CT扩散炉培训教材(设备中英文版)
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加栽的硅 片
Loading box上料Mec箱han ical arm 机械臂
Loading box 上料箱
Storage rack 1，2 存储位1、2
Paddle bearing, adjustable paddle position 碳化硅桨支座，调节桨位 置
TGA有毒气体排放 quartz door 石英门
Detection of a range of whether object, avoid hit boat phenomenon, this range can be adjusted
检测某个范围 内是否有物体， 避免出现撞舟 现象，些范围 可进行调节
Communication Network Overview 通信网络总览
Heating system加热系统
Cooling system冷却系统
1、Heat exchanger 2、Cooling 3、Shutoff valve
1、Cooling exchanger 2、The main fan
4、Heat 5、
Alarm lamp information
Indicator lamp color green
否则机械臂可能因无法正常运行而报警。
From manual automatic, Grip must be in the Middle position,
or mechanical arm may be due to normal operation and alarm.
7.进舟后，工艺无法运行，先确认舟在桨上的位置，以及 Tube=ready SLS=UP TGA=YES 然后进行操作。 In the boat, technology cannot run, make sure the boat on the oar
Pushbutton shift—calls up the second keyboard level,push this bushbutton together with the
CMI interface CMI桌面信息
1 System name
7 alarm close
2 Date time
8 notes
Door cylinder炉门气缸
Heating furnace炉膛
1、CMS module connection cover
3、Power
Gas cabinet气源柜
2
1、 Flow meter
气体流量计
2、 Pneumatic
valve
1
气动阀
Cooling water inlet and water system冷却水系统
2 Pushbutton task change
5 pushbutton shift
3 Pushbutton brightness
ABC keyboard call---calls up\closses the keyboard on the touchscreen, keyboard entries can
brightness of the touchscress.
Pushbutton right mouse button—opens right mouse button context menu,press this button
together with the shift button to reduce the touchscreen.
keyboard
2 Touch screen
5
touch screen button
Operation panel操作面板
The equipment has the following button 1 Stop action --All the mechanical action of loading box are stop 2 Loading box lighting--open\close the lamp of the loading box 3 Auto\hand manual switch--Loading and unloading of the operating
blue yellow red
action open twinkle open open Shines
meaning Ready to operate pause User interaction required warning Alarm\error
Operation panel操作面板
1 operation panel 4
centrotherm扩散炉设备培训
equipment training of centrotherm Diffusion furnace
Centrotherm扩散炉的组成
A．Loading box 推舟部分
B. TGA 有毒气体排放
C. Heating furnace 加热部分
D. Gas cabinet 气柜
SLS in the "DOWN" position, the paddle is not manually into the boat boat. 3.桨上有舟时，舟不在正确位置，不准切换到自动运行 模式。
Oars on a boat, the boat is not in the correct position, are not allowed to switch to automatic running mode.
CT操作注意事项 CT operation matters needing attention
4.进舟、退舟失败报警时，一定要检查舟的位置 是否在合理的位置，才可以对报警进行复位，自动/手动的切换要谨 慎，若舟不在正确位置，请手动移至正确位置后再对报警进行复位（ 炉门以桨的位置作为开闭标准）
Into the boat, boat back failure alarm, be sure to check the boat position is in a reasonable position, can alarm reset, automatic / manual switch must be careful, if the ship is not in the correct position, please manually moved to the correct position after the alarm reset ( door to paddle position as opening and
CT操作注意事项 CT operation matters needing attention
1.SLS处于“UP”位置时，管内有舟时不可手动进桨
SLS in the "UP" position, the inner tube has a boat can not be manually into the paddle. 2.SLS处于“DOWN”位置时，桨上有舟时不得手动进舟。
9.单一炉管有故障时，应该及时琐闭并降温，以节约能 源。 Single tube has fault, should be timely and closed and cooling, in order to save energy.
