SEM technique for imaging and measuring electronic
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专利名称：SEM technique for imaging and measuring
electronic transport in nanocomposites
based on electric field induced contrast
发明人：Stephen Jesse,David B. Geohegan,Michael
Guillorn
申请号：US11331840
申请日：20060113
公开号：US20070164218A1
公开日：
20070719
专利内容由知识产权出版社提供
专利附图：
摘要：Methods and apparatus are described for SEM imaging and measuring
electronic transport in nanocomposites based on electric field induced contrast. A method includes mounting a sample onto a sample holder, the sample including a sample material; wire bonding leads from the sample holder onto the sample; placing the sample holder in a vacuum chamber of a scanning electron microscope; connecting leads from the sample holder to a power source located outside the vacuum chamber; controlling secondary electron emission from the sample by applying a predetermined voltage to the sample through the leads; and generating an image of the secondary electron emission from the sample. An apparatus includes a sample holder for a scanning electron microscope having an electrical interconnect and leads on top of the sample holder electrically connected to the electrical interconnect; a power source and a controller connected to the electrical interconnect for applying voltage to the sample holder to control the secondary electron emission from a sample mounted on the sample holder; and a computer coupled to a secondary electron detector to generate images of the secondary electron emission from the sample.
申请人：Stephen Jesse,David B. Geohegan,Michael Guillorn
地址：Knoxville TN US,Knoxville TN US,Brooktondale NY US
国籍：US,US,US
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