Failure analysis system, failure analysis method,
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专利名称：Failure analysis system, failure analysis
method, and program product for failure
analysis
发明人：Tetsuichi Satonaga,Koki Uwatoko,Koji
Adachi,Kaoru Yasukawa
申请号：US11652531
申请日：20070112
公开号：US20070237399A1
公开日：
20071011
专利内容由知识产权出版社提供
专利附图：
摘要：A failure analysis system includes an obtaining portion that obtains read-in
image information that is image information obtained by reading an output image, a memory that stores fundamental image reduction information that is information in which an information amount of fundamental image information is reduced, the fundamental image information serving as a fundamental of the output image, a calculating portion that calculates a characteristic value of a projecting waveform by use of differential information between read-in image reduction information and the fundamental image reduction information, the read-in image reduction information being information in which the information amount of the read-in image information obtained by the obtaining portion is reduced, the fundamental image reduction information being stored in the memory; and a determining portion that determines a defect type group that is a group of defect types of elements included in the output image by use of a clustering process.
申请人：Tetsuichi Satonaga,Koki Uwatoko,Koji Adachi,Kaoru Yasukawa
地址：Kanagawa JP,Kanagawa JP,Kanagawa JP,Kanagawa JP
国籍：JP,JP,JP,JP
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