真空泵英文文献

Vacuum Pump Overview
Xue Jianguo
(Jiangsu Asia Pacific pump valve technology limited company, Jiangsu Taizhou
225400)
Abstract:Vacuum pump is an enormous quantity of products, yield great wide, the output is not high, but it is really a directly affect the vacuum equipment performance quality indispensable based products. The vacuum pump market in accordance with the needs of users and happen dynamics. Market growth from the main driving force of the rapid development of the semiconductor industry and dry pump and molecular pump application field of widening.
Keywords:vacuum pump; market development; expand
Introduction:At present, the vacuum pump market sales of about $20 billion in annual rate around 7%. Our production of vacuum pump manufacturer of vacuum pump, all in many sales are about 1.5 billion yuan, is only American KINNEY company annual sales of vacuum pump[1,2]. Based on the analysis of global vacuum pump market we can see that all types of vacuum pump market and application fields are constantly changing and developing. Our country vacuum pump manufacturing has a long history and strong foundation, homebred vacuum pump has been applied in many different fields and validated, some pumps also exported abroad, get foreign customers approval and good reputation, it should be said that China vacuum pump manufacturing in domestic and international market still has the huge development space.
1. Water-ring vacuum pump
Although water-ring vacuum pump belongs to rough vacuum pumps, but in our country of petroleum, chemical industry, electric power, textile, paper, pharmaceutical products still has a large market. In a foreign country, water ring vacuum pumps sales total market of 14%[3], after dry
pump, so SEIMEMS and NASH, such companies in China KINNEY investment and construction or establish sales network, and constantly expand in our market share[3]. Because water ring pumps are mostly casting, processing requirements are not high, of labor-intensive products, so the domestic water ring pump on price competitive advantage, the key is to design improvement, narrow the volume, lose weight, increase efficiency, reduce the energy consumption.
2.Rotary piston pump
Rotary piston pump is a kind of oil seal type vacuum pump. Because rotary piston pump more durable, reliable, various domestic and international vacuum furnace, coaters and drying equipment, dipping with rotary piston pump is a former level rotary piston pump pump, but casting heavy, processing larger workload, so the foreign vacuum factory all seek partnership in China. In order to make the homemade rotary piston pump can enter the international market, we must further reduce pump vibration noise, prevent leakage and improve injection and rotary piston pump long-term operation reliability.
3. Straight league rotary vane pumps
Along with the vacuum technology in each application domain expands unceasingly, straight league rotary vane pumps the growing demand. Because of this pump number, processing and assembling workload is very big, price is very low, so some foreign vacuum manufacturers in China build
plants. Domestic small and medium-sized straight league rotary vane pumps in technology have pass, price and far than foreign pump cheap, so domestic pump still has a competitive advantage, the key is to solve the shaft seal leakage and rotary vane materials and vacuum pump oil performance quality problems, ensure that straight league pump in the high speed, high temperature performance is stable and reliable operation, and meanwhile, further improve the domestic straight league rotary vane pumps besides water vapor ability.
4. ROM Bates vacuum pump
From abroad ROM Bates vacuum pump production situation, the foreign several big companies, such as the LEYBOLD, ALCATELL BALZERS, EDWARDS and ULVAC, they each ROM sales of Bates pump of world ROM Bates pump sales proportion of more than 5%, which are not only 20%, total 5 home Bates pump output robben is not big, but foreign ROM Bates pump prices than domestic pump is much higher[4]. At present, the domestic and foreign almost all the large or small high vacuum and vacuum system, in order to shorten the suction time and improve production efficiency is equipped with ROM Bates pump, so homebred ROM Bates pump must be in occupied domestic market based on managed to enter the international market, so we must further reduce domestic ROM Bates pump vibration noise, thoroughly solve the shaft seal leakage problem and improve the quality and improve the appearance of the pump inside the finish and cleanness of pump. Additional, even
considering some countries and regions of power frequency for 60HZ, more make sure Paul Bates pump in improving speed under the condition of the long-term operational reliability.
