半导体智能制造探索之路

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Roadmap
Foundation systems - MES - ERP - PDM - SPAS - MBO
Phase 1
Digitalization - EAP - RMS - SPC - YMS - CIM - Wafer/Cell Map
Phase 2
Lights Off - PT/SDT - RTD(AM) - ARV - ARS - E-Form - Big Data
Exploring the way to
smart manufacturing
in Semiconductor industry
半导体智能制造探索之路
Agenda:
Introduction Challenges we were/are facing Roadmap to smart manufacturing What we are now Next Journey Q&A
Calendar Management • Calendar, Holidays • Shifts
Security Management • Role & User Definition • User Authentication • Setup Access, Attribute Access, User Group Access, Service Rules
• 17,000+ active patents worldwide
• Vertically integrated business model to maximize operational efficiency
• Consistent profitable performance, strong free cash flow
Introduction
A Storage Solutions Leader
• In a strong strategic position to lead global evolution of broad-based and changing storage industry
• Broad storage portfolio, including HDDs, SSDs, embedded and removable flash memory, and storage-related systems
Equipment Management • Equipment Clustering • Equipment-Tool Association • Maintenance Management (Date-, Recurring Date-, Throughput-based) on Equipment, Tool • Jobs Model, State Model
Parts Management • Part Inventory (Stock), Part Preparation, Withdrawal Request, Expiry Control • Maintenance Management • Jobs Model, State Model
Broadest Portfolio of Products & Solutions
Global Operations
Our Manufacturing Process
KGD
Wafer
DP
Assembly Test
Retail
Challenges we were/are facing
Adopt
Process Management • Process Specs, Workflows, Specs, Operations, Parameters, Reason Codes, Limits, Time Window, Mask Layers, etc. • Recipe, Equipment, Tool and Parameter Matrixes for ease of Workflow and Process controls and management. • Defines Multi-Processes/In-Line WIP tracking Models, for Serial and Parallel process • Supplementary Process Spec
3 Layer Factory Systems
Siemens Camstar Semiconductor Suite
Siemens Camstar Semiconductor Suite module Implemented -1
Product Management • Product Definition • Process Spec & BOM List • Bins & Grades Mapping
Mask/Film Management • Mask, Mask Set, Mask Layer • Process Spec-Mask Layer Association • Maintenance Management (Date-, Recurring Date-, Throughput-based) on Mask
DFM Quality & Delivery
Customize Kaizen Volume
Change R&D Speed
Flexibility
Innovation
Time to market
Cost Globalize
Labor
Βιβλιοθήκη Baidu
Material
Standard
Equipment
Big Data
Connect
Phase 3
Smart Factory - Data Virtualization - Big Data - Edge computing - Edge Analytics - B2B - APC(FDC/R2R) - AI
Phase 4
What we are now
Achievement: • Light Off production • Auto
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