SUBSTRATE HEATER

摘要：PURPOSE: To prevent a heater from suffering from failure heating by heating a substrate while measuring actual temperature of a substrate conveyed in a substrate heating apparatus and controlling a heat amount of the heater. CONSTITUTION: When a conveyed substrate is detected with an arrival sensor 5 in a zone A indicated by a substrate heating apparatus 3, substrate conveyance with a conveyor 2 is interrupted for predetermined time, and a non-contact temperature sensor 6 within the region A indicated by the conveyor 2 is acted, and substrate temperature at that time is measured. When heating is insufficient for purposed temperature as a measured result of the substrate temperature, an increase of a heat amount of the heater 4 in the zone A is increased. At the time the purposed substrate temperature is attained, the increase of the heat amount of the heater 4 is interrupted, and thereafter the heater 4 heats the substrate keeping the heat amount unchanged. Further, when an overheated state is reached, heater output is interrupted or decreased. The same operation is performed for later zones, i.e., from a zone B to a zone E.
申请人：MATSUSHITA ELECTRIC IND CO LTD
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专利名称：SUBSTRATE HEATER 发明人：ASANO TAKAHIRO,SAITO SUSUMU,NAITO
TAKAO,MISAWA YOSHIHIKO 申请号：J P 304 83687 申请日：19871202 公开号：J P H 0114 7281A 公开日：19890608