4D干涉仪原理介绍 PhaseCam Training 201010V1

Quantitative Improvement

“Bulls-eye” artifacts are highly attenuated in measurement
PV ~28nm
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PV <5nm
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Extended Precision Package
for PhaseCam6000
PhaseCam 6000 Extended Precision Package
Standard Illumination Source
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Performance Improvement vs. Spatial Frequency
(A) Object Surface Profile (B)
Measureme
h
freq
h
freq
x
x
RMS Precision (Waves @ 633nm) Spatial Frequency (Cycles/Aperture) Source Point Extended All 0.00067 0.00034 Low (<30) 0.00034 0.00026 Mid (30-100) 0.00014 0.00006 High (>100) 0.00042 0.00010
4.1.1 PhaseCam泰曼－格林系列
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4.1.2 PhaseCam产品线 •
P4000>>P4010>>P4020 P5030 P6000
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基于泰曼型的多波长、高能、ESPI、便携型
Extended Precision Package

Artifacts from dust, diverger optics, etc.

Artifacts virtually eliminated
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CCD的帧频(30帧/秒），导致普通相移干涉测量时 间>120ms 能不能用一帧干涉图就完成测量？
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3.1 4D 动态干涉仪原理
A
4 Frame PSI:
(2x,2y)
(2x+1,2y)
•
适合于 恶劣环境下的测量
– 快速测量 – 测量速度受曝光时间限制，而不受CCD帧频限制! – 对振动不敏感 – 减少了气流的影响－多次平均
• •
适合于 挑战性的测试设置
– 大口径光学元件或系统 – 长光程 – 真空或环境仓内的测试
适合于 高难度测试
– – – – 运动表面 多波长干涉仪－JWST 电子散斑干涉仪ESPI－NASA 生产环境下的测试
D
Sensor Array
BD tan A C
Intensity Pattern On the Detector
C
•
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(2x,2y+1)
(2x+1,2y+1)
B
所有相位图都在同一时刻获得 !
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f (c1) = 0 f (c2) (0°)
= p/2 (90°) f (c3) = p (180°) f (c4) = 3p/2 (270°)
I x, y I 2 (x, y) x, y Tan 1 4 I x , y I ( x , y ) 3 1
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重要项目中的应用
•
NASA于2005年1月发射的“深度撞 击飞行器” 7月4日成功撞击坦普尔1号彗星 携带的所有光学系统由4D PhaseCam 做质量检测QC.
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长光程测量中的气流场
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32m 光程, F 1.2m
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Factor of two Improvement!
Factor of four improvement at higher spatial frequencies!
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6. 动态干涉仪的应用
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3.2 4D 动态干涉仪原理
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续 －相位相关探测器
相位相关探测器
定向微偏振器阵列
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品种最多，发展最完善， 用户最多，最稳定
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4D 产品 系列
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PC6000
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FizCam
– – – – 斐索型干涉仪 4“ －32” 倾斜光束1000系列 共光路 2000系列
Patent No. US 7,057,738
•
160x160x85mm
• •
NIR/IR 干涉仪 193nm 干涉仪
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PhaseCam – 泰曼－格林型干涉仪 Patent No. US 6,304,330 – 多波长 – ESPI电子散斑 – 适用于大口径长光程凹面的测量
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PZT
PZT
PZT
PZT
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Test Part
Ref Flat
Test Part
Ref Flat
Test Part
Ref Flat
Test Part
Ref Flat
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2.3 相移干涉技术的原理 －振动的影响 • •
3.2 4D ห้องสมุดไป่ตู้态干涉仪原理
使用偏振光的相移机理
续 －相位相关探测器
ref LHC RHC test
圆偏光 (Df) + 线偏振器 (a)
cos (Df + 2a)
1 与光轴平行的分量才能发生干涉 2 偏振器的光轴角度决定了 相移结果
Kothiyal and Delsile, Appl. Opt. V24 n24 p4439 (1985) Kemo, et. al, Appl Opt. V41 n 13 p2448 (2002)
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Features - Specifications • • • • • • •
Small form factor Fully automated, remotely controllable Interchangeable sources Larger beam diameter – 9mm Entrance pupil plane 50mm in front of system 1MPix camera, fixed magnification 532 or 632.8nm single mode, long coherence sources
2.1 相移干涉技术的原理 续
I(x,y) = I0 + I' cos[f(x,y)+ f(c)]
I1(x,y) = I0 + I' cos [ f (x,y)] I2(x,y) = I0 - I' sin [f (x,y) ] I3(x,y) = I0 - I' cos [f (x,y) ] I4(x,y) = I0 + I' sin [f (x,y) ]
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4D Technology （DynamicCorporation Interferometer)
Oct. 2010
4D 动态相移干涉仪
-----原理、技术与应用 Company Profile
www.OPTurn.com
表面残差 PVq=89nm：去除zernike项后
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加工现场检测
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口径0.8m，500次测量平均消除气流影响
Height (x, y) =
l (x, y) 4p
对同一表面，采多幅不同相位的干涉图， 进行计算，获得表面的数值
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2.2 相移干涉技术的原理 －普通干涉仪
准直镜
分束器
激光
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主要内容
• • • •
相移干涉技术的原理 动态相移干涉仪原理 4D PhaseCam 动态干涉仪 动态干涉仪的应用
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光阑
参考面
被测面
Camera
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2.2 相移干涉技术的原理 －普通干涉仪 续
fc)= ft), 按时间顺序，人为改变干涉图的相位
f (0.03s) = 0 deg f (0.06s) = 90deg f (0.09s) = 180deg f (0.12s) = 270deg
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多次反射测量
经过镜面多次反射后光强变 得很弱 增大了动态测量的难度
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长焦距离轴非球面的测量
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Award Winning Technology
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• • • •
10 US Patents (licensed or owned), numerous pending 2003 Photonics Circle of Excellence Winner: One of the best 25 new products of the year 2004 R&D 100 Award for FizCam 2005 R&D 100 Award for PhaseCam MW 2006 NASA Goddard SFC Exceptional Achievement Award for SpeckleCam (ESPI System) 2006 R&D 100 Award for SpeckleCam (ESPI System)
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Corporation
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PhaseCam 6000 Configuration
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