Valve for vacuum exhaustion system
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专利名称：Valve for vacuum exhaustion system
发明人：Tadahiro Ohmi,Nobukazu Ikeda,Michio
Yamaji,Masafumi Kitano,Akhiro Morimoto
申请号：US10545672
申请日：20040209
公开号：US20060071192A1
公开日：
20060406
专利内容由知识产权出版社提供
专利附图：
摘要：The present invention provides a valve which makes it possible to reduce the diameter of the vacuum exhaustion pipings for making the facility for the vacuum exhaustion system small, as a result lowering the costs, and making the vacuum
exhaustion time short, and also which can prevent the corrosions, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of the gas. Specifically, the aluminum passivation is applied on the piping parts, i.e. the valve and others, used in the vacuum exhaustion system to inhibit the gas decomposition caused by the temperature rise at the time of the baking so that components for the reduction in the diameter size in the vacuum exhaustion system are provided. The corrosions, cloggings and seat leakages caused by the gas decomposition are prevented.
申请人：Tadahiro Ohmi,Nobukazu Ikeda,Michio Yamaji,Masafumi Kitano,Akhiro Morimoto
地址：Miyagi JP,Osaka JP,Osaka JP,Osaka JP,Osaka JP
国籍：JP,JP,JP,JP,JP
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