基于纳米ZnO压电纳米发电机

Wang, Z. L. and J. H. Song (2006). "Piezoelectric nanogenerators based on zinc oxide nanowire arrays." Science 312(5771): 242-246
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Introduction
Research Significance The efficiency of the NW-based piezoelectric power generator is estimated to be 17 to 30%. This approach has the potential of converting mechanical, vibrational, and/or hydraulic energy into electricity for powering nanodevices. Achievements
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Operational Principle
Reverse- and forward-biased Schottky rectifying behavior
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Operational Principle
Principle Application
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Preparation
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Preparation
The orientation of the nanowires follows the surface curvature of the pattern at the end.
S., Y. Shen, et al. (2010). "Growth and Transfer of Monolithic Horizontal ZnO Nanowire Superstructures onto Flexible Substrates." Advanced Functional Materials 20(9): 1493-1495.
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3 4
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Introduction
Nanogenerator
Convert nanoscale mechanical energy into electrical energy by means of piezoelectric zinc oxide nanowire (NW) arrays.
Au Al0.5Ga0.5N AlN
c-planeoriented sapphire
Wang X. D.,Song J. H.,et al(2005)."Growth of Uniformly Aligned ZnO Nanowire Heterojunction Arrays on GaN, AlN, and Al0.5Ga0.5N Substrates",Journal of American Chemical Society,127:7920-7923
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16 LOGO
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Preparation
2. Solution Growth Method
Two materials : ZnO seeds and a Cr layer
Step 1: fabricate a ZnO strip pattern covered with Cr at the top. (100) Si wafer
clean
spin coat photoresist
Optical lithography
pattern
Magnetron sputtering
deposit 300 nm ZnO and 10 nm Cr
Qin, Y., R. S. Yang, et al. (2008). "Growth of Horizonatal ZnO Nanowire Arrays on Any Substrate." Journal of Physical Chemistry C 112(48): 18734-18736
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Preparation
Step 2: Growth of ZnO NWs
O2
Furnace
Thermal couple
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Alumina tube Ar+O2 ZnO + Graphite(950℃） Substrate（880℃）
Ar
To pump
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Preparation
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Operational Principle
Experimental setup
பைடு நூலகம்
Potential distribution
Wang, Z. L. and J. H. Song (2006). "Piezoelectric nanogenerators based on zinc oxide nanowire arrays." Science 312(5771): 242-246
Vapor-Liquid-Solid (VLS) Process
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Preparation
2
Solution Growth Method
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Preparation
1.Vapor-Liquid-Solid (VLS) Process
Step 1: Fabrication of substrate
Advantage
1. Any substrates can be used for the lateral growth of ZnO NWs with this method.
2. The growth temperature(<100℃) is so low that the method can be applied to a wide range of substrates.
Yang, R., Y. Qin, et al. (2009). "Converting Biomechanical Energy into Electricity by a MuscleMovement-Driven Nanogenerator." Nano Letters 9(3): 1201-1205.
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Preparation
Step 2: growth of laterally aligned NWs
Put the substrate into growth solution and aged for 12 h at 80 ℃
solution
Zn(NO3)2 and HMTA in the solution were both 0.0025 mol/L
16 LOGO
Piezoelectric Nanogenerators Based on Zinc Oxide Nanowire Arrays
Members: 刘才 刘秉龙 李龙 龙胜 董伟
Contents
1
Introduction Basic Principle Preparation Outlook
3. Control growth orientation
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Outlook
High out voltage
Novel nanostructure
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Outlook
Harvest the energy produced by acoustic waves, ultrasonic waves, or hydraulic pressure/force
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Preparation
ZnO NW arrays grown on patterns evaporated with 10 nm Cr at an angle of θ=70° in reference to the substrate normal.
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Preparation
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Introduction ZnO
Piezoelectric Semiconducting
Biosafe Biocompatible Biomedical applications with little toxicity
Most diverse and abundant configurations of nanostructures
Step 2: Growth of ZnO NWs
Zn+O2
substrate
Au
ZnO
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Preparation
Advantage
1. Simple, Mature and widely used. 2. Fit for preparing NWs with good dispersion.