湿氧系统中英对照操作手册基本操作

操作手册
目录
Preface.序言 (III)
Tempress documentation set. 文件设置 (III)
User Definition. 用户定义 (IV)
Notes, Cautions and Warnings..注意，小心，警告 (V)
Contents description (VI)
Revision History (VI)
1. Introduction.......................................................................1-1
1.1 General.....................................................................................1-1
1.2 Operator area description.........................................................1-2
2. Safety.................................................................................2-2
2.1 Emergency Off (EMO)..............................................................2-2
2.2 Alarm Signals............................................................................2-2
2.2.1 Buzzer / LED.............................................................2-2
2.2.2 Touchscreen..............................................................2-2
2.2.3 Light tower.................................................................2-3
2.2.4 TSC Alarm menu.......................................................2-3
2.3 Light tower signal description (optional)....................................2-3
2.4 Toxic Material...........................................................................2-5
2.5 Safety measures.......................................................................2-5
3. Operator Instructions.....................................................2.5-1
3.1 Load or Unload process wafers.............................................3.1-1
3.1.1 Load process wafers...............................................3.1-1
3.1.2 Unload wafers.........................................................3.1-1
3.2 Selecting a new process recipe.............................................3.2-1
3.2.1 Touchscreen...........................................................3.2-1
3.2.2 TSC-2.....................................................................3.2-3
3.3 Start/Continue a new process recipe.....................................3.3-1 3.3.1 Touchscreen...........................................................3.3-1
3.3.2 TSC-2.....................................................................3.3-2
3.4 Stop a running process recipe...............................................3.4-1 3.
4.1 Touchscreen...........................................................3.4-1
3.4.2 TSC-2.....................................................................3.4-2
3.5 Abort a running process recipe..............................................3.5-1 3.5.1 Touchscreen...........................................................3.5-1
3.5.2 TSC-2.....................................................................3.5-2
3.6 Clear Alarms..........................................................................3.6-1 3.6.1 Required action.......................................................3.6-1
3.6.2 Touchscreen...........................................................3.6-1
3.6.3 TSC-2.....................................................................3.6-2
Preface序言
This set of manuals explains how to operate a Horizontal Diffusion/LPCVD furnace.
这套手册是操作水平扩散炉/ LPCVD的说明。

Refer to the Touchscreen reference manual (M440.01) or the TSC-2 reference manual (M450.03) for a full description of all operating screens.
触摸屏参考手册(M440.01)和TSC-2参考手册是操作触摸屏的说明。

For information about processing refer to the Process Manual (M220.xxx.02).
工艺手册(M220.xxx.02)是工艺过程的信息。

The Tempress Horizontal Diffusion Furnaces are fully described in the reference manuals (M300 series).
参考手册(M300 series).是描述Tempress水平扩散炉的。

Tempress documentation set 文件设置
The complete Tempress documentation set includes: 全部的文件包括
• Safety manual 安全手册
• Operator manual 操作手册
• Reference manuals 参考手册
1. Loadstation 装载区
2. Furnace 炉子
3. Gas cabinet 气柜
4. Main Power cabinet 电源柜
5. DPC
6. DTC
7. Touchscreen 触摸屏
8. TSC-2 (+ optional SECS/GEM)
• Vendor documentation 卖主文件
Delivery’s on request: 按要求交付
• Desired vendor documentation
• Sic and Quartz drawings Sic和石英器件的图纸
• RS422 protocol (DPC/DTC)
User Definition 用户定义
It is strongly recommended that all users first read this manual before starting any procedure. To produce an accessible manual suiting on various responsibilities, Tempress defines the following users:
特别建议开始所有程序之前，先看这本手册。

为不同职责的人编写一本易懂的操作手册，Tempress定义了以下用户：
Operator 操作人员
The operator is handling the process from loading until unloading of the wafers. Therefore the operator needs to select a recipe, put the wafers on the boat, fill in Lot ID, Start the process, monitor the progress and unload wafers.
操作人员的操作过程是从装载硅片到卸载硅片。

