 = ( 3.67 – 1 ) X ( 1 – 70% ) / 70% = 1.14
For internal use only
1 - 32
MCD Charles 2003/10/16
OCM Introduction
• Four Partners
• Definitions of Terms • Operating Curve • Status of OCM Cross Functional Team Activity • Tools in Report system for OCM Analysis
MES problem
For internal use only
17 - 32
MCD Charles 2003/10/16
Example : Formation of Cross Functional Team
Number of Teams
OCM Roll out N 9 8 7 6 5 4 3 2 1 IMP, 5/24 Training Pilot Team DUV Apr May Jun Jul
16 - 32
MCD Charles 2003/10/16
Example : Fab Operating Curve without CP
Go back to the level of July, if everything goes well
TPC Power Shutdown
PCW Problem Reticle Issue (DD1E/EE1F)
availability
21.6 h 19.2 h 20.4 h 20.4 h Man Machine Material Method available not available productive
productive time
0h
time
24h
productive time
12.5 h
For internal use only
FF =
=1
1
DGR Capa
1
FF=3 FF=1
U=47% U=80%
in general: < 0,75 low variability > 1,33 high variability 1 moderate variability
U=100%(capa)
For internal use only
Operating Curve (OC)
CT FF = RPT
UU M FF = 1 1 UU M Little´ s Law
Waiting time RPT
For internal use only
9 - 32
MCD Charles 2003/10/16
Little’s Law
WIP DCT = DGR
• DGR
: Daily Going Rate ( Operation Move , Stage Move , Wafer out etc..)
• UUM : Manufacturing Uptime Utilization • Capa : Theoretical capacity ( DGR /UUM )
= 94000 / 1345.6
= 69.8
For internal use only
11 - 32
MCD Charles 2003/10/16
SPT & RPT
SPT, RPT
Choose new lot Operation start Tool loading Processing time Tool unloading Document ation Operat ion Finish Transport to the next operation
Operator
( Man )
+
Production equipment
Equipment
( Machine )
+
Process
( Method )
For internal use only
4 - 32
MCD Charles 2003/10/16
4 Partners
?
"Silent"
"Waiting for lots ..."
Raw Process Time RPT of one lot [h]
Tool unloading
Tool loading
processing time
SPT and RTT is the minimal limit without delay( queuing)
Tool Time SPT of one lot [h]
Assign new team when it's necessary Diff Furnace DF, 7/26
Etch Wet ETCH, 7/19
TF W CMP TF, 7/12 CP Laser W/S, 7/5 Repair
I-LINE, 6/28 CVD, 6/21
DT Etch6/14 POLY,
WIP CT DGR
For internal use only
10 - 32
MCD Charles 2003/10/16
Little’s Law
Example:
2003/10/22 WIP : 94,000, Stage Moves : 188,382, Stage : 140
=> Average DGR = 188382 / 140 = 1345.6 Little’s Law DCT = WIP / DGR
not available
productive
20.4 h
Method
productive tí me
0h
time
24h
productive time
19.2 h
For internal use only
7 - 32
MCD Charles 2003/10/16
Definitions of Terms
Man Machine Material Method
For internal use only
3 - 32
MCD Charles 2003/10/16
4 Partners
Production System
lot queue
Lot flow
( Material )
+
Production Unit
Lot flow
6 - 32
MCD Charles 2003/10/16
4 Partners
Case 2:
the work of the 4 partners is synchronized
availability
21.6 h 19.2 h 20.4 h Man Machine Material available
• OCM Methodology and PDCA Cycle
For internal use only
2 - 32
MCD Charles 2003/10/16
4 Partners
4 Partners in a production system. The 4 Partnersare: Operator Equipment Lots Process
FF 1 1UUm = UUm
FF =
CT RPT
For internal use only
15 - 32
MCD Charles 2003/10/16
Operating Curve
FF =
FF=11 =2
UU M 1 1 UU M
DGR Capa
UU M FF = 1 1 UU M
waiting time
is representing the variability