常见故障
1. Process recipe has terminated with error state AC 进行中的工艺以错误状态结 束―――警报确认 •To store 储存 •To store enable unload 储存并缷下 •Restart recipe 重新开始工艺 A――用于选错工艺号，手动结束工艺，
设备 平面结构Equipment plane structure
1、CMI电脑 2、Loading box
上料箱 3、Toxic gases
有毒气体排放 4、Furnace
炉体 5、Gas box
气源柜
Loading box上料箱 Baddle head 舟头
Loading wafer
system can manual operation in an open feeding box
4 Allows to unlock-- Press this button ,to unlock the car
Operation panel操作面板
1 pushbutton ABC keyboard call 4 pushbutton right mouse button
3 Centrotherm logo and system 9 additional information
Information button
4 Current display area in the
10 system mode
Information field
11 connection state with
position, as well as Tube = ready SLS = UP TGA = YES then operation.
8.机械臂运动时不要上料，以免上料时抖动机械臂撞到舟。
As mechanical arm movement not feeding,in order to avoid feeding time jitter mechanical arm hit the boat。
对POCL3进行 恒温作用，正 常工艺温度20 度
Silicon carbide paddle碳化硅桨
Bearing quartz and silicon, and out of the carrier ship
承载石英舟 和硅片 石英舟进出 的载体
Range detection alarm 范围检测报警器
5.舟位于存储架（storage2,3）时，一定要确认存储架上 的感应器有没有感应到，否则有可能导致撞舟。
When the boat is located on the storage rack (storage2, 3),make sure that the storage rack sensor is d, otherwise may cause the bumped boat. 6.从手动切换自动时，Grip一定要在Middle位置，
be carried out directly on the touchsceen.
Pushbutton task change---changes a task windows
Pushbutton brightness---press this button together with the shife button to increase the
Cooling to the top of the furnace body and furnace 对炉膛顶部和 炉体进行冷却
Thermostatic bath恒温槽
On the POCL3 constant temperature process, normal temperature 20 degrees
CEC\GEM
5 System status
6 Login\logout button
CMI interface CMI桌面信息
1 Jobs 2 System 3 Datslog
4 setup 5 alarms 6 help(online help)
The CMI user interface CMI使用者桌面
1 Title bar
3 navigation bar
2 Command bar
4 information field with
variable field areas
简单介绍CESAR界面 A brief introduction to CESAR interface
上图是CESAR的界面：1.系统工艺状态 2.工艺时间状态 3.时间日期 4.气体流量状态 5.系统准备状态 6. 温 度检测显示 This is a CESAR interface： 1. System process 2. Process time 3. Time and date 4.
Loading box上料Mec箱han ical arm 机械臂
Loading box 上料箱
Storage rack 1，2 存储位1、2
Paddle bearing, adjustable paddle position 碳化硅桨支座，调节桨位 置
TGA有毒气体排放 quartz door 石英门
Detection of a range of whether object, avoid hit boat phenomenon, this range can be adjusted
检测某个范围 内是否有物体， 避免出现撞舟 现象，些范围 可进行调节
Communication Network Overview 通信网络总览
Heating system加热系统
Cooling system冷却系统
1、Heat exchanger 2、Cooling 3、Shutoff valve
1、Cooling exchanger 2、The main fan
4、Heat 5、
Alarm lamp information
Indicator lamp color green
否则机械臂可能因无法正常运行而报警。
From manual automatic, Grip must be in the Middle position,
or mechanical arm may be due to normal operation and alarm.
7.进舟后，工艺无法运行，先确认舟在桨上的位置，以及 Tube=ready SLS=UP TGA=YES 然后进行操作。 In the boat, technology cannot run, make sure the boat on the oar
Pushbutton shift—calls up the second keyboard level,push this bushbutton together with the
CMI interface CMI桌面信息
1 System name
7 alarm close
2 Date time
8 notes
Door cylinder炉门气缸
Heating furnace炉膛
1、CMS module connection cover
3、Power
Gas cabinet气源柜
2
1、 Flow meter
气体流量计
2、 Pneumatic
valve
1
气动阀
Cooling water inlet and water system冷却水系统
2 Pushbutton task change
5 pushbutton shift
3 Pushbutton brightness
ABC keyboard call---calls up\closses the keyboard on the touchscreen, keyboard entries can
brightness of the touchscress.
