机械毕业设计英文外文翻译87传感器与现代汽车电子

附录
附录1
Sensor and the modern automobile electron modern automobile electron from the electronic primary device which applies to the vehicle in the electronic system construction entered one the new stage which has essential to enhance.One of in which most representative core components is the sensor.
First, the automobile electron holds controls mentions with the safety system
First, the automobile electron holds controls mentions our country automobile industry growth with the safety system to be in the last few years rapid, the development tendency is very fierce.Therefore commented appeared some expert's forecast: The automobile industry has the possibility to surpass the IT industry, becomes one of Chinese national economy
most important pillar industries.Actually, the automobile industry growth will certainly to contain with the automobile industry correlation IT industry growth.
For example, although at present only occupies about 10%-15% in our country steam product neutron product
and the technical price value content, but the overseas automobile neutron product and the technical value content approximately is equally 22%, in the upscale passenger vehicle the automobile electron has accounted for above 30%, moreover this proportion in, unceasingly the fast growth, anticipated very quick will also achieve 50%.
The electronic information technology already became the new generation of automobile development direction the leading factor, the automobile (vehicle) the power performance, manoeuvring could, the safety performance and the comfortable performance and so on each aspect improvement and raisehigh, all will rely on the mechanical system and the structure and the electronic products, the information technology perfect union.
The automobile engineering expert pointed out that,The electronic technology development has caused the automobile product the concept to have the deep transformation.This also is the recent electronic information industrial field to one of automobile electron unprecedented attention
reasons.But, must point out, except some vehicles in the sound, the video frequency equipment, Che Yong corresponds, the guidance system, as well as the vehicle carries vehicles and so on in work system, network system the electronic installation essence changes few outside .The modern automobile electron from the electronic primary device which applies (including sensor, actuator, micro electric circuit and so on) to the vehicle in the electronic system construction entered one the new stage which has essential to enhance.One of in which most representative core components is the intelligent sensor (intelligent actuator, intelligence changes delivers).
In fact, the automobile electron has already experienced several development phases: Electric circuit monitor control builds which from the separation electron primary device, passed through the electronic primary device or the module adds the microprocessor to construct respectively independent, special-purpose, semiautomatic and automatic holds controls the system, now already enters has used the high speed main line (at present to have 5 kind of above main lines to develop use at least)
In unification exchange automobile movement each kind of electronic equipment and system data, realization synthesis, intelligent regulation new stage.The new automobile electron system is composed by each electronic control unit (ECU), may hold independently controls, simultaneously can coordinate to the whole movement optimum condition.For example for causes the engine to be at the best active status, needs from the inspiration cylinder air flow, the manifold pressure determination start, Again according to work link boundary parameters and so on the water temperature, air temperature calculates the basic distributive value, meanwhile must through the damper position transducer examination damper opening, the definite engine operating mode, then the control, the adjustment best distributive value, finally also need through the crank angular speed sensor monitor crank corner and the engine speed, finally calculates and sends out the best ignition opportunity the instruction.
This engine fuel injection system and the ignition integrated control system
also may with combinations and so on exhaust gas discharge supervisory system and starting system, constructs Cheng Keshi the motor car engine power and the torque maximization, but simultaneously fuel oil consumption and exhaust gas discharge minimizing intelligent system.
Also may lift a safe driving aspect the example, stemming from steady, safe driving need, only aims at four wheels to hold controls, and installed the braking besides the application massive pressure transmitter to guard against generally hugs installs (ABS) deadly, many passenger vehicles, including the domestically produced vehicle, additionally built electronic power distribution system (EBD), ABS+EBD to be possible time the maximum limit safeguard sleet weather driving stability.
Presently in, the domestic and foreign some automobiles further has installed emergency brake servosystem (EBA), this system when has the emergency case, the automatic detection driver steps on when the brake pedal the speed and dynamics, and sentence break the emergency brake dynamics is whether enough, if the need, can increase the braking force automatically.The EBA automatic control movement must (e.g. 1/1000000 seconds levels) in complete in the extremely short time.
This system can cause the 200km/h high speed travel vehicles the brake skidding distance to reduce the extremely precious more than 20 rice.Also has in view of the wheel monitors each wheel to be opposite separately in the vehicle speed rotational speed, then matches the power for each wheel balance minute, guaranteed each turn has good under the bad road surface condition stresses ability balanced “the electronic force of traction control” the (ETC) system and so on.
Two examples enumerates which from above may see clearly, automobile development to automobile electron some basic requests:
