Near-field scanning microwave microscope using die

专利名称：Near-field scanning microwave microscope
using dielectric resonator
发明人：Kie Jin Lee,Joo Young Kim,Hyun Jun
Yoo,Jong Il Yang,Song Hui Kim
申请号：US11116010
申请日：20050427
公开号：US20050246129A1
公开日：
20051103
专利内容由知识产权出版社提供
专利附图：
摘要：Provided is a near-field microscope using a dielectric resonator, which makes it possible to minimize influences by external environments, and to enhance its sensitivity,
resolution and function by adjusting the distance between a sample and an apex of a probe. The near-field microscope includes a wave source, a dielectric resonator, a probe, a distance adjusting unit, and a detector. The wave source generates a wave, and a frequency of the wave is adjustable by the wave source. The dielectric resonator propagates the wave from the wave source, and a resonance frequency, impedance, a Q factor and an electromagnetic wave mode of the wave is freely adjustable. The probe scans the wave output from the dielectric resonator on a sample. The distance adjusting unit measures a distance between the probe and the sample and maintains the distance to a predetermined value. The detector detects a wave that propagates through the probe, interacts with the sample and then propagates through the probe and the dielectric resonator.
申请人：Kie Jin Lee,Joo Young Kim,Hyun Jun Yoo,Jong Il Yang,Song Hui Kim
地址：Seoul KR,Paju-city KR,Suwon-city KR,Seoul KR,Daejeon-city KR
国籍：KR,KR,KR,KR,KR
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