SPECKIE PATTERN INTERFEROMETER

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专利名称:SPECKIE PATTERN INTERFEROMETER 发明人:HIRAI MAKOTO,AKISHIBA YUUJI,KUKI TAIJI 申请号:JP2033988 申请日:19880129 公开号:JPH01195302A 公开日:19890807
摘要:PURPOSE:To stably emit laser light by forming a light source part of a semiconductor laser light by a closed structure so that a semiconductor laser is not brought to dewing even if the temperature of the outside of a speckle pattern interferometer becomes high. CONSTITUTION:A light source part constituted of semiconductor laser and its temperature detecting element and temperature control element, etc., a lens for laser light enlargement, a beam splitter, a television camera, a control circuit, etc., are fixed onto a horizontal bottom face part of a U-shaped chassis. A seal agent 27 for adhesion is applied so as to surround all sides of the light source part on the horizontal bottom face of the U-shaped chassis to which said light source part has been fixed, and by this seal agent 27, a covert 24 for light source is fixed onto the horizontal bottom face part so as to cover the light source part. Accordingly, even if a temperature of the outside of a speckle pattern interferometer becomes higher than a prescribed temperature of the semiconductor laser which is held so as to stabilize an oscillation frequency of the semiconductor laser, the semiconductor laser is not influenced thereby and not brought to dewing.
申请人:KEYENCE CORP
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