CUSP磁场对8英寸半导体级硅晶体生长的影响(晶体生长建模软件FEMAG)
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Ox yge n ppm a
5 4 3 2 1 0 C U SP N o C U SP
0,12
0
0,02
0,04
Ra dius (m )
0,06
0,08
0,1
0,12
Radial Oxygen Concent rat ion H=1290mm
8 7 6
Radial Oxygen Concent rat ion H=1550 mm
FEMAGSoft © 2012
CRYSTAL RADIAL OXYGEN MEASUREMENT POSITIONS
FEMAGSoft © 2012
PREDICTION OF RADIAL OXYGEN CONCENTRATION
Radial Oxygen Concent rat ion H=90mm
PARAMETERS OBSERVED
The concentration of the Oxygen in the melt and crystal. The concentration of the Phosphorous in the melt and crystal The concentration of the Carbon in the melt and crystal
9 8 7 6
Ox yge n ppm a
5 4 3 2 1 0 0,2 0,4 0,6 0,8 1 1,2 1,4 1,6 C U SP N o C U SP
H e ight (m )
FEMAGSoft © 2012
PREDICTION OF CARBON CONCENTRATION ALONG THE HEIGHT OF THE CRYSTAL
6 5 4 3 2 1 C U SP N o C U SP
6 5 4 C U SP 3 2 1 N o C U SP
0 0 0,02 0,04 0,06 0,08 0,1 0,12
0 0 0,02 0,04 0,06 0,08 0,1 0,12
Ra dius (m )
Ra dius (m )
FEMAGSoft © 2011
FEMAGSoft © 2012
CUSP vs NOCUSP - CARBON CONCENTRATION - CRYSTAL
FEMAGSoft © 2012
CUSP vs NOCUSP - PHOSPHOROUS CONCENTRATION-CRYSTAL
FEMAGSoft © 2012
CUSP vs NO CUSP - PHOSPHORUS RESISTIVITY - CRYSTAL
PREDICTION OF RADIAL OXYGEN CONCENTRATION
Radial Oxygen Concent rat io H=840mm
8 7 6
8 7 6
Radial Oxygen Concent rat ion H=1070
Ox yge n ppm a
5 4 3 2 1 0 0 0,02 0,04 0,06(m ) Ra dius 0,08 0,1 C U SP N o C U SP
SIMULATION PROCESS
The growth process is modeled as Time dependent simulation taking in to account the transient effects taking place during the growth of the crystal
8 7 6
Ox yge n ppm a
C U SP 4 3 2 1 N o C U SP
Ox yge n ppm a
5
5 C U SP 4 3 2 1 N o C U SP
0 0 0,02 0,04
Ra dius (m )
0,06
0,08
0,1
0,12
0 0 0,02 0,04
Ra dius (m )
晶体生长建模软件FEMAG --CUSP磁场对8英寸半导体级硅晶体生长的影响
Report Bruker ASC Feb, 9, 2012
FEMAGSoft © 2012
OBJECTIVE
PROCESS CONDITION
CZ furnace - 8 inch diameter crystal, 24 inch diameter crucible To predict the impact of a CUSP magnetic field operating at 140 A with the neutral-axis located on the melt free surface.
FEMAGSoft © 2012
PREDICTION OF PHOSPHOROUS CONCENTRATION ALONG THE HEIGHT OF THE CRYSTAL
FEMAGSoft © 2012
CUSP vs NOCUSP - OXYGEN CONCENTRATION - CRYSTAL
8
9
Radial Oxygen Concent rat ion H=250 mm
8 7
7 6
Ox yge n ppm a
Ox yge n ppm a
5 4 3 2 1 0 0 0,02 0,04 0,06 0,08 0,1 C U SP N o C U SP
6 5 4 3 2 1 0 C U SP N o C U SP
0,06
0,08
0,1
0,12
FEMAGSoft © 2012
PREDICTION OF OXYGEN CONCENTRATION ALONG THE HEIGHT OF THE CRYSTAL
Oxygen Concent rat ion variat ion in a Vert ical Direct ion
0,12
0
0,02
0,04
0,06
0,08
0,1
0,12
Ra dius (m )
Ra dius (m )
Radial Oxygen Concent rat ion H=430mm
9
Radial Oxygen Concent rat ion H=640mm
9 8
8 7
7
Ox yge n ppm a
Ox yge n ppm a