1. electrons hold control the system the movement to have fast, to be correct, to be reliable.The sensor (+ recuperates electric circuit) + the microprocessor, then (+ power enlargement electric circuit) + the actuator technical way already no longer could satisfy the modern automobile again through the microprocessor the request, needed through the hardware integration, the direct exchange data and the simplification electric circuit, and enhances the intellectualized degree to guarantee the control unit movement the accuracy, the reliability and the timeliness.
2. present nearly all automobile mechanism part all already electronic installation control, but in the automobile chassis space is limited, the component system space is extremely limited.The ideal situation is certainly, the electronic control unit should and the control portion close union, is formed a whole.Therefore the component and the electric circuit microminiaturization, the integration may not avoid path.
3. electronic control unit must have the enough intellectualized degree.Take the security aerocyst as the example, it in the critical moment must have to be able prompt, the instant to open correctly, but in the extremely majority time the aerocyst is place in the standby condition, therefore security aerocyst ECU must have self-checking, from the maintenance ability, confirmed unceasingly the aerocyst system may operate normally the reliability, guarantees the movement “surefire”.
4. automobile each kind of function parts all have respective movement, hold control the characteristic, and, speaking of the electronic products, mostly is in the very severe movement environment, moreover various.Such as time active status high temperature, time static standby low temperature,
highly concentrated oil steam and activeness (toxicity) gas, as well as high speed movement and high strength impact and vibration and so on.Therefore, the electronic primary device and the electric circuit musthave to have high stable, the anti-environment and auto-adapted, from compensation adjustment ability.
5. is similarly important with the above request, even sometimes is the crucial condition is, the automobile electronic control unit uses the electronic primary device, the module must have to be able the large-scale industry production, and can cost reduction to the degree which may accept.
A slightly sensor and the intelligent sensor is this aspect model.Not only for example the intelligence acceleration instrument, it can satisfy the modern automobile well each need, moreover because may in the integrated circuit standard silicon craft on-line volume production, the production cost be low (several US dollars to several or several dozens US dollars), therefore had found own biggest application market in the automobile industry, counter- has come also powerfully to promote the automobile industry electronic informationization.
Two sensors: The micro sensor and the integrated circuit fuse new generation of electronic device
The micro sensor, the intelligent sensor is the emerging technology which only then starts to develop rapidly in recent years.The technical name at present uses which in our country's publication magazine quite is also ambiguous, still generally called it the sensor, or induces ambiguously into the automobile semiconductor device, also has the intelligent sensor (or intelligent actuator, intelligent transmitting instrument) and the micro system
MEMS and so on has all belonged to MEMS (microcomputer electrical system series
) under the name.Here introduces in the current some European and American monograph the commonly used technical noun definition and the technical connotation.
Intelligent sensor and modern automobile electron
First must explain, in the overwhelming majority situation, the sensor which in this article size title and the full text said has made a general reference actually three big kind of components: Transforms the electromagnetics signal output the non-electricity input parameter the sensor; Transforms the non-electricity parameter output the electricity signal the actuator; As well as both can serve as the sensor and to be able to serve as the actuator many,
in which is transforms one kind of electromagnetics parameter form Cheng Ling one kind of electromagnetics parameter shape output the transmitting instrument
Meant that, about the micro sensor, the intelligent sensor technical characteristic may expand analogizes the micro actuator, the micro transmitting instrument - sensor (or execution, either transmitting instrument) in the physical criterion to have a physical size to be equal to or to be smaller than at least an Asian millimeter magnitude.The micro sensor is not a product which traditional sensor simple physics reduces, but is based on partly leads the body processing technology the new generation of component:
Sometimes therefore also is called the silicon to pass on the feeling.May use the similar definition and the technical characteristic analogy describes the micro actuator and the micro transmitting instrument.
It is composed by two chips, one has from the examination ability accelerometer unit (micro acceleration instrument), together is in addition the micro sensor and the microprocessor (MCU) connection electric circuit and MCU.
This is one kind compared the early time (around 1996), but already quite practical component, available in automobile self-braking and suspension system, because and the micro accelerometer had the self-checking ability Also available in security aerocyst.From this time on in the example may see clearly, not only the micro sensor superiority is the volume reduction, lies in can conveniently and the integrated circuit combination and the scale production.Should refer, uses this kind of
two piece of solution to be possible to reduce the design cycle, reduces the development preliminary small batch trial production the cost.But to the practical application and the market, the single chip solution may take obviously, the production cost is lower, the application value is higher.
The sensor (Smart Sensor), the intelligent actuator and the intelligent transmitting instrument - micro sensor (or micro actuator, either micro transmitting instrument) and its part or processes the component, the processing electric circuit integration completely on a chip component (e.g. the above micro accelerometer single chip solution).Therefore the intelligent sensor has certain biological modelling ability, like fuzzy logic operation, initiative distinction environment, automatic accent entire and compensation adaptation environment ability
