THIN-FILM SOLAR CELL

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专利名称:THIN-FILM SOLAR CELL 发明人:OOTAKE TSUTOMU

申请号:JP17293680

申请日:19801208

公开号:JPS5796576A

公开日:

19820615

专利内容由知识产权出版社提供

摘要:PURPOSE:To decrease the number of masks, and to curtail expenses by forming the first electrode onto one surface of a semiconductor thin-film and the second electrode onto the other surface and making the shape of the second electrode take a turn-out pattern of the shape of the first electrode. CONSTITUTION:SnO2 is sputtered onto a glass substrate 301 and the first electrodes 302 are shaped by using masks obtained by boring holes 202 through a stainless steel plate 201. An amorphous silicon film 303 having P-I-N structure is formed through plasma CVD. The second electrodes 304 are evaporated and shaped onto the film 303 through the evaporation of aluminum. The masks used previously are turned out so that left and right are reversed and employed at that time. Accordingly, expenses can be curtailed because the masks for patterning the electrodes may be one kind and the masks reduce by half.

申请人:SUWA SEIKOSHA KK

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