Pushbutton right mouse button—opens right mouse button context menu,press this button
together with the shift button to reduce the touchscreen.
keyboard
2 Touch screen
5
touch screen button
Operation panel操作面板
The equipment has the following button 1 Stop action --All the mechanical action of loading box are stop 2 Loading box lighting--open\close the lamp of the loading box 3 Auto\hand manual switch--Loading and unloading of the operating
blue yellow red
action open twinkle open open Shines
meaning Ready to operate pause User interaction required warning Alarm\error
Operation panel操作面板
1 operation panel 4
centrotherm扩散炉设备培训
equipment training of centrotherm Diffusion furnace
Centrotherm扩散炉的组成
A．Loading box 推舟部分
B. TGA 有毒气体排放
C. Heating furnace 加热部分
D. Gas cabinet 气柜
SLS in the "DOWN" position, the paddle is not manually into the boat boat. 3.桨上有舟时，舟不在正确位置，不准切换到自动运行 模式。
Oars on a boat, the boat is not in the correct position, are not allowed to switch to automatic running mode.
CT操作注意事项 CT operation matters needing attention
4.进舟、退舟失败报警时，一定要检查舟的位置 是否在合理的位置，才可以对报警进行复位，自动/手动的切换要谨 慎，若舟不在正确位置，请手动移至正确位置后再对报警进行复位（ 炉门以桨的位置作为开闭标准）
Into the boat, boat back failure alarm, be sure to check the boat position is in a reasonable position, can alarm reset, automatic / manual switch must be careful, if the ship is not in the correct position, please manually moved to the correct position after the alarm reset ( door to paddle position as opening and
CT操作注意事项 CT operation matters needing attention
1.SLS处于“UP”位置时，管内有舟时不可手动进桨
SLS in the "UP" position, the inner tube has a boat can not be manually into the paddle. 2.SLS处于“DOWN”位置时，桨上有舟时不得手动进舟。
9.单一炉管有故障时，应该及时琐闭并降温，以节约能 源。 Single tube has fault, should be timely and closed and cooling, in order to save energy.
常见故障
1. Process recipe has terminated with error state AC 进行中的工艺以错误状态结 束―――警报确认 •To store 储存 •To store enable unload 储存并缷下 •Restart recipe 重新开始工艺 A――用于选错工艺号，手动结束工艺，
设备 平面结构Equipment plane structure
1、CMI电脑 2、Loading box
上料箱 3、Toxic gases
有毒气体排放 4、Furnace
炉体 5、Gas box
气源柜
Loading box上料箱 Baddle head 舟头
Loading wafer
system can manual operation in an open feeding box
4 Allows to unlock-- Press this button ,to unlock the car
Operation panel操作面板
1 pushbutton ABC keyboard call 4 pushbutton right mouse button
3 Centrotherm logo and system 9 additional information
Information button
4 Current display area in the
10 system mode
Information field
11 connection state with
position, as well as Tube = ready SLS = UP TGA = YES then operation.
8.机械臂运动时不要上料，以免上料时抖动机械臂撞到舟。
As mechanical arm movement not feeding,in order to avoid feeding time jitter mechanical arm hit the boat。
对POCL3进行 恒温作用，正 常工艺温度20 度
Silicon carbide paddle碳化硅桨
Bearing quartz and silicon, and out of the carrier ship
承载石英舟 和硅片 石英舟进出 的载体
Range detection alarm 范围检测报警器
5.舟位于存储架（storage2,3）时，一定要确认存储架上 的感应器有没有感应到，否则有可能导致撞舟。
When the boat is located on the storage rack (storage2, 3),make sure that the storage rack sensor is d, otherwise may cause the bumped boat. 6.从手动切换自动时，Grip一定要在Middle位置，
be carried out directly on the touchsceen.
Pushbutton task change---changes a task windows
Pushbutton brightness---press this button together with the shife button to increase the
Cooling to the top of the furnace body and furnace 对炉膛顶部和 炉体进行冷却
Thermostatic bath恒温槽
On the POCL3 constant temperature process, normal temperature 20 degrees
CEC\GEM
5 System status
6 Login\logout button
CMI interface CMI桌面信息
1 Jobs 2 System 3 Datslog
4 setup 5 alarms 6 help(online help)
The CMI user interface CMI使用者桌面
1 Title bar
3 navigation bar
2 Command bar
4 information field with
variable field areas
简单介绍CESAR界面 A brief introduction to CESAR interface
上图是CESAR的界面：1.系统工艺状态 2.工艺时间状态 3.时间日期 4.气体流量状态 5.系统准备状态 6. 温 度检测显示 This is a CESAR interface： 1. System process 2. Process time 3. Time and date 4.