From diagnosis, from maintenance and so on.Obviously, produces and
reduces the production cost stemming from the scale the request, the intelligent sensor design concept, the choice of material and the production craft musthave to have as far as po ssible and the integrated circuit standard silicon plane craft is consistent.May throw in front of the piece in the normal technical process, either in flow, after either the craft completes increases some special need the working procedure, but should not too be many.
In a seal, a micro mechanical pressure transmitter and simulation user connection, 8 mold - number switch (SAR), microprocessor (Motorola 69HC08), memory and serial interface (SPI) and so on integrations on a chip.Its front end silicon pressure transmitter uses the body silicon tiny processing technology manufacture.The preparation silicon pressure transmitter working procedure already may arrange in to integrate the CMOS electric circuit craft flows in front of the regulation, also may in after
This kind of intelligence pressure transmitter technology and market all already mature, has widely used in all kinds of pressure survey and the control unit which the automobile (vehicle) needs, such as in front of each kind of air gage, spray nozzle collection class cavity pressure, waste gas exhaust pipe, fuel oil, tire, hydraulic gear and so on.The intelligence pressure transmitter application is very broad, does not limit to the automobile industry.At present, the production intelligence pressure transmitter manufacturer many, the market commodity variety also very have been many, already appeared the keen competition.
The result is the intelligence pressure transmitter volume getting smaller, needs outside along with it control unit to encircle the connector and the discrete component are more and more few, but the function and the performance more and more are actually strong, moreover the production cost reduces very quickly (the present is approximately several US dollars).
While convenient needs said, in some Chinese material, in particular in some product tendentious material, generally (either device) and Intelligent sensor (or device) all calls
Smart Sensor it the intelligent sensor,But these only can respond the environmental variation simply, makes some corresponding compensations, the adjustment active status, specially does not need to integrate place
the principle component, its knowledge rank too is low, should not belong to the intelligent component category generally.
Believed the majority readers can contact frequently, most drew close to the life the intelligent sensor possibly to have to be uses in the camera, the digital camera, the camera, in the handset photograph CCD image sensor. This is a situation which one kind of non-intelligence sensor not is, because in the CCD array each silicon unit transforms by the light the electrical signal
is extremely weak, must direct and prompt shifting checks, and processes transforms the standard the image
form signal.Also has complex some
The electron and optics which in, on the upscale long focus (IOX) optics enlargement numerical code camera and the camera equips guard against shake the system, specially in high end product true
optics guard against shake the system.Its core is the two axle to either 3 axial micro accelerometers or the micro gyroscope, monitors the fuselage through it the vibration, and converts the lens each axial displacement quantity, then actuates in the lens
the invariable angle lens migration, makes the optical system the refraction path of rays to maintain stably.
Micro system (Microsystem) and MEMS (microcomputer electrical system series) - by the micro sensor, microelectronics electric circuit (signal processing, control circuit, correspondence meets and so on) and the micro actuator constitutes a three level of level
association system, the integration calls it on a chip component the micro system.If has the mechanical linkage or the machinery implementing agency and so on the micro mechanical part instrument calls it MEMS.
MEMS chip left side gives prepares the basic processing technology which the MEMS chip needs.Its right flank enumerates for the main application domain.Very obvious, the MEMS best solution also is selects with the silicon labor
skill compatible material and the physical effect, the design idea and the technical process, also namely uses the method which the conventional standard the CMOS craft and two-dimensional, the three dimensional tiny processing technology unifies, in which also includes the micro mechanical
structural element the manufacture.
The micro sensor logical development extends is the intelligent sensor, the intelligent sensor extends is naturally the micro system and the MEMS, MEMS further development is can receive, the resolution outside signal and the instruction
independently, then can independent Now, develops successful, and had the commercial product MEMS variety already many, covering shown in Figure 4 each big domain.
In which of one of including entire smooth correspondence and entire light computer key components two-dimensional, three dimensional MEMS light switch.
Through control chip on micro reflector array, realization light input/output overlapping interconnection.This is the present entire light exchange technology mature preferred plan.In the market may buy the MEMS light switch has amounted to
1296 groups, the switch switching time is approximately 20ms.
The micro machinery (also is called a nanometer machinery) then still was at the development experimental stage, but had many very important laboratory product emergence, like famous nanometer electrical machinery, micro insect, micro helicopter and submarine and so on
.The technical industrial field believed generally that, they will develop successful and the investment practical application have the profound influence to the industrial technology and the quality of life.
附录2
传感器与现代汽车电子
现代汽车电子从所应用的电子元器件到车内电子系统的架构均已进入了一个有本质性提高的新阶段。