但是操作人员需要选择工艺菜单，装载硅片，填写产品批号，启动工艺和监控运行过程及卸载硅片
Process engineer 工艺工程师
The process engineer is a qualified chemical engineer, who is responsible for the process recipes and their results. The process engineer writes, tests and releases new process recipes.
工艺工程师是有资格的化学工程师，他负责工艺菜单和结果，需要编写、测试和投放新的工艺菜单。

Service or Maintenance engineer 维修工程师
The maintenance engineer is a qualified electrician or mechanic, who is responsible for a proper functioning system in accordance to its designated purpose. A Tempress qualified service engineer will perform the first installation.
维修工程师是有资格的电工或技工，他要负责设备按设定的目的正常运行。

Tempress 的维修工程师会完成初始的安装。

Notes, Cautions and Warnings注意，小心，警告
Notes, Cautions and Warnings appear throughout this manual, where extra attention is required to a particular (safety) item. Three levels can be distinguished:
特别注意的地方会有特别提醒，注意，小心，警告要贯穿整个手册，并分为三个等级：
NOTE 注意
Notes alert to pay attention to items or procedures of special importance.
注意是提醒特别重要的项目或程序
CAUTION 小心
Cautions alert for a potentially hazardous situation that may result in minor or moderate injuries.
Cautions can also alert for potential equipment and/or product damage.
小心是提醒有潜在的危险境况，会导致小的或中度的工伤。

提醒有设备或产品的潜在损害。

WARNING 警告
Warnings alert for conditions that may result in permanent and/or lethal injuries.
警告是提醒有永久或致命的伤害。

Contents description 内容简介
This manual is divided into the following sections and appendices: 手册分为下面几个部分和附录
Section 1 Introduction 简介
Provides an overview of the Tempress Systems Inc. Horizontal furnace.
Tempress公司水平炉子的简介
Section 2 Safety 安全
Describes the safety components and functions. It describes all measures that are required to provide a safe way of working.
描述安全组分和作用。

它描述为提供一个安全工作的所有措施。

Section 3 Operator Instructions 操作说明
Describes all procedures that are required for the operator.
描述为操作员需要的所有规程
Revision History 版本的历史
This manual is revision 1 of the Operator Manual and is intended to explain the required operator procedures. The function and screens it describes are based on the following software releases:
说明操作程序的操作手册是第一个版本，其中功能和屏幕的描述是基于以下软件版本：
• TSC 2 version 6.3 (17-02-2003)
• DPC 2.I.03 (17-02-2003)
• DTC 2.F.02 (17-02-2003)
• Touchscreen 2.I.05 (17-02-2003)
For minor software and hardware changes, addendum to this manual will be available. For major changes, a new revision will be available. For information or other questions please contact Tempress Systems Inc.
一些小的软件和硬件的变化会加在附录里。

大的变化就会有一个新的版本。

其他问题请联系厂家。

1.Introduction 简介
1.1 General 概要
The horizontal furnaces of Tempress Systems Inc. are developed according to the European directives for Machinery (98/37/EC), Low Voltage (73/23/EC) and EMC
(89/336/EEC).
The Tempress Diffusion system is a modular horizontal furnace designed to process (silicon) wafers as part of the manufacturing technology of semiconductor, optical, MEMS and solar devices.
公司的水平炉子是依照Machinery (98/37/EC), Low Voltage (73/23/EC) and EMC (89/336/EEC)的欧洲标准发展的。

该公司的扩散炉是为半导体、光学、MEMS和太阳能器件中的硅片处理工艺设计的有标准组件的水平炉子。

Figure 1-1 shows an example of a standard L-shape diffusion system with 4 process tubes shown without the partition of a cleanroom wall. It is a right-handed system, defined according to the position of the furnace relative to an operator. Usually the system contains more than 1 tube. Based on the number and size of tubes, the system is referred
to as a 2, 3 or 4 stack.
Figure 1-1 is an example of a 4-stack system, allowing up to 4 different processes at any time. The tubes are numbered from 1 to 4, with tube number 1 at the top and tube 4 at the bottom. All tubes operate fully independently.
图1-1是一个标准的L型四管扩散炉，没有超净间的隔离墙。

