Humidity resistant sensors and methods of making s
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专利名称：Humidity resistant sensors and methods of
making same
发明人：Xiaoyi Ding,James Nowicki
申请号：US14639169
申请日：20150305
公开号：US09574961B2
公开日：
20170221
专利内容由知识产权出版社提供
专利附图：
摘要：A pressure sensor device which uses appropriate passivation materials/patterns to make the device more robust and resistant to a hot and humid environment. The
pressure sensor device uses moisture resistant passivation material(s) covering exposed
glass areas, including sidewalls, and bonding interfaces to avoid the glass and bonding interfaces absorbing and reacting with moisture, thus maintaining the integrity of the device output after exposure in a humid/hot environment. These passivation materials/patterns used for the MEMS devices described may be applied to any MEMS based sensors and actuators using glass as one type of material for fabrication. The pressure sensor devices may be front side absolute pressure sensors, differential pressure sensors, or back side absolute pressure sensors.
申请人：Continental Automotive Systems, Inc.
地址：Auburn Hills MI US
国籍：US
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