MICROSCOPE WITH SCANNING PROBE
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专利名称：MICROSCOPE WITH SCANNING PROBE 发明人：KINOSHITA KATSUYUKI
申请号：JP5335990
申请日：19900305
公开号：JPH03254056A
公开日：
19911113
专利内容由知识产权出版社提供
摘要：PURPOSE:To monitor even information other than the amperage possessed by electron emitted from a specimen, by furnishing a probe provided with a through hole, and equipping an electron beam sensing device which is to obtain information carried by the electron beam after it has passed through the through hole. CONSTITUTION:An emitted electron led into a through hole 24 in a probe 12 is accelerated by an accelerating electrode 32 e.g. to several hundreds of V, passes through an aperture in the center of the electrode 32 to be incident to an electron booster tube 34. This booster tube 34 boosts electrons, which are incident to an anode 34A, and the number of incident electrons is counted by a pulse counter 36 which counts the pulses generated signaling electron by electron. This enables sensing of even very weak current emitted from the surface of a specimen 22. If the tip of the probe 12 scans over the specimen surface in the X and Y directions with the aid of a piezo fine motion scanning element 16, the space distribution of the emitted current can be obtained with a space resolution substantially equal to the inner dia. 0.1mum of the through hole at its foremost part.
申请人：HAMAMATSU PHOTONICS KK
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