of the production-flow caused by: • irregular lot arrivals • fluctuation of raw process time on the same tools • fluctuating availability of operators
"... and then the batch"
lot flow
"track record"
lot flow
For internal use only
5 - 32
MCD Charles 2003/10/16
4 Partners
Case 1:
The work of the 4 partners is not synchronized
RPT
FF 1 1UUm = UUm
Time point of view
CT FF = RPT
Throughput point of view
UUM =
PR × 100 % PR SB
! =
13 - 32
DGR UUM = CapaPU
MCD Charles 2003/10/16
• FF : flow factor ( CT/ RPT )
• Alpha : variability of a production system - alpha wip, alpha tool, alpha operator, alpha rework, alpha PU, ... • RPT : Raw Process Time • SPT : Standard Process Time • CT : Cycle Time ( DCT : Dynamic Cycle Time )
For internal use only
8 - 32
MCD 来自百度文库harles 2003/10/16
Mathematical Representation of OCM
WIP DCT = DGR
dynamic performance
UUM=
DGR Capa PU
static performance
of a production system
Aug
Sep
Oct
Nov
Dec-99
For internal use only
18 - 32
MCD Charles 2003/10/16
Example : Structure of Cross Functional Team
•CP
For internal use only
19 - 32
MCD Charles 2003/10/16
For internal use only
SEMI E10 tool state definition
Non Scheduled Unscheduled Down OT Operational Time Scheduled Down UPM Manufacturing Uptime Engineering Standby Productive
Stnadard Process Time
CT= RPT + Queue Time
* SPT is called RTT by Infineon
For internal use only 12 - 32
MCD Charles 2003/10/16
Calculation of Alpha
From Queue Theory:
What is OCM?
• Operating Curve Management ( Infineon ) • Continuous Flow Manufacturing ( IBM )
Why OCM?
• Manufacturing Line Performance Improvement
NS : Tool hook up , Tool Reallocation , Facility yearly PM etc. UD : Tool down , process down etc. SD : PM , Tool monitor etc. EN : Engineer lent for technology develop , process tuning etc. SB : Standby , Idle PR : Production run
UP Uptime
For internal use only
14 - 32
MCD Charles 2003/10/16
Calculation of Alpha
Example: 2003/10/22 CT : 69.8 days , RPT : 19 days , UUm : 70% FF = 69.8 / 19 = 3.67 = ( 3.67 – 1 ) X ( 1 – 70% ) / 70% = 1.14
For internal use only
1 - 32
MCD Charles 2003/10/16
OCM Introduction
• Four Partners
• Definitions of Terms • Operating Curve • Status of OCM Cross Functional Team Activity • Tools in Report system for OCM Analysis
MES problem
For internal use only
17 - 32
MCD Charles 2003/10/16
Example : Formation of Cross Functional Team
Number of Teams
OCM Roll out N 9 8 7 6 5 4 3 2 1 IMP, 5/24 Training Pilot Team DUV Apr May Jun Jul
16 - 32
MCD Charles 2003/10/16
Example : Fab Operating Curve without CP
Go back to the level of July, if everything goes well
TPC Power Shutdown
PCW Problem Reticle Issue (DD1E/EE1F)
availability
21.6 h 19.2 h 20.4 h 20.4 h Man Machine Material Method available not available productive
productive time
0h
time
24h
productive time
12.5 h
For internal use only
FF =
=1
1
DGR Capa
1
FF=3 FF=1
U=47% U=80%
in general: < 0,75 low variability > 1,33 high variability 1 moderate variability
U=100%(capa)
For internal use only
Operating Curve (OC)
CT FF = RPT
UU M FF = 1 1 UU M Little´ s Law
Waiting time RPT
For internal use only
9 - 32
MCD Charles 2003/10/16
Little’s Law
WIP DCT = DGR
• DGR
: Daily Going Rate ( Operation Move , Stage Move , Wafer out etc..)
• UUM : Manufacturing Uptime Utilization • Capa : Theoretical capacity ( DGR /UUM )
= 94000 / 1345.6
= 69.8
For internal use only
11 - 32
MCD Charles 2003/10/16
SPT & RPT
SPT, RPT
Choose new lot Operation start Tool loading Processing time Tool unloading Document ation Operat ion Finish Transport to the next operation
Operator
( Man )
+
Production equipment
Equipment
( Machine )
+
Process
( Method )
For internal use only
4 - 32
MCD Charles 2003/10/16
4 Partners
?
"Silent"
"Waiting for lots ..."
Raw Process Time RPT of one lot [h]
Tool unloading
Tool loading
processing time
SPT and RTT is the minimal limit without delay( queuing)
Tool Time SPT of one lot [h]
Assign new team when it's necessary Diff Furnace DF, 7/26
Etch Wet ETCH, 7/19
TF W CMP TF, 7/12 CP Laser W/S, 7/5 Repair
I-LINE, 6/28 CVD, 6/21
DT Etch6/14 POLY,
WIP CT DGR
For internal use only
10 - 32
MCD Charles 2003/10/16
Little’s Law
Example:
2003/10/22 WIP : 94,000, Stage Moves : 188,382, Stage : 140
=> Average DGR = 188382 / 140 = 1345.6 Little’s Law DCT = WIP / DGR
not available
productive
20.4 h
Method
productive tí me
0h
time
24h
productive time
19.2 h
For internal use only
7 - 32
MCD Charles 2003/10/16
Definitions of Terms
Man Machine Material Method
For internal use only
3 - 32
MCD Charles 2003/10/16
4 Partners
Production System
lot queue
Lot flow
( Material )
+
Production Unit
Lot flow
6 - 32
MCD Charles 2003/10/16
4 Partners
Case 2:
the work of the 4 partners is synchronized
availability
21.6 h 19.2 h 20.4 h Man Machine Material available
• OCM Methodology and PDCA Cycle
For internal use only
2 - 32
MCD Charles 2003/10/16
4 Partners
4 Partners in a production system. The 4 Partnersare: Operator Equipment Lots Process
FF 1 1UUm = UUm
FF =
CT RPT
For internal use only
15 - 32
MCD Charles 2003/10/16
Operating Curve
FF =
FF=11 =2
UU M 1 1 UU M
DGR Capa
UU M FF = 1 1 UU M
waiting time
is representing the variability
of the production-flow caused by: • irregular lot arrivals • fluctuation of raw process time on the same tools • fluctuating availability of operators
"... and then the batch"
lot flow
"track record"
lot flow
For internal use only
5 - 32
MCD Charles 2003/10/16
4 Partners
Case 1:
The work of the 4 partners is not synchronized
RPT
FF 1 1UUm = UUm
Time point of view
CT FF = RPT
Throughput point of view
UUM =
PR × 100 % PR SB
! =
13 - 32
DGR UUM = CapaPU
MCD Charles 2003/10/16
• FF : flow factor ( CT/ RPT )
• Alpha : variability of a production system - alpha wip, alpha tool, alpha operator, alpha rework, alpha PU, ... • RPT : Raw Process Time • SPT : Standard Process Time • CT : Cycle Time ( DCT : Dynamic Cycle Time )
For internal use only
8 - 32
MCD 来自百度文库harles 2003/10/16
Mathematical Representation of OCM
WIP DCT = DGR
dynamic performance
UUM=
DGR Capa PU
static performance
of a production system
Aug
Sep
Oct
Nov
Dec-99
For internal use only
18 - 32
MCD Charles 2003/10/16
Example : Structure of Cross Functional Team
•CP
For internal use only
19 - 32
MCD Charles 2003/10/16
For internal use only
SEMI E10 tool state definition
Non Scheduled Unscheduled Down OT Operational Time Scheduled Down UPM Manufacturing Uptime Engineering Standby Productive
Stnadard Process Time
CT= RPT + Queue Time
* SPT is called RTT by Infineon
For internal use only 12 - 32
MCD Charles 2003/10/16
Calculation of Alpha
From Queue Theory: