真空脱气膜MD

8 2011-11-29
除气膜的制作
200 µm 300 µm
0.03 µm Pore
9 2011-11-29
MD的使用模式设计 MD的使用模式设计
Liquid Outlet
Parallel Configuratio n for Flow
Liquid Inlet Liquid Outlet
Series Configuratio n for Efficiency
LiquiLiqui-Cel
LiquiLiqui-Cel
Reclaim
LiquiLiqui-Cel
LiquiLiqui-Cel
O2 and CO2 Removal to Recycle Back into Loop
UV
UV
LiquiLiqui-Cel
DI Tank
Ion Exchang e
Process O2 Removal. Hybrid or Stand Alone
Membrane Degasify Introduction
ExtraExtra-Flow Membrane Contactor Technology
for Gas Transfer
MD
1 2011-11-29
概要
MD的用途 MD的工作原理介绍 MD的使用 MD产品的相关信息
2 2011-11-29
14
Pressure Drop (psig)
产品系列
2.5 x 8-inch Contactor Single Unit Capacity: 0.5 gpm – 3 gpm (0.1 – 0.7 m3/h) Membrane Area: 15.1 ft2 (1.4 m2) All Polyolefin Contactor 4 x 28-inch Contactor Single Unit Capacity: 5 gpm – 30 gpm (1.1–6.8 m3/h) Membrane Area: 210 ft2 (19.5 m2) Vessel: Polypropylene, Stainless Steel or PVDF 10 x 28 Contactor Single Unit Capacity: 44 gpm – 210 gpm (10 – 47.7 m3/h) Membrane Area: 1400 ft2 (130 m2) Vessel: 316 L Stainless Steel or Plastic with PVDF inner surface
12 10 8 6 4 2 0 0 20 40 60 80 100 110 .25
6
Shellside
4
.50
Shellside
2
0 15 25 35 45
55
Water Flow Rate (liter/min)
Water Flow Rate (m3/h)
16 2011-11-29
Pressure Drop (psig)
纯水系统中MD使用点
Pretreatmen t UPW Tank
Recycle
来自百度文库
No.2RO
Ion Exchange
DI Tank
UV No.1
LiquiLiqui-Cel
Polisher No.2 UV No.2
CO2 Removal for Ion Bed Life Extension
Final Filter POU
N2 , O2 Removal
LiquiLiqui-Cel
Polisher No.1
14 2011-11-29
MD 之性能曲线
Water Flow Rate (gpm)
90 100 110 130 150 170 190 100 90 110 130 150 170 190
Combo
Oxygen Removal (%)
18 2011-11-29
MD Introduction
THE END
19 2011-11-29
MD操作模式的发展 MD操作模式的发展
Strip gas WaterTo Vacuum outlet Water outlet Strip gas
Water outlet
Strip gas
To Vacuum Water inlet
To Vacuum Water inlet
A
B
C
Water inlet
Oxygen Removal (%)
Combo
90
95 90 85 80 75
50 mm Hg
50 mm Hg
80
100 mm Hg
100 mm Hg
70 15
One Contactor
25 35 45
Two Contactor in Series
15 25 35 45
Water Flow Rate (m3/hr) Temperature 20ºC
MD的用途 MD的用途
可除去以下气体： 水中溶解的O2 水中溶解的CO2 水中溶解的N2等其他气体 水中由O3转化而来的O2（消毒杀菌尾声）
3 2011-11-29
MD的工作原理 MD的工作原理
Henry’s Law DO=H *Po2 液体中所溶解的气体量跟此气体在液气 界面上气体空间的分压成正比关系。 Dalton’s Law Ptotal=PH2o +PN2 + PO2+………. 混合气体的总压力等于各种气体分压的 总和。
SAMPLE
CONTACTOR
PI FEED WATER
PI CHECK DRAIN VALVE VENT/ DRAIN
VAC EXHAUST
12 2011-11-29
纯水系统中可能使用MD 之POU
LiquiLiqui-Cel System
Pretreatmen t
RO
Vacuum Tower
RO Tank
17 2011-11-29
AT&T Ultrapure Water Deoxygenation System
Sematech Sponsored Design Basis: 10 gpm (2.30 m3/hr) 77°F (25°C) ° ° Inlet O2 Saturated (8.5 ppm) System Design: Two 4×28 Contactors in × Series N2 Sweep – 1.0 scfm (1.6 m3/hr) per Contactor Outlet Achieved: < 15 ppb Dissolved O2
4 2011-11-29
Henry&Dalton定律的运用 Henry&Dalton定律的运用
Henry’s Law DOo2= H1 *Po2
Po2=H2* Ptotal
Dalton’s Law
Vacuum
Ptotal=PH2o + PN2 + PO2+……
Gas strip
5 2011-11-29
UV
Excess O2 CO2 Removal Removal Created from O3 for Ion Bed Life Extension Conversion
Polisher Final Filter POU
N2 , O2 Removal
Total Gas Control and Final Polishing 13 of O2 2011-11-29
15 2011-11-29
压降曲线：
4×8 Contactor ×
0 5
10×28 Contactor ×
Water Flow Rate (gal/min)
25 30 8 1 .75 50 100 150 200 250 20
Water Flow Rate (gal/min)
10 15
16
Pressure Drop (psig)
Liquid Inlet
10 2011-11-29
GSMC ＵPW系统一段MD设计模式 PW系统一段MD设计模式
进水
1
2 3 4
5
出水
共五组并联，每组２个串联
进０. 进０.７Mp N2
11 2011-11-29
MD串联系统架构
PI N2 FEED FI
CONTACTOR
FI
PRODUCT WATER
目前，一般采用C模式
6 2011-11-29
MD工作原理剖析图 MD工作原理剖析图
Strip gas 高压N2分子 向 方 流 水 PP材质膜壁 水分子 各种气体分子
膜 孔 0.03um 只 能 通 过各种气体分子, Strip gas & Vacuum 水分子则不能通过
7 2011-11-29
MD的运转模型 MD的运转模型