其中最有代表性的核心器件之一就是传感器。

一、汽车电子操控和安全系统谈起
近几年来我国汽车工业增长迅速，发展势头很猛。

因此评论界出现了一些专家的预测：汽车工业有可能超过IT产业，成为中国国民经济最重要的支柱产业之一。

其实，汽车工业的增长必将包含与汽车产业相关的IT 产业的增长。

例如，虽然目前在我国一汽的产品中电子产品和技术的价值含量只占10%—15%左右，但国外汽车中电子产品和技术的价值含量平均约为22%，中、高档轿车中汽车电子已占30%以上，而且这个比例还在、不断地快速增长，预期很快将达到50%。

电子信息技术已经成为新一代汽车发展方向的主导因素，汽车（机动车）的动力性能、操控性能、安全性能和舒适性能等各个方面的改进和提高，都将依赖于机械系统及结构和电子产品、信息技术间的完美结合。

汽车工程界专家指出：电子技术的发展已使汽车产品的概念发生了深刻的变化。

这也是最近电子信息产业界对汽车电子空前关注的原因之一。

但是，必须指出的是，除了一些车内音响、视频装备，车用通信、导航系统，以及车载办公系统、网络系统等车内电子设备的本质改变较少外，现代汽车电子从所应用的电子元器件（包括传感器、执行器、微电路等）到车内电子系统的架构均已进入了一个有本质性提高的新阶段。

其中最有代表性的核心器件之一就是智能传感器（智能执行器、智能变送器）。

实际上，汽车电子已经经历了几个发展阶段：从分立电子元器件搭建的电路监测控制，经过了电子元器件或组件加微处理器构筑的各自独立的、专用的、半自动和自动的操控系统，现在已经进入了采用高速总线（目前至少有5种以上总线已开发使用），统一交换汽车运行中的各种电子装备和系统的数据，实现综合、智能调控的新阶段。

新的汽车电子系统由各个电子控制单元（ECU）组成，可以独立操控，同时又能协调到整体运行的最佳状态。

例如为使发动机处于最佳工作状态，就需要从吸入汽缸的空气流量、进气压力的测定开始，再根据水温、空气温度等工作环境参数计算出基本喷油量，同时还要通过节气门位置传感器检测节气门的开度，确定发动机的工况，进而控制，调整最佳喷油量，最后还需要通过曲轴的角速度传感器监测曲轴转角和发动机转速，最终计算出并发出最佳点火时机的指令。

这个发动机燃油喷射系统和点火综合控制系统还可以与废气排放的监控系统和起动系统等组合，构筑成可使汽车发动机功率和扭矩最大化，而同时燃油消耗和废气排放最低化的智能系统。

还可以举一个安全驾驶方面的例子，出于平稳、安全驾驶的需要，仅只针对四个轮子的操控上，除了应用大量压力传感器并普遍安装了刹车防抱死装置（ABS）外，许多轿车，包括国产车，已增设了电子动力分配系统（EBD），ABS+EBD可以最大限度的保障雨雪天气驾驶时的稳定性。

现在，国内外的一些汽车进一步加装了紧急刹车辅助系统（EBA），该系统在发生紧急情况时，自动检测驾驶者踩制动踏板时的速度和力度，并判断紧急制动的力度是否足够，如果需要，就会自动增大制动力。

EBA 的自控动作必须在极短时间（例如百万分之一秒级）内完成。

这个系统能使200km/h高速行驶车辆的制动滑行距离缩短极其宝贵的20多米。

针对车轮的还有分别监测各个车轮相对于车速的转速，进而为每个车轮平衡分配动力，保证在恶劣路面条件下各轮间具有良好的均衡抓地能力的“电子牵引力控制”（ETC）系统等。