对于操作人员来说是右手操作。

一般系统不止一个炉管，基于炉管的数量，系统分为2、3或4管炉。

图1-1是个四管炉，容许4个不同的工艺同时进行。

四个管的编号是1在顶部，4在底部，所有的管是完全独立的。

Figure 1-1 Schematic view of a right-handed 4-stack Diffusion System
1.2 Operator area description 操作区介绍
The operator area is limited to the loadstation only. Figure 1-2 shows the relevant items. The Loadstation part of a Tempress System should be placed in the cleanroom. The Furnace and Gas cabinet can optionally be placed in the greyroom.
操作区只限于装载区，如图1-2所示。

装载区必须置于千级间，炉体和气柜置于万级间。

Figure 1-2 Loadstation
To load wafers, several loader types can be implemented, including the (default) inline loader, the Amtech Atmoscan®, and the backmounted softlander. To prevent particles on the wafers during the loading process, a constant horizontal laminar flow is created from the loadstation into the cleanroom.
装载硅片有几种装载类型，如联机式、Amtech Atmoscan®和backmounted softlander 类型，在装片过程中为防止微粒落入硅片，千级间的装载区要开启水平的气流吹扫。

The loadstation is powered by 220V and has an illuminated On/Off switch for the fans and the lights.
The remote control cabinet in the loadstation contains TFT-Touchscreens, one for each tube. These supply the user interface for communication with the Digital System Controllers (Digital Process Controller, Digital Temperature Controller and Digital Motion
Controller).
装载区要有220v 的电源，以及风扇和灯的照明开关。

装载区的远程控制箱包括每个管的触摸屏，它提供一个与数字控制系统交流的用户界面。

2.Safety 安全
This section contains a brief description of the safety features of a Tempress Horizontal Diffusion System for the operator. Buzzer/LED Light/Fan Switch Touchscreen
EMO
Operators must have a general knowledge of the technology involved in diffusion systems. They should understand safety practices outlined in this manual.
The descriptions contained in this user manual are general in nature or generic. The actual furnace may differ in minor detail from the furnace described in this manual, because of customer specific requirements or modifications. Please refer to the Tempress Safety manual for a complete description of available safety features.
这一部分是为操作者有关扩散系统的安全装置作一简要说明。

操作者必须了解扩散工艺的基本常识，才能理解本手册安全装置的要点。

用户手册中描写的是一般性，实际上炉子和此有一些细微的差别，是因为客户的特殊需要或更改。

安全装置的完整描述请参考安全手册。

2.1 Emergency Off (EMO) 紧急关闭
Emergency Off (EMO) buttons are located around the system at accessible locations according to EN 60204-1, especially EN 418. Pressing an EMO button turns off all power to the system except to the fans on top of the furnace. This prevents fire hazard as a result of high heat concentration in the furnace cabinet. Also those parts that are connected to a UPS facility remain operational.
按照EN 60204-1, 尤其是EN 418标准，紧急关闭按钮在系统中易接近的位置。

按下紧急关闭按钮将切断除炉子顶部风扇的其他电源，会防止由于炉子高温引起的火灾。

其他连有不间断电源的部分会继续运行。

Press the EMO button when a person is in danger, when there is a fire, a water leak or any other event that could be hazardous to life.
当着火，漏水或其他危害到生命的突发事件，要按EMO按钮
2.2 Alarm Signals 警报信号
Alarms and alerts generated by tube controls are presented in several ways:
石英管引起的报警有下面几种形式：
• Buzzer / LED 蜂鸣器/ LED
• Touch screen 触摸屏
• Light tower 灯塔
• TSC-II
2.2.1 Buzzer / LED
Visible and audible alarm signals are generated by the DPC, DTC and the DMC. The visible signals will be presented with a LED, located below the buzzer position as shown in Figure1-2. Each tube process is represented by one LED and buzzer combination. DPC, DTC 和DMC提供了可视听报警信号，可视信号是由LED实现的，如图1-2它位于蜂鸣器下方。