At present,the domestic air type in-line atmospheric ROM Bates pump progress soon, technology has matured on.Because of this pump in the vent below containing gas cooler, one part is cooled the air through pipeline pump chamber to cool the rotor returns, thus make refrigerator heat to be balanced, so this kind of pump can be in-line atmosphere. In order to meet different requirements of limiting vacuum pump series, this can be used, general appending a air type in-line atmospheric ROM Bates pumps, reach limit vacuum pump high level than before an order of magnitude. This pump because in pump chamber without working medium, is actually belong to dry pump. At present, this kind of air type in-line atmospheric ROM Bates pump and crew have in petroleum, chemical, plastic, pesticide, turbine rotor dynamic balance, aerospace space simulation device got long-term operation of the test, so it should be popularized and applied in China[5].
5.Molecular pump
Molecular pump in the field of many foreign semiconductor process occasion is used instead of cryogenic pumps, especially sputtering, etching and LCVD devices are adopted complex molecular pump and traction pump as the main pump.
Because of molecular pump to water vapor is only the pumping speed with diameter cryogenic pumps pumping speed in the quarter, so molecular pump exhaust time than cryogenic pumps long. In order to improve the pumping speed, foreign in molecular pump inlet side to install a-130℃~150℃ low-temperature cooling-plate, called low-temperature molecular pump, vapor by low-temperature board, other gas is captured by molecular pumped away[6]. This kind of low molecular pump in the vacuum coating on the device application, it raised production efficiency and improves the coating quality. With China's semiconductor industry, film industry and scientific research undertaking develop rapidly, molecular pump should be focusing on the development of our country vacuum pump manufacturing. First, molecular pump to establish a complete series of childhood, and research and development of different complex molecular pump, traction pump and low temperature molecular pump, in order to meet different situation the need.
6. Dry type mechanical vacuum pump
Foreign dry type mechanical vacuum pump market is growing, its main drive from the semiconductor industry, chemical industry, film industry rapid development. In Japan, semiconductor industry is full already use dry vacuum pump oil seal type JiXieBeng, euramerican instead of semiconductor industry more than 45% replaced with dry vacuum pump oil seal type JiXieBeng, greatly improving the product performance and
quality. In order to meet different applications and requirements of different working conditions, abroad have multistage ROM Bates vacuum pump, multi-stage claw type vacuum pump, screw vacuum pump and the vacuum pump, reciprocating type vortex piston vacuum pump and turbine oil free pump etc. Extreme pressure from 10PA ~ 10-2PA, pumping speed from 20M3 / H ~ 500M3 / H. According to statistics, at present domestic dry pump application is insufficient still 1%[7], domestic semiconductor industry with dry pump all imported from abroad, its price is very expensive. Therefore, our country should vigorously research and development dry pump, and let the dry vacuum pump become China's industrial new economic growth point.
7、Vacuum pump technology progress trend
Technology is the impulsion of the demand of the market. Because the vacuum technology, expansion and the rapid growth of high-tech, the domestic market to the vacuum pump technology level put forward higher request. The vacuum pump production enterprises must through technical innovation and the adjustment of product mix two ways to preserve the original market, and thus continue to expand the market share.
7.1、Enhance the vacuum pump reliability, reduce the vibration and noise, pay attention to the vacuum pump comprehensive level.
Over the past several years, vacuum pump manufacturer pays attention to main performance indexes, such as, extreme pressure, pumping speed etc, and ignore the vacuum pump comprehensive performance. And now, product reliability, performance stability and the environment pollution caused by gradually become users buy products factors. For rotary vane pumps, , rotary piston pump，luo Bates pump concerned will mature such reliability design concept applied to vacuum pump design, the reliability design, reliability experiments to dramatically improve aspects the free time, vacuum pump reliability, stability and life, ensure vacuum pump can under various working conditions long-term reliable operation. By adopting new technology, new material, new structure to reduce the vibration and noise, solve pump oil spraying, oil leakage problem, but also a clean user friendly working environment.
7.2、Vacuum pump to individuation, diversification development.
Enterprise face is ever changing market, and our vacuum pump products but waking greatly. Product and market of cohesion, make we don't lose many opportunities. The vacuum pump next development should be facing personalized and diversification. So-called personalized and diversification is aims at the different needs of different customers, design for a user's specific occasion products, make the product is in this occasion to application, characteristic play just pour advantage.
7.3、Formation of molecular pump and dry pump scale production.
