Micro electronic mechanical system

专利名称：Micro electronic mechanical system
发明人：ブランソン ケヴィン マイケル,ハミルトン デイ
ヴィッド ジェイムス,キング デイヴィッド ウー
リ,マクニー マーク エドワード
申请号：JP2003576322
申请日：20030319
公开号：JP2005521036A
公开日：
20050714
专利内容由知识产权出版社提供
专利附图：
摘要：A micro-electromechanical system (MEMS) comprises a substrate incorporating an oscillatory ring, forcing electrodes for driving the ring into resonance, and sensing electrodes providing an electrical output signal dependent on oscillation of the ring as a
result of such forcing and any externally applied force. A positive feedback circuit is provided for feeding back a signal dependent on the output signal of the sensing electrodes to the forcing electrodes in order to sustain oscillation of the ring. The use of positive feedback to drive the forcing electrodes in order to sustain oscillation of the ring is highly advantageous in such an application since it produces a system which exhibits very low phase noise of a magnitude considerably less than the phase noise experienced in use of a phase-lock loop circuit to sustain oscillation.
申请人：キネティック リミテッド
地址：イギリス ロンドン エスダブリュー１イー ６ピーディー バッキンガム ゲート ８５
国籍：GB
代理人：熊倉 禎男,大塚 文昭,今城 俊夫,西島 孝喜
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