每一个石英管都有一组对应的LED和蜂鸣器。

2.2.2 Touchscreen
The visible alarm signals will be presented on the touchscreen bottom line. Alarms on the Touchscreen are always in combination with an audible signal.
Touching the screen deactivates the audible signal.
A new Alarm or alert will not activate the audible signal again before current alarm has been solved.
可视报警信号是在触摸屏的底线，触摸屏上的报警信号是于可听信号相结合的，点击触摸屏可解除报警信号。

当前的报警情况没有解决之前，新的报警情况不会激活可听报警。

2.2.3 Light tower
Figure 2-1 Default light tower configuration
Alarms generated by the DPC, DTC and DMC will be made visible by three colors. Each color of the light tower represents particular circumstances.
DPC, DTC和DMC提供了三种颜色的报警信号，每种颜色代表特别的情况。

- Green represents safe, operational condition. 绿色代表安全，运行环境
- Yellow represents warnings and alerts 黄色代表警告或警报
- Red represents alarms 红色代表报警
See section 2.3 for a full description. 2.3节会详细描述
2.2.4 TSC Alarm menu TSC报警菜单
Activating the alarm menu gives an overview of all active and passed alarms during the process. In case of an active alarm the “Alarm” button start flashing on and off.
如果“Alarm”报警按钮开始闪烁，激活报警菜单会显示工艺中过去和现在的报警情况。

2.3 Light tower signal description (optional) 灯塔信号描述（可选）
Two light towers, one on top of the loadstation in the cleanroom and one on top of the furnace in the greyroom, are installed for fast anticipation on the status of the (production) process. This section describes the function of each light and its relation to the tube status. 两个灯塔，一个在千级间装载区顶部，一个在万级间炉子顶部，这样安装是为了快速反映工艺状况。

本部分描述每个灯的功能及对应的管子状况。

Green 绿
Yellow 黄
Red 红
A light tower is (default) comprised of 3 lights: from top to bottom RED, YELLOW and GREEN. 灯塔是由红，黄，绿三个颜色组成：
The green and red light can indicate 2 signals: 绿和红灯显示两种信号：亮或不亮
1) OFF
2) ON
The yellow light can indicate 2 signals: 黄灯显示两种信号：不亮或闪烁
1) OFF
2) BLINK
The light tower is controlled by a tower signal PLC that receives its commands from the various controllers, among others DPC/DTC/DMC, Excess temperature controller, gas detection system alarm and the TSC Host control.
灯塔是由PLC信号塔控制，信号塔接收来自不同控制系统的命令，如DPC/DTC/DMC，超温控制，气体检测系统和TSC主机控制。

In case the EMO-switch is activated or a power failure occurs for more than 4 seconds, the power supply to the furnace will stop and also the light tower will be off.
The tower signal PLC is programmed by Tempress Systems Inc. and is not adjustable by customers.
如果紧急关闭启动或电源停止供电4秒以上，炉子电源将切断，灯塔也会关掉。

信号塔PLC的程序是由Tempress公司编写的，用户不能改动。

For a functional description of the light tower signals see table 1:
灯塔的功能描述如表1
Table 1 Light tower signal description
2.4 Toxic Material 有毒材料
The process engineer, responsible for all process related activities, has to inform the operator about the hazards of the process.
工艺工程师要对全部及相关工艺过程负责，必须告知操作员工艺中存在的危险。

2.5 Safety measures 安全措施
Safety measures are indicated in the appropriate procedures
安全措施会在适当的程序中指出。

3.Operator Instructions 操作说明
This document describes the various procedures required for an operator. The procedures describe how to load and unload wafers, how to select a new process recipe, how to
start/continue a process recipe, how to stop the timer of a running process recipe, how to modify ‘Variable Commands’ when available and how to abort a running process recipe. 这一文件向操作者描述了不同的程序：如何装卸硅片，如何选择一个新的工艺菜单，如何开始或继续工艺菜单，如何停止运行的工艺计时，如需要怎样修改可变参数，如何中断一个正在运行的工艺。

3.1 Load or Unload process wafers 装卸硅片
Loading and unloading process wafers on the paddle is required before and after each process run. 每一个工艺过程运行之前和之后都要从桨上装卸硅片。

3.1.1 Load process wafers 装载硅片
• Place the wafers on the wafer carriers, depending on the situation with (vacuum) tweezers or a wafer transfer system. 用真空吸笔或硅片转移装置把硅片装入硅片承载器。

• Pick-up wafer carriers with a pick-up fork or automated loading tool.
• Place the wafer carriers around the center of flatzone as indicated on the loadstation.
用叉子或自动装载工具提取硅片承载器放到装载区的中心位置。

3.1.2 Unload wafers 卸载硅片
CAUTION 小心Wafers and paddle are hot. 硅片和桨是热的。

• Allow the wafers to cool down. 让硅片降温
• Pick-up wafer carriers with a pick-up fork or automated loading tool. (Amtech Systems S300)
• Remove the wafers from the wafer carriers, depending on the situation with (vacuum) tweezers or a wafer transfer system. 用叉子或自动装载工具提取硅片承载器。

然后用真空吸笔或硅片转移装置把硅片从硅片承载器中取出。

3.2 Selecting a new process recipe 选一个新的工艺菜单
A new process recipe needs to be selected so the new instructions can be executed. A new process recipe can only be selected if the current process recipe is in ‘Step 0‘.
要执行新的指令需要选一个新的工艺菜单。

只有当现在工艺菜单处在的‘Step 0’才可以选择新的工艺菜单。

3.2.1 Touchscreen 触摸屏
1) return to the Main Menu by pressing ‘ESC’ until the following screen appears:
按ESC 直到返回主菜单。

2) press ‘4’ to access ‘Tube control’按4 进入管子控制
3) press ‘6’ to ‘Select a Process Recipes’按6 进入选择工艺菜单
4) select the desired process recipe by entering its number. 通过键入数字选择需要的工艺菜单
5) press ‘Yes’ to confirm the question ‘Sure to SELECT PROCESS recipe (Yes/No)?’
按“yes”证实你的选择
Note: selecting another process recipe is only possible if the current process recipe is in Step 0.
注意：只有当现在工艺菜单处在的‘Step 0’才可以选择新的工艺菜单。

3.2.2 TSC-2
1) select the desired tube from the pull-down menu or from the ‘Overview’ screen.
从下拉菜单或从‘Overview’屏上选择要操作的管子。

2) select ‘Operations’ to access the operations screen.
按‘Operations’键进入操作屏
3) Select the desired process recipe from the pull-down menu
从下拉菜单中选择所需的工艺菜单
4) Press ‘Yes’ to confirm the question ‘Are you sure to select another process recipe?’
按‘Yes’证实自己的选择。

Note: selecting another process recipe is only possible if the current process recipe is in Step
0. 注意：只有当现在工艺菜单处在的‘Step 0’才可以选择新的工艺菜单。

3.3 Start/Continue a new process recipe 开始/继续一个新的工艺菜单
Two different situations require the ‘Start‘ command.
The first situation is starting a newly selected process recipe so it starts running from Step 0. The second situation is starting a process recipe that has been stopped or is waiting for an ‘Operator‘ instruction.
两种情形需要开始命令，第一是从Step 0开始一个最近用过的一个工艺菜单。

第二是开始一个曾停止过或在等待操作命令的工艺菜单。

3.3.1 Touchscreen 触摸屏
1) return to the Main Menu by pressing ‘ESC’ until the following screen appears:
按ESC 直到返回主菜单。

2) press ‘4’ to access ‘Tube Control’按4 进入管子控制
3) press ‘2’ to access ‘Start/Stop Process Recipe’. 按2 进入开始/停止工艺菜单
4) press ‘Start’ to start/continue the selected process recipe.按start开始/继续所选择的功艺菜单。

3.3.2 TSC-2
1) select the desired tube from the pull-down menu or from the ‘Overview’ screen.
从下拉菜单或从‘Overview’屏上选择要操作的管子。

2) select ‘Operations’ to access the operations screen. 按‘Operations’键进入操作屏。

3) press ‘Start’ to start the selected process recipe from ‘Step 0’
按‘Start’从‘Step 0’开始所选的工艺菜单。

4) press ‘Continue’ to start a process recipe that has been stopped or is waiting for an
‘Operator‘ instruction. 按‘Continue’开始一个曾停止过或在等待操作命令的工艺菜单。

5) press ‘Yes’ to confirm the question ‘Do you want to start?’按‘Yes’证实选择。

3.4 Stop a running process recipe 停止一个运行的工艺
Stopping a running process recipe may be required to temporarily stop the process recipe. When activated, the ‘Stop‘ command will stop the timer while all given commands are maintained.
有时需要临时停掉工艺，当激活‘Stop‘命令，计时器将停止，而已执行的命令将继续。

3.4.1 Touchscreen
1) return to the Main Menu by pressing ‘ESC’ until the following screen appears:
2) press ‘4’ to access ‘Tube Control’
3) press ‘2’ to access ‘Start/Stop Process Recipe’
4) press ‘Stop’ to stop the selected process recipe
3.4.2 TSC-2
1) select the desired tube from the pull-down menu or from the ‘Overview’ screen.
2) select ‘Operations’ to access the operations screen.
3) Press ‘Pause’ to stop the selected process recipe from the current step.
3.5 Abort a running process recipe 中断运行的工艺
A manual ‘Abort‘ instruction may be required if the operator foresees a dangerous situation or a continuous looped process recipe needs to be reset to Step 0 to allow selection of another process recipe.如果操作者预见到危险或者一个连续循环的工艺要设置成Step 0，需要手动停止指令然后选择另外的工艺。

3.5.1 Touchscreen
1) return to the Main Menu by pressing ‘ESC’ until the following screen appears:
2) press ‘4’ to access ‘Tube Control’
3) press ‘3’ to access ‘Abort Process Recipe’
4) press ‘Yes’ to confirm the question ‘Are you sure you want to abort?’
5) press ‘Yes’ again to activate the abort command
3.5.2 TSC-2
1) select the desired tube from the pull-down menu or from the ‘Overview’ screen.
2) select ‘Operations’ to access the operations screen.
3) Press ‘Abort’ to abort the selected process recipe.
4) Press ‘Yes’ to confirm the question ‘Sure to abort?’
3.6 Clear Alarms 清除报警
Visible and audible Alarms signals are generated by the DPC and DTC. The visible alarms will be presented both on the touchscreen and the TSC-2 computer(s), the audible alarms are available on the touchscreen only.
Two different audible alarm signals are available: 两种不同的报警声音
• operator alert: an intermittent beep-beep-beep to alert an operator for action (press
‘Start‘ for example) 一种是间断的beep-beep-beep声警告操作者的行为。

（如按“start”）• alarm signal: a continuous beeeeeeeeeeeeep to alert for an alarm situation
一种是连续的beeeeeeeeeeeeep声来警告危险状况。

3.6.1 Required action
• Operator alert signals (beep-beep-beep) require the operator to press ‘Start‘ to have the furnace proceed to the next step in the process.
beep-beep-beep的警告信号需要操作者按下‘Start‘使炉子运行到下一步。

• Alarm situation signals (beeeeeeeeeeep) require the operator to alert the responsible person(s) immediately.
Beeeeeeeeeeep的警报声需要操作者马上报告负责人。

3.6.2 Touchscreen
1) touch the touchscreen to silence the buzzer
2) read the alarm message in the bottom line of the screen
3) take the appropriate action as described in section 3.6.1.
3.6.3 TSC-2
1) the overview screen gives an instant view of which tubes are in alarm in RED
2) select the desired tube from the pull-down menu or from the ‘Overview’ screen
4) select the ‘Alarm’ screen
3) read the alarm message(s)
4) take the appropriate action as described in section 3.6.1。