从以上列举的两个例子可以清楚看到，汽车发展对汽车电子的一些基本要求：1．电子操控系统的动作必须快速、正确、可靠。

传感器（+调理电路）+微处理器，然后再通过微处理器（+功率放大电路）+执行器的技术途径已经不再能满足现代汽车的要求，需要通过硬件集成、直接交换数据和简化电路，并提高智能化程度来确保控制单元动作的正确性、可靠性和适时性。

2．现在几乎所有的汽车的机械结构部件都已受电子装置控制，但汽车车体内的空间有限，构件系统的空间更是极其有限。

理想的情况当然是，电子控制单元应
与受控制部件紧密结合，形成一个整体。

因此器件和电路的微型化、集成化是不可回避的道路。

3．电子控制单元必须具有足够的智能化程度。

以安全气囊为例，它在关键时刻必须要能及时、正确地瞬时打开，但在极大多数时间内气囊是处在待命状态，因此安全气囊的ECU 必须具有自检、自维护能力，不断确认气囊系统的可正常运作的可靠性，确保动作的“万无一失”。

4．汽车的各种功能部件都有各自的运动、操控特性，并且，对电子产品而言，大多处于非常恶劣的运行环境中，而且各不相同。

诸如工作状态时的高温，静止待命时的低温，高浓度的油蒸汽和活性（毒性）气体，以及高速运动和高强度的冲击和振动等。

因此，电子元器件和电路必须要有高稳定、抗环境和自适应、自补偿调整的能力。

5．与上述要求同样重要，甚至有时是关键性的条件是，汽车电子控制单元用的电子元器件、模块必须要能大规模工业生产，并能将成本降低到可接受的程度。

一些微传感器和智能传感器就是这方面的典范。

例如智能加速度传感器，它不仅能较好地满足现代汽车的各项需要，而且因为可以在集成电路标准硅工艺线上批量生产，生产成本较低（几美元至十几或几十美元），所以在汽车工业中找到了自己最大的应用市场，反过来也有力地促进了汽车工业的电子信息化。

二传感器：微传感器与集成电路融合的新一代电子器件
微传感器、智能传感器是近几年才开始迅速发展起来的新兴技术。

在我国的报刊杂志上目前所使用的技术名称还比较含混，仍然笼统地称之为传感器，或者含糊地归纳为汽车半导体器件，也有将智能传感器（或智能执行器、智能变送器）与微系统、MEMS等都归入了MEMS （微机电系统）名称下的。

这里介绍当前一些欧美专著中常用的技术名词的定义和技术内涵。

智能传感器与现代汽车电子
首先必须说明的是，在绝大多数情况下，本文大小标题及全文中所说的传感器其实是泛指了三大类器件：将非电学输入参量转换成电磁学信号输出的传感器；将电学信号转换成非电学参量输出的执行器；以及既能用作传感器又能用作执行器，其中较多的是将一种电磁学参量形式转变成另一种电磁学参量形态输出的变送器。

就是说，关于微传感器、智能传感器的技术特性可以扩大类推到微执行器、微变送器-传感器（或执行器、或变送器）的物理尺度中至少有一个物理尺寸等于或小于亚毫米量级的。

微传感器不是传统传感器简单的物理缩小的产物，而是基于半导体工艺技术的新一代器件：应用新的工作机制和物化效应，采用与标准半导体工艺兼容的材料，用微细加工技术制备的。

因此有时也称为硅传感器。

可以用类似的定义和技术特征类推描述微执行器和微变送器。

它由两块芯片组成，一是具有自检测能力的加速度计单元（微加速度传感器），另一块则是微传感器与微处理器（MCU）间的接口电路和MCU。

这是一种较早期（1996年前后）的，但已相当实用的器件，可用于汽车的自动制动和悬挂系统中，并且因微加速度计具有自检能力，还可用于安全气囊。

从此例中可以清楚看到，微传感器的优势不仅是体积的缩小，更在于能方便地与集成电路组合和规模生产。

应该指的是，采用这种两片的解决方案可以缩短设计周期、降低开发前期小批量试产的成本。

但对实际应用和市场来说，单芯片的解决方案显然更可取，生产成本更低，应用价值更高。

传感器（Smart Sensor）、智能执行器和智能变送器-微传感器（或微执行器，或微变送器）和它的部分或全部处理器件、处理电路集成在一个芯片上的器件（例
如上述的微加速度计的单芯片解决方案）。