According to the forecast by 2010, China will become the world's second-biggest semiconductor IC market, total demand is about 1000 YiKuai, reaching $100 billion more than the total amount, need to build more than 30 large production line to meet demand. 30 production lines needed dry vacuum pump around 15000 units, it is current our country vacuum pump annual output of 1/10 or so.[8]
Domestic currently vacuum pro-duction equipment still with traditional vacuum pump is given priority to, mainly for sliding vane rotary pump, rotary piston vacuum pump, luo Bates vacuum pump, steam flow pump, water ring vacuum pumps, etc, and all used in traditional industries, China's production of vacuum pump used for electronic information industry to less than 1%, with Japan, European and American countries than gap is tremendous.
Our production of dry vacuum pump is just the start stage, in the whole nation 200 manufacturer of vacuum pump enterprise, can produce the dry vacuum pump of enterprise insufficient 10 home, annual production capacity of less than 1000 sets. No form batch production. Current domestic production of dry pump most used in laboratory and chemical, pharmaceutical and other fields, used in semiconductor industry is very few.
Domestic rapid development of electronic information industry no effective stimulating domestic dry vacuum pump development, but become international vacuum industrialized countries to the expansion of the land. At present domestic built semiconductor integrated circuit production line, almost all of the dry vacuum pump (including other vacuum equipment) are all imported mainly from Britain, Japan, Germany, America, etc. Domestic production of dry vacuum pump from entering the field was very difficult, making the dry vacuum pump this future vacuum pro-duction equipment leading products in our country through a very difficult situation. The cause of this situation was the main cause of dry vacuum pump in our startting evening, just a start namely facing abroad has developed mature products to enter China market, large domestic product besides low price outside, in processing manufacturing, technical level, quality situation and so on various aspects does not contain advantage, foreign countries products after years of contest, has been basically divided up the domestic market, and establish feet, domestic production because of the dry vacuum pump has lost market incentive, did not have the development power, progress is slow. Industry experts agree that the dry vacuum pump is vacuum pro-duction equipment the direction of development, but also vacuum pro-duction means "cutting-edge technology", our country's vacuum pump industry must make a difference in this field, the first in food, chemical, pharmaceutical, etc. After these markets to
cultivate and exercise, and then into the semiconductor industry. To make the industry of keeping pace with times.
At present domestic molecular pump shall improve its series and develop many varieties, such as low molecular pump, complex molecules pump etc, gradually expand the market.
7.4、To introduce advanced foreign technology, make domestic independent brands.
Introduce the foreign advanced technology, improve our scientific and technological content of products in other industries have successful experience. In the development of vacuum pro-duction equipment in the high-end product introduction of foreign technology, and good digestion absorption, will change our country product otaku pinliang speed low-skilled, quality and technology level cannot meet the demand of market of the status quo. But we the introduction of foreign technology, should pay special attention to two points: one is the emphasis on digest absorb, and based on this, cultivate enterprise of independent intellectual property rights and innovation ability. 2 it is not repeat import blindly, aiming at the international on contemporary latest technology, avoid introducing generation, backward generation. The introduction of foreign technology is not an end, but a means, through introducing technology ultimately make domestic independent brand!
7.5、Grasp product structure adjustment to develop to meet market demand of the products.
The traditional vacuum equipment we produce decades in the nationwide form became the stability of the product distribution pattern. But with the high speed development of economy, the information technology, aerospace, nano science and other high-tech bow I guide of today's science and technology development trend. And these high-tech vacuum pro-duction equipment's development is inseparable from the basic equipment. At present domestic situation is still in production vacuum pump production enterprise traditional product mainly in the traditional application field occupied more than 90% of the market share. In the high-tech fields, domestic products in the technical level and quality will fail to meet demand, more than 90 percent market share by foreign product occupation. Domestic vacuum pro-duction products and the development of new high technology, product structure apart seriously incompatible. Most enterprises only expect to existing old products, and constantly increased production and increased profits, this possibility in current competitive market will be more and more small. In today's domestic and foreign market pattern in front, as soon as possible adjustment of product structure, make its to meet market demand is the most sensible choice.
The adjustment of product mix one is to continuously introduce market needs of marketable products, to vacuum pump market for, it is to speed
up the various dry type pumps, molecular pumps and other high-end product development and production, the formation of batch. It is the industry to become the high, medium and low end products of rational layout, and along with the changes in the market, constantly adjust and maintain reasonable product structure state.
Although vacuum industry achieved remarkable progress, but the present development situation of vacuum pump technology is not optimistic. The industry should seriously analysis situation, sum up lessons, solidarity, to the industry's development and technical progress, opened a road for our country's economic construction to make its due contribution to the whole industry.
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