DISPLACEMENT SENSOR
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专利名称：DISPLACEMENT SENSOR
发明人：SPRONK, Josephus, Wilhelmus,BONSE, Marcus, Hans, Wilhelm
申请号：NL1996000240
申请日：19960613
公开号：WO96/041999P1
公开日：
19961227
专利内容由知识产权出版社提供
摘要：There is described a measuring system for detecting a positional variation of an object (V), comprising: a reference device (10) defining an X-direction; a first group (30) of at least three sensor members (31, 32, 33) for providing measuring signals indicative of a positional variation in a Z-direction relative to the reference device; a second group (40) of at least two sensor members (41, 42; 43, 44) for providing measuring signals indicative of a positional variation in a Y-direction relative to the reference device. The sensor members can be plane plate electrodes which, together with an electrically conductive surface of reference device, form a capacitive element whose capacity is influenced by distance and/or overlap of plate electrodes with reference member. The measuring system offers a possibility for improving reproducibility and accuracy, and is, as far as design is concerned, readily adaptable to an intended use.
申请人：SPRONK, Josephus, Wilhelmus,BONSE, Marcus, Hans, Wilhelm
地址：Julianalaan 134 NL-2628 BL Delft NL,Sadatweg 67 NL-2622 PB Delft
NL,Backershagen 59 NL-1082 GS Amsterdam NL
国籍：NL,NL,NL
代理机构：SMULDERS, Th., A., H., J.更多信息请下载全文后查看。