因此智能传感器具有一定的仿生能力，如模糊逻辑运算、主动鉴别环境，自动调整和补偿适应环境的能力，自诊断、自维护等。

显然，出于规模生产和降低生产成本的要求，智能传感器的设计思想、材料选择和生产工艺必须要尽可能地和集成电路的标准硅平面工艺一致。

可以在正常工艺流程的投片前，或流程中，或工艺完成后增加一些特殊需要的工序，但也不应太多。

在一个封装中，把一只微机械压力传感器与模拟用户接口、8位模-数转换器（SAR）、微处理器（摩托罗拉69HC08）、存储器和串行接口（SPI）等集成在一个芯片上。

其前端的硅压力传感器是采用体硅微细加工技术制作的。

制备硅压力传感器的工序既可安排在集成CMOS 电路工艺流程之前，亦可在后。

这种智能压力传感器的技术和市场都已成熟，已广泛用于汽车（机动车）所需的各式各样的压力测量和控制单元中，诸如各种气压计、喷嘴前集流腔压力、废气排气管、燃油、轮胎、液压传动装置等。

智能压力传感器的应用很广，不局限于汽车工业。

目前，生产智能压力传感器的厂商已不少，市售商品的品种也很多，已经出现激烈的竞争。

结果是智能压力传感器体积越来越小，随之控制单元所需的外围接插件和分立元件越来越少，但功能和性能却越来越强，而且生产成本降低很快（现在约为几美元一只）。

顺便需要说说的是，在一些中文资料中，尤其是一些产品宣传性材料中，笼统地将Smart Sensor(或device)和Intelligent sensor（或device）都称之为智能传感器，但在欧美文献中是有所差别的。

西方专家和公众通常认为，Smart（智能型）传感器比Intelligent(知识型)的智慧层次和能力更高。

当然，知识型的内涵也在不断进化，但那些只能简单响应环境变化，作一些相应补偿、调整工作状态的，特别是不需要集成处理器的器件，其知识等级太低，一般不应归入智能器件范畴。

相信大多数读者能经常接触到的，最贴近生活的智能传感器可能要算是用于摄像头、数码相机、摄像机、手机摄像中的CCD图像传感器了。

这是一种非智能型传感器莫属的情况，因为CCD 阵列中每个硅单元由光转换成的电信号极弱，必须直接和及时移位寄存、并处理转换成标准的图像格式信号。

还有更复杂一些的，在中、高档长焦距（IOX）光学放大数码相机和摄像机上装备的电子和光学防抖系统，特别是高端产品中的真正光学防抖系统。

它的核心是双轴向或3轴向的微加速度计或微陀螺仪，通过它监测机身的抖动，并换算成镜头的各轴向位移量，进而驱动镜头中可变角度透镜的移动，使光学系统的折射光路保持稳定。

微系统（Microsystem）和MEMS（微机电系统）-由微传感器、微电子学电路（信号处理、控制电路、通信接品等）和微执行器构成一个三级级联系统、集成在一个芯片上的器件称之为微系统。

如果其中拥有机械联动或机械执行机构等微机械部件的器械则称之为MEMS。

MEMS芯片的左侧给出的是制备MEMS芯片需要的基本工艺技术。

它的右侧则为主要应用领域列举。

很明显，MEMS 的最好解决方案也是选用与硅工艺兼容的材料及物理效应、设计理念和工艺流程，也即采用常规标准的CMOS 工艺与二维、三维微细加工技术相结合的方法，其中也包括微机械结构件的制作。

微传感器合乎逻辑的发展延伸是智能传感器，智能传感器自然延伸则是微系统和MEMS，MEMS 的进一步发展则是能够自主接收、分辨外界信号和指令，进而能独立、正确动作的微机械（Micromachines）。

现在，开发成功、并已有商业产品的MEMS品种已不少，涵盖图4所示的各大领域。

其中包括全光光通信和全光计算机的关键部件之一的二维、三维MEMS光开关。

通过控制芯片上的微反射镜阵列，实现光输入/输出的交叉互联。

这是目前全光交换技术的成熟的最佳方案。

市场上可买到的MEMS光开关已达1296路，开关转换时间约为20ms。

微机械（也称为纳米机械）则尚处于开发试验阶段，但已有许多很重要的实验室产品涌现，如著名的纳米电机、微昆虫、微直升机和潜水艇等。

技术产业界普遍认为，它们的开发成功和投入实际应用将对工业技术和生活质量产生深远的影响。