Self-oriented bundles of carbon nanotubes and meth

专利名称：Self-oriented bundles of carbon nanotubes

and method of making same

发明人：Hongjie Dai,Shoushan Fan,Michael

Chapline,Nathan Franklin,Thomas Tombler

申请号：US09858783

申请日：20010515

公开号：US06900580B2

公开日：

20050531

专利内容由知识产权出版社提供

专利附图：

摘要：A field emission device having bundles of aligned parallel carbon nanotubes on a substrate. The carbon nanotubes are oriented perpendicular to the substrate. The

carbon nanotube bundles may be up to 300 microns tall, for example. The bundles of carbon nanotubes extend only from regions of the substrate patterned with a catalyst material. Preferably, the catalyst material is iron oxide. The substrate is preferably porous silicon, as this produces the highest quality, most well-aligned nanotubes. Smooth, nonporous silicon or quartz can also be used as the substrate. The method of the invention starts with forming a porous layer on a silicon substrate by electrochemical etching. Then, a thin layer of iron is deposited on the porous layer in patterned regions. The iron is then oxidized into iron oxide, and then the substrate is exposed to ethylene gas at elevated temperature. The iron oxide catalyzes the formation of bundles of aligned parallel carbon nanotubes which grow perpendicular to the substrate surface. The height of the nanotube bundles above the substrate is determined by the duration of the catalysis step. The nanotube bundles only grow from the patterned regions.

申请人：Hongjie Dai,Shoushan Fan,Michael Chapline,Nathan Franklin,Thomas Tombler 地址：Sunnyvale CA US,Beijing CN,Alamo CA US,Menlo Park CA US,Stanford CA US 国籍：US,CN